| Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526) |
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| 09/14/2011 | CN102180442A Microparticle capturing device and microparticle transport equipment using same |
| 09/14/2011 | CN102180440A Preparation method of nano-gap electrode in micro-nano electromechanical device |
| 09/14/2011 | CN102180439A Carbon microtructure with graphene integrated on surface and preparation method thereof |
| 09/14/2011 | CN102180438A Manufacturing method of tunable triangular metal nano particle array structure |
| 09/14/2011 | CN102180437A Graphene-based infrared smart transparent film device and preparation method thereof |
| 09/14/2011 | CN102180435A Integrated micro electro-mechanical system (MEMS) device and forming method thereof |
| 09/14/2011 | CN101759137B Method for manufacturing electrothermal driving photoresist micro gripper |
| 09/14/2011 | CN101695992B Method for manufacturing electric heating drive micro-clamp based on body silicon processing technique |
| 09/14/2011 | CN101654217B Methods for manufacturing microelement |
| 09/14/2011 | CN101279713B Manufacturing method for floating type micro-silicon electrostatic gyro/accelerometer sensitive structure |
| 09/14/2011 | CN101279707B Deflectable structure, micromechanical structure comprising same, and method for adjusting a micromechanical structure |
| 09/14/2011 | CN101258102B A method of manufacturing a microsystem with an interval |
| 09/14/2011 | CN101231473B Replication and transfer of microstructures and nanostructures |
| 09/13/2011 | US8018077 Electromechanical system having a controlled atmosphere, and method of fabricating same |
| 09/13/2011 | US8017443 Light transmissive cover, device provided with same and methods for manufacturing them |
| 09/09/2011 | WO2011109231A2 Cmp process flow for mems |
| 09/09/2011 | WO2011107996A1 A flexible magnetic membrane based actuation system and devices involving the same. |
| 09/09/2011 | WO2011107484A1 Bonding process for sensitive micro- and nano-systems |
| 09/09/2011 | WO2011080409A3 Process for fabricating an electronic component combining an electromechanical system and an electronic circuit |
| 09/09/2011 | WO2011071685A3 Micro electromechanical systems (mems) having a gap stop and method therefor |
| 09/09/2011 | WO2011028504A4 Fabrication of a floating rocker mems device for light modulation |
| 09/09/2011 | CA2791334A1 Bonding process for sensitive micro- and nano-systems |
| 09/07/2011 | EP2363374A2 Manufacturing Method of MEMS Package, and Oscillator |
| 09/07/2011 | EP2363373A1 Bonding process for sensitive micro-and nano-systems |
| 09/07/2011 | EP2121515B1 Method for producing a micromechanical component comprising a partial protective layer |
| 09/07/2011 | EP2043781B1 Arrangement comprising nanoparticles, and method for the production thereof |
| 09/07/2011 | EP1715961B1 Spin-on protective coatings for wet-etch processing of microelectronic substrates |
| 09/07/2011 | CN102176637A Miniature electromagnetic type vibration energy collector and manufacturing method thereof |
| 09/07/2011 | CN102176535A Micro electro mechanical microwave antenna and manufacturing method thereof |
| 09/07/2011 | CN102176534A Independently pull-down electrode type microwave antenna based on MEMS (micro-electromechanical system) and manufacturing method thereof |
| 09/07/2011 | CN102176506A Transverse micro electro mechanical system (MEMS) microactuator adopting piezoelectric thick film actuating and manufacturing method thereof |
| 09/07/2011 | CN102175910A Micro-electro-mechanical system (MEMS) microwave power automatic detection system and detection method and preparation method thereof |
| 09/07/2011 | CN102175909A Micro-electro-mechanical system (MEMS) cantilever type microwave power automatic detection system and detection method and preparation method thereof |
| 09/07/2011 | CN102175891A Method for manufacturing three-axis thermal convection acceleration sensor chip |
| 09/07/2011 | CN102175764A Quality chemical sensor using functionalized mesoporous material as sensitive material and method |
| 09/07/2011 | CN102175757A Carbon nanotube film three-electrode sensor and manufacturing method thereof |
| 09/07/2011 | CN102175755A Carbon nanotube film micro-nano ionizing sensor and manufacture method thereof |
| 09/07/2011 | CN102175381A Pressure sensor and preparation method thereof based on composite plating of carbon nano tube and metallic copper |
| 09/07/2011 | CN102175329A Infrared detector, manufacturing method thereof and multiband uncooled infrared focal plane |
| 09/07/2011 | CN102175287A Measurement component of flow meter chip based on MEMS (micro electronic mechanical system) technology and manufacturing method thereof |
| 09/07/2011 | CN102173377A Semiconductor device and manufacturing method thereof |
| 09/07/2011 | CN102173376A Preparation method for small silicon-based nano hollow array with orderly heights |
| 09/07/2011 | CN101819214B Integrated anemograph based on ceramics wafer level package and preparation method thereof |
| 09/07/2011 | CN101792106B Etching solution for processing N-type silicon microchannel array by photon-assisted electrochemical etching method |
| 09/07/2011 | CN101578231B Surface roughening process |
| 09/07/2011 | CN101538004B Micro-hole substrates and methods of manufacturing the same |
| 09/07/2011 | CN101279711B Method of fabricating a micromechanical structure out of two-dimensional elements and micromechanical device |
| 09/06/2011 | US8012852 Controlled process and resulting device |
| 09/06/2011 | US8012382 Molded waveguides |
| 09/01/2011 | WO2011059831A3 A superfilling secondary metallization process in mems fabrication |
| 09/01/2011 | DE102010043980A1 Sensor i.e. gyroscope, has micromechanical structure comprising substrate, structure firmly connected with substrate, and another structure movably arranged at substrate, where latter structure is formed for enclosing former structure |
| 09/01/2011 | DE102010002463A1 Mikromechanisches Drucksensorelement und Verfahren zu dessen Herstellung Micromechanical pressure sensor element and method for its production |
| 09/01/2011 | DE102009035291B4 Vorrichtung zur Erzeugung einer mikrofluidischen Kanalstruktur in einer Kammer, Verfahren zu ihrer Herstellung und ihre Verwendung An apparatus for producing a microfluidic channel structure in a chamber, process for their preparation and their use |
| 08/31/2011 | CN201955617U 双光阻墙光罩 Dual photoresist mask wall |
| 08/31/2011 | CN102169229A Method and system for packaging a MEMS device |
| 08/31/2011 | CN102169088A Monomolecular detection method |
| 08/31/2011 | CN102167282A Method for processing microstructure of silicon and metal composite material |
| 08/31/2011 | CN102167281A Carbon micro structure with carbon nano structure integrated on surface, and preparation method thereof |
| 08/31/2011 | CN102167280A Super-hydrophobic silicon micron-nano composite structure and preparation method thereof |
| 08/31/2011 | CN102167278A Zinc oxide micro/nano composite structure array film and preparation method thereof |
| 08/31/2011 | CN101780943B Method for preparing nano-scale silicon oxide groove |
| 08/31/2011 | CN101738355B Micro electro mechanical system (MEMS) technology-based viscosity transducer chip and preparation method thereof |
| 08/31/2011 | CN101734611B Method for preparing black silicon based on mask-free deep reactive ion etching |
| 08/31/2011 | CN101630536B Method for preparing carbon nano-tube AFM probe based on electromagnetic field |
| 08/31/2011 | CN101592578B Silicon cantilever sensor, preparation method and application thereof |
| 08/25/2011 | WO2011101057A1 Method for producing coated molded bodies |
| 08/25/2011 | DE102008025691B4 Piezoelektrischer Dünnfilm, piezoelektrisches Material und Herstellungsverfahren für piezoelektrischen Dünnfilm A piezoelectric thin film piezoelectric material and manufacturing method of piezoelectric thin-film |
| 08/25/2011 | DE102007046498B4 Verfahren zur Herstellung eines mikroelektromechanischen Bauelementes A method for producing a microelectromechanical component |
| 08/25/2011 | CA2790601A1 Process for producing coated molded bodies |
| 08/24/2011 | EP2360114A1 Method of producing a polymer stamp for the reproduction of devices comprising microstructures and nanostructures, a corresponding polymer stamp, a corresponding device and a fuel delivery system or water management system for fuel cells |
| 08/24/2011 | EP2359885A1 Structure of micro-needle with channel thereinside and manufacturing method thereof |
| 08/24/2011 | CN102164848A Micromechanical component and method for the production thereof |
| 08/24/2011 | CN102164847A Contact arrangement for establishing a spaced, electrically conducting connection between microstructured components |
| 08/24/2011 | CN102163606A Charge-detecting chip and manufacturing method thereof |
| 08/24/2011 | CN102163531A Flat line type ion trap mass analyzer based on MEMS (micro electro mechanical system) process and manufacturing method thereof |
| 08/24/2011 | CN102162815A Plasma separating chip and preparation method thereof |
| 08/24/2011 | CN102161471A Method for fabricating semiconductor device |
| 08/24/2011 | CN102161470A Method of enclosing a micromechnical element formed between a base layer and a metallization layer |
| 08/24/2011 | CN102161469A Method for forming suspending object on monolithic substrate |
| 08/24/2011 | CN101290255B Preparing method of 0-50pa single slice silicon based SOI ultra-low micro pressure sensor |
| 08/24/2011 | CN101289160B 0-100Pa monolithic silicon based SOI high-temperature low drift micropressure sensor and processing method thereof |
| 08/23/2011 | US8004736 Optical interference display panel and manufacturing method thereof |
| 08/23/2011 | US8002933 Microfabricated elastomeric valve and pump systems |
| 08/18/2011 | WO2011100593A2 Microelectromechanical system with reduced speckle contrast |
| 08/18/2011 | WO2011100445A1 Methods to fabricate a photoactive substrate suitable for microfabrication |
| 08/18/2011 | WO2011051718A3 Micro-channel structure method and apparatus |
| 08/18/2011 | US20110201009 Microfabricated Crossflow Devices and Methods |
| 08/18/2011 | DE19954022B4 Halbleitersensor für eine physikalische Grösse und Verfahren zu dessen Herstellung A semiconductor sensor for a physical quantity, and process for its preparation |
| 08/18/2011 | DE102010008044A1 MEMS-Mikrofon und Verfahren zur Herstellung MEMS microphone and methods for preparing |
| 08/18/2011 | DE102010007970A1 Verfahren und Vorrichtung zum aktiven Keilfehlerausgleich zwischen zwei im wesentlichen zueinander parallel positionierbaren Gegenständen Method and device for active wedge error compensation between two substantially parallel repositionable articles |
| 08/18/2011 | DE102010001824A1 Zusammengepackte Vorrichtung und Herstellungsverfahren davon Packed together device and manufacturing method thereof |
| 08/18/2011 | DE102005004795B4 Konzept zur nass-chemischen Entfernung eines Opfermaterials in einer Materialstruktur Concept for the wet chemical removal of a sacrificial material in a material structure |
| 08/18/2011 | DE102005002304B4 Mikroelektromechanischer Sensor und Verfahren zu dessen Herstellung The microelectromechanical sensor and method for its production |
| 08/17/2011 | EP2356065A2 Hydrophobic surface coating systems and methods for metals |
| 08/17/2011 | EP2356064A2 Mems devices |
| 08/17/2011 | EP2355864A2 Nanochanneled device and related methods |
| 08/17/2011 | CN102156203A MEMS (micro-electromechanical system) inertial sensor and forming method of MEMS inertial sensor |
| 08/17/2011 | CN102156012A Micro electromechanical system (MEMS) pressure sensor and manufacturing method thereof |
| 08/17/2011 | CN102153046A Method for preparing semicylindrical superfine slot by combining twice membranous layer deposition, dry etching and wet etching |
| 08/17/2011 | CN101871825B Membrane stress testing structure and method as well as manufacturing method |