B81C 1 - Manufacture or treatment of devices or systems in or on a substrate

Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526)
12/2011
12/22/2011	DE102011050839A1 Sensor und Verfahren zur Herstellung desselben Of the same sensor and process for producing
12/22/2011	DE102011050837A1 Sensor und Verfahren zur Herstellung desselben Of the same sensor and process for producing
12/22/2011	DE102010030345A1 Method for manufacturing piezoresistive sensor arrangement of inertial sensor e.g. rotation rate sensor, involves forming remaining strips of electrical insulating layer between strip guard and bar
12/22/2011	DE102010024498A1 Aufbau dreidimensionaler Bauteile mit nichtdiffundierenden Edel-oder Sondermetallen und deren Legierung durch Sputtertechnologie Construction of three-dimensional components with non-diffusing precious or special metals and their alloys by sputtering
12/21/2011	EP2396694A2 Pixel black mask design and formation technique
12/21/2011	EP2396275A2 Display device with desiccant
12/21/2011	CN102292472A 模具及其制造方法 Mold and manufacturing method thereof
12/21/2011	CN102292281A 基于经涂覆的纳米结构的多功能复合材料 Based multifunctional composites coated nanostructures
12/21/2011	CN102292280A 与金属锗硅材料接合的衬底 Metal substrate material bonded silicon germanium
12/21/2011	CN102290968A 一种微发电机及其制备方法 A micro power generator and its preparation method
12/21/2011	CN102289148A 植入式微针尖电极及其制作方法 Micro tip electrode implantation and its production method
12/21/2011	CN102288644A 一种具有四支撑悬梁四层结构的电阻式气体传感器及方法 Having a four layer structure of the support cantilever resistive gas sensor and method
12/21/2011	CN102285637A 带侧壁保护的腔体制造方法 Method of producing the sidewall of the cavity protection
12/21/2011	CN102285636A 一种多边形截面硅梁的湿法腐蚀制备工艺 Polygonal cross-section of the wet etching of silicon beams Preparation
12/21/2011	CN102285635A 一种利用激光制作金属微纳结构的系统与方法 An advantage of the system and method of making the metal laser micro-nano structures
12/21/2011	CN102285634A 一种ZnO微/纳米材料柔性应变传感器的构建方法 A method of constructing ZnO micro / nano materials Flexible Strain Sensor
12/21/2011	CN102285633A 复合集成传感器结构及其制造方法 Composite integrated sensor structure and manufacturing method
12/21/2011	CN102285632A A sensor and method for fabricating the same
12/21/2011	CN102285631A 一种在石墨或石墨烯表面加工纳米尺度图形的方法 A graphite or graphene nano-sized surface processing method for graphic
12/21/2011	CN102285630A 基于光镊的自动化微粒搬运方法 Automated particle transport methods based on optical tweezers
12/21/2011	CN102285629A 一种表面增强拉曼光谱活性基底的制备方法 A surface-enhanced Raman spectroscopy method for preparing active base
12/21/2011	CN102285628A 用于半导体微细加工的喷胶装置及衬底的喷涂方法 The spraying method of the semiconductor microfabrication gluing means and a substrate for
12/21/2011	CN102285627A 有机花状微纳结构及其制备方法 Organic flower-like micro-nano structure and preparation method
12/21/2011	CN102285624A 带有热应力释放结构的键合晶圆及激光划片工艺 Wafer bonding and laser thermal stress relief structure with the dicing process
12/21/2011	CN101885463B 基于碳纳米管填充高分子复合材料的柔性压敏元件及其制作方法 Based on the flexible sensitive element and its production method of carbon nanotube polymer composites
12/21/2011	CN101792108B 一种基于滑膜阻尼的大电容微惯性传感器及其制作方法 Large capacitive micro inertial sensor and its production method based on synovial damping
12/21/2011	CN101774532B 一种在微流体芯片上加工纳米通道的方法 A method of processing nanochannels on a microfluidic chip
12/21/2011	CN101659389B 光读出红外图像传感器像元芯片的光刻方法 Optical readout pixel infrared image sensor chip lithography method
12/21/2011	CN101654219B 图形化碳纳米管薄膜或阵列的方法 Graphical methods carbon nanotube film or arrays
12/20/2011	US8080221 Capillary-channel probes for liquid pickup, transportation and dispense using stressy metal
12/20/2011	US8079832 Device for the actively-controlled and localised deposition of at least one biological solution
12/15/2011	WO2011154105A1 Three-dimensional metal-coated nanostructures on substrate surfaces, method for producing same and use thereof
12/15/2011	WO2011153576A1 Inkjet printhead having hydrophilic ink pathways
12/15/2011	DE102011075365A1 Halbleitervorrichtung und Herstellungsverfahren hierfür A semiconductor device and manufacturing method thereof
12/15/2011	DE102011007217A1 Erfassungsvorrichtung für eine physikalische Größe und Verfahren zum Herstellen derselben Detecting apparatus for a physical quantity, and methods for manufacturing the same
12/15/2011	DE102010023098A1 Mold for forming plastic mold part, has structure portion comprising microstructures, which are arranged in such manner that three-dimensional mark structure is formed with safety feature of mold part
12/15/2011	DE102010017357A1 Verfahren zur Herstellung von Körpern mit mikro- und/oder nanostrukturierten Oberflächen oder von mikro- und/oder nanogroß durchbrochenen Folien Process for the preparation of bodies with micro- and / or nano-structured surfaces or micro- and / or nano large perforated sheets
12/15/2011	DE102007060785B4 Verfahren zur Herstellung eines (Vielfach-) Bauelements auf Basis ultraplanarer Metallstrukturen A method for producing a (multicapper) component based on metal structures ultraplanarer
12/14/2011	EP2395395A2 Method for Manufacturing Micro-Structure
12/14/2011	EP2393751A1 Method for producing a stamp for hot embossing
12/14/2011	EP2205356B1 Method for implementing a microfluidic channel
12/14/2011	CN102279289A 一种基于(110)单晶硅的微悬臂梁探针制作方法 Based on (110) single crystal silicon microcantilever probe production methods
12/14/2011	CN102279220A 制造芯片的方法、气体传感器装置、在芯片上镀碳纳米管的方法 Chip manufacturing method, a gas sensor device, the plating method of carbon nanotubes on the chip
12/14/2011	CN102279210A 纳米纤维和粒子粘附层的双敏感层气体传感器及制备方法 Double-sensitive layer of gas sensors and nano fiber preparation and particle adhesion layer
12/14/2011	CN102275868A 硅微机械结构的预埋掩模湿法腐蚀工艺 Silicon micromechanical structures embedded mask wet etching process
12/14/2011	CN102275867A 带有部分密封壳体的半导体器件及其制造方法 Semiconductor device and manufacturing method with a portion of the seal housing
12/14/2011	CN102275866A 一种具有加热功能的微流体通道的制造工艺 A manufacturing process having a heating function microfluidic channel
12/14/2011	CN102275865A 压力传感器及其制造方法 Pressure sensor and its manufacturing method
12/14/2011	CN102275864A 一种载镍多壁碳纳米管的定向排列方法 Alignment method contained nickel multi-walled carbon nanotubes
12/14/2011	CN102275863A 微机电器件的晶圆级真空封装方法 Wafer level vacuum packaging method MEMS devices
12/14/2011	CN102275862A 微机电封装结构及其制造方法 MEMS package structure and its manufacturing method
12/14/2011	CN102275861A 半导体装置及传声器 Semiconductor device and microphone
12/14/2011	CN102275860A 惯性微机电传感器及其制造方法 MEMS inertial sensor and its manufacturing method
12/14/2011	CN102275859A Mems微传感器的封装结构及其制造方法 Mems package structure and method of manufacturing the micro-sensors
12/14/2011	CN102275857A 微机电装置及其制造方法 Micro-electromechanical device and manufacturing method thereof
12/14/2011	CN101780942B Mems器件圆片级真空封装方法 Mems device wafer level vacuum packaging method
12/14/2011	CN101723307B 一种利用两次膜层沉积和湿法腐蚀制备半圆柱形微细沟槽的方法 A use of two film deposition and wet etching fine semi-cylindrical groove preparation method
12/14/2011	CN101206411B 采用聚焦光刻成形亚波长微纳结构的制作方法 Focus production methods using subwavelength lithography forming micro-nano structures
12/14/2011	CN101154581B 半导体器件的制造方法、湿式蚀刻处理装置及湿式蚀刻方法 The method of manufacturing a semiconductor device, a wet etching apparatus and wet etching method processing
12/14/2011	CN101041413B 微机械及其制造方法 Micromechanical and manufacturing method thereof
12/08/2011	WO2011151243A1 Lithography method for doubled pitch
12/08/2011	WO2011151109A1 Self-assemblable polymer and method for use in lithography
12/08/2011	WO2011151098A2 Component with a via and method for producing it
12/08/2011	WO2011094594A3 Microelectromechanical systems embedded in a substrate
12/08/2011	US20110298065 Electromechanical system having a controlled atmosphere, and method of fabricating same
12/08/2011	DE102010029709A1 Mikromechanisches Bauelement Micromechanical component
12/08/2011	DE102010029708A1 Mikromechanisches System Micromechanical System
12/08/2011	DE102010023568A1 Verfahren und Vorrichtung zum Herstellen nanostrukturierter Oberflächen Method and device for manufacturing nanostructured surfaces
12/08/2011	DE102010022675A1 Producing a hydrogel structure with micrometer dimensions on a substrate, comprises one channel comprising casting mold, a liquid hydrogel, freezing and removing sating mold is useful for growth of axons
12/08/2011	DE102008011531B4 Verfahren zum Bearbeiten eines Objekts mit miniaturisierten Strukturen A method for processing an object with miniaturized structures
12/08/2011	DE102007047162B4 Verfahren zum Herstellen einer Mikrostruktur oder Nanostruktur und mit Mikrostruktur oder Nanostruktur versehenes Substrat A method of manufacturing a microstructure or nanostructure, and provided with a microstructure or nanostructure substrate
12/08/2011	DE102004006201B4 Drucksensor mit Siliziumchip auf einer Stahlmembran Pressure sensor with silicon chip on a steel membrane
12/07/2011	EP2393307A2 Semiconductor device and microphone
12/07/2011	CN202066317U 一种用于mems器件圆片的自动干燥设备 Automatic drying apparatus for mems device wafer
12/07/2011	CN102271800A 反应装置及反应装置的制造方法 The reaction apparatus and reaction method of manufacturing a device
12/07/2011	CN102269869A 一种沟槽隔离锚点梳齿的微扭转镜及其制作方法 One kind of anchor trench isolation comb micro mirror reversed its production methods
12/07/2011	CN102269868A 一种沟槽隔离镜面的微扭转镜及其制作方法 One kind of micro-trench isolation mirror reversing mirror and its production method
12/07/2011	CN101585508B 基于光敏触变胶膜的有机玻璃微流控芯片的制备方法 Preparation of photosensitive film based thixotropic plexiglass microfluidic chips
12/07/2011	CN101441410B 一种制作纳米级图形的方法 A method of producing nanoscale patterns
12/07/2011	CN101141023B 微机电层叠式毫米波天线 MEMS stacked millimeter wave antenna
12/06/2011	US8071056 Thermal microvalves
12/06/2011	US8070969 Method of fabricating microelectromechanical systems devices
12/01/2011	WO2011148973A1 Pressure sensor and method for manufacturing pressure sensor
12/01/2011	WO2011147842A1 Method for manufacturing a microfluidic chip, and related chip and plate
12/01/2011	WO2011121427A3 A method to produce a microfluidic device having vertical electrodes and a device obtained from it
12/01/2011	US20110294306 Controlled process and resulting device
12/01/2011	DE102011005471A1 Mikro-Ejektor und Verfahren für dessen Herstellung Micro-ejector and method for its preparation
12/01/2011	DE102010029539A1 Mikromechanisches Bauteil und Herstellungsverfahren für ein mikromechanisches Bauteil Micromechanical element and manufacturing method for a micromechanical component
12/01/2011	DE102010029302A1 Method for producing thin chips of electronic device, involves forming notch-like break section between bottom portion and upper area of semiconductor substrate and layer structure according to overlapping of doping regions
12/01/2011	DE102008061151B4 Halbleiterbauelement und Verfahren zu seiner Herstellung Semiconductor device and process for its preparation
12/01/2011	CA2799160A1 Method for manufacturing a microfluidic chip, and related chip and plate
11/2011
11/30/2011	EP2390225A2 Method of dividing a substrate into a plurality of individual chip parts
11/30/2011	EP2389337A2 Substrate bonding with metal germanium silicon material
11/30/2011	CN102262991A 一种sed显示器电子发射源纳米缝阵列的制备方法 Method for preparing nano-sed display electron emission source array seam
11/30/2011	CN102261979A 用于真空测量的低量程压阻式压力传感器及其制造方法 Low range piezoresistive pressure sensor and manufacturing method for vacuum measurement
11/30/2011	CN102259830A 与半导体工艺兼容的制造隔离腔体的方法及隔离腔体 The method is compatible with a semiconductor manufacturing process and the isolation of the isolation chamber cavity
11/30/2011	CN102259829A 隔离腔体及其制造方法 Isolation cavity and manufacturing method thereof
11/30/2011	CN102259828A 与半导体工艺兼容的制造隔离腔体的方法及隔离腔体 The method is compatible with a semiconductor manufacturing process and the isolation of the isolation chamber cavity
11/30/2011	CN102259827A Mems高量程加速度传感器的封装方法 Encapsulation method Mems high range acceleration sensor
11/30/2011	CN102259826A 飞秒激光束制备微纳复合周期结构的方法及装置 Method and apparatus for preparing a femtosecond laser beam micro-nano composite periodic structures

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