| Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526) |
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| 10/20/2011 | WO2011038158A3 Methods, compositions, systems and apparatus for molecular array fabrication |
| 10/19/2011 | EP2377809A1 Method for Manufacturing a Hermetically Sealed Structure |
| 10/19/2011 | EP2377606A1 Reactor and method for producing a reactor |
| 10/19/2011 | EP2377154A1 Via structure and method thereof |
| 10/19/2011 | EP2376369A2 Arrangement of two substrates having a slid bond and method for producing such an arrangement |
| 10/19/2011 | EP2376226A2 Improved reagent storage in microfluidic systems and related articles and methods |
| 10/19/2011 | EP2046677B1 Method of etching a sacrificial silicon oxide layer |
| 10/19/2011 | CN102219177A Micro electro mechanical system photomask and method for improving topological appearance of tungsten sediment |
| 10/19/2011 | CN101839706B Structure for measuring contact length of micro-cantilever and method thereof |
| 10/19/2011 | CN101434376B Method for manufacturing suspension micro electromechanical structure |
| 10/19/2011 | CN101024481B Micro electro mechanical system, semiconductor device, and manufacturing method thereof |
| 10/18/2011 | US8039205 Fluidic MEMS device |
| 10/13/2011 | WO2011076369A3 Method for the production of conical nanostructures on substrate surfaces |
| 10/13/2011 | US20110247941 Method for Electrochemical Fabrication |
| 10/13/2011 | DE102010032799A1 Mikroventil mit elastisch verformbarer Ventillippe, Herstellungsverfahren und Mikropumpe Microvalve with elastically deformable valve lip, manufacturing processes and micropump |
| 10/12/2011 | EP2375219A1 Inertial sensor and method for manufacturing the same |
| 10/12/2011 | EP2013137B1 Process for collective manufacturing of membranes and small volume cavities having high dimensional accuracy |
| 10/12/2011 | EP1951610B1 Method of forming moulds for nano imprinting |
| 10/12/2011 | CN102216987A Ultra thin alignment walls for di-block copolymer |
| 10/12/2011 | CN102216201A Encapsulation method |
| 10/12/2011 | CN102216015A Machine and method for machining a part by micro-electrical discharge machining |
| 10/12/2011 | CN102213784A Manufacturing method for dynamically-stamped reflective optical grating |
| 10/06/2011 | WO2011121946A1 Optical reflection element |
| 10/06/2011 | WO2011121427A2 A method to produce a microfluidic device having vertical electrodes and a device obtained from it |
| 10/06/2011 | DE102011001306A1 Halbleiter-Kapselung Semiconductor encapsulation |
| 10/06/2011 | DE102010003488A1 Method for manufacturing integrated micro-electromechanical system component of flux sensor, involves achieving mechanical mobility of structural elements by removal of layer portions of layer stack of substrate rear side |
| 10/05/2011 | EP2371512A1 Method for generating a clear space between two elements |
| 10/05/2011 | CN1986386B initiating structure used for manufacturing tiny mechanical devices and method for forming tiny mechanical devices |
| 10/05/2011 | CN102209683A Mems devices |
| 10/05/2011 | CN102208479A Nano coaxial-cable heterojunction array base ultraviolet detector and manufacturing method thereof |
| 10/05/2011 | CN102205942A Manufacturing method of sacrifice layer of MEMS (Micro-electromechanical System) |
| 10/05/2011 | CN102205941A Micro electro mechanical system (MEMS) process-based micro atomic cavity device air tightness package and method |
| 10/05/2011 | CN102205940A Bicrystal electrothermal actuator for MEMS (Micro-electromechanical System) |
| 10/05/2011 | CN101863448B Method for preparing nanometer or micron devices in controllable mode |
| 10/05/2011 | CN101863447B Method for manufacturing sloped sidewall silicon dioxide structure by adopting photoetching and dry etching |
| 10/05/2011 | CN101746710B Manufacturing method of embedded metal through-hole wafer and device thereof |
| 10/05/2011 | CN101243010B Chip scale package for a micro component and preparation method |
| 10/04/2011 | US8029681 Master recording medium for magnetically transferring servo pattern to the magnetic recording medium and method of manufacturing the same |
| 10/04/2011 | US8028567 AFM tweezers, method for producing AFM tweezers, and scanning probe microscope |
| 09/29/2011 | WO2011117181A2 Method for producing a microelectromechanical device and microelectromechanical device |
| 09/29/2011 | WO2011035185A3 A microfluidic device and uses thereof |
| 09/29/2011 | DE102010012441A1 Milli-Newton micro force measuring device for measuring forces in micro-electro-mechanical system, has micro sensor whose end is fastened to retaining unit and another end is designed as free end that moves relative to retaining unit |
| 09/29/2011 | DE102007015726B4 Auslenkbare Struktur, mikromechanische Struktur mit derselben und Verfahren zur Einstellung einer mikromechanischen Struktur Deflectable structure, micromechanical structure with the same and method for adjusting a micromechanical structure |
| 09/28/2011 | EP2254827B1 Methods of improving long range order in self-assembly of block copolymer films with ionic liquids |
| 09/28/2011 | CN201993195U 可输出多个参量的硅电容差压传感器 Can output multiple parameters of silicon capacitive pressure sensor |
| 09/28/2011 | CN102203001A Transducer with decoupled sensing in mutually orthogonal directions |
| 09/28/2011 | CN102202724A Method for manufacturing microneedle stamper |
| 09/28/2011 | CN102202723A Stamper for microneedle sheet, method for manufacturing the stamper, and method for manufacturing microneedle using the stamper |
| 09/28/2011 | CN102201483A Silicon nanowire grating resonant enhanced photoelectric detector and manufacturing method thereof |
| 09/28/2011 | CN102198927A Method for etching nanometer pattern on surface of crystalline silicon |
| 09/28/2011 | CN102198926A Micro-channel processing method for micro-fluidic chip |
| 09/28/2011 | CN102198925A MEMS device and forming method thereof |
| 09/28/2011 | CN102198924A Electronic device |
| 09/28/2011 | CN101817497B Method for preparing all-dry etching dissolved silicon chip for microstructure manufacturing |
| 09/28/2011 | CN101792111B Method for preparing multilayer raised compound film |
| 09/28/2011 | CN101561510B Chip of three-dimensional MEMS geophone and preparation method thereof |
| 09/27/2011 | US8025831 Imprinting of supported and free-standing 3-D micro- or nano-structures |
| 09/22/2011 | WO2011115578A1 Method of applying a lubricant to a micromechanical device |
| 09/22/2011 | WO2011114628A1 Mems element, and manufacturing method of mems element |
| 09/22/2011 | WO2011114018A2 Method of forming a pattern on the surface of a substrate |
| 09/22/2011 | WO2011113495A1 Mems device having coined metal foil membrane and manufacturing method |
| 09/22/2011 | WO2011073393A3 Method for plugging a hole and a plugged hole |
| 09/22/2011 | DE102010012042A1 Bauelement mit einem Chip in einem Hohlraum und einer spannungsreduzierten Befestigung Component with a chip in a cavity and a voltage reduced fastening |
| 09/22/2011 | DE102010002992A1 Piezoresistive micromechanical sensor component e.g. acceleration sensor has piezoresistive doping regions provided at top face and underside of bending joists which are arranged between substrate and seismic mass at opposed sides |
| 09/22/2011 | DE102010002991A1 Verfahren zur Herstellung einer mikrofluidischen Vorrichtung A process for producing a microfluidic device |
| 09/22/2011 | DE102010002921A1 Mikrofluidische Mehrfach-Messkammeranordnung Microfluidic multiple measurement chamber assembly |
| 09/22/2011 | DE102010002915A1 Mikrofluidischer Sensor Microfluidic sensor |
| 09/22/2011 | DE102007034963B4 Zelle mit einer Kavität und einer die Kavität umgebenden Wandung, Verfahren zur Herstellung einer derartigen Zelle, deren Verwendung und Wandung mit einer darin ausbildbaren Ausnehmung Cell with a cavity and a wall surrounding the cavity, methods of making such a cell, the use of which and the wall with a recess embodied therein |
| 09/22/2011 | DE102007021920B4 Vorrichtung zum Entewerfen eines mikromechanischen Bauelements mit angepasster Empfindlichkeit, Verfahren zur Herstellung eines mikromechanischen Bauelements und eines mikromechanischen Systems An apparatus for subjecting a duck micromechanical component with adapted sensitivity, methods of making a micromechanical device and a micromechanical system |
| 09/21/2011 | EP2366659A2 Device and use thereof |
| 09/21/2011 | EP2365934A1 Functional capping |
| 09/21/2011 | CN201980994U 消除微电子机械系统悬空结构粘附现象的结构 Elimination of vacant structures sticking structure microelectromechanical systems |
| 09/21/2011 | CN102193002A Acceleration sensor and manufacturing method thereof |
| 09/21/2011 | CN102193001A SAW-MEMS (surface acoustic waves-micro electro mechanical system) acceleration sensor and manufacturing method thereof |
| 09/21/2011 | CN102190483A Three-dimensional micro-nano material composed of nano CoFe2O4 and preparation method thereof |
| 09/21/2011 | CN102190286A Method for fabricating MEMS device and MEMS device |
| 09/21/2011 | CN102190285A Manufacturing method of MEMS device, and substrate used therefor |
| 09/21/2011 | CN102190284A MEMS sensor and methods for manufacturing MEMS sensor, film, mass block and cantilever beam |
| 09/21/2011 | CN102190283A Microfluidic chip preparation method capable of realizing microsphere discretization |
| 09/21/2011 | CN102190281A Chip package and method for forming the same |
| 09/21/2011 | CN102190280A Micromechanical component and method for manufacturing a micromechanical component |
| 09/21/2011 | CN102190276A Micro electro mechanical device and packaging manufacture technology thereof |
| 09/21/2011 | CN101559914B Digital micro-droplet drive with deep submicron pore structure and manufacturing method thereof |
| 09/21/2011 | CN101360851B Master electrode and method for manufacturing it |
| 09/21/2011 | CN101037185B Method for making nano-groove on quartz glass |
| 09/20/2011 | US8021593 Method of producing a three-dimensional structure and fine three-dimensional structure |
| 09/20/2011 | US8021480 Microfluidic free interface diffusion techniques |
| 09/15/2011 | WO2011112337A1 Microfluidic channel device with array of drive electrodes |
| 09/15/2011 | WO2011081045A3 Vibrating mirror element and manufacturing method for same |
| 09/15/2011 | US20110221095 Step and Repeat Imprint Lithography Process |
| 09/15/2011 | US20110220890 Methods and Devices for Fabricating and Assembling Printable Semiconductor Elements |
| 09/15/2011 | DE112006001152B4 Verfahren zur Fertigung einer Halbleitervorrichtung mit Elementabschnitt ichtung A method of manufacturing a semiconductor device having element portion ichtung |
| 09/15/2011 | DE102010002818A1 Mikromechanisches Bauelement und Verfahren zur Herstellung eines mikromechanischen Bauelementes Micromechanical component and process for producing a micromechanical component |
| 09/14/2011 | EP2364953A1 Fabrication process for a microelectromechanical system by etching a sacrificial layer through a porous region. |
| 09/14/2011 | CN201976248U 微电子机械系统传声器 MEMS microphones |
| 09/14/2011 | CN102185097A Piezoelectric stacking type MEMS (Micro-electromechanical System) vibration energy collector and manufacturing method thereof |
| 09/14/2011 | CN102183677A Integrated inertial sensor and pressure sensor and forming method thereof |
| 09/14/2011 | CN102183602A Micro gas chromatographic column with high depth-to-width ratio and wet corrosion manufacturing method thereof |
| 09/14/2011 | CN102183335A Mems压力传感器及其制作方法 Mems pressure sensor and manufacturing method thereof |
| 09/14/2011 | CN102183333A Capacitive type pressure transducer containing silicon through holes and manufacturing method thereof |