B81C 1 - Manufacture or treatment of devices or systems in or on a substrate

Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526)
11/2011
11/30/2011	CN102259825A 一种mems原子蒸气腔室的制备方法及原子蒸气腔室 Method for preparing mems atomic vapor chamber and atomic vapor chamber
11/30/2011	CN102259824A 一种基于晶圆键合技术的黏度传感器芯片及其制备方法 Based on wafer bonding technology viscosity sensor chip and its preparation method
11/30/2011	CN102259823A Mems压敏传感器件的制作方法 The method of making the pressure-sensitive sensor element Mems
11/30/2011	CN102259822A 压敏传感器的制备方法及在硅片上形成空腔结构的方法 The method for preparing a pressure-sensitive sensor and method for forming a cavity structure on a silicon wafer
11/30/2011	CN102259820A 空腔结构和该结构的制备方法及压敏传感器的制作方法 Preparation cavity structure and the structure and manufacturing method of the pressure-sensitive sensor
11/30/2011	CN101907637B Triaxial differential accelerometer and manufacture method thereof
11/30/2011	CN101881785B 四折叠梁变面积差分电容结构微加速度传感器及制备方法 Four fold differential capacitance variable area beam micro-accelerometer structure and preparation methods
11/30/2011	CN101837946B 一种干性粘合剂的制作方法 A method of making dry binder
11/30/2011	CN101712450B 一种液相脉冲激光诱导制备纳米晶二氧化钛薄膜的方法 A method for preparing a pulsed laser induced phase nanocrystalline titania films
11/30/2011	CN101608962B 一种微型皮拉尼计 A miniature Pirani gauge
11/30/2011	CN101126900B 一种基于金属局域化效应的光刻方法 A lithographic method based on metal localization effect
11/30/2011	CN101108720B 微机电装置以及其制造方法 Micro-electromechanical device and a manufacturing method thereof
11/29/2011	US8066930 Forming a layer on a substrate
11/24/2011	WO2011087565A3 Thermal sensors having flexible substrates and uses thereof
11/24/2011	WO2011083160A3 Micro-electromechanical semiconductor component and method for the production thereof
11/24/2011	DE102010029072A1 Micro-electromechanical translation vibrator system, has acoustic resonator arranged such that resonance frequency of acoustic resonator is adapted to natural frequency of micro-electromechanical translation vibrator
11/23/2011	EP2388119A1 An imprint lithography process
11/23/2011	CN102257374A Device and method for producing a device
11/23/2011	CN102256893A Method of using a plurality of smaller mems devices to replace a larger mems device
11/23/2011	CN102256387A Rectangular micro heating device with heating resistance wire with non-uniform wire width and heating method
11/23/2011	CN102256386A Rectangular micro-heater with heating resistance wires at non-uniform wire intervals and method
11/23/2011	CN102255128A Micro electro mechanical clamped beam type directional microwave power coupler and manufacturing method thereof
11/23/2011	CN102253238A Static suspension six-axis micro accelerometer and manufacturing method thereof
11/23/2011	CN102252878A Off-Gel free flow electrophoresis coupling chip and making method thereof
11/23/2011	CN102249183A CuO/TiO2 nanotube array and preparation method and application method thereof
11/23/2011	CN102249182A Method for preparing magnetic/polymer composite material three-dimensional micro/nano device capable of being remotely magnetically driven
11/23/2011	CN102249181A Manufacturing method of SU-8 photoresist micro-force sensor
11/23/2011	CN102249180A Piezoresistive pressure sensor polycrystalline silicon diaphragm in micro electro mechanical system and forming method of piezoresistive pressure sensor polycrystalline silicon diaphragm
11/23/2011	CN102249179A Dry etching method for improving profile angle of micro-electro-mechanical system (MEMS) sensing film cavity
11/23/2011	CN102249178A Solid-state image pickup apparatus, method for manufacturing same, and electronic device
11/23/2011	CN102249177A Micro-electromechanical sensor and forming method thereof
11/23/2011	CN102249176A Micro electromechanical infrared imaging chip and manufacturing method thereof
11/22/2011	US8062491 Biological identification system with integrated sensor chip
11/17/2011	WO2011142850A2 Etchant-free methods of producing a gap between two layers, and devices produced thereby
11/17/2011	DE10321482B4 Verbesserung von Membraneigenschaften einer Halbleiteranordnung Improvement of membrane properties of a semiconductor device
11/17/2011	DE102010028833A1 Piezoresistive sensing element for resilient fastening of mass element of acceleration sensor, has equaled portions which are separated by separation element for differential measurement of mechanical stress caused by acceleration
11/17/2011	DE102010020162A1 Verfahren zur Strukturierung eines Strahlungsauskoppelelements Method for structuring a Strahlungsauskoppelelements
11/16/2011	EP2386521A2 Acoustic sensor having protective film and method of manufacturing the same
11/16/2011	CN102245498A Arrangement of two substrates having a SLID bond and method for producing such an arrangement
11/16/2011	CN102243268A Micro-electro-mechanical directional coupling microwave power sensor and preparation method thereof
11/16/2011	CN102243207A Electrochemical sensor with nanometer concave-convex structure formed on surface of electrode and preparation method of electrochemical sensor
11/16/2011	CN102241389A Method for packing alkali metal simple substance
11/16/2011	CN102241388A MEMS (micro electro mechanical system) wafer-level three-dimensional mixing integration packaging structure and method
11/16/2011	CN101907769B Silicon on insulator (SOI) wafer double-mask etching-based vertical comb teeth driven torsional micro-mirror and manufacturing method thereof
11/16/2011	CN101723306B Method for monolithic integration of MEMS hot-film sensor and IC
11/16/2011	CN101718667B Density sensor chip based on micro electro mechanical system technology and preparation method thereof
11/16/2011	CN101692099B Piezoresistive double-shaft micro-accelerometer with on-chip zero offset compensation and manufacturing method thereof
11/16/2011	CN101590997B Method for manufacturing integrated piezoresistance SiO2 cantilever by wet etching
11/16/2011	CN101580222B Micro electromechanical component and manufacturing method thereof
11/16/2011	CN101566502B Thermo-optical infrared detector and preparation method thereof
11/16/2011	CN101456533B Method for manufacturing electric pole in micro fixed scroll vane
11/16/2011	CN101432223B Process for collective manufacturing of small volume high precision membranes and cavities
11/16/2011	CN101428751B Micro electro-mechanical system and manufacturing method therefor
11/15/2011	US8057725 Capillary imprinting technique
11/10/2011	WO2011138635A1 Capillary electrophoresis chips
11/10/2011	WO2011138148A2 Counterbearing with aspherical membrane bed, pressure sensor comprising such a counterbearing and method for the production thereof
11/10/2011	WO2011084229A3 Embedded mems sensors and related methods
11/10/2011	DE102010048003A1 Verfahren zur Herstellung von mechanischen Anschlägen zur Selbstjustage und Vorrichtung mit Anschlägen zur Selbstjustage Process for the manufacture of mechanical stops for self-adjustment device and with stops for self-adjustment
11/10/2011	DE102009056894B4 Verfahren zur Herstellung eines Bauteils mit mindestens einem Mikrosensor A method for producing a component with at least one micro-sensor
11/09/2011	CN102234099A Micromachining method of gas-sensitive element with gas-exchanging forcing cold-heat pump
11/09/2011	CN102234098A Manufacturing method of micro electromechanical structure
11/09/2011	CN102234097A Semiconductor structure, manufacturing method of semiconductor structure and semiconductor device
11/09/2011	CN102234096A Semiconductor structure and manufacturing method of semiconductor structure
11/09/2011	CN101837943B Sensor for quantitatively measuring mechanical and electrical properties and microstructure and manufacturing method thereof
11/09/2011	CN101654218B Method for preparing BiFeO3 film pattern on surface of self-assembly single layer film
11/09/2011	CN101575083B Micromachined thermopile infrared detector
11/09/2011	CN101447369B Manufacture method of Ti-based MEMS mechanical relay
11/09/2011	CN101316790B Method of fabricating reflective pixel and reflection structure
11/09/2011	CN101263077B A method of manufacturing a microsystem with interval
11/03/2011	WO2011087598A3 Thermal sensor using a vibrating mems resonator of a chip interconnect layer
11/03/2011	WO2011037435A3 Composition for forming a pattern for a nano-/microfluidic channel, and apparatus for forming a pattern using same
11/03/2011	US20110266639 Method of Producing a MEMS Device
11/02/2011	EP2383749A2 Nanofabric articles and methods of making the same
11/02/2011	EP2383601A1 Semiconductor device comprising a cavity having a vent hole
11/02/2011	EP2382151A2 Bonded microelectromechanical assemblies
11/02/2011	CN101638215B Manufacture method of micro-nano gap electrode
10/2011
10/27/2011	WO2011132771A1 Mold, method for producing same, article having micro-relief structure on surface, and method for producing same
10/27/2011	WO2011132532A1 Piezoelectric actuator and manufacturing method for piezoelectric actuator
10/27/2011	WO2011131249A1 Mems device having a membrane and method of manufacturing
10/27/2011	WO2011064716A3 Method for producing at least one cavity in a microelectronic and/or micromechanical structure and a sensor or actuator comprising such a cavity
10/27/2011	WO2011015650A3 Method of producing microneedles
10/27/2011	DE102011009810A1 Lösung für optische Einschränkungen bei der Mikrofachwerkverarbeitung Solution for optical limitations in the microtruss processing
10/27/2011	DE102010028111A1 Mikromechanisches Element Micromechanical element
10/26/2011	EP2381116A1 Apparatus and methods for conducting assays and high throughput screening
10/26/2011	EP2379998A1 Device and method for producing a device
10/26/2011	EP2379443A2 Nanostructured articles and methods of making nanostructured articles
10/26/2011	EP2379441A2 Directed self-assembly of block copolymers using segmented prepatterns
10/26/2011	EP2379440A2 Method for producing thin, free-standing layers of solid state materials with structured surfaces
10/26/2011	EP2379160A1 Patch production
10/26/2011	EP2084102B1 Method for producing a micromechanical component with thin-film capping
10/26/2011	CN1802265B Positive tone bi-layer imprint lithography method and compositions therefor
10/26/2011	CN102226989A Method for manufacturing mixed crystal-oriented silicon substrate
10/26/2011	CN102226715A Visible photoelectrochemical detector based on one-dimensional silicon nanostructure array
10/26/2011	CN102225739A Manufacturing method of adjustable FP (filter pass) optical filter based on MEMS (micro electro mechanical system) process
10/26/2011	CA2737791A1 Soft lithography device and process
10/25/2011	US8043882 Method of making microminiature moving device
10/20/2011	WO2011129352A1 Mems device and production method for same
10/20/2011	WO2011129351A1 Mems device and production method for same
10/20/2011	WO2011128446A2 Method for manufacturing a hermetically sealed structure
10/20/2011	WO2011128188A2 Microelectronic component

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