| Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526) |
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| 02/15/2012 | CN102353610A Capacitance micro-machining ultrasonic sensor for measuring density and production method thereof |
| 02/15/2012 | CN102353609A MEMS fluid density sensor chip with dual Wheatstone full bridges structure and its preparation method |
| 02/15/2012 | CN102353464A Superconductive nanowire single-photon detector capable of distinguishing photon number and preparation method thereof |
| 02/15/2012 | CN102353459A Detector and manufacturing method thereof |
| 02/15/2012 | CN102353324A Flexible semi-clarity strain sensor and preparation method thereof |
| 02/15/2012 | CN102351140A Preparation method of growth-controllable silicon nanowire sensor |
| 02/15/2012 | CN101913553B 一种体硅刻蚀和金硅键合复合工艺方法 As a bulk silicon etching and gold process for silicon-bonded complexes |
| 02/15/2012 | CN101913552B 一种基于铝牺牲层工艺的悬浮微敏感结构制备方法 Micro-sensitive structure suspension preparation method based on aluminum sacrificial layer technology |
| 02/15/2012 | CN101665238B 一种微纳放电加工微三维结构的方法和系统 A micro-nano-discharge method and system for processing micro three-dimensional structure |
| 02/15/2012 | CN101583559B 微机械结构和制造微机械结构的方法 The method of micro-mechanical structure and manufacturing micromechanical structures |
| 02/09/2012 | WO2012019092A1 Polymer composition for microelectronic assembly |
| 02/09/2012 | WO2012019091A1 Sacrificial polymer compositions including polycarbonates having repeat units derived from stereospecific polycyclic 2,3-diol monomers |
| 02/09/2012 | WO2012017904A1 Microfluidic chip manufacturing method, microfluidic chip, and device for generating surface plasmon resonance light |
| 02/09/2012 | WO2011151098A3 Component with a via and method for producing it |
| 02/09/2012 | DE102010038810A1 Micromechanical component capping method, involves forming perforation in cap layer, where cap layer produces reduced ambient atmosphere to flow around cap layer so as to close perforation |
| 02/09/2012 | DE102010038809A1 Inertialsensor und Verfahren zum Herstellen eines Inertialsensors Inertial sensor and method of manufacturing an inertial sensor |
| 02/09/2012 | DE102008013098B4 Mikromechanisches System mit Temperaturstabilisierung The micromechanical system with temperature stabilization |
| 02/08/2012 | EP2414276A1 Production of a microelectronic device comprising a monocrystalline silicon nems component and a transistor, the gate of which is produced in the same layer as the movable structure of said component |
| 02/08/2012 | EP2414275A2 Mems cavity-coating layers and methods |
| 02/08/2012 | CN102349311A Microphone and accelerometer |
| 02/08/2012 | CN102346164A Method for constructing uric acid sensor on the basis of super-long zinc oxide nano-wire |
| 02/08/2012 | CN102344114A Preparation method for deep trench isolation channel |
| 02/08/2012 | CN102344113A Method for etching device deep slot with metal sensitive interlayer |
| 02/08/2012 | CN102344112A A method for forming a capped micro-electro-mechanical system (mems) device |
| 02/08/2012 | CN102344111A A process for manufacturing a micromechanical structure having a buried area provided with a filter |
| 02/08/2012 | CN102344109A Packaging structure and manufacturing method thereof |
| 02/02/2012 | WO2012015700A2 Method and device for restoring and maintaining superhydrophobicity under liquid |
| 02/02/2012 | WO2012012939A1 Cmos compatible mems microphone and method for manufacturing the same |
| 02/02/2012 | DE102010038461A1 Drehratensensor und Verfahren zur Herstellung eines Masseelements Rotation rate sensor and method for producing a mass element |
| 02/02/2012 | DE102010038445A1 Verfahren zur Herstellung eines mikrofluidischen Systems A process for preparing a microfluidic system |
| 02/01/2012 | EP2412665A1 Process for manufacturing a micromechanical structure having a buried area provided with a filter |
| 02/01/2012 | CN202131084U Microparticle capturing device and microparticle transporting device applying same |
| 02/01/2012 | CN102338825A 120-degree three-channel micro electro mechanical microwave power sensor and preparation method thereof |
| 02/01/2012 | CN102338681A Planar silicon pressure sensor and manufacturing method thereof |
| 02/01/2012 | CN102336394A Method for manufacturing flexible micro electro mechanical system (MEMS) resistance reducing covering |
| 02/01/2012 | CN102336393A Method for preparing hydrophobic micro-structure on surface of organic glass through femtosecond laser |
| 02/01/2012 | CN102336392A Electrical device built into semiconductor integrated circuit |
| 02/01/2012 | CN102336391A Method for manufacturing piezoresistive sensor device and sensor device |
| 02/01/2012 | CN102336390A Micro-electro-mechanical structure with pressure sensor and manufacturing method thereof |
| 02/01/2012 | CN102336389A Integrated device of Micro-electro-mechanical Systems (MEMS) device and circuit chip and production method thereof |
| 02/01/2012 | CN102336388A Preparation method of pressure-sensitive transducer |
| 02/01/2012 | CN102336387A Quartz micro-needle array tip spherical shell microstructure and preparation method thereof |
| 02/01/2012 | CN102336386A Three-dimensional solid needle tip flexible micro-electrode array and making method thereof |
| 02/01/2012 | CN102334988A Manual combined type microelectrode propeller and production method thereof |
| 02/01/2012 | CN101957246B 一种用于微力微位移测量系统的集成探测器 Integrated detector for Merak micro-displacement measuring system |
| 02/01/2012 | CN101646116B 一种电极串联式硅微压电传声器 An electrode tandem silicon micro piezoelectric microphone |
| 02/01/2012 | CN101222792B 声换能器结构以及制造声换能器结构的方法 Acoustic transducer structures and the structure of the acoustic transducer manufacturing method |
| 01/31/2012 | US8107157 Micromirror unit and method of making the same |
| 01/31/2012 | US8105860 Support with integrated deposit of gas absorbing material for manufacturing microelectronic microoptoelectronic or micromechanical devices |
| 01/31/2012 | US8105496 Method of fabricating MEMS devices (such as IMod) comprising using a gas phase etchant to remove a layer |
| 01/31/2012 | US8104515 Microfabricated elastomeric valve and pump systems |
| 01/31/2012 | US8104497 Microfabricated elastomeric valve and pump systems |
| 01/26/2012 | WO2011142850A3 Etchant-free methods of producing a gap between two layers, and devices produced thereby |
| 01/26/2012 | DE10356507B4 Gefederte mikromechanische Struktur und Verfahren zu ihrer Herstellung Sprung micromechanical structure and process for their preparation |
| 01/25/2012 | EP2410344A2 Method for manufacturing an accelerometer |
| 01/25/2012 | EP2409326A2 Rapid fabrication of a microelectronic temporary support for inorganic substrates |
| 01/25/2012 | EP2038061B1 Microfluidic device with variable volume material |
| 01/25/2012 | CN102332882A Structure of surface mount device micro electromechanical oscillator and manufacturing method thereof |
| 01/25/2012 | CN102332529A Piezoelectric energy collector with flexible substrate and manufacturing method thereof |
| 01/25/2012 | CN102331443A Acetone gas sensor and manufacturing method thereof |
| 01/25/2012 | CN102331325A Pressure sensor package systems and methods |
| 01/25/2012 | CN102328904A Method for forming microelectro mechanical system (MEMS) device |
| 01/25/2012 | CN102328903A Large-area nano-seam electrode parallel manufacturing method |
| 01/25/2012 | CN102328902A Method for preparing surface microstructure of super-hydrophobic amorphous alloy |
| 01/25/2012 | CN102328901A Method for preparing ZnO nano-array composite system modified by gold nanoparticles |
| 01/25/2012 | CN102328900A Cavity manufacturing method |
| 01/25/2012 | CN102328899A Method for manufacturing cavities of different depths |
| 01/25/2012 | CN102328898A Method for large area arrangement of nanowires |
| 01/25/2012 | CN101717066B Method and nano balance for weighing viruses |
| 01/25/2012 | CN101638217B Method for electric discharge machining of micronanometer three-dimensional structure of nanowire or nanotube and system thereof |
| 01/19/2012 | WO2011121427A8 A method to produce a microfluidic device having vertical electrodes and a device obtained from it |
| 01/19/2012 | DE102011078937A1 Drucksensorgehäusesysteme und -verfahren Pressure sensor housing systems and procedures |
| 01/19/2012 | DE102010031757A1 Mikrofluidisches System und Herstellungsverfahren für ein mikrofluidisches System Microfluidic system and manufacturing process for a microfluidic system |
| 01/19/2012 | DE102009030281B4 Vorrichtung und Verfahren zur aktiven Abschirmung von Leitern in MEMS-Vorrichtungen Apparatus and method for active shielding of conductors in MEMS devices |
| 01/19/2012 | DE102005004795B9 Konzept zur nass-chemischen Entfernung eines Opfermaterials in einer Materialstruktur Concept for the wet chemical removal of a sacrificial material in a material structure |
| 01/18/2012 | EP2407418A2 A MEMS device comprising a hermetically sealed cavity and devices obtained thereof |
| 01/18/2012 | EP2407416A1 Method for manufacturing a membrane device retaining a fluid |
| 01/18/2012 | EP2406964A1 Microphone and accelerometer |
| 01/18/2012 | EP2406815A1 Method for positioning chips during the production of a reconstituted board |
| 01/18/2012 | CN202116292U Laser micro-manufacturing device for in-situ shaping optical micro lens |
| 01/18/2012 | CN102325717A Method for producing thin, free-standing layers of solid state materials with structured surfaces |
| 01/18/2012 | CN102325563A Patch production |
| 01/18/2012 | CN102323716A Method for transferring and manufacturing pattern with nanometer structure |
| 01/18/2012 | CN102323475A Three-channel micromechanical clamped beam indirect microwave power sensor and preparation method |
| 01/18/2012 | CN102323314A Production and detection method of plated bismuth gold micro-array electrode for detecting heavy metals |
| 01/18/2012 | CN102323301A Silicon nanowire biosensor for detecting organophosphorus pesticide residue and preparation method thereof |
| 01/18/2012 | CN102322961A Micromachine thermopile infrared sensor with high duty cycle and manufacture method thereof |
| 01/18/2012 | CN102320562A Method for forming layers to realize tapered edges within a MEMS device |
| 01/18/2012 | CN102320561A Film manufacturing method capable of increasing technology efficiency |
| 01/18/2012 | CN102320560A Production method of MEMS component film |
| 01/18/2012 | CN102320559A Preparation method of hollow-structured micro-array electrode |
| 01/18/2012 | CN102320558A Manufacturing method for cavity of full silica-based microfluidic device |
| 01/18/2012 | CN102320557A Method for preparing metal nanometer particles with hexagonal network in lattice distribution on substrate |
| 01/18/2012 | CN102320556A Method for constructing netty nano ZnO material strain transducer |
| 01/18/2012 | CN102320555A Single nanometer hole preparation method based on glass micro tube and medium identification method |
| 01/18/2012 | CN102320554A Process for preparing nano seam by virtue of template alignment impressing |
| 01/18/2012 | CN102320553A Method for making micro nanometer structure device by laser two-photon direct writing technology |
| 01/18/2012 | CN102320552A Method for making viscosity sensor chip based on separation by implantation of oxygen technology |
| 01/18/2012 | CN102320551A Preparation method of surface localized surface plasmon resonance (LSPR)-based molecular imprinting bionic olfaction Ag nano wire sensor |
| 01/18/2012 | CN102320550A Raman scattering enhancing substrate of germanium-based semiconductor, and perpetration method and application of the same |