| Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526) |
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| 01/18/2012 | CN102320549A Method for improving stress linearity of film |
| 01/18/2012 | CN102319145A Method for preparing contact lens electronic chip |
| 01/18/2012 | CN101767766B Method for manufacturing nanometer space in micro-nano mechanical device |
| 01/18/2012 | CN101531333B Sensor self-powered circuit based on MEMS, and manufacturing process thereof |
| 01/18/2012 | CN101284643B Method for fabricating a structure for a microelectromechanical systems (MEMS) device |
| 01/17/2012 | US8096048 Method for fabricating MEMS structure |
| 01/12/2012 | WO2012005292A1 Semiconductor substrate etching method and production method for capacitive mems sensor |
| 01/12/2012 | WO2012004423A1 Method for producing microfluid devices. |
| 01/12/2012 | WO2012004415A1 Switchable surfaces based on freely floating colloidal particles |
| 01/12/2012 | WO2012004353A1 Method for preparing microfluidic devices |
| 01/12/2012 | WO2012004066A1 Method for producing an integrated microfluidic system and integrated microfluidic system |
| 01/12/2012 | WO2011128188A3 Microelectronic component |
| 01/12/2012 | DE102010031187A1 Schichtdicken optimierendes Jettlayout Layer thicknesses optimizing Jettlayout |
| 01/12/2012 | DE102010031055A1 Sensor module i.e. acceleration sensor, manufacturing method, for measuring e.g. acceleration, in motor car, involves applying metallic support on temporary support, and switching circuit contacting contacting area by re-wiring layer |
| 01/12/2012 | DE102010030960A1 Method for manufacturing e.g. electronic stability control sensor that is installed in e.g. prefabricated injection molded base housing, involves applying attenuation mass on micro or nano-structured component |
| 01/12/2012 | DE102010026519A1 Micro-electro-mechanical system microphone for use in mobile telephone, has sound inlet port arranged in cover or in carrier, and sealing structure attached around sound inlet port on microphone |
| 01/12/2012 | DE102008002362B4 Mikrofluideinheiten, die Flüssigkeits-Fliesswege mit einem monolithischen chromatographischen Material aufweisen Having microfluidic devices, the liquid flow paths with a monolithic chromatographic material |
| 01/12/2012 | CA2804135A1 Method for preparing microfluidic devices |
| 01/11/2012 | EP2405301A1 Manufacturing method for multi-level metal parts through a LIGA type process and parts obtained using the method |
| 01/11/2012 | EP2405300A1 Manufacturing method for multi-level metal parts through an LIGA type method and parts obtained using the method |
| 01/11/2012 | EP2404868A1 Method for manufacturing a stationary structure defining a space containing a mobile element, in particular of a MEMS |
| 01/11/2012 | EP2404867A1 Method for preparing microfluidic devices |
| 01/11/2012 | EP2404866A1 Switchable surfaces based on freely floating colloidal particles |
| 01/11/2012 | EP2404320A2 Hermetic packaging of integrated circuit components |
| 01/11/2012 | CN102317199A Display device with desiccant |
| 01/11/2012 | CN102315194A Microstructure and microstructure production method |
| 01/11/2012 | CN102315094A Optimized jettlayout design layer thickness |
| 01/11/2012 | CN102313818A Flexible pressure resistance flow field sensor based on single-wall carbon nanotube array and manufacturing method thereof |
| 01/11/2012 | CN102313727A Preparation method of surface-enhanced Raman scattering (SERS) substrate |
| 01/11/2012 | CN102311095A Method for preparing multistage metal micro-nanostructures inside micro fluidic chip |
| 01/11/2012 | CN102311094A Method for producing nano fluid pathway with large area and available size base on SU-8 photosensitive resist |
| 01/11/2012 | CN102311093A Method for forming the chip package |
| 01/11/2012 | CN102311092A Method for producing a vibration-damped component |
| 01/11/2012 | CN102311091A Production process for a microneedle arrangement and corresponding microneedle arrangement and use |
| 01/11/2012 | CN102311090A Two-dimensional comb actuator and manufacturing method thereof |
| 01/11/2012 | CN101792109B Micro inertial sensor with embedded transversely movable electrodes and manufacturing method thereof |
| 01/11/2012 | CN101786593B Processing method of differential type high-precision accelerometer |
| 01/11/2012 | CN101436555B Method of manufacturing semiconductor package |
| 01/11/2012 | CN101286003B Drum die structure and method of manufacture |
| 01/06/2012 | CA2745162A1 Microfluidic devices |
| 01/05/2012 | WO2012002446A1 Micro-electromechanical system |
| 01/05/2012 | WO2012002233A1 Method of producing sensor device and sensor device |
| 01/05/2012 | WO2012001642A1 Method for functionalising fluid lines contained in a micromechanical device, micromechanical device including functionalised lines, and method for manufacturing same |
| 01/05/2012 | WO2011100593A3 Microelectromechanical system with reduced speckle contrast |
| 01/05/2012 | DE102010030864A1 Herstellungsverfahren für eine Mikronadelanordnung und entsprechende Mikronadelanordnung und Verwendung Manufacturing method of a microneedle array and corresponding microneedle array and use |
| 01/05/2012 | DE102010025969A1 Locherzeugung mit Mehrfach-Elektroden Hole generation with multiple electrode |
| 01/05/2012 | DE102010025968A1 Erzeugung von Mikrolöchern Generation of micro holes |
| 01/05/2012 | DE102010025965A1 Verfahren zur spannungsarmen Herstellung von gelochten Werkstücken Process for the production of low-stress perforated workpieces |
| 01/04/2012 | EP2402284A1 MEMS manufacturing method |
| 01/04/2012 | EP2401224A1 Method for making microchannels on a substrate, and substrate including such microchannels |
| 01/04/2012 | CN202102009U Thermal wind speed and direction sensor based on Au-Au bonding process |
| 01/04/2012 | CN102305256A Metal micrometer/nanometer spring as well as preparation method and application thereof |
| 01/04/2012 | CN102303845A Preparation method of drug-delivery type three-dimensional carbon microelectrode with microfluid channel |
| 01/04/2012 | CN102303844A MEMS (micro electro mechanical system) apparatus and forming method thereof |
| 01/04/2012 | CN102303843A Nano fluid channel and manufacturing method thereof |
| 01/04/2012 | CN102303842A Pre-packaging method of cover plate compatible with semiconductor process |
| 01/04/2012 | CN102303841A Method for forming micro-nano composite structure by micro-spraying-printing and dielectrophoretic force |
| 01/04/2012 | CN102303840A Preparation method of nano-imprint template in vector type AFM (atomic force microscopy) nano processing system |
| 01/04/2012 | CN101985348B Manufacturing method of micron-scale grid structure made of monocrystalline silicon material |
| 01/04/2012 | CN101759138B Positive pressure thermoforming manufacturing method of wafer-level glass micro-channel |
| 01/04/2012 | CN101691202B Method for preparing polyvinylidene fluoride piezo film with microstructure |
| 12/29/2011 | WO2011163618A2 Array structures of containers |
| 12/29/2011 | WO2011162950A2 Planar cavity mems and related structures, methods of manufacture and design structures |
| 12/29/2011 | WO2011162949A2 Planar cavity mems and related structures, methods of manufacture and design structures |
| 12/29/2011 | WO2011161318A1 Multi-layer substrate structure and manufacturing method for the same |
| 12/29/2011 | WO2011160986A1 Micro-electro-mechanical system structures |
| 12/29/2011 | WO2011160985A2 Micro-electro-mechanical system |
| 12/29/2011 | WO2011109231A3 Cmp process flow for mems |
| 12/29/2011 | DE102011001304A1 Bauelement und Verfahren zur Herstellung eines Bauelements Device and method for manufacturing a device |
| 12/29/2011 | DE102010041690A1 Producing structures of ion gel, comprises mixing monomer with ionic liquid to printable liquid, generating structure by printing printable liquid using inkjet printing technology, and polymer forming |
| 12/29/2011 | DE102010030457A1 Method for manufacturing fragile microelectromechanical system structure of packaged microelectromechanical system components for e.g. laptop, involves coating substrate with plastic material to produce chip packaging |
| 12/29/2011 | CA2787161A1 Micro-electro-mechanical system structures |
| 12/28/2011 | EP2399863A1 Multi-layer substrate structure and manufacturing method for the same |
| 12/28/2011 | EP2398733A1 Device for grasping and active release of micro and nano objects |
| 12/28/2011 | CN202093043U Saw-mems加速度传感器 Saw-mems accelerometer |
| 12/28/2011 | CN102301458A 用于蚀刻的方法和设备 Method and apparatus for etching |
| 12/28/2011 | CN102300801A 接合式微机电组件 Joining micro-electromechanical components |
| 12/28/2011 | CN102300800A 磁构图方法和系统 Magnetic patterning method and system |
| 12/28/2011 | CN102299361A 一种微型微生物燃料电池 A miniature microbial fuel cell |
| 12/28/2011 | CN102298075A 一种具有复合多梁结构的加速度传感器芯片及其制作方法 An acceleration sensor chip and its manufacturing method of a composite multi-beam structure has |
| 12/28/2011 | CN102298074A 一种孔缝双桥式加速度传感器芯片及其制备方法 One kind of apertures Shuangqiaoshan accelerometer chip and its preparation method |
| 12/28/2011 | CN102297895A 纳米聚苯胺复合声表面波型湿度传感器及其制作方法 Nano polyaniline SAW humidity sensor and manufacturing method thereof |
| 12/28/2011 | CN102297851A 一种智能高敏分子印迹传感芯片 An intelligent high sensitivity molecular imprinting chip |
| 12/28/2011 | CN102297737A 压力传感器空腔结构及其制作方法 Pressure sensor cavity structure and manufacturing method thereof |
| 12/28/2011 | CN102297689A 静电驱动压电检测闭环控制微固体模态陀螺 Electrostatic detection loop control to drive the piezoelectric micro modal solid gyro |
| 12/28/2011 | CN102295269A 腔体封口工艺 Cavity sealing process |
| 12/28/2011 | CN102295268A 长玻璃柱体阳极键合的加热加压装置 Long glass cylinder anodic bonding of heat and pressure devices |
| 12/28/2011 | CN102295267A 柔性mems减阻蒙皮的制造方法 Mems drag reduction method for manufacturing flexible skinning |
| 12/28/2011 | CN102295266A 一种获得精密齐整棱边的mems划片方法 Mems dicing method for obtaining precise neat edge of |
| 12/28/2011 | CN102295265A 平面腔体微机电系统及相关结构、制造和设计结构的方法 Methods planar cavity micro-electromechanical systems and related structures, manufacturing and design structure |
| 12/28/2011 | CN102295264A 平面腔体微机电系统及相关结构、制造和设计结构的方法 Methods planar cavity micro-electromechanical systems and related structures, manufacturing and design structure |
| 12/28/2011 | CN102295263A Planar cavity mems and related structures, methods of manufacture and design structures |
| 12/28/2011 | CN102295262A 微型动态压阻压力传感器及其制造方法 Miniature dynamic piezoresistive pressure sensor and its manufacturing method |
| 12/28/2011 | CN101880879B 硅杯腐蚀夹具 Silicon Cup fixture corrosion |
| 12/28/2011 | CN101850945B 一种去除微纳结构中溶剂的方法 A method of micro-nano structures solvent removal |
| 12/28/2011 | CN101659391B 一种圆滑曲面微结构的制作方法 A method of making smooth the surface microstructure of |
| 12/28/2011 | CN101460246B 具有可变体积材料的微流控装置 Microfluidic device with variable volume material |
| 12/28/2011 | CN101094804B 微机电系统封装件及其制造方法 MEMS package and method for manufacturing |
| 12/22/2011 | WO2011159351A2 Electrodes to improve reliability of nanoelectromechanical systems |
| 12/22/2011 | WO2011092137A3 Miniaturized electrical component comprising an mems and an asic and production method |