| Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526) |
|---|
| 05/16/2012 | CN102456582A Technology for manufacturing molded lead frame |
| 05/16/2012 | CN102454543A Active energy absorbing and vibration damping energy saving method of micro-nano blade of large-sized draught fan |
| 05/16/2012 | CN102452638A Method of making a micro-electro-mechanical-systems (mems) device |
| 05/16/2012 | CN102452637A Novel device for nanometer (micrometer) spherical membrane and automatic boundary finishing technology |
| 05/16/2012 | CN102452636A Handling layer for transparent substrate |
| 05/16/2012 | CN101384505B Patterning method and device with a patterned surface |
| 05/15/2012 | US8179215 MEMS device with integral packaging |
| 05/10/2012 | WO2012059251A2 Feedback control of dimensions in nanopore and nanofluidic devices |
| 05/10/2012 | WO2012021776A3 Method of forming monolithic cmos-mems hybrid integrated, packaged structures |
| 05/10/2012 | US20120111129 Device for the Actively-Controlled and Localized Deposition of at Least One Biological Solution |
| 05/10/2012 | DE102011117498A1 Verfahren zum fertigen eines substrats und substratbearbeitungsverfahren A method of manufacture of a substrate and substrate processing method |
| 05/10/2012 | CA2812371A1 Feedback control of dimensions in nanopore and nanofluidic devices |
| 05/09/2012 | EP2450309A2 Sacrificial layers made from aerogel for manufacturing MEMS devices |
| 05/09/2012 | EP2448861A1 Simplified copper-copper adhering method |
| 05/09/2012 | EP1663517B1 Method for reducing leaching in metal-coated mems |
| 05/09/2012 | CN102449906A Mems element, and manufacturing method of mems element |
| 05/09/2012 | CN102448873A Mems element |
| 05/09/2012 | CN102445477A Ex-vivo nerve information dual-mode detection microelectrode array chip and preparation method thereof |
| 05/09/2012 | CN102445472A Microfluidic chip-based sensor and preparation method thereof |
| 05/09/2012 | CN102445246A Thermal mass flow sensor packaging part and manufacturing method thereof |
| 05/09/2012 | CN102442637A Preparation method of nanowire array perpendicular to substrate |
| 05/09/2012 | CN102442636A Semiconductor structure with lamella defined by singulation trench |
| 05/09/2012 | CN102442635A Method for modifying micro-fluidic chip by using chiral selective magnetically-functionalized graphene |
| 05/09/2012 | CN102442634A Method of providing a semiconductor structure with forming a sacrificial structure |
| 05/09/2012 | CN102442633A Numerically controlled processing instrument for microfluidic chip |
| 05/09/2012 | CN102442632A Micro-nano multi-scale patterned anticoagulation composite biological material and method for preparing same |
| 05/09/2012 | CN102442630A Translation rotating mechanism based on bidirectional or multidirectional electrostatic drivers |
| 05/09/2012 | CN102001615B Method for preparing high polymer nanofluidic chip |
| 05/09/2012 | CN101941673B Micro electro mechanical system wafer-level vacuum packaging method |
| 05/09/2012 | CN101566643B Structure of film thermoelectric converter based on bi-material microcantilevel and fabricating method thereof |
| 05/09/2012 | CN101308803B Semiconductor device manufacture method |
| 05/09/2012 | CN101226856B Micro-switching device and method of manufacturing the same |
| 05/08/2012 | US8174082 Micromechanical component having multiple caverns, and manufacturing method |
| 05/03/2012 | WO2012057858A1 Wafer-scale package including power source |
| 05/03/2012 | US20120105936 Micromirror unit and method of making the same |
| 05/03/2012 | DE19632060B4 Verfahren zur Herstellung eines Drehratensensors A process for producing a rotational speed sensor |
| 05/03/2012 | DE102011085353A1 Herstellungsverfahren für halbleitervorrichtung Manufacturing method for semiconductor device |
| 05/03/2012 | DE102010043277A1 Mikroelektromechanischer Sensor zur Messung einer Kraft sowie entsprechendes Verfahren The microelectromechanical sensor for measuring a force and corresponding method |
| 05/03/2012 | DE102008011530B4 Verfahren zum Bearbeiten eines Objekts mit miniaturisierten Strukturen A method for processing an object with miniaturized structures |
| 05/02/2012 | EP2446067A1 Methods of wet etching a self-assembled monolayer patterned substrate and metal patterned articles |
| 05/02/2012 | EP1940731B1 Method for etching a sacrificial layer for a micro-machined structure |
| 05/02/2012 | CN102438760A Atomising body, atomising device, inhaler, manufacturing method of manufacturing an atomising body and assembly method for assembling an atomising device |
| 05/02/2012 | CN102435837A Online detector for micro electro mechanical system (MEMS) coupling degree-reconfigurable microwave power and preparation method thereof |
| 05/02/2012 | CN102435647A Method for detecting heavy metal by utilizing molecular device based on graphene electrode |
| 05/02/2012 | CN102435634A OTFT (Organic Field-Effect Transistor) integrated sensor array and production method thereof |
| 05/02/2012 | CN102431966A Tubular multi-pore micron motor and preparation method and application thereof |
| 05/02/2012 | CN102431965A Method for manufacturing convex post structure |
| 05/02/2012 | CN102431964A Method for controllable generation of quantum dots or quantum wires |
| 05/02/2012 | CN102431963A Gallium arsenide image sensor wafer-level chip size packaging process at low temperature |
| 05/02/2012 | CN102431962A Preparation method and application of nanoimprint template |
| 05/02/2012 | CN102431961A Method for manufacturing three-dimensional silicon mold directly bonded by low-temperature plasma activation |
| 05/02/2012 | CN102431960A Silicon through hole etching method |
| 05/02/2012 | CN102431959A Method and structure for packaging semiconductor microelectromechanical system (MEMS) chip |
| 05/02/2012 | CN102431958A Waterproof wafer-level package method aiming at glass-silicon-glass sandwich structure |
| 05/02/2012 | CN102431957A Method for manufacturing non-refrigerant thermal infrared detector based on black silicon material |
| 05/02/2012 | CN102431956A Monolithic integration processing method for unequal-height silicon structure and integrated circuit |
| 05/02/2012 | CN102431955A Preparation method of PDMS (polydimethylsiloxane) mask microstructure used for sandblast micro-processing |
| 05/02/2012 | CN102431954A Electrochemical micromachining method for ZnO substrate with high-frequency alternating-current (AC) electric heating technology |
| 05/02/2012 | CN102431953A Production technology of pressure sensor having buried layer of silica |
| 05/02/2012 | CN102431952A Plane surface conductive ring array and preparation method thereof |
| 05/02/2012 | CN102431951A Double-carrier and double-MEMS (micro-electro-mechanical systems) device package and production method thereof |
| 05/02/2012 | CN102431950A Double-layer MEMS (micro-electro-mechanical systems) device stacked package and production method thereof |
| 05/02/2012 | CN102430512A Integrated system on ultrasonic transducer sheet with MEMS (Micro-Electromechanical Systems) glass sphere and preparation method thereof |
| 05/02/2012 | CN101966473B Micro fluid control screening chip based on ultrasonic standing wave and preparation method thereof |
| 05/02/2012 | CN101610972B Protection box for a microelectromechanical system including a wiring relay |
| 04/26/2012 | WO2012037539A9 Micromachined 3-axis accelerometer with a single proof-mass |
| 04/26/2012 | WO2012013361A3 A polymeric substrate having a glass-like surface and a chip made of said polymeric substrate |
| 04/26/2012 | WO2011117181A3 Method for producing a microelectromechanical device and microelectromechanical device |
| 04/26/2012 | US20120099753 Backplate for Microphone |
| 04/26/2012 | DE102011112879A1 Halbleiterherstellung und Halbleiterbauelement mit Halbleiterstruktur Semiconductor fabrication, and semiconductor device having semiconductor structure |
| 04/26/2012 | DE102010042824A1 Microfluidic module useful for analysis of fluids, comprises an integral carrier substrate with a first main surface and a second main surface lying opposite to the first main surface, a sensor arrangement, and a channel structure |
| 04/26/2012 | DE102008061879B4 Verfahren und Maschinen zur Herstellung eines Mikrostrukturen beinhaltenden Materialbandes A method and machine for producing a microstructure-containing material strip |
| 04/26/2012 | DE102006020131B4 Nano- und mikrostrukturierter Biosensor und Verfahren zu seiner Herstellung Nano- and microstructured biosensor and method for its manufacture |
| 04/25/2012 | EP2444368A2 A method of manufacturing an electronic device and electronic device |
| 04/25/2012 | EP2443517A1 Spectral purity filter, lithographic apparatus, and method for manufacturing a spectral purity filter |
| 04/25/2012 | EP2443058A1 Method for producing a planar membrane |
| 04/25/2012 | EP1105344B1 Micromechanical sensor and corresponding production method |
| 04/25/2012 | CN102428022A 使用分段预图案的定向自组装嵌段共聚物 Pre-directional pattern using segmented block copolymer self-assembly |
| 04/25/2012 | CN102427083A 一种疏水疏油表面微结构及其制备方法 A hydrophobic oleophobic surface microstructure and its preparation method |
| 04/25/2012 | CN102426176A 一种气体传感器及其制造工艺 A gas sensor and a manufacturing process |
| 04/25/2012 | CN102426060A 一种太赫兹或红外微测辐射热计及其制作方法 A terahertz or infrared micro-bolometer and its production method |
| 04/25/2012 | CN102424356A 一种金属纳米颗粒微阵列芯片的制备装置及方法 An apparatus and method for preparing metal nano-particles in the micro-array chips |
| 04/25/2012 | CN102424355A 一种增强BCB和Au之间粘附性的方法 A method for the adhesion between the Au and a reinforcing BCB |
| 04/25/2012 | CN101693515B 用于mems领域的可图形化聚合物薄膜的制备方法 Preparation process for mems patterned areas of the polymer film can |
| 04/24/2012 | US8163373 Method of room temperature covalent bonding |
| 04/24/2012 | US8163345 Methods utilizing scanning probe microscope tips and products therefor or produced thereby |
| 04/24/2012 | CA2690165C Method for the production of a microfluidic system on a polymer surface |
| 04/19/2012 | WO2012051340A1 Microphone package with embedded asic |
| 04/19/2012 | WO2012048870A2 Process for producing highly ordered nanopillar or nanohole structures on large areas |
| 04/19/2012 | WO2012048424A1 Soi-based cmut device with buried electrodes |
| 04/19/2012 | WO2011163618A3 Array structures of containers |
| 04/19/2012 | WO2011151098A4 Component with a via and method for producing it |
| 04/19/2012 | US20120091374 Microfabricated elastomeric valve and pump systems |
| 04/19/2012 | DE102007022959B4 Verfahren zur Herstellung von Halbleitervorrichtungen A process for the manufacture of semiconductor devices |
| 04/19/2012 | DE102004052634B4 Verfahren zur Herstellung von Wärme-Flussmesselementen A process for producing heat-flow-measuring elements |
| 04/19/2012 | CA2814123A1 Soi-based cmut device with buried electrodes |
| 04/18/2012 | EP2038206B1 Mems-based nanopositioners and nanomanipulators |
| 04/18/2012 | CN202193612U 一种单芯片和晶圆的键合设备 A single-chip and wafer bonding equipment |
| 04/18/2012 | CN102419283A 微型拉伸测量组件及其制作方法 Miniature tension measurement assembly and manufacturing method thereof |
| 04/18/2012 | CN102418082A 薄膜涂层微纳米织构制备方法及其装置 Nano-textured thin film coating method and apparatus for preparing |