| Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526) |
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| 06/13/2012 | CN102491253A Processing method of different-height silicon structures |
| 06/13/2012 | CN102491252A Selective arrangement method of discrete nano-material |
| 06/13/2012 | CN101924542B Capacitive mems switch and method of fabricating the same |
| 06/13/2012 | CN101837944B Method for forming a gyroscope and accelerometer |
| 06/13/2012 | CN101510467B Preparation method of super capacitor plate material |
| 06/13/2012 | CN101509888B Method for making silicone base integrable miniature glucose sensor |
| 06/13/2012 | CN101164863B Mems device and fabrication method thereof |
| 06/07/2012 | WO2012074894A1 Direct sealing of glass microstructures |
| 06/07/2012 | WO2012074814A2 Microstructured articles comprising nanostructures and method |
| 06/07/2012 | WO2012073009A2 Nanopore devices |
| 06/07/2012 | WO2012072917A1 Microsystem having a microelectrical and microfluidic function, and method for manufacturing same |
| 06/07/2012 | WO2012071820A1 Infrared detector and method of manufacture thereof and multi-band uncooled infrared focal plane |
| 06/07/2012 | WO2012040245A3 Through silicon via with reduced shunt capacitance |
| 06/07/2012 | WO2012037501A3 Flexure bearing to reduce quadrature for resonating micromachined devices |
| 06/07/2012 | WO2012037492A3 Multi-die mems package |
| 06/07/2012 | WO2012031818A3 Lithography using self-assembled polymers |
| 06/07/2012 | US20120141329 Microfluidic apparatus with integrated porous-substrate/sensor for real-time (bio) chemical molecule detection |
| 06/06/2012 | EP2461159A1 Method of fabricating sensors having functionalized resonating beams |
| 06/06/2012 | EP2460763A2 Wafer level packaging process for MEMS devices |
| 06/06/2012 | EP2460203A1 Organic component and method for the production thereof |
| 06/06/2012 | DE102008032319B4 Verfahren zur Herstellung eines MST Bauteils A method for producing a component MST |
| 06/06/2012 | CN102485639A Low-temperature bonding method based on gold-induced amorphous silicon crystals |
| 06/06/2012 | CN101963564B Chiral sensor and preparation method thereof |
| 06/06/2012 | CN101898745B Method of fabricating Mems device |
| 06/06/2012 | CN101774530B Microbolometer and preparation method thereof |
| 06/06/2012 | CN101578230B Process for forming and controlling rough interfaces |
| 06/05/2012 | US8193623 Support with integrated deposit of gas absorbing material for manufacturing microelectronic, microoptoelectronic or micromechanical devices |
| 06/05/2012 | US8193550 Method for manufacturing a micro-electro-mechanical device, in particular an optical microswitch, and micro-electro-mechanical device thus obtained |
| 06/05/2012 | US8193069 Stacked structure and production method thereof |
| 05/31/2012 | WO2012071330A1 Controlling morphology of block copolymers |
| 05/31/2012 | WO2012071003A1 Method for the wafer-level integration of shape memory alloy wires |
| 05/31/2012 | WO2012068798A1 Micro-mechanical thermopile infrared sensor by cmos technology |
| 05/31/2012 | US20120133078 Step and Flash Imprint Lithography |
| 05/31/2012 | DE102011083962A1 Method for fabricating semiconductor substrate for micro-electromechanical system (MEMS) sensor device, involves singulating structure at the chip singulation trench |
| 05/31/2012 | DE102010062127A1 Method for manufacturing micromechanical component that is utilized as e.g. inertial sensor in automobile industry, involves performing chemical vapor etching process for removal of conductive sacrificial layer |
| 05/31/2012 | DE102010062118A1 Abdeckvorrichtung für ein mikro-opto-mechanisches Bauteil und Herstellungsverfahren für eine derartige Abdeckvorrichtung Covering device for a micro-opto-mechanical device and manufacturing method for such a covering device |
| 05/31/2012 | DE102010062062A1 Verfahren zum Herstellen von MEMS-Strukturen und MEMS-Struktur A process for the manufacture of MEMS structures and MEMS structure |
| 05/31/2012 | DE102010062009A1 Verfahren zum Herstellen von Schrägflächen in einem Substrat und Wafer mit Schrägfläche A process for the manufacture of inclined surfaces in a substrate and wafer with inclined surface |
| 05/31/2012 | CA2818301A1 Method for the wafer-level integration of shape memory alloy wires |
| 05/30/2012 | EP2457658A1 Direct sealing of glass microstructures |
| 05/30/2012 | EP2456714A1 Method for manufacturing a micromechanical part made of reinforced silicon |
| 05/30/2012 | EP1843972B1 Patterning by energetically-stimulated local removal of solid-condensed-gas layers and solid state chemical reactions produced with such layers |
| 05/30/2012 | CN102484066A 干式蚀刻法 Dry etching method |
| 05/30/2012 | CN102483585A 光谱纯度滤光片、光刻设备、和制造光谱纯度滤光片的方法 The spectral purity filters, lithographic apparatus and a method for manufacturing a spectral purity filter |
| 05/30/2012 | CN102482075A 在烧结过程中具有受控的压缩的层状烧结微流体装置以及相关方法 Sintered layered microfluidic device having a controlled compression during sintering and related methods |
| 05/30/2012 | CN102482074A 加盖的微机械构件的制造方法、相应的微机械构件以及用于微机械构件的盖板 The method of manufacturing a micro machine member stamped, the corresponding cover member, and micro-mechanical components for the micromechanical |
| 05/30/2012 | CN102482073A Fabrication of a floating rocker mems device for light modulation |
| 05/30/2012 | CN102482072A 具有应力隔离的mems器件及其制造方法 Mems device and its manufacturing method having a stress isolation |
| 05/30/2012 | CN102481544A 制造挤出主体反应器的方法 Manufacturing method of extruding the main body of the reactor |
| 05/30/2012 | CN102478581A 基于聚3-己基噻吩和c60衍生物的光敏混合聚合物光电导薄膜操控芯片及制备方法 Based on poly 3-hexyl thiophene and mixed polymers of the photoconductive film of the photosensitive control chip and a method for preparing derivatives c60 |
| 05/30/2012 | CN102476789A Metamaterial manufacturing method |
| 05/30/2012 | CN102476788A 弯曲平板波过敏感测器及其制造方法 Allergic flexural plate wave sensor and its manufacturing method |
| 05/30/2012 | CN102476787A ZnO纳米线阵列的制备方法 Preparation of ZnO nanowire arrays |
| 05/30/2012 | CN102476786A 加速度和压力传感器单硅片集成芯片及制作方法 Acceleration and pressure sensors integrated single silicon chip and production methods |
| 05/30/2012 | CN102082105B Thermal wind sensor based on anodic bonding technology and preparation method thereof |
| 05/30/2012 | CN102079499B Cantilever trace detection sensor and preparation method thereof |
| 05/30/2012 | CN101927977B Fabrication method of cmos microelectromechanical system (mems) device |
| 05/30/2012 | CN101852770B Quick-response surface acoustic wave gas sensor and method for preparing same |
| 05/30/2012 | CN101817496B Micro-electro-mechanical systems interconnection pins and method for forming the same |
| 05/30/2012 | CN101792112B Micro fluid control detection device based on surface-enhanced Raman scattering active substrate |
| 05/30/2012 | CN101694989B Monolithic filter component based on acoustic interface waves and integrated with MEMS switches and manufacture method thereof |
| 05/30/2012 | CN101648695B MEMS bulk silicon technological method for transferring mask layer three-dimensional structure |
| 05/30/2012 | CN101646115B Silicon micro piezoelectric microphone based on inn-plane polarization of ferroelectric PZT film and manufacture method thereof |
| 05/30/2012 | CN101578232B Methods using block copolymer self-assembly for sub-lithographic patterning |
| 05/24/2012 | WO2012067856A1 Linearly deployed actuators |
| 05/24/2012 | WO2012066178A2 Methods and systems for fabrication of mems cmos devices in lower node designs |
| 05/24/2012 | WO2012015700A3 Method and device for restoring and maintaining superhydrophobicity under liquid |
| 05/24/2012 | WO2011162950A3 Planar cavity mems and related structures, methods of manufacture and design structures |
| 05/24/2012 | DE102010061910A1 Mikrofluidvorrichtung und Verfahren zum Herstellen derselben Microfluidic device and methods for manufacturing the same |
| 05/24/2012 | DE102010061909A1 Fluidischer Aktor mit verformbarer Verschlussanordnung und langer Lagerfähigkeit Fluidic actuator deformable closure assembly and long shelf life |
| 05/24/2012 | DE102010061795A1 Verfahren zum Erzeugen einer mikromechanischen Membranstruktur und MEMS-Bauelement A method of producing a micromechanical membrane structure and MEMS device |
| 05/24/2012 | DE102010061782A1 Verfahren zum Herstellen eines mikromechanischen Bauelements A method for producing a micromechanical component |
| 05/24/2012 | DE102010052033A1 Verfahren zur Herstellung von metallischen Strukturen A process for the production of metallic structures |
| 05/24/2012 | DE102010052032A1 Verfahren zur Herstellung von metallischen Strukturen A process for the production of metallic structures |
| 05/23/2012 | EP2455332A1 Method for producing temporary cap on a MEMS device |
| 05/23/2012 | EP2453971A1 Multichannel micro-needles |
| 05/23/2012 | EP1546028B8 Method for selectively covering a micro machined surface |
| 05/23/2012 | CN102473601A High-hardness material for imprint |
| 05/23/2012 | CN102471048A Integrated circuit switches, design structure and methods of fabricating the same |
| 05/23/2012 | CN102471047A Method for manufacturing a micromechanical part made of reinforced silicon |
| 05/23/2012 | CN102464296A 一种mems结构切割分离方法 One kind of mems structure singulation method |
| 05/23/2012 | CN102464295A 以银纳米片为基元的空心球微/纳结构阵列及其制备方法 Silver nano-piece hollow sphere primitive micro / nano-structure array and its preparation method |
| 05/23/2012 | CN102464294A 具有微机电元件的封装结构及其制造方法 With a package structure and method for manufacturing micro electromechanical components |
| 05/23/2012 | CN102464292A Actuator, protective cover, manufacturing method, optical deflector, scanner and image projector |
| 05/23/2012 | CN101993033B Micro electro mechanical system structure and manufacturing method |
| 05/23/2012 | CN101915871B MEMS (Micro Electronic Mechanical System) clamped beam type online microwave power sensor and production method thereof |
| 05/23/2012 | CN101915870B MEMS (Micro Electronic Mechanical System) cantilever beam type online microwave power sensor and production method thereof |
| 05/23/2012 | CN101870446B Multichannel carbon nanotube sensor and preparation method thereof |
| 05/23/2012 | CN101863449B Encapsulation method of MEMS infrared sensor with infrared focusing function |
| 05/23/2012 | CN101771168B Method for preparing miniature lithium battery |
| 05/23/2012 | CN101734610B Multilayer film for low load working condition of micro electro mechanical system and preparation method thereof |
| 05/23/2012 | CN101450787B Method for producing heat insulation antiblocking cavity based on silicon substrate |
| 05/22/2012 | US8183651 MEMS sensor, method of manufacturing MEMS sensor, and electronic apparatus |
| 05/18/2012 | WO2012063818A1 Sensor element, and method for producing sensor element |
| 05/18/2012 | WO2012062613A1 Method for the production of a substrate comprising embedded layers of getter material |
| 05/17/2012 | US20120119312 Method for manufacturing a microelectromechanical component; and a microelectromechanical component |
| 05/16/2012 | EP2451740A1 Sealed cavity and method for making such a sealed cavity |
| 05/16/2012 | CN102459713A Method for manufacturing a metal microstructure and microstructure obtained according to said method |
| 05/16/2012 | CN102459061A 具有两个衬底之间的共晶连接的微机械元件以及用于制造这种微机械元件的方法 Micromechanical element having a eutectic connections between the two substrates and a method for manufacturing such a micro-mechanical element |
| 05/16/2012 | CN102456926A Constructing method of novel three-dimensional lithium ion battery |