Patents
Sitemap › B81 - Micro-structural technology › B81C - Processes or apparatus specially adapted for the manufacture or treatment of micro-structural devices or systems › B81C 1 - Manufacture or treatment of devices or systems in or on a substrate
Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526)
07/2012
07/04/2012CN102135729B Preparation method of carbon micro-nano integrated structure
07/04/2012CN102079498B Flexible electrothermal drive micro-gripper and manufacturing process method
07/04/2012CN102009945B Method for machining micro-mechanical quartz tuning fork gyro sensitive structure
07/04/2012CN101987720B Method of fabricating integrated semiconductor device and structure thereof
07/04/2012CN101914296B Metal fiber reinforced polymeric matrix composite material and preparation method thereof
07/04/2012CN101891142B Method for preparing active, flow impact resistant and non-lotus-like super-hydrophobic surface
07/04/2012CN101746712B Phase-change material for compositing VO2 sheet and porous nanometer structure on silicon wafer and preparation method thereof
07/04/2012CN101746704B MEMS (micro electro mechanical system) element with function of dust prevention and manufacturing method thereof
07/04/2012CN101738722B Method for manufacturing micro-opto-electro-mechanical system-based wave-adjustable harmonic filter
07/04/2012CN101691203B Method and device for alignment and assembly of glass micro nanofluidic chip
07/04/2012CN101261965B Encapsulation structure with micro hole and its making method
07/04/2012CN101163638B Device and use thereof
07/03/2012CA2540273C Z-axis angular rate sensor
06/2012
06/28/2012WO2012088274A1 Graphene windows, methods for making same, and devices containing same
06/28/2012WO2012087942A2 Method of fabrication and resultant encapsulated electromechanical device
06/28/2012WO2012085737A1 A method for manufacturing a microfluidic device.
06/28/2012WO2012085728A1 Microfluidic device with fluid flow control means
06/28/2012WO2012059251A3 Feedback control of dimensions in nanopore and nanofluidic devices
06/28/2012WO2012048870A3 Process for producing highly ordered nanopillar or nanohole structures on large areas
06/28/2012DE102010064120A1 Bauteil und Verfahren zu dessen Herstellung Component and process for its preparation
06/28/2012DE102010064108A1 Verfahren zur Verpackung eines Sensorchips und dermaßen hergestelltes Bauteil A method for packaging a sensor chip and so produced component
06/28/2012DE102010061481A1 Grill for use in X-ray-based system of medical device and in medical radiography system, has primary structure, which is inserted in carrier by directed etching tread and material
06/28/2012DE102008046860B4 Akustischer Transducer mit einer Mehrschichtelektrode und Verfahren zu seiner Herstellung Acoustic transducer having a multilayer electrode and method for its preparation
06/27/2012EP2468679A2 Method for fabricating a cavity for a semiconductor structure and a semiconductor microphone fabricated by the same
06/27/2012EP2468403A1 A method for manufacturing a microfluidic device
06/27/2012EP1719012B9 Mems scanning system with improved performance
06/27/2012CN102520376A Cross current type three-axis vector magnetic sensor
06/27/2012CN102520147A Capacitive micromachined ultrasonic transducer (CMUT) for detecting trace biochemical substances and preparation method for CMUT
06/27/2012CN102520012A MEMS (Micro Electro Mechanical System) technology-based thermal diffusivity sensor chip and manufacturing method thereof
06/27/2012CN102519657A Two-dimensional vector flexible thermo-sensitive micro-shearing stress sensor, and array and preparation method thereof
06/27/2012CN102519504A Acoustic surface wave type humidity sensor based on conductive polymer composite nano-fibre and preparation method thereof
06/27/2012CN102517558A Porous metal/dielectric micro tube, and preparation method and application thereof
06/27/2012CN102515091A Plastic functional micro-structured surface soft-lithography duplicating method used in plastic functional micro-structured surface batch production
06/27/2012CN102515090A Pressure sensor and formation method thereof
06/27/2012CN102515089A MEMS integration method
06/27/2012CN102515088A Method for preparing silicon-iron silicide composite nano wire
06/27/2012CN102515087A Manufacturing method of flow sensor
06/27/2012CN102515086A Method for preparing cobalt (Co) nano-structured array material with form correlation magnetism
06/27/2012CN102515085A Method for restraining secondary emission of surface nano-structure of microwave component
06/27/2012CN102515084A Microfluidic atom cavity, on-chip atomic clock chip and preparation method
06/27/2012CN102515083A Miniature atom cavity with light incidence plane, miniature atomic clock chip and preparation methods
06/27/2012CN102515082A Single-carrier MEMS (micro-electro-mechanical system) device package and production method thereof
06/27/2012CN102512151A Method for manufacturing three-dimensional nervus microelectrode
06/27/2012CN102130026B Wafer-level low-temperature packaging method based on gold-tin alloy bonding
06/27/2012CN102109402B Surface friction shearing stress sensor
06/27/2012CN101885467B Manufacturing method of micro fluxgate sensor with amorphous magnetic core
06/27/2012CN101776483B Non-refrigerant thermopile infrared detector and manufacturing method thereof
06/27/2012CN101500935B Method of etching a sacrificial silicon oxide layer
06/27/2012CN101353153B MEMS sensor and manufacturing method thereof
06/21/2012WO2012081933A2 Method for manufacturing microstructure body
06/21/2012WO2011138148A3 Counterbearing with aspherical membrane bed, pressure sensor comprising such a counterbearing and method for the production thereof
06/21/2012DE102010061340A1 Multi-component injection molding system e.g. acceleration or rotational rate sensor, for ball-point pen, has plastic component comprising stiff part and elastic member and coupled with elastic member of another plastic component
06/20/2012EP2466377A1 Method for the creation of complex structures on a micrometric or nanometric scale, and the complex structure thus obtained
06/20/2012EP2465817A1 Method for encapsulating a MEMS structure and encapsulated MEMS structure
06/20/2012EP2465816A1 Varifocal lens structure and method of manufacturing the same
06/20/2012EP2464596A1 Airtight assembly of two components and method for producing such an assembly
06/20/2012CN102509718A Wafer-level chip size encapsulation technology for GaAs (gallium arsenide) CCD (Charge Coupled Device) image sensor
06/20/2012CN102508410A Composite nanometer impressing mold plate with sandwich structure and preparation method of composite nanometer impressing mold plate
06/20/2012CN102508409A Ultraviolet-light-assisted thermocuring nanoimprint lithography technology and material
06/20/2012CN102508408A Dual-solidification nanoimprint lithography transporting layer material
06/20/2012CN102508203A Novel MEMS (microelectromechanical systems) bionic acoustic vector sensor and manufacturing method thereof
06/20/2012CN102507531A Raman scattering enhanced substrate of oxidation zinc base semiconductor and preparation method and application thereof
06/20/2012CN102507530A Method using gamma radiation for preparing nano-silver surface-enhanced Raman spectrum substrate
06/20/2012CN102503171A Preparation method of branched zinc oxide nanowire array film
06/20/2012CN102503155A Glass surface nanofabrication method based on friction-induced selective etching
06/20/2012CN102502585A Method for directly growing carbon nano onion on iron-based amorphous powder
06/20/2012CN102502537A Method for preparing porous aluminum nitride or gallium nitride slice or thin strip by dealloying
06/20/2012CN102502480A Method for packaging wafer level solid-state image sensor
06/20/2012CN102502479A Composite integrated sensor structure and manufacture method thereof
06/20/2012CN102502478A Manufacturing method for polydimethylsiloxane microfilm biosensor based on surface stress
06/20/2012CN102502477A Method for bonding diatom on surface of polydimethylsiloxane (PDMS) in patterning mode
06/20/2012CN102501444A Titanium dioxide nanotube array-carbon nanotube-hydroxyapatite biological composite coating and preparation thereof
06/20/2012CN102500923A Preparation device for preparing functional micro-nano materials on silicon surfaces based on femtosecond laser and method
06/20/2012CN101668696B A microfluidic device and a fluid ejection device incorporating the same
06/20/2012CN101640144B Metal structure electrostatic-driven MEMS relay and preparation method thereof
06/20/2012CN101620952B Ohm contact type radio frequency switch and integration process thereof
06/20/2012CN101456532B Micro scroll vane and method for producing micro scroll vane substrates
06/20/2012CN101063747B Process control monitors for interferometric modulators
06/14/2012WO2012078139A1 Process for manufacturing electro-mechanical systems
06/14/2012WO2012077325A1 Silicon structure, array substrate using same, and method for producing silicon structure
06/14/2012WO2012076818A1 Circuit comprising a component covered with a lid, method for producing such a circuit, and device for implementing said method
06/14/2012WO2011067679A3 Electromechanical systems, waveguides and methods of production
06/14/2012DE102010062559A1 Mikroelektromechanisches Sensormodul sowie entsprechendes Herstellungsverfahren Micro-electromechanical sensor module and method of manufacture
06/14/2012DE102010062555A1 Micromechanical membrane device e.g. speaker device has silicon carbide membrane which is arranged opposite to upper and lower electrodes and is electrically isolated in movable membrane range by air gaps of upper and lower electrodes
06/13/2012EP2462050A1 Process for manufacturing mems devices having buried cavities and mems device obtained thereby
06/13/2012EP1797479B1 Device obtained by nanoprinting comprising metallic patterns and method for nanoprinting of metallic patterns
06/13/2012CN202272730U 动态纳米刮印结合等离子体聚合制作纳米通道的系统 Nano squeegee dynamic combination produced plasma polymerization system nanochannel
06/13/2012CN202272729U System for preparing micro nano structure silicon
06/13/2012CN102496470A Asymmetric miniature ultracapacitor based on MEMS technology and manufacturing method thereof
06/13/2012CN102495545A Wafer-level on-chip integrated miniature atomic clock chip and preparation method for same
06/13/2012CN102495526A Optical exposing method, and method for applying optical exposure in preparation of silicon material vertical hollow structure
06/13/2012CN102495234A Capacitive type micro-acceleration sensor with double-sided symmetrical elastic beam structure and manufacturing method
06/13/2012CN102495119A Multi-parameter water quality monitoring integrated microarray electrodes and preparation method
06/13/2012CN102491260A Method for manufacturing flow sensor by etch self-stopping technology
06/13/2012CN102491259A MEMS miniature atom-cavity, miniature atomic clock chip and preparation method
06/13/2012CN102491258A Preparation method of wafer-grade spherical micro-lens array
06/13/2012CN102491257A Method for producing thermoplastic polymer nano channel
06/13/2012CN102491256A Composite sensor with multiple pressure sensitive elements and its manufacturing method
06/13/2012CN102491255A Method for manufacturing infrared dynamic scene generation chip
06/13/2012CN102491254A Method for wrinkling polydimethylsiloxane (PDMS) elastomer in selective area
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