Patents
Sitemap › B81 - Micro-structural technology › B81C - Processes or apparatus specially adapted for the manufacture or treatment of micro-structural devices or systems › B81C 1 - Manufacture or treatment of devices or systems in or on a substrate
Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526)
07/2012
07/11/2012CN102570902A Piezoelectric-static compound micro machine vibration energy collector and manufacture method thereof
07/11/2012CN102569563A Wafer level packaging method of light emitting diode with adjustable lens focus
07/11/2012CN102568976A Manufacturing method of secondary reflector
07/11/2012CN102568817A MEMS (Micro Electro Mechanical System) capacitor based on three-dimensional silicon micro structure and manufacturing method thereof
07/11/2012CN102566395A Assembly of a part that has no plastic domain
07/11/2012CN102565460A Continuous direct-writing nano particle solution scanning probe and manufacturing method thereof
07/11/2012CN102565148A Miniature differential capacitance glucose continuous monitoring damping sensor and manufacturing method thereof
07/11/2012CN102565142A Low-temperature drift piezoresistive humidity sensor and manufacturing method thereof
07/11/2012CN102564650A Micro electro mechanical system (MEMS) sensor for measuring stress of phase-change memory and preparation process for MEMS sensor
07/11/2012CN102564602A Thermal detector and manufacturing method thereof, thermal detection device, electronic instrument
07/11/2012CN102564601A Thermal detector, thermal detection device, electronic instrument, and thermal detector manufacturing method
07/11/2012CN102556957A Method for manufacturing ion aggregation device of micro electro mechanical system (MEMS) air amplifier
07/11/2012CN102556956A Vacuum packaging structure of MEMS (Micro Electro Mechanical System) device and manufacture method thereof
07/11/2012CN102556955A Two-dimensional direct printing type maskless plasma etching array device
07/11/2012CN102556954A Method for preparing nano-electromechanical probe for storing ultrahigh-density information
07/11/2012CN102556953A Method for preparing two-sided silicon nano-wire array
07/11/2012CN102556952A Metal cup-cylinder composite nano structure array and preparation method thereof
07/11/2012CN102556951A Silicon substrate impending metal nanometer pinhole and processing method thereof
07/11/2012CN102556950A Tunable artificial electromagnetic material based on three-layer structure and preparation method thereof
07/11/2012CN102556949A Preparation method of silicon micro/nanometer line array with controllable dimension
07/11/2012CN102556948A Batch fabricated 3d interconnect
07/11/2012CN102556947A Production method of ion beam and ion beam modulating switch
07/11/2012CN102556946A Method for encapsulating a MEMS structure and encapsulated MEMS structure
07/11/2012CN102556945A Method to prevent metal pad damage in wafer level package
07/11/2012CN102556944A Production method for MEMS (micro-electromechanical system) device
07/11/2012CN102556943A Method for forming micro-electro-mechanical sensor
07/11/2012CN102556942A Manufacturing method of convective acceleration sensor chip based on temperature sensitive resistor
07/11/2012CN102556941A Cobaltosic oxide nanowire array, preparation method thereof as well as application of nanowire array as cathode of lithium ion battery
07/11/2012CN102556938A Stacked die package structure and manufacturing method thereof
07/11/2012CN102556937A Strained germanium device with cantilever structure and preparation method thereof
07/11/2012CN102556936A Method for fabricating a cavity structure, for fabricating a cavity structure for a semiconductor structure and a semiconductor microphone fabricated by the same
07/11/2012CN102556933A Mems kinetic energy conversion
07/11/2012CN102556932A Microelectrode array with adjustable electrode point distance
07/11/2012CN102556931A Microelectrode array with electrode point distance capable of exceeding micromaching precision and preparation method of microelectrode array
07/11/2012CN102120561B Method for forming wafer through hole
07/11/2012CN102033425B Method for manufacturing micromechanical shutter
07/11/2012CN101973507B Friction induction-based single crystal quartz surface selective etching method
07/05/2012WO2012088823A1 Forming method for microelectromechanical system sensor
07/05/2012WO2012088814A1 Inertial micro-electromechanical sensor and manufacturing method thereof
07/05/2012WO2012037538A3 Micromachined monolithic 6-axis inertial sensor
07/05/2012DE112006001844B4 Verfahren zum Herstellen einer Elektronikkomponente und Elektronikkomponente A method of manufacturing an electronic component and electronic component
07/05/2012DE102011011160A1 Mikromechanisches Bauteil und Herstellungsverfahren für ein mikromechanisches Bauteil Micromechanical element and manufacturing method for a micromechanical component
07/05/2012DE102011002457A1 Mikromechanische Mikrofoneinrichtung und Verfahren zum Herstellen einer mikromechanischen Mikrofoneinrichtung Micromechanical microphone device and method for fabricating a micromechanical microphone means
07/05/2012DE102011002456A1 Micromechanical microphone component manufacturing method, involves realizing layer structure on semiconductor substrate, and opening sound pressure-sensitive membrane by extracting sacrificial layer material over corroding entrances
07/05/2012DE102010056572A1 Elektronisches Bauelement und Verfahren zur Herstellung des elektronischen Bauelements An electronic device and method for manufacturing the electronic component
07/05/2012DE102010056562A1 Elektronisches Bauelement und Verfahren zur Herstellung des elektronischen Bauelements An electronic device and method for manufacturing the electronic component
07/04/2012EP2472542A1 Method for manufacturing a micro-contactor that can be actuated by a magnetic field
07/04/2012EP2472340A1 Timepiece component and method for manufacturing same
07/04/2012EP2470467A2 Mems device with stress isolation and method of fabrication
07/04/2012EP2038920B1 Method for packaging components
07/04/2012EP1984462B1 Electrografting method for forming and regulating a strong adherent nanostructured polymer coating
07/04/2012CN202305094U Soi结构高温压力传感器 Soi High Temperature Pressure Sensor
07/04/2012CN102549796A Organic component and method for the production thereof
07/04/2012CN102544349A MEMS (Micro-electromechanical Systems) wideband frequency vibration energy collector based on PMNT (Lead Magnesium Niobate-Lead Titanate) piezoelectric mono-crystal, and preparation method
07/04/2012CN102543591A MEMS (micro-electro-mechanical systems) switch and manufacturing method thereof
07/04/2012CN102543239A Three-dimensional heterojunction isotope battery based on carbon nanotube film and preparation method of three-dimensional heterojunction isotope battery
07/04/2012CN102540456A Self-tilting micro electromechanical system micromirror and manufacturing method thereof
07/04/2012CN102539849A Microprobe array and manufacturing method thereof
07/04/2012CN102539830A Multi-axis sensor as well as manufacturing method thereof and differential sensor system
07/04/2012CN102539033A Method for making micro electromechanical system pressure sensor
07/04/2012CN102538949A Nano-electromechanical resonant sensor based on graphene sheet layer and manufacturing method thereof
07/04/2012CN102538850A Capacitor micro-electromechanical ultrasonic sensor and manufacturing method thereof
07/04/2012CN102538834A Coplanar sensor and manufacturing method thereof
07/04/2012CN102538773A Micro-electro-mechanical component and method for manufacturing the same
07/04/2012CN102531673A Cation corrosion method for preparing porous monomolecular film material
07/04/2012CN102530856A Method for forming room-temperature superconducting quantum bit network from redox nano-drug quantum dots
07/04/2012CN102530851A Self-removal anti-stiction coating for bonding process
07/04/2012CN102530850A Method for millimeter-sized micro nanostructure nano carving and processing through adopting antifrictional metal (AFM) needle
07/04/2012CN102530849A Large-breadth microstructural processing system based on moving-iron electromechanical transducer and processing method thereof
07/04/2012CN102530848A Method for manufacturing mosquito-mouth-imitated hollow microneedle array
07/04/2012CN102530847A Heat insulation micro-structure and preparation method thereof
07/04/2012CN102530846A Method for preparing metal nanobelt array with tip
07/04/2012CN102530845A Method for preparing triangular metal nano-pore array
07/04/2012CN102530844A Microcomponent vacuum packaging method
07/04/2012CN102530843A Method for preparing loosened polyimide infrared absorption film
07/04/2012CN102530842A Method for preparing nano texture through local anodic oxidation
07/04/2012CN102530841A Processing method of high depth-width ratio microstructure of optical glass
07/04/2012CN102530840A Method and device for performing hot embossing of parts by self-polishing die
07/04/2012CN102530839A Manufacturing method of capacitive micro-electromechanical ultrasonic sensor with bent focusing
07/04/2012CN102530838A Method for producing oblique surfaces in a substrate and wafer having an oblique surface
07/04/2012CN102530837A Method for producing a micromechanical component
07/04/2012CN102530836A Microstructure processing method
07/04/2012CN102530835A Method for packaging a sensor chip, and a component produced using such a method
07/04/2012CN102530834A Manufacturing method of impedance type microfluidic chip
07/04/2012CN102530833A Closed-type microfluidic channel etching method and automatic etching device
07/04/2012CN102530832A Inertia MEMS (micro-electro-mechanical system) sensor and making method thereof
07/04/2012CN102530831A Manufacture method for MEMS (Micro-electromechanical Systems) device
07/04/2012CN102530830A Integrated micro-valve droplet control chip and method for synthesizing and assembling polymer microspheres
07/04/2012CN102530829A Method for preparing micro-fluidic chip by freeze drying process
07/04/2012CN102530828A Surface-enhanced Raman scattering active substrate based on carbon nanometer pipe arrays and metal nanometer particles
07/04/2012CN102530826A Chip, method for producing a chip and device for laser ablation
07/04/2012CN102530825A Micro-electromechanical system device having electrical insulating structure and manufacturing methods
07/04/2012CN102530824A Package structure having mems element and fabrication method thereof
07/04/2012CN102530823A Systems and methods for a four-layer chip-scale MEMS device
07/04/2012CN102530822A Suspending imaging hafnium oxide substrate nitride syntony photon device and preparation method thereof
07/04/2012CN102530821A Suspending resonant photonic device based on silicon substrate nitride material and preparation method for same
07/04/2012CN102530820A Dangling syntony photon device and preparation method thereof based on silicon substrate nitride
07/04/2012CN102530819A Microelectromechanical system device and semi-manufacture and manufacturing method thereof
07/04/2012CN102528379A Method for disassembling micro-electro-mechanical devices under assistance of laser impact
07/04/2012CN102527450A Micro-fluidic chip capable of measuring fluid properties and working method of micro-fluidic chip
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