| Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526) |
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| 08/07/2012 | US8236694 Method for manufacturing micromechanical components |
| 08/07/2012 | CA2768047C Torque motor |
| 08/02/2012 | WO2012103087A1 Packaged microphone with reduced parasitics |
| 08/02/2012 | WO2012101595A1 Method for obtaining hollow nano-structures |
| 08/02/2012 | WO2012101431A1 Vapour etch of silicon dioxide with improved selectivity |
| 08/02/2012 | WO2012074814A3 Microstructured articles comprising nanostructures and method |
| 08/02/2012 | WO2012066178A3 Methods and systems for fabrication of mems cmos devices in lower node designs |
| 08/02/2012 | WO2012040211A3 Microelectromechanical pressure sensor including reference capacitor |
| 08/02/2012 | US20120193754 Mems device with integral packaging |
| 08/02/2012 | DE102011103195A1 Micro system e.g. micro electromechanical system, for use in e.g. electrical engineering, has anchor structure provided at carrier substrate and/or at electrical component, where membrane is fixed to anchor structure in form-fit manner |
| 08/01/2012 | EP2480493A1 Improved selectivity in a xenon difluoride etch process |
| 08/01/2012 | CN102625721A Multichannel micro-needles |
| 08/01/2012 | CN102621805A Method for preparing micro-nano-channels based on liquid-gas equilibrium polymer nano-channels self-building mechanism |
| 08/01/2012 | CN102620878A Capacitive micromachining ultrasonic sensor and preparation and application methods thereof |
| 08/01/2012 | CN102620864A Capactive micro-machined ultrasonic transducer (CMUT)-based super-low range pressure sensor and preparation method thereof |
| 08/01/2012 | CN102616734A Processing method for double-mask silicon on insulator (SOI) micro electro mechanical system (MEMS) |
| 08/01/2012 | CN102616733A Processing method of double-mask heavy boron-doped silicon on insulator (SOI) micro electro mechanical system (MEMS) |
| 08/01/2012 | CN102616732A Method for manufacturing impending semiconductor film structures and sensor units |
| 08/01/2012 | CN102616731A Manufacture method of micro electro mechanical system (MEMS) device |
| 08/01/2012 | CN102616730A Manufacturing method of hollow nanotube structure |
| 08/01/2012 | CN102616727A Micro electro mechanical system (MEMS) device and manufacture method of MEMS device |
| 08/01/2012 | CN102060260B Micromechanical structure device production method taking tin as sacrifice layer |
| 08/01/2012 | CN102030308B Method for assembling particle ordered array in polarized way based on ferroelectric film electric domain |
| 08/01/2012 | CN101509933B Method for manufacturing micro-acceleration and micro-angular rate integration sensor |
| 07/31/2012 | US8231795 Micromachined horn |
| 07/31/2012 | CA2358215C Methods utilizing scanning probe microscope tips and products therefor or produced thereby |
| 07/25/2012 | EP2477938A1 Magnetic microparticle and method for making such a microparticle |
| 07/25/2012 | CN102612482A Micro-channel structure method and apparatus |
| 07/25/2012 | CN102608755A System and method of illuminating interferometric modulators using backlighting |
| 07/25/2012 | CN102608754A Diffusion barrier layer for MEMS devices |
| 07/25/2012 | CN102608356A Double-shaft micromechanical resonant accelerometer structure and manufacturing method thereof |
| 07/25/2012 | CN102607607A H-shaped micro-nano optical fiber surface plasmon sensor and preparation method thereof |
| 07/25/2012 | CN102607394A MEMS (Micro-Electro-Mechanical Systems) processing technique-based cylindrical capacitive sensor |
| 07/25/2012 | CN102602881A Method for forming multiple silicon trenches on MEMS (Micro Electro Mechanical Systems) sealing-cap silicon chip and etching mask structure thereof |
| 07/25/2012 | CN102602880A Universal self-aligned preparation method for fully limited nanowires among various materials |
| 07/25/2012 | CN102602879A Two-step corrosion manufacturing method for resonant beam and support beam of resonance type accelerometer |
| 07/25/2012 | CN102602878A Silicon substrate nitride based optical micro-electromechanical device and production method thereof |
| 07/25/2012 | CN102602876A Mems device and fabrication method thereof |
| 07/25/2012 | CN102142482B Method for preparing Schottky contact ZnO nano array ultraviolet detection device |
| 07/25/2012 | CN102121859B Micro piezoresistive device for measuring wall shear stress and manufacturing method thereof |
| 07/25/2012 | CN102092674B Method for preparing micro-electrode array |
| 07/25/2012 | CN102081335B Liquid patterned device for photoelectric synergic induced anisotropic infiltration and manufacturing method |
| 07/25/2012 | CN102050417B Device with microstructure and method of forming such a device |
| 07/25/2012 | CN102030305B Micro suspension structure compatible with semiconductor element and manufacturing method thereof |
| 07/25/2012 | CN102020235B Low-moisture content packaging method for thin outline (TO) packaging structure |
| 07/25/2012 | CN102001617B Displacement loading device and method for flexible electronic device |
| 07/25/2012 | CN101962166B Packaging structure and packaging method |
| 07/25/2012 | CN101905858B Method for preventing MEMS (Micro-Electromechanical System) device structural layer material from being electrochemically corroded |
| 07/25/2012 | CN101905857B Method for preventing structural layer materials of MEMS (Micro-Electromechanical System) devices from being electrochemically corroded on large scale |
| 07/25/2012 | CN101878180B Method of forming structured sintered articles |
| 07/25/2012 | CN101693519B Process for preparing silicon dioxide nano-cone array |
| 07/24/2012 | CA2433738C Method for microfabricating structures using silicon-on-insulator material |
| 07/19/2012 | WO2012097234A2 Method for mems device fabrication and device formed |
| 07/19/2012 | WO2012096571A1 A method of manufacturing a probe comprising a cantilever with a conduit |
| 07/19/2012 | WO2012095117A1 Micromechanical pressure sensor and method for producing same |
| 07/19/2012 | WO2011162949A3 Planar cavity mems and related structures, methods of manufacture and design structures |
| 07/19/2012 | US20120183808 Method of room temperature covalent bonding |
| 07/19/2012 | DE102009020163B4 Verfahren zum zwischenschichtfreien Verbinden von Substraten, Vorrichtung zur Durchführung einer Plasmabehandlung sowie deren Verwendung A method for interlayer-free bonding substrates, apparatus for performing a plasma treatment and the use thereof |
| 07/18/2012 | EP2476644A2 Method of making a MEMS device |
| 07/18/2012 | EP2475611A2 Method for preparing a functional structured surface and surface obtained by said method |
| 07/18/2012 | CN102598220A Treatment solution for preventing pattern collapse in metal fine structure body, and process for production of metal fine structure body using same |
| 07/18/2012 | CN102595791A System for depositing microwire |
| 07/18/2012 | CN102593282A Doping method for ZnO nanowire array |
| 07/18/2012 | CN102590555A Resonance-force balance capacitance type three-axis acceleration transducer and manufacture method |
| 07/18/2012 | CN102590280A Gas sensor array based on microwell structure and manufacturing method of gas sensor array |
| 07/18/2012 | CN102589760A Minitype capacitance-type mechanical sensor and preparation method thereof |
| 07/18/2012 | CN102589539A Micromechanical sensor for measuring rotation rate and method therefor |
| 07/18/2012 | CN102584331A Method for preparing double-component and double-layer nano lubrication thin film by taking nano-particle array as template |
| 07/18/2012 | CN102583230A Method for adjusting diameter of silicon nanometer hole |
| 07/18/2012 | CN102583229A Microprobe scratching machining method with force feedback control function for manufacturing microstructure |
| 07/18/2012 | CN102583228A Method and device for processing nano structures by utilizing controllable pulse lasers |
| 07/18/2012 | CN102583227A Three-dimensional ZnO homogeneous pn junction nano array and preparation method thereof |
| 07/18/2012 | CN102583226A Preparation method for multielement dissymmetrical microsphere and heterogeneous microsphere shell |
| 07/18/2012 | CN102583225A Fabricating method for one-dimensional large-scale multistage-step structure |
| 07/18/2012 | CN102583224A MEMS (micro-electromechanical system) and IC (integrated circuit) monolithical integration method |
| 07/18/2012 | CN102583223A Preparation method of nano solar battery based on CuS quasi one-dimensional nanostructure |
| 07/18/2012 | CN102583222A Process of forming a material having nano-particles and a material having nano-particles |
| 07/18/2012 | CN102583221A Bulk silicon moving member with dimple |
| 07/18/2012 | CN102583220A Wafer-level vacuum packaged infrared detector and manufacturing method thereof |
| 07/18/2012 | CN102583219A Vacuum package structure and vacuum packaging method for wafer-level MEMS (micro-electromechanical system) devices |
| 07/18/2012 | CN102583217A Micro-electro mechanical system element, deformation preventive structure used therein and manufacturing method thereof |
| 07/18/2012 | CN102583215A Suspension nano photonic device based on silicon substrate nitride and preparation method for same |
| 07/18/2012 | CN102580794A Micro-fluidic chip capable of positioning cells and organisms and application thereof |
| 07/18/2012 | CN101903285B Method of component assembly on a substrate |
| 07/18/2012 | CN101881881B Variable optical attenuator and preparation method thereof |
| 07/18/2012 | CN101871817B Hybrid-type pyroelectric uncooled focal plane detector and manufacturing process thereof |
| 07/18/2012 | CN101726629B Micro-electro-mechanical element, out-plane sensor and manufacturing method of micro-electro-mechanical element |
| 07/18/2012 | CN101691200B Low temperature vacuum encapsulation structure of non-refrigeration infrared detector and manufacturing method thereof |
| 07/18/2012 | CN101687629B Method for the production of a component, and component |
| 07/18/2012 | CN101261977B Electronic device packages and methods of formation |
| 07/17/2012 | US8220487 Microfabricated elastomeric valve and pump systems |
| 07/12/2012 | WO2012094006A1 Three-dimensional (3d) porous device and method of making a 3d porous device |
| 07/12/2012 | WO2012093105A1 Method for encapsulating a micro-component |
| 07/12/2012 | WO2012037537A3 Sealed packaging for microelectromechanical systems |
| 07/12/2012 | DE102011008206A1 Mikrostrukturvorrichtung zur Messung an molekularen Membranen und ein Verfahren zur Herstellung dieser Mikrostrukturvorrichtung The microstructure apparatus for measurement of molecular membranes and a process for producing this microstructure apparatus |
| 07/11/2012 | EP2473438A1 Production method for an encapsulated micromechanical component, corresponding micromechanical component and encapsulation for a micromechanical component |
| 07/11/2012 | EP2473271A1 Methods for producing extruded body reactors |
| 07/11/2012 | EP2331455B1 Contact arrangement for establishing a spaced, electrically conducting connection between microstructured components |
| 07/11/2012 | EP1953815B1 Wafer level package structure, and sensor device obtained from the same package structure |
| 07/11/2012 | CN102574676A Process for manufacturing MEMS devices having buried cavities and MEMS device obtained thereby |