Patents
Sitemap › B81 - Micro-structural technology › B81C - Processes or apparatus specially adapted for the manufacture or treatment of micro-structural devices or systems › B81C 1 - Manufacture or treatment of devices or systems in or on a substrate
Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526)
09/2012
09/05/2012CN102653391A Method for processing metal micro-structure
09/05/2012CN102653390A Method for preparing nano-forest structure by utilizing mixed gas etching
09/05/2012CN102653389A Through hole forming method, nozzle plate and mems device
09/05/2012CN102141413B Method for realizing heterodyne measurement under all-fiber condition
09/05/2012CN102103058B Columnar electrode array structure capable of realizing stress release of sensitive biochemical films and preparation method thereof
09/05/2012CN102070120B Preparation method for high-density interposer for microelectronic system-in-package
09/05/2012CN102030301B Micro suspension structure compatible with semiconductor element and manufacturing method thereof
09/05/2012CN102007559B Tunable capacitor and switch using mems with phase change material
09/05/2012CN101973508B Flexible substrate MEMS technology-based electroencephalogram dry electrode array and preparation method thereof
09/05/2012CN101885466B Method for manufacturing binary optical glass lens and packaging MEMS (Micro-electromechanical System) infrared detector
09/05/2012CN101858928B Capacitance-type triaxial accelerator for micromotor system
09/05/2012CN101590995B Same plane sensor
09/05/2012CN101551403B Integrated silicon chip for testing acceleration, pressure and temperature, and manufacturing method thereof
09/05/2012CN101436571B Electrical device and method
09/05/2012CN101312904B Method for manufacturing a microelectromechanical component, and a microelectromechanical component
09/04/2012CA2689890C Method of manufacturing an intracutaneous microneedle array
09/04/2012CA2641184C Mirror element and method for manufacturing mirror element
09/04/2012CA2378725C Merged-mask micro-machining process
08/2012
08/30/2012WO2012114227A1 Biosensor and method of manufacturing such a biosensor
08/30/2012US20120219530 Compositions and methods of generating reprogrammed adipocyte cells and methods of use therefore
08/30/2012DE10231730B4 Mikrostrukturbauelement Microstructure component
08/30/2012DE102011012295A1 Microelectromechanical system microphone for mobile radio unit, has transducer element enclosed between cover and carrier, and sound inlet openings formed in carrier and cover, respectively
08/30/2012DE102011004782A1 Ablösbare Mikro- und Nanobauteile für platzsparenden Einsatz Removable micro and nanodevices for space-saving use
08/30/2012DE10001361B4 Verfahren zum Herstellen eines Mikroträgheitssensors A method of manufacturing a micro inertial sensor
08/29/2012EP2492240A1 IC with pressure sensor and manufacturing method thereof
08/29/2012EP2492239A1 Integrated circuit with sensor and method of manufacturing such an integrated circuit
08/29/2012CN102650069A Method for preparing large-size silicon pore array
08/29/2012CN102649538A Silica glass bonding-based SOI MEMS (silicon on insulator micro electro mechanical system) preparation method
08/29/2012CN102649537A SOI MEMS (silicon on insulator micro electro mechanical system) one chip integrating method
08/29/2012CN102649536A Structure-enhancing and sensitivity-increasing method for micro-machined components
08/29/2012CN102649535A Component support and assembly having a mems component on such a component support
08/29/2012CN102162815B Plasma separating chip and preparation method thereof
08/29/2012CN102079503B Etching method of silicon substrate forming MEMS (Micro Electro Mechanical System) device
08/29/2012CN101950126B Method for manufacturing three-dimensional smooth curved surface microstructure based on SU-8 thick photo-resist
08/29/2012CN101916754B Through-hole, through-hole forming method and through-hole filling method
08/29/2012CN101881676B Hexagonal silicon membrane piezoresistive pressure sensor for embedded monocrystal silicon cavity and method
08/29/2012CN101603861B Thermal isolation structure of infrared detector and preparation method thereof
08/29/2012CN101597021B Method for structuring a device layer of a substrate
08/28/2012US8252539 Microfabricated crossflow devices and methods
08/23/2012WO2012112803A1 Compensation of stress effects on pressure sensor components
08/23/2012WO2012112395A2 Micro-electromechanical system devices and methods of making micro-electromechanical system devices
08/23/2012WO2012082881A3 Void-free wafer bonding using channels
08/23/2012WO2012072070A3 Sensor comprising a preferably multilayered ceramic substrate and method for producing it
08/23/2012DE102011004577A1 Bauelementträger und Bauteil mit einem MEMS-Bauelement auf einem solchen Bauelementträger Component carrier and the component with a MEMS device on such a component carrier
08/23/2012DE102011004570A1 Component carrier for e.g. microelectromechanical system component, has carrier film formed with coating, where mounting surface is formed on inner wall of film for mounting microelectromechanical system components
08/23/2012DE102011004381A1 Moldmodul mit Sensorelement Moldmodul with sensor element
08/22/2012EP2490250A1 Mould module with sensor element
08/22/2012EP2401224B1 Method for making microchannels on a substrate, and substrate including such microchannels
08/22/2012CN102647111A Magnetically-driven nanogenerator
08/22/2012CN102645579A Four-input micro mechanical cantilever beam thermoelectric microwave power sensor and preparation method
08/22/2012CN102645565A Micro machinery magnetic field sensor and preparation method thereof
08/22/2012CN102644049A Micro-flow driving method based on TiO2 nano-film wettability
08/22/2012CN102642807A Preparation method of ordered silicon nanowire array
08/22/2012CN102642806A Method for manufacturing semiconductor multi-step structure
08/22/2012CN102642805A Method for preparing silicon carbide (SiC) micro-nano needle tips
08/22/2012CN102642804A MEMS device having variable gap width and method of manufacture
08/22/2012CN102642803A Micromechanical device and manufacturing method of same
08/22/2012CN102642801A Double-faced parallel symmetric silicon beam mass block structure and method for preparing same
08/22/2012CN102642355A Preparation method of flexible membrane based on artificial micro-structures
08/22/2012CN101905855B Method for encapsulating a wafer level microdevice
08/22/2012CN101905854B Electronic component and its manufacturing method, and an electronic system
08/22/2012CN101489170B Self-detecting silicon micromechanical microphone and production method thereof
08/21/2012US8247032 Methods utilizing scanning probe microscope tips and products therefor or produced thereby
08/16/2012WO2012108303A1 Light emission detection device and method of manufacturing the same
08/16/2012WO2012108283A2 Method of manufacturing capacitive electromechanical transducer
08/16/2012US20120208343 Method for manufacturing a micro-electro-mechanical device, in particular an optical microswitch, and micro-electro-mechanical device thus obtained
08/16/2012DE112010003412T5 Schalter in integrierten Schaltkreisen, Entwicklungsstruktur und Herstellungsverfahren Switch in integrated circuits, development of structure and manufacturing method
08/15/2012CN102640264A Treatment solution for preventing pattern collapse in metal fine structure body, and process for production of metal fine structure body using same
08/15/2012CN102637626A Production of a new structure incorporating superficial , buried and support layers, for micro- electronic and micro-system applications
08/15/2012CN102637610A Method for mounting a semiconductor chip on a carrier
08/15/2012CN102636544A Multilayer thin film OTFT (organic thin film transistor) formaldehyde gas sensor and preparation method thereof
08/15/2012CN102636538A Microelectrode array sensor as well as preparation method and stripping voltmeter detection method thereof
08/15/2012CN102636534A Preparation method of porous cerium oxide nanotube array electrode and detection for hydrogen peroxide by using electrode
08/15/2012CN102633230A Method for preparing silicon nano-pillar array based on nanosphere etching technology
08/15/2012CN102633229A Preparation method for super-lens with plane-shaped imaging surface by using secondary ion beam etching technology
08/15/2012CN102633228A Novel non-refrigeration infrared sensor wafer-level packaging method compatible with CMOS (Complementary Metal Oxide Semiconductor)-MEMS (Micro-Electro-Mechanical System)
08/15/2012CN102633226A Microsystem for fluidic applications, and production method and usage method for a microsystem for fluidic applications
08/15/2012CN102298075B Acceleration sensor chip with compound multiple-beam structure and manufacturing method thereof
08/15/2012CN102298074B Hole-crack double-bridge type acceleration sensor chip and preparation method thereof
08/15/2012CN102050419B Magnetic double nano-structure array material and preparation method thereof
08/15/2012CN102030310B Method for preparing Si/Mn27Si47 core-shell structure nanowire array
08/15/2012CN102030309B Preparation method of Mn27Si47-Si heterostructure nanometer linear array or Mn27Si47 nanometer linear array
08/15/2012CN101710228B Imprint lithography processes and systems
08/15/2012CN101646119B Silicon condenser microphone chip with micro-honeycomb structural vibration membrane and preparation method thereof
08/14/2012US8241509 Capillary-channel probes for liquid pickup, transportation and dispense using stressy metal
08/09/2012WO2012106326A1 Using millisecond pulsed laser welding in mems packaging
08/09/2012WO2012104465A2 Methods and systems for mems cmos devices having arrays of elements
08/09/2012DE102011010899A1 Verfahren zum Erzeugen einer dreidimensionalen Struktur sowie dreidimensionale Struktur A method for generating a three-dimensional structure as well as three-dimensional structure
08/09/2012DE102011010135A1 Method for reshaping e.g. thermoplastic film, for thermoforming micro parts, involves heating film to forming temperature and cooling film formed part below heat deflection temperature during gas compression step
08/09/2012DE102011003856A1 Mikrosystem für fluidische Anwendungen sowie Herstellungsverfahren und Benutzungsverfahren für ein Mikrosystem für fluidische Anwendungen Micro fluidic system for applications and manufacturing processes and method of use for a micro-fluidic system for applications
08/08/2012EP2484751A2 Gradient structures interfacing microfluidics and nanofluidics, methods for fabrication and uses thereof
08/08/2012CN202369388U Device controlled to generate quantum dots or quantum lines
08/08/2012CN202369387U Equipment for preparing parallel substrate nano wire arrays
08/08/2012CN202369386U Device for preparing vertical substrate nanowire array
08/08/2012CN102628710A Porous nanometer silicon visible light detector and preparation method thereof
08/08/2012CN102627256A Micro-nano integrated processing technology based three-dimensional anti-drag micro-channel structure and preparation method thereof
08/08/2012CN102627255A Micro-nano integrated processing technology based implantable three-dimensional anti-drag micro-channel and preparation method thereof
08/08/2012CN102627254A Perforated complex micromechanical part
08/08/2012CN102183677B Integrated inertial sensor and pressure sensor and forming method thereof
08/08/2012CN101924058B Method for reducing chip warpage
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