Patents
Sitemap › B81 - Micro-structural technology › B81C - Processes or apparatus specially adapted for the manufacture or treatment of micro-structural devices or systems › B81C 1 - Manufacture or treatment of devices or systems in or on a substrate
Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526)
10/2012
10/03/2012CN102706835A Sensing chip of dual-detecting biochemical sensing detector and preparation method thereof
10/03/2012CN102706369A Three-dimensional integrated suspended sensor and manufacture method of sensor
10/03/2012CN102701144A Method for etching multilayer graphene
10/03/2012CN102701143A Lithography process with micro-nano lens for auxiliary light condensation for preparing ordered micro-nano structure
10/03/2012CN102701142A Wafer-integrated micro-lens optical system manufacturing method and apparatus structure
10/03/2012CN102701141A Method for manufacturing high depth-to-width ratio micro-nano composite structure
10/03/2012CN102701140A Method for processing suspended silicon thermistor
10/03/2012CN102701139A Preparation method of solid state chemistry micro-propeller
10/03/2012CN102701138A Large-area layering etching and transferring method of auxiliary metal silicon nanometer line array
10/03/2012CN102701136A Electrical bypass structure for MEMS device
10/03/2012CN102701135A Porous silicon micron tube and preparation method thereof
10/03/2012CN102201483B Silicon nanowire grating resonant enhanced photoelectric detector and manufacturing method thereof
10/03/2012CN101931852B Manufacturing method of silicon microphone
10/02/2012US8277667 Magnetic element and manufacturing method therefor
09/2012
09/27/2012WO2012129527A2 Biofunctional nanofibers for analyte separation in microchannels
09/27/2012WO2012128987A1 Thin film desiccant and method of fabrication
09/27/2012DE112010004848T5 Verfahren zur gezielten Selbstorganisation mit Immersionslithographie bei 193 NM und daraus gebildete Schichtstrukturen Method for the selective self-assembly with immersion lithography at 193 NM and layered structures formed therefrom
09/27/2012DE102012200569A1 Halbleitergerät, welches eine Luftbrücke hat, und Verfahren zum Herstellen desselben Of the same semiconductor device which has an air bridge, and methods for preparing
09/27/2012DE102011001422A1 Sensor module has three sensors electrically connected with electric wires that are provided at mounting substrate and sensors are mounted at mounting substrate
09/27/2012DE102009019029B4 Verfahren zur Herstellung eines Sensormoduls A process for producing a sensor module
09/27/2012DE102008034546B4 Brennstoffzelle mit einer Bipolarplatte mit einer hydrophil/hydrophob gemusterten Oberfläche Fuel cell with a bipolar plate with a hydrophilic / hydrophobic patterned surface
09/26/2012CN102695978A Vibrating mirror element and manufacturing method for same
09/26/2012CN102695115A Sound pressure sensing element for micro electro mechanical system (MEMS) and manufacturing method thereof
09/26/2012CN102694088A Roughening method for indium tin oxide (ITO) nanobowl array of GaN-based light-emitting diode (LED)
09/26/2012CN102693936A Package Interconnects
09/26/2012CN102692515A Biomedical chip used for blood coagulation tests, its manufacturing method and application
09/26/2012CN102692276A Non-refrigeration infrared detector
09/26/2012CN102689874A Three-dimensional integrated method of sensor array and signal processing circuits
09/26/2012CN102689873A Preparation method for orientationally growing F-doped ZnO porous film on inner surface of microchannel
09/26/2012CN102689872A Metamaterial processing method
09/26/2012CN102689871A Medical instruments and methods for fabricating same
09/26/2012CN102689870A Nano porous material capable of being perfomed direct photoetching imaging and preparation method thereof
09/26/2012CN102689869A In-plane resonant-type direct-pull direct-pressure micro cantilever beam structure and preparation method thereof
09/26/2012CN102060262B Method for manufacturing micro-nano fluid control system by using low-pressure bonding technology
09/26/2012CN102040185B Manufacturing method of load bearing wafer and load bearing wafer
09/26/2012CN101811657B Micro-electromechanical sensor and manufacturing method
09/26/2012CN101117206B Method for generating tomography between micro-channel structure and substrate in production process of silicon micro-channel by electrochemical process
09/25/2012US8273671 Glass material for radio-frequency applications
09/25/2012US8273574 Apparatus and methods for conducting assays and high throughput screening
09/25/2012US8272124 Anchoring carbon nanotube columns
09/25/2012CA2752746C Mems device with integrated via and spacer
09/20/2012WO2012125770A2 Controlled fabrication of nanopores in nanometric solid state materials
09/20/2012WO2012125415A1 Seal anchor structures
09/20/2012WO2012125377A2 Treatment of a self-assembled monolayer on a dielectric layer for improved epoxy adhesion
09/20/2012WO2012123991A1 Electronic apparatus comprising variable capacitance element and method of manufacturing same
09/20/2012WO2012122879A1 Mems inertial sensor and forming method therefor
09/20/2012WO2012122878A1 Integrated inertial sensor and pressure sensor, and forming method therefor
09/20/2012WO2012122877A1 Mems pressure sensor and manufacturing method therefor
09/20/2012WO2012122876A1 Integrated mems component and forming method therefor
09/20/2012WO2012122628A1 Microfluidic system having monolithic nanoplasmonic structures
09/20/2012US20120234688 Method for Electrochemical Fabrication
09/20/2012DE102011015141A1 Verfahren zum Herstellen eines reflektiven optischen Bauelements für eine EUV-Projektionsbelichtungsanlage und derartiges Bauelement A method for producing a reflective optical component for EUV projection exposure apparatus and such a component
09/20/2012CA2830103A1 Microfluidic system having monolithic nanoplasmonic structures
09/20/2012CA2829833A1 Controlled fabrication of nanopores in nanometric solid state materials
09/19/2012EP2500313A1 Process for manufacturing a membrane microelectromechanical device and membrane microelectromechanical device
09/19/2012EP2499368A2 Method for producing at least one deformable membrane micropump and deformable membrane micropump
09/19/2012EP2499085A2 Micromechanical method and corresponding assembly for bonding semiconductor substrates and correspondingly bonded semiconductor chip
09/19/2012CN102686508A A tri wavelength diffraction modulator and a method for modulation
09/19/2012CN102683391A Methods and devices for fabricating and assembling printable semiconductor elements
09/19/2012CN102683300A Semiconductor housing and method for the production of semiconductor housing
09/19/2012CN102680917A Micro-mechanical magnetic field sensor and preparation method thereof
09/19/2012CN102674241A Method for manufacturing variable-height micro flow channel based on maskless gray-scale lithography
09/19/2012CN102674240A Micromechanical sensor and manufacturing method thereof
09/19/2012CN102674239A Method for preparing blending type three-dimensional neuron probe array
09/19/2012CN102674238A Flexible compound type method for complex surface
09/19/2012CN102674237A Monolithic integrated sensor device and method thereof and method for formign the cavity structure of the monolithic integrated sensor device
09/19/2012CN102674236A Gold micro-nano composite structure array and preparation method thereof
09/19/2012CN102674235A MEMS and method of manufacturing the same
09/19/2012CN102674234A Sensor with energy-harvesting device
09/19/2012CN102674233A Package systems and manufacturing methods of the same
09/19/2012CN102072967B Gold-gold bonding process-based thermal type wind speed and direction sensor and preparation method thereof
09/19/2012CN101811656B MEMS element and method of manufacturing the same
09/19/2012CN101734608B Micro-electromechanical structure and manufacturing method thereof
09/19/2012CN101641281B Mold and mold production process
09/18/2012US8268660 Process for fabricating micromachine
09/13/2012WO2012097234A3 Method for increasing a sacrificial layer etching rate and device formed thereof
09/13/2012US20120231444 Microfabricated Crossflow Devices and Methods
09/13/2012US20120228143 Method for Electrochemical Fabrication
09/13/2012DE102012203254A1 Mikrostrukturmaterialien und verfahren zu deren herstellung Microstructure materials and processes for their preparation
09/13/2012DE102012202643A1 Hohlraumstrukturen für mems-bauelemente Cavity structures for mems devices
09/13/2012DE102011013468A1 Halbleitergehäuse und Verfahren zur Herstellung eines Halbleitergehäuses Semiconductor package and method for manufacturing a semiconductor package
09/13/2012DE102011013375A1 Manufacture of ohmic contact on silicon carbide substrate used in e.g. electronic component, involves thermally treating silicon carbide substrate in non-oxidizing atmosphere, and applying conductive contact material on treated substrate
09/13/2012DE102008000261B4 Halbleitervorrichtung und Verfahren zu ihrer Herstellung Semiconductor device and process for their preparation
09/12/2012EP2498287A2 Method for making vertical interconnections through structured layers
09/12/2012EP2497745A2 Mems device having support structures configured to minimize stress-related deformation and methods for fabricating same
09/12/2012EP2496516A2 Micro-channel structure method and apparatus
09/12/2012CN202433334U Piezoresistive type humidity sensor with low temperature drift
09/12/2012CN102667432A Thermal sensors having flexible substrates and uses thereof
09/12/2012CN102664129A Preparation method for ZnO/ZnS heterostructure nanocone array
09/12/2012CN102659070A Integrated photon chip and preparation method thereof
09/12/2012CN102659069A Component having at least one MEMS element and method for the manufacture thereof
09/07/2012WO2012117177A1 Method of fabricating an inertial sensor
09/07/2012WO2012081933A3 Method for manufacturing microstructure body
09/07/2012WO2012073009A3 Nanopore devices
09/05/2012EP2495212A2 Mems devices having support structures and methods of fabricating the same
09/05/2012EP2493809A1 Structure manufacturing method and liquid discharge head substrate manufacturing method
09/05/2012CN1974373B Micro structure, its manufacture method and micro electromechanical system
09/05/2012CN102656111A Methods of directed self-assembly with 193nm immersion lithography and layered structures formed therefrom
09/05/2012CN102656110A Simplified copper-copper bonding
09/05/2012CN102653392A Method for preparing superconductive nanometer device by negative electron beam resist exposure process
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