Patents
Sitemap › B81 - Micro-structural technology › B81C - Processes or apparatus specially adapted for the manufacture or treatment of micro-structural devices or systems › B81C 1 - Manufacture or treatment of devices or systems in or on a substrate
Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526)
10/2012
10/31/2012CN101080360B Sacrificial substrate for etching
10/30/2012US8299706 Hermetic encapsulation of organic, electro-optical elements
10/30/2012US8298457 Method of producing a movable lens structure for a light shaping unit
10/26/2012WO2012087942A3 Method of fabrication and resultant encapsulated electromechanical device
10/24/2012EP2515159A2 A device having a light-absorbing mask and a method for fabricating same.
10/24/2012EP2514714A1 Site-selectively modified micro- and nanostructures
10/24/2012EP2514374A1 Devices for delivering agents across biological barriers
10/24/2012CN102745645A Method for producing octangle micropores on silicon wafer
10/24/2012CN102745644A Method for acquiring micro-nano structure by using high-voltage electrospinning die overturning on material surface
10/24/2012CN102745643A Laser tweezers device
10/24/2012CN102745642A Integration getter MEMS (micro-electro-mechanical systems) film packaging structure and manufacturing method thereof
10/24/2012CN102745640A Covering member for micro electro mechanical device and manufacturing method thereof
10/24/2012CN102745639A Micro electro mechanical bearing piece and manufacturing method thereof
10/24/2012CN102745638A MEMS device etch stop
10/24/2012CN102005330B Micro-inertia switch chip and preparation method thereof
10/23/2012US8295027 MEMS device with integral packaging
10/18/2012WO2012142431A1 Method of forming membranes with modified stress characteristics
10/18/2012WO2012142424A1 Wafer with recessed plug
10/18/2012WO2012142415A1 Wafer with spacer including horizontal member
10/18/2012WO2012142400A1 Method of forming membranes with modified stress characteristics
10/18/2012WO2012142381A1 Method of forming non-planar membranes using cmp
10/18/2012WO2012142368A1 Out-of-plane spacer defined electrode
10/18/2012WO2012141666A2 A method for microfabrication of a capacitive micromachined ultrasonic transducer comprising a diamond membrane and a transducer thereof
10/18/2012WO2012141484A2 Bowl-shaped structure, method for manufacturing same, and bowl array
10/18/2012WO2012112452A3 Strengthened micro-electromechanical system devices and methods of making thereof
10/18/2012US20120261013 Microfluidic system including a bubble valve for regulating fluid flow through a microchannel
10/18/2012DE102010002915B4 Mikrofluidischer Sensor Microfluidic sensor
10/17/2012EP2511749A2 Vibrating mirror element and manufacturing method for same
10/17/2012EP2511230A1 A method for sealing a micro-cavity
10/17/2012EP2511229A1 Micromechanical component with reinforced flanks
10/17/2012CN102741155A Structure manufacturing method and liquid discharge head substrate manufacturing method
10/17/2012CN102740200A Micromechanical sound transducer having a membrane support with tapered surface
10/17/2012CN102737746A Isotope battery based on carbon nanotube and preparation method thereof
10/17/2012CN102735727A Preparation method of glucose sensor
10/17/2012CN102735712A Micro-well based gas sensor array and its making method
10/17/2012CN102732885A Magnetic-field-assisted silicon micro-nano processing technology and equipment
10/17/2012CN102730632A Method for processing metal film strainometer based on MEMS (Micro-electromechanical Systems)
10/17/2012CN102730631A Method for texturing large-area silicon surface in multipoint contact mode
10/17/2012CN102730630A Method for manufacturing ZnO nano structure and nano ultraviolet sensor
10/17/2012CN102730629A Microlens preparation method and its product
10/17/2012CN102730628A Preparation method of carbon microelectrode array structure
10/17/2012CN102730627A Forming curved features using a shadow mask
10/17/2012CN102730626A Carrier and method for fabricating thereof
10/17/2012CN102730625A Method for constructing microelectrode pair array on surface of silicon chip containing hydrophobic silicon column
10/17/2012CN102730624A Real-time dynamic color regulation and control micro device, method for preparing micro device and real-time dynamic color regulation and control method
10/17/2012CN102730623A Micro-electro-mechanical system sensing device and method for manufacturing same
10/17/2012CN102730622A Integrated chip of micro thermal conductive detector and manufacturing method for same
10/17/2012CN102730621A Silicon-based micro-heating plate provided with embedded heating wire, and processing method thereof
10/17/2012CN102730620A Systems and methods for enhancing reliability of mems devices
10/17/2012CN102730619A Covering member for micro-electro mechanical device and method for manufacturing covering member
10/17/2012CN102730618A Encapsulating structure and encapsulating method for integrating acceleration sensor and magnetic sensor
10/17/2012CN102730617A Packaging structure of integrated magnetic and accelerometer and packaging method thereof
10/17/2012CN102728533A Electromechanical transducer and method of producing the same
10/17/2012CN102728405A Function-guiding polyoxometalate one-dimension nano-array and preparation method thereof
10/17/2012CN102115023B Fixture structure capable of realizing front face protection and wet chemical etching on rear face of MEMS (micro-electromechanical system) chip
10/17/2012CN101935008B Method of micro cantilever beam sensor using functional carbon nano tubes as sensitive materials
10/17/2012CN101932146B Three-dimensional microheater with arc groove heating membrane area and manufacturing method thereof
10/17/2012CN101860262B Piezoelectric twin-wafer type MEMS energy collector and preparation method thereof
10/17/2012CN101513989B Functional device and manufacturing method thereof
10/16/2012US8287749 High-molecular thin film, pattern medium and manufacturing method thereof
10/16/2012US8287744 Capillary-channel probes for liquid pickup, transportation and dispense using stressy metal
10/11/2012WO2012138035A1 Micropump
10/11/2012WO2012136544A1 Wafer-level package and method for production thereof
10/11/2012WO2012135997A1 Method for forming microelectrode-pair arrays on silicon substrate surface with hydrophobic silicon pillars
10/11/2012WO2012108758A3 Silicon diaphragm formation with embedded oxide support
10/11/2012US20120256346 Mold structures, and method of transfer of fine structures
10/10/2012EP2508469A1 Three-dimensional nano-sculptured structures of high surface-mobility materials and methods of making same
10/10/2012EP2507160A2 Electromechanical systems, waveguides and methods of production using density changing sacrificial layers
10/10/2012CN102723839A Electromagnetic energy harvester with flexible substrate and method for preparing electromagnetic energy harvester
10/10/2012CN102721829A Capacitive micro acceleration sensor and uni-wafer manufacturing method thereof
10/10/2012CN102721658A Method for manufacturing pyroelectric spectrum detector
10/10/2012CN102718182A Large-area-friction-induced micron-scale processing equipment in multipoint contact mode
10/10/2012CN102718181A Process for manufacturing bionic gecko structure material
10/10/2012CN102718180A Concentric ring core nano silicon micro-disk micro-cavity device and preparation method thereof
10/10/2012CN102183333B Capacitive type pressure transducer containing silicon through holes and manufacturing method thereof
10/10/2012CN102180435B Integrated micro electro-mechanical system (MEMS) device and forming method thereof
10/10/2012CN102147569B Processing method of micro-component in multi-layer structure and solidified SU-8 photoresist sheet
10/10/2012CN102062662B Monolithic integrated SiC MEMS (Micro-Electro-Mechanical Systems) pressure sensor and production method thereof
10/10/2012CN102042832B Micro electro mechanical system (MEMS) gyroscope, chip level temperature control method thereof and processing method thereof
10/10/2012CN102041536B Method for preparing two types of super-hydrophobic membranes simultaneously by utilizing nickel chloride
10/10/2012CN102041535B Method for preparing two types of super-hydrophobic membranes simultaneously by utilizing ferric chloride
10/10/2012CN102041534B Method for simultaneously preparing two types of super-hydrophobic films by utilizing copper chloride
10/10/2012CN101993030B Micro movable device and method for manufacturing the same
10/10/2012CN101905856B Method for preparing plane hollow microneedle for transdermal administration
10/10/2012CN101830425B Variable rigidity beam, manufacturing method and actuating method thereof
10/10/2012CN101472212B Post-CMOS capacitance silicon-based micro-microphone and preparation method thereof
10/10/2012CN101152955B Method of making microstructure device, and microstructure device made by the same
10/10/2012CN100998901B Porous silicon painless injection mironeedle array and its preparation method
10/08/2012DE202012103703U1 Bolometer Bolometer
10/04/2012WO2012131911A1 Electronic device and method for manufacturing same
10/04/2012DE102011006596A1 Micro-mechanical arrangement for manufacturing thin polysilicon layer utilized as e.g. strip conductor, has hole pairs connected with micro-mechanical functional area over contact plugs and disconnected from area by gap
10/04/2012DE102011006595A1 Micromechanical optical component e.g. micro mirror actuator device has lever elements that are connected to piezoelectric element such that voltage is applied to piezoelectric element and lever elements are moved to move mirror element
10/04/2012DE102011006422A1 Mikromechanisches Bauteil und Herstellungsverfahren für ein mikromechanisches Bauteil Micromechanical element and manufacturing method for a micromechanical component
10/04/2012DE102011006412A1 Manufacturing method for micromechanical system involves removing a portion of sacrificial layers in region of cavity structure with etch channels through trenches while not removing remaining portion of sacrificial layers
10/04/2012DE102011006403A1 Mikromechanische Anordnung und entsprechendes Herstellungsverfahren Micromechanical device and manufacturing method thereof
10/04/2012DE102007035633B4 Verfahren zur Herstellung mikromechanischer Strukturen sowie mikromechanische Struktur A process for producing micromechanical structures and micromechanical structure
10/04/2012DE10159415B4 Verfahren zur Herstellung einer Mikrospule und Mikrospule A process for producing a microcoil and microcoil
10/03/2012EP2505548A2 Micromechanical sound transducer having a membrane support with tapered surface
10/03/2012CN102712462A Improved selectivity in a xenon difluoride etch process
10/03/2012CN102707378A Method for manufacturing silicone micro-nano optical structure by using imprinting technology
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