Patents
Sitemap › B81 - Micro-structural technology › B81C - Processes or apparatus specially adapted for the manufacture or treatment of micro-structural devices or systems › B81C 1 - Manufacture or treatment of devices or systems in or on a substrate
Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526)
11/2012
11/28/2012CN102798489A Pressure sensor and preparation method thereof
11/28/2012CN102798474A High-performance MEMS (Micro Electro Mechanical System) thermopile infrared detector structure and preparation method thereof
11/28/2012CN102798403A MEMS (Micro Electro Mechanical System) film capacitive type multi-parameter sensor structure and integrated manufacturing method thereof
11/28/2012CN102796998A Method for operating and controlling position of nano-grating deposition substrate in vacuum vessel and device therefor
11/28/2012CN102795594A MEMS (micro electro mechanical systems) package structure and package method
11/28/2012CN102795593A Method for processing ultrathin vacuum-sealed MEMS (Micro-electromechanical System) wafer
11/28/2012CN102795592A Selective etching reparation method and application of PDMS (polydimethylsiloxane) elastomer surface hard film layer
11/28/2012CN102795591A Method for reducing metal secondary electron yield by utilizing regular array structure
11/28/2012CN101952195B One-dimensional arrays of block copolymer cylinders and applications thereof
11/28/2012CN101944860B Piezoelectric cantilever vibration energy harvester and preparation method thereof
11/28/2012CN101694895B Series radio-frequency micro-electromechanical switch amplified on basis of heat driving and preparation method of same
11/28/2012CN101351401B Process of forming a microphone using support member
11/27/2012US8320589 Electret condenser
11/27/2012US8318066 Step and repeat imprint lithography process
11/22/2012WO2012157358A1 Production method for optical component and optical component
11/22/2012WO2012157357A1 Optical module and production method for same
11/22/2012US20120295029 Methods utilizing scanning probe microscope tips and products therefor or produced thereby
11/22/2012DE112010005010T5 Wärmesensoren mit flexiblen Substraten und Verwendungen derselben Heat sensors with flexible substrates and uses thereof
11/22/2012DE102011102205A1 Processing a sliding surface of component e.g. oil scraper ring that is useful for piston of internal combustion engine, comprises introducing micro recesses into surface by laser machining, and filling recesses with solid material
11/21/2012EP2524390A2 Micro-electromechanical semiconductor sensor component
11/21/2012CN102789884A Preparation method of solenoid micro-inductor inside quartz material
11/21/2012CN102786028A Manufacturing method of multi-needle point array used for large area friction induced micro/nano-processing
11/21/2012CN102786027A Method and device for preventing corrosion on sensors
11/21/2012CN102786026A Film seal cap packaging structure for MEMS (micro electro mechanical system) optical device and manufacturing method of film seal cap packaging structure
11/21/2012CN102786024A Package structure having mems elements and fabrication method thereof
11/21/2012CN102786023A Cover plate-free carbon nanotube device structure and manufacturing method thereof
11/21/2012CN102175329B Infrared detector, manufacturing method thereof and multiband uncooled infrared focal plane
11/21/2012CN102115024B System and method for releasing micro-electromechanical system (MEMS) structure by etching silicon sacrificial layer
11/21/2012CN102062524B Automatic drying equipment for MEMS (micro electro mechanical system) device wafer
11/21/2012CN102040186B High vacuum ceramic LCC packaging method
11/21/2012CN102012633B Method for making self-supporting structure of nano fluid system based on SU-8 photoresist
11/21/2012CN102001618B Masking method for deep-etching multi-layer silicon structure by dry method
11/21/2012CN101978469B Thermal anneal of block copolymer films with top interface constrained to wet both blocks with equal preference
11/21/2012CN101762623B Semiconductor-type gas sensor with A1N heat isolation panel double-side micro structure and manufacturing method thereof
11/21/2012CN101573792B Preferentially deposited lubricant to prevent anti-stiction in micromechanical systems
11/21/2012CN101477096B Polymer plane nano-channel production method
11/20/2012US8313332 Oblique parts or surfaces
11/15/2012WO2012154764A2 Method for achieving smooth side walls after bosch etch process
11/15/2012WO2012153112A2 Semiconductor structure
11/15/2012WO2012100361A3 Method for manufacturing a sensor chip comprising a device for testing it
11/15/2012DE102008012826B4 Verfahren zur Erzeugung einer dreidimensionalen mikromechanischen Struktur aus zweidimensionalen Elementen und mikromechanisches Bauelement A method for generating a three-dimensional micro structure from two-dimensional mechanical elements and micromechanical component
11/14/2012CN102782488A Microfluidic channel device with array of drive electrodes
11/14/2012CN102781815A Conical nanostructures on substrate surfaces, in particular optical elements, methods for the production thereof and use thereof
11/14/2012CN102778586A Differential capacitive micro-acceleration transducer and manufacturing method thereof
11/14/2012CN102778503A Surface acoustic wave gas sensor and its manufacturing method
11/14/2012CN102778408A Device of quartz crystal monitor (QCM) chip with surface modified by zinc oxide nanometer chain and preparation method of QCM chip
11/14/2012CN102776469A Method for preparing copper nanowires and copper nano pointed cones
11/14/2012CN102774807A Method for preparing core shell type nanowire array raman scattering reinforcement substrate
11/14/2012CN102774806A Producing method of micro-mesa of Mn-Co-Ni-O line array detector
11/14/2012CN102774804A Package having MEMS element and fabrication method thereof
11/14/2012CN102353464B Superconductive nanowire single-photon detector capable of distinguishing photon number and preparation method thereof
11/14/2012CN101894954B Normal temperature bonding technology-based microminiature fuel cell encapsulation method
11/14/2012CN101801838B Interferometric optical modulator with broadband reflection characteristics
11/14/2012CN101774529B MEMS atom cavity chip and preparation method thereof
11/14/2012CN101389566B Electrical conditioning of mems device and insulating layer thereof
11/14/2012CN101279712B Method for generating a micromechanical structure
11/14/2012CN101061058B Imprinting of supported and free-standing 3-D micro-or nano-structures
11/13/2012US8309008 Separation in an imprint lithography process
11/08/2012WO2012150278A1 Hierarchical carbon nano and micro structures
11/08/2012WO2012125481A3 Thin film through-glass via and methods for forming same
11/08/2012WO2012125377A3 Treatment of a self-assembled monolayer on a dielectric layer for improved epoxy adhesion
11/08/2012WO2012113902A3 Detachable micro- and nano-components for a space-saving use
11/08/2012US20120282682 Micro-channel structure method and apparatus
11/08/2012DE102011104843A1 Micro-mirror structure of micro-mirror device, has contact region that is formed between mirror portions by coating process during deposition of one mirror portion on another mirror portion
11/07/2012EP2520368A1 Microfluidic membrane pump and valve
11/07/2012EP2520367A1 Microfluidic membrane pump and valve
11/07/2012CN202522760U Optical tweezers device of vortex femtosecond laser
11/07/2012CN202522538U Microelectrode array sensor
11/07/2012CN102768933A Method for etching
11/07/2012CN102768290A MEMS (micro-electrochemical systems) accelerometer and production method thereof
11/07/2012CN102768230A Vertical flat plate capacitive gas sensor and preparation method thereof
11/07/2012CN102768093A MEMS capacitive pressure sensor, operating method and manufacturing method
11/07/2012CN102768039A Semiconductor apparatus
11/07/2012CN102765695A Method of manufacturing wafer-level low-dimensional nano-structure based on self-focusing of electrostatic field singular-point
11/07/2012CN102208479B Nano coaxial-cable heterojunction array base ultraviolet detector and manufacturing method thereof
11/07/2012CN102175891B Method for manufacturing three-axis thermal convection acceleration sensor chip
11/07/2012CN102070119B Bending and forming method of thin silicon wafer
11/07/2012CN102012434B Capacitive angular speed sensor of micro electro mechanical system and manufacturing method thereof
11/07/2012CN101922984B Nano-silicon thin-membrane four-island-beam-membrane sensor chip and preparation method thereof
11/07/2012CN101421178B A method for manufacturing an electronic assembly, electronic assembly, covering piece and substrate
11/07/2012CN101410323B Stamping methods and devices
11/01/2012WO2012146458A2 A method for producing a polymer-based microfluidics system for bioanalytics using biological membranes
11/01/2012US20120276544 Microfabricated Crossflow Devices and Methods
11/01/2012US20120276543 Microfabricated Crossflow Devices and Methods
10/2012
10/31/2012EP2516977A2 Thermal sensor using a vibrating mems resonator of a chip interconnect layer
10/31/2012EP2516691A1 Production of functionalised substrate
10/31/2012EP2516322A2 Method for making conical nanostructures on substrate surfaces
10/31/2012DE102011018588A1 Method for manufacturing integrated pressure sensor of highly integrated switching circuit, involves forming diaphragm by formation of depression of substrate by back corrosion of substrate
10/31/2012DE102011017700A1 Manufacturing method of semiconductor device e.g. acceleration sensor, involves positioning separator component in chamber to separate specific region between substrates, such that water molecule is hardly passed through component
10/31/2012CN102762491A Assembly of flat on structured glass layers
10/31/2012CN102762490A Micro electromechanical systems (mems) having a gap stop and method therefor
10/31/2012CN102759763A Micronano manufacturing method of compound eye structure micro lens array
10/31/2012CN102759637A MEMS (micro electro mechanical system) triaxial acceleration transducer and manufacture method thereof
10/31/2012CN102759326A Micro-electro-mechanical system (MEMS) strain type icing sensor and detection method
10/31/2012CN102757015A Method of fabricating an integrated CMOS-MEMS device
10/31/2012CN102757014A Preparation method of glass rod surface micro-lens array
10/31/2012CN102757013A Preparation method for three-dimensional carbon micro-nano electrode array structure integrating carbon nano-drape
10/31/2012CN102757012A Method for preparing micro-solution storage and multi-phase heterogenous microparticles
10/31/2012CN102757011A Micromechanical thermopile infrared detector and manufacturing method thereof
10/31/2012CN101616864B Encapsulation module, method for production and use thereof
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