| Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526) |
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| 01/31/2013 | WO2013013831A1 A substrate surface structured with thermally stable metal alloy nanoparticles, a method for preparing the same and uses thereof, in particular as a catalyst |
| 01/31/2013 | US20130029157 Method for making a reinforced silicon micromechanical part |
| 01/31/2013 | DE102011080138A1 Mikro-Gassensor und Verfahren zu dessen Herstellung The micro-gas sensor and method for its production |
| 01/30/2013 | EP2550234A2 Method for producing a microelectromechanical device and microelectromechanical device |
| 01/30/2013 | CN102906011A Micro-electro-mechanical system structures |
| 01/30/2013 | CN102906010A Planar cavity mems and related structures, methods of manufacture and design structures |
| 01/30/2013 | CN102906009A Planar cavity micro-electro-mechanical system and related structures, methods of manufacture and design structures |
| 01/30/2013 | CN102902039A Auto-focusing lens based on micro-electromechanical system |
| 01/30/2013 | CN102901997A Preparation method of curved compound eye |
| 01/30/2013 | CN102901715A Fluorescence enhanced microarray biochip based on micro/nano periodic structures and method for preparing same |
| 01/30/2013 | CN102901568A Infrared detector and manufacturing method for same |
| 01/30/2013 | CN102901567A Thermopile infrared detector, array and preparation method of thermopile infrared detector |
| 01/30/2013 | CN102901534A Film temperature ablation composite sensor and manufacture method thereof |
| 01/30/2013 | CN102897710A Manufacturing method of through hole structure in PDMS (polydimethylsiloxane) microfluidic device |
| 01/30/2013 | CN102897709A Manufacturing method of low-cost micronano integrated structure |
| 01/30/2013 | CN102897708A Cutting method for MEMS wafer |
| 01/30/2013 | CN102897707A Fluid device for controlling microtubule movement direction, its preparation method and application |
| 01/30/2013 | CN102897706A Method and apparatus for protecting wiring and integrated circuit device |
| 01/30/2013 | CN102897705A Micro-electric field gradient structure and preparation method thereof |
| 01/30/2013 | CN102896007A Microfluidic control element and preparation method thereof |
| 01/24/2013 | WO2013012466A2 Process for making nanocone structures and using the structures to manufacture nanostructured glass |
| 01/24/2013 | WO2013012187A1 Method for processing a super-hydrophobic surface, and evaporator having the super-hydrophobic surface |
| 01/24/2013 | WO2013012123A1 Food packing material having hydrophobicity, manufacturing method and mold thereof |
| 01/24/2013 | WO2013011864A1 Thin film device and manufacturing method thereof |
| 01/24/2013 | WO2012145485A3 Implantation of gaseous chemicals into cavities formed in intermediate dielectric layers for subsequent thermal diffusion release |
| 01/24/2013 | DE112010004602T5 Behandlungslösung zur Verhinderung eines Musterzusammenbruchs in einem feinen Metallstrukturkörper und Verfahren zur Herstellung eines feinen Metallstrukturkörpers, bei dem diese eingesetzt wird Treatment solution for preventing a pattern collapse in a fine metal structure body and method for producing a fine metal structure body in which it is used |
| 01/24/2013 | DE102011108089A1 Verfahren zur Herstellung dünner elektrisch leitfähiger Schichten aus Silber, eine Silber-Schicht, einen Silberkomplex, dessen Lösung sowie eine Verwendung des Silberkomplexes in einer Lösung A process for the production of thin electrically conductive layers of silver, a silver layer, a silver complex, the solution and a use of the silver complex in a solution |
| 01/23/2013 | CN102887478A Micro-nano machining method based on electrochemical micro-nano system for functional material and device thereof |
| 01/23/2013 | CN102887477A Polymer surface nanowire array and preparation method thereof |
| 01/17/2013 | WO2013009163A1 Nanostructured sensing device and method of fabricating same |
| 01/17/2013 | WO2013008203A2 Miniaturised sensor comprising a heating element, and associated production method |
| 01/17/2013 | WO2013008191A1 Method for making a silicon separation microcolumn for chromatography or gas chromatography |
| 01/17/2013 | DE102011107649A1 Micromechanical sensor for, e.g. analyzing topographies in grid force microscopy, has unilateral bendable cantilever in which gate electrode of FET is inserted, and is spaced at free space from semiconductor substrate |
| 01/17/2013 | DE102011107046A1 Micro pump of micro-fluidic chip in micro-fluidic lab-on-chip system for, e.g. chemical and biological sample analysis, has several nanoscale surface structures that are provided at regions of fluid inflow and outflow micro channel |
| 01/17/2013 | DE102011079222A1 Method for manufacturing micro-electro-mechanical system structure for e.g. acceleration sensor, involves depositing oxide layer as sacrificial layer such that porous region is formed in oxide layer by impinging ions on oxide layer |
| 01/17/2013 | DE102011078976A1 Mikrofluidische Vorrichtung sowie Verfahren zur Herstellung einer mikrofluidischen Vorrichtung The microfluidic device and methods for producing a microfluidic device |
| 01/16/2013 | EP2546188A1 Method for forming a structure with a suspended membrane and a buried electrode |
| 01/16/2013 | EP2545371A1 Microfluidic channel device with array of drive electrodes |
| 01/16/2013 | CN202671196U Multi-point contact type large-area friction induction micron-level machining device |
| 01/16/2013 | CN102883992A Counterbearing with aspherical membrane bed, pressure sensor comprising such a counterbearing and method for the production thereof |
| 01/16/2013 | CN102883991A Bonding process for sensitive micro- and nano-systems |
| 01/16/2013 | CN102882424A Vibration power generating device and manufacturing method thereof |
| 01/16/2013 | CN102881582A Deep silicon etching method |
| 01/16/2013 | CN102879609A Capacitive acceleration transducer for H-shaped beam and manufacturing method thereof |
| 01/16/2013 | CN102879608A Capacitive acceleration transducer for bending elastic beam and manufacturing method |
| 01/16/2013 | CN102874748A Amorphous silicon planarization method |
| 01/16/2013 | CN102874747A Method for preparing multilevel structural material by performing epitaxial growth of layered double hydroxide (LDH) based on guiding of electric field of metallic oxide nano array |
| 01/16/2013 | CN102874746A Method capable of improving uniformity of porous silicon film physical micro-structure and optical characteristics |
| 01/16/2013 | CN102874745A Method for fabricating package structure having mems elements |
| 01/16/2013 | CN102874744A Photoelectrochemical method for separating p-type silicon micro-channel from substrate |
| 01/16/2013 | CN102874743A Preparation method for embedded micro-nano channel |
| 01/16/2013 | CN102874742A Cobaltosic oxide micro-nano composite structure array and manufacturing method thereof |
| 01/16/2013 | CN102874741A Spherical optical microcavity on chip and preparation method of spherical optical microcavity |
| 01/16/2013 | CN102874740A Infrared detection device and manufacturing method thereof |
| 01/16/2013 | CN102874738A Infrared probe and manufacture method thereof |
| 01/16/2013 | CN102874737A micro system and/or nano system type of device and manufacturing method thereof |
| 01/16/2013 | CN102874736A Transverse comb tooth type micro-electromechanical vibration energy collector |
| 01/16/2013 | CN102393252B Two-layer micrometering bolometer and manufacturing method thereof |
| 01/16/2013 | CN102368098B Submicron diffraction grating with modulatable period and preparation method thereof |
| 01/16/2013 | CN102107847B Method for preparing three-dimensional micro-nano device |
| 01/16/2013 | CN101553425B Micro electro mechanical system |
| 01/10/2013 | WO2013005289A1 Electronic device, method of manufacturing same, and electronic device drive method |
| 01/10/2013 | WO2013004081A1 Method for manufacturing composite integrated sensor structure |
| 01/10/2013 | WO2012154764A3 Method for achieving smooth side walls after bosch etch process |
| 01/10/2013 | WO2012141484A3 Bowl-shaped structure, method for manufacturing same, and bowl array |
| 01/10/2013 | US20130012078 Method for plugging a hole and a plugged hole |
| 01/09/2013 | EP2542500A1 Bonding process for sensitive micro- and nano-systems |
| 01/09/2013 | EP2542499A2 Cmp process flow for mems |
| 01/09/2013 | EP2542271A1 A flexible magnetic membrane based actuation system and devices involving the same. |
| 01/09/2013 | CN202657952U Preparation mechanism of silicon base structure |
| 01/09/2013 | CN202657951U Device for machining nanometer structure by utilizing controllable pulse laser |
| 01/09/2013 | CN102869630A Methods to fabricate a photoactive substrate suitable for microfabrication |
| 01/09/2013 | CN102869488A Method for producing coated molded bodies |
| 01/09/2013 | CN102868318A Mini-type combined type energy collector based on PVDF (Poly Vinyli Dene Fluoride) and preparation method |
| 01/09/2013 | CN102866178A Gas sensor and forming method thereof |
| 01/09/2013 | CN102862950A Method for preparing nano-gap metal focusing lens |
| 01/09/2013 | CN102862949A Double-cantilever-beam MEMS (Micro-electromechanical System) device based on inversion process and forming method thereof |
| 01/09/2013 | CN102862948A Preparation method of bacteria fission biological clock |
| 01/09/2013 | CN102163531B Flat line type ion trap mass analyzer based on MEMS (micro electro mechanical system) process and manufacturing method thereof |
| 01/09/2013 | CN102136484B Indium columns for face-down bonding interconnection of infrared focal plane and preparation method thereof |
| 01/09/2013 | CN102050418B Three-dimensional integrated structure and production methods thereof |
| 01/09/2013 | CN101977839B Methods of improving long range order in self-assembly of block copolymer films with ionic liquids |
| 01/09/2013 | CN101539586B Element wafer and method for manufacturing the same |
| 01/03/2013 | WO2013002767A1 Out-of-plane travel restriction structures |
| 01/03/2013 | WO2013001171A1 A method of making a system-in-package device, and a system-in-package device |
| 01/03/2013 | WO2012153112A3 Semiconductor membrane structure with controlled tensile stress |
| 01/03/2013 | WO2012146458A3 A method for producing a polymer-based microfluidics system for bioanalytics using biological membranes |
| 01/03/2013 | DE102009026682A9 Bauelement mit einer mikromechanischen Mikrofonstruktur und Verfahren zu dessen Herstellung Component having a micromechanical microphone structure and process for its preparation |
| 01/03/2013 | DE102008000128B4 Halbleitersensorvorrichtung und deren Herstellungsverfahren A semiconductor sensor device and its manufacturing method |
| 01/02/2013 | CN102859735A Ferroelectric device |
| 01/02/2013 | CN102859047A Mold, method for producing same, article having micro-relief structure on surface, and method for producing same |
| 01/02/2013 | CN102858681A CMP process flow for MEMS |
| 01/02/2013 | CN102854741A Compound soft die for wafer-grade nano imprinting of uneven substrate and manufacturing method |
| 01/02/2013 | CN102853926A Packing structure of MEMS (Micro-electromechanical Systems) temperature sensor and manufacturing method of packing structure |
| 01/02/2013 | CN102849674A Packaging method of vertical sensor |
| 01/02/2013 | CN102849673A Liquid suspension microstructure and preparation method thereof |
| 01/02/2013 | CN102849672A Surface enhanced Raman micro-structural substrate and preparation method thereof |
| 01/02/2013 | CN102262991B Preparation method of electron emission source nano seam array of surface conduction electron emitter display (SED) |
| 01/02/2013 | CN102175757B Carbon nanotube film three-electrode sensor and manufacturing method thereof |
| 01/02/2013 | CN102175755B Carbon nanotube film micro-nano ionizing sensor and manufacture method thereof |