| Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526) |
|---|
| 01/02/2013 | CN102097588B Method for preparing molecular junction by polydimethylsiloxane stencil printing |
| 01/02/2013 | CN101482528B Production method for integrated concentrated nano-particle monolayer film hydrogen sensor |
| 01/01/2013 | US8343369 Method of producing a MEMS device |
| 12/27/2012 | WO2012177954A2 Bi-metallic actuators |
| 12/27/2012 | WO2012177488A2 Planarized spacer for cover plate over electromechanical systems device array |
| 12/27/2012 | WO2012141666A3 A method for microfabrication of a capacitive micromachined ultrasonic transducer comprising a diamond membrane and a transducer thereof |
| 12/27/2012 | WO2012129527A3 Biofunctional nanofibers for analyte separation in microchannels |
| 12/27/2012 | WO2012104465A3 Methods and systems for mems cmos devices having arrays of elements |
| 12/27/2012 | US20120328834 Microfabricated elastomeric valve and pump systems |
| 12/27/2012 | DE102011105679A1 Verfahren zum Herstellen dreidimensionaler Mikrostrukturen Method for manufacturing three-dimensional microstructures |
| 12/27/2012 | DE102011105595A1 Verfahren zum Herstellen einer Drucksensor-Fläche auf einem Substrat sowie Bauteil A method of manufacturing a pressure sensor surface on a substrate and component |
| 12/26/2012 | EP2538436A2 Hermetically Sealed Wafer Packages |
| 12/26/2012 | EP2536548A1 Method for producing coated molded bodies |
| 12/26/2012 | CN102841325A Three-dimensional tunneling magnetic field sensor with bevel angle of 45 degrees and manufacturing method of sensor |
| 12/26/2012 | CN102838082A Method for preparing micro-nano structure on material surface based on laser interference photolithography |
| 12/26/2012 | CN102838081A Method utilizing femtosecond laser non-mask method to prepare magnetic sensitive microstructure unit |
| 12/26/2012 | CN102838080A Three-dimensional photon limiting optical microcavity structure and preparation method thereof |
| 12/26/2012 | CN102838079A Open-type packaging structure used for sensor chip and manufacturing method thereof |
| 12/26/2012 | CN102279289B Method for manufacturing micro cantilever probe based on monocrystalline silicon (110) |
| 12/26/2012 | CN102163606B Charge-detecting chip and manufacturing method thereof |
| 12/26/2012 | CN102115025B Method for preparing polystyrene micro-sphere micro-array by ultrasonic focusing micro-jet process |
| 12/26/2012 | CN102053489B Mercaptan-alkene based high-precision ultraviolet imprinting method of continuous embossment micro optical elements |
| 12/26/2012 | CN102040187B Method for growing core-shell structure ZnO nanowire array |
| 12/26/2012 | CN102020231B Enhanced Raman scattering substrates of silicon semiconductor and a manufacturing method and application for the same |
| 12/26/2012 | CN101813701B Method for preparing protein chip by in-situ synthesis |
| 12/26/2012 | CN101566510B Pressure sensor, manufacturing method thereof, and electronic component provided therewith |
| 12/26/2012 | CN101268012B Fine structure body and method for manufacturing same |
| 12/25/2012 | US8338205 Method of fabricating and encapsulating MEMS devices |
| 12/20/2012 | WO2012171663A1 Low-temperature wafer-level packaging and direct electrical interconnection |
| 12/20/2012 | WO2012125770A3 Controlled fabrication of nanopores in nanometric solid state materials |
| 12/19/2012 | EP2534093A2 Microelectromechanical system with reduced speckle contrast |
| 12/19/2012 | CN102834347A MEMS device having a membrane and method of manufacturing |
| 12/19/2012 | CN102830374A Three-dimensional tunnelling magnetic field sensor using angle of 45 degrees and manufacturing method thereof |
| 12/19/2012 | CN102830373A Three-dimensional anisotropic magnetic field sensor employing 45-degree- oblique angle and manufacturing method thereof |
| 12/19/2012 | CN102829880A High-performance MEMS (Micro Electro Mechanical System) thermopile infrared detector based on black silicon and preparation method thereof |
| 12/19/2012 | CN102826503A Preparation method of wedge microstructure on surface of polymer |
| 12/19/2012 | CN102826502A MEMS devices and methods of fabrication thereof |
| 12/19/2012 | CN102826501A Quartz fiber surface microstructure and preparation method thereof |
| 12/19/2012 | CN102124415B Gearing system for a timepiece |
| 12/19/2012 | CN101638213B Micro structural manufacture method capable of integrating semiconductor processing |
| 12/18/2012 | CA2565772C High-performance heat engine |
| 12/13/2012 | WO2012170499A2 Nanopore fabrication and applications thereof |
| 12/13/2012 | WO2012170204A1 Photoresists containing polymer-tethered nanoparticles |
| 12/13/2012 | WO2012168889A1 Anodic bonding for a mems device |
| 12/13/2012 | DE102011050894A1 Verfahren zur Polymerisierung von Monomer- und/oder Oligomereinheiten durch Infrarotlichtimpulse A method for polymerizing the monomer and / or oligomer by infrared light pulses |
| 12/13/2012 | DE102009036951B4 Keramik-Mehrlagenschaltung mit elektrischem Bauteil Ceramic multilayer circuit with electrical component |
| 12/12/2012 | EP2533099A2 Method for manufacturing micro-structure and optically patternable sacrificial film-forming composition |
| 12/12/2012 | EP2532619A1 Anodic bonding for a MEMS device |
| 12/12/2012 | CN102822084A CMOS compatible MEMS microphone and method for manufacturing the same |
| 12/12/2012 | CN102820385A Method for manufacturing semiconductor device |
| 12/12/2012 | CN102818516A Sensor chip of high-temperature resistant silicone strainometer and manufacturing method of sensor chip |
| 12/12/2012 | CN102817084A Preparation method of silicon nanowire double-layer array structure material |
| 12/12/2012 | CN102815664A Flexible tubular microelectrode and preparation method thereof |
| 12/12/2012 | CN102815663A Manufacturing method for semiconductor device |
| 12/12/2012 | CN102815662A Method for preparing cavity in semiconductor substrate |
| 12/12/2012 | CN102815661A Preparation method of silicon film |
| 12/12/2012 | CN102815659A Semiconductor Devices With Moving Members and Methods for Making the Same |
| 12/12/2012 | CN102815657A Packaging structure and packaging method thereof |
| 12/12/2012 | CN102024667B Feeding driving mechanism and connecting component thereof |
| 12/12/2012 | CN101792113B Method and apparatus for protecting wiring and integrated circuit device |
| 12/12/2012 | CN101652317B Eliminate release etch attack by interface modification in sacrificial layers |
| 12/12/2012 | CN101035930B Fused-salt bath, precipitate obtained by using the fused-salt bath, method for producing metal product and metal product |
| 12/06/2012 | WO2012165143A1 Photosensitive resin composition for forming biochip, and biochip |
| 12/06/2012 | WO2012164512A1 Method for producing three-dimensional monolithic microfluidic devices |
| 12/06/2012 | WO2012164485A1 Process for functionalizing the wall of a hole |
| 12/06/2012 | WO2012163783A1 Method for producing an mos transistor |
| 12/06/2012 | WO2012163702A1 Method for making patterns on the surface of a substrate using block copolymers |
| 12/06/2012 | WO2012163072A1 Method for manufacturing dielectric substrate, and metamaterial |
| 12/06/2012 | US20120308779 Membrane for oxygen generation |
| 12/06/2012 | DE102011103516A1 Method for filling cavity within micro-electro mechanical system (MEMS) component e.g. microphone, involves forming aperture in the sealing layer using pulsed laser beam so as to open the closed cavity |
| 12/06/2012 | DE102011050722A1 Method for production of microstructure on surface of substrate, involves applying polymer layer on upper surface of carbon conductive paint layer of specific thickness and graphite and soot particle |
| 12/06/2012 | DE102009000642B4 Verfahren zur Herstellung mikrostrukturierter Bauteile mittels Photolithographie A process for producing microstructured components by means of photolithography, |
| 12/06/2012 | CA2838018A1 Method for producing three-dimensional monolithic microfluidic devices |
| 12/05/2012 | EP2530509A1 Display device and method for producing the same |
| 12/05/2012 | EP2530508A1 Display device |
| 12/05/2012 | EP2530506A2 Display device with MEMS shutters and method for producing the same |
| 12/05/2012 | EP2528854A1 Patterned superhydrophobic surfaces to reduce ice formation, adhesion, and accretion |
| 12/05/2012 | EP2528853A2 Assembly of flat layer on structured glass layers |
| 12/05/2012 | CN202576613U Bidirectional rotating cathode mechanism for high speed electroplating equipment |
| 12/05/2012 | CN102811942A Method for producing a microelectromechanical device and microelectromechanical device |
| 12/05/2012 | CN102810626A Precision machining based manufacturing method of minisize thermoelectric device |
| 12/05/2012 | CN102809452A Piezoresistance-type micro-nano sensor based on double-sided surface stress and preparation method of piezoresistance-type micro-nano sensor |
| 12/05/2012 | CN102807188A Micro atomic cavity subjected to negative pressure forming, micro atomic clock chip and preparation method for micro atomic cavity and micro atomic clock chip |
| 12/05/2012 | CN101998930B Method of sealing a cavity |
| 12/05/2012 | CN101880022B Anti-vibration device and preparation method thereof |
| 12/05/2012 | CN101592627B Method for manufacturing and integrating multichannel high-sensitive biosensor |
| 12/05/2012 | CN101571536B Preparation process of single nanoparticle and array-based biological molecule detector thereof |
| 11/29/2012 | WO2012162155A1 Mems anchor and spacer structure |
| 11/29/2012 | WO2012159869A1 Semi-conductor component comprising micro-bridges for adjusting a tensile strain state and method for the production thereof |
| 11/28/2012 | EP2527902A1 Display device and method for manufacturing the same |
| 11/28/2012 | EP2527810A2 Device for measuring environmental forces and method of fabricating the same |
| 11/28/2012 | EP2527290A1 Semiconductor component with micro-bridges for adjusting a tensile elongation condition and method for producing same |
| 11/28/2012 | CN102803562A Methods of wet etching a self-assembled monolayer patterned substrate and metal patterned articles |
| 11/28/2012 | CN102803126A Method for plugging a hole and a plugged hole |
| 11/28/2012 | CN102800879A MEMS manufacturing method of fuel cell |
| 11/28/2012 | CN102800872A Manufacturing method of MEMS (Micro-electromechanical Systems) of fuel cell polar plate |
| 11/28/2012 | CN102800567A Deep silicon etching method |
| 11/28/2012 | CN102799063A Method for preparing photoresist template and patterned ZnO nanorod array |
| 11/28/2012 | CN102798734A Micro-electromechanical system (MEMS) triaxial accelerometer and manufacturing method thereof |
| 11/28/2012 | CN102798615A Periodic nanostructure-based biosensor and preparation method thereof |