| Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526) |
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| 03/06/2013 | EP2563450A2 Device for delivery of rheumatoid arthritis medication |
| 03/06/2013 | CN202770545U Package structure of MEMS temperature sensor |
| 03/06/2013 | CN202770456U MEMS (Micro Electro Mechanical System) film capacitive type multi-parameter sensor structure |
| 03/06/2013 | CN102958827A Method for producing an integrated microfluidic system and integrated microfluidic system |
| 03/06/2013 | CN102956416A Oxidation method of silicon microchannel plate |
| 03/06/2013 | CN102955046A Monolithic integrated CMOS (Complementary Metal Oxide Semiconductor) MEMS (Micro-electromechanical Systems) multilayer metal three-axis capacitive accelerometer and manufacturing method thereof |
| 03/06/2013 | CN102951604A Preparation method for three-dimensional metal micro-nanometer device |
| 03/06/2013 | CN102951603A Methods to form substrates for optical sensing by surface enhanced raman spectroscopy (sers) and substrates formed by methods |
| 03/06/2013 | CN102951602A Energy conversion device and methods of manufacturing and operating same |
| 03/06/2013 | CN102951601A Method for manufacturing micromechanical structure, and micromechanical structure |
| 03/06/2013 | CN102951600A Antibody fragment modified micro-cantilever preparation method, and immunity sensing detection system based on antibody fragment modified micro-cantilever |
| 03/06/2013 | CN102951599A Preparation method of microcantilever modified by antibody fragments, and microcantilever immune sensing detection system based on antibody fragment modification |
| 03/06/2013 | CN102951598A Preparation method of microcantilever modified by antibody fragments, and microcantilever immune sensing detection system based on antibody fragment modification |
| 03/06/2013 | CN102951597A Preparation method of micro-bridge structured infrared detector, and micro-bridge structure |
| 03/06/2013 | CN102951595A Structure and method for motion sensor |
| 03/06/2013 | CN102951594A Tube shell for vacuum package of micro-optical-electronic-mechanic system and manufacture method thereof |
| 03/06/2013 | CN102951592A Multilayered nonon membrane in a mems sensor |
| 03/06/2013 | CN102951591A Micro-channel structure for catching circulating tumor cells and preparation method thereof |
| 03/06/2013 | CN102393251B Two-layer micrometering bolometer and manufacturing method thereof |
| 03/06/2013 | CN102060263B Preparation of ZnO/ ZnS/ Ag nano-rod array in microchannel |
| 03/06/2013 | CN101968495B Cantilever beam acceleration transducer manufactured by micro-machining on single side of single silicon chip and method |
| 03/06/2013 | CN101877362B Silicon substrate with period structure |
| 02/28/2013 | WO2013027123A1 Method for producing periodic crystalline silicon nanostructures |
| 02/28/2013 | US20130047738 Platform with aspherical membrane bed, pressure sensor with such a platform and method for their manufacture |
| 02/28/2013 | DE102011111998A1 Verfahren zur Strukturierung einer Oberfläche Method for structuring a surface |
| 02/28/2013 | DE102011081641A1 Sensor und Verfahren zum Herstellen eines Sensors Sensor and method for manufacturing a sensor |
| 02/27/2013 | EP2562836A1 Piezoelectric actuator and manufacturing method for piezoelectric actuator |
| 02/27/2013 | CN102947217A Method for manufacturing hermetically sealed structure |
| 02/27/2013 | CN102944545A Nano-gold surface-enhanced Raman active substrate with layered three-dimensional structure and method for preparing same |
| 02/27/2013 | CN102944544A Recycling surface-reinforced Raman scattering substrate as well as preparation method and application |
| 02/27/2013 | CN102944339A Piezoresistive pressure sensor of MEMS (Micro-Electro-Mechanical Systems) and preparation method thereof |
| 02/27/2013 | CN102942158A Manufacturing method of detection structure |
| 02/27/2013 | CN102942157A Flow sensor manufacturing method by the way of positive corrosion |
| 02/27/2013 | CN102175381B Pressure sensor and preparation method thereof based on composite plating of carbon nano tube and metallic copper |
| 02/27/2013 | CN101936992B Method for quickly detecting colibacillus and used micro flow control chip as well as preparation technique |
| 02/26/2013 | US8382896 High throughput screening of crystallization materials |
| 02/21/2013 | WO2013025800A2 Ultra-light micro-lattices and a method for forming the same |
| 02/21/2013 | WO2013023446A1 Cavity manufacturing method |
| 02/21/2013 | DE102012106710A1 Chip-Montagevorrichtung und Verfahren zur Chip-Montage Chip mounting apparatus and method for mounting chip- |
| 02/21/2013 | DE102011084582B3 Micromechanical sensor device, particularly micromechanical pressure sensors, microphones, acceleration sensors or optical sensors, has substrate, circuit chip fixed on substrate and mold package, in which circuit chip is packaged |
| 02/21/2013 | DE102011081033A1 Verfahren zur Herstellung einer mikromechanischen Struktur und mikromechanische Struktur A process for producing a micromechanical structure and micromechanical structure |
| 02/21/2013 | DE102011081014A1 Micromechanical component used in e.g. acceleration sensor, has a stator electrode finger or an actuator electrode finger which partially overlaps a separating trench formed partially surrounding the outer side of a movable mass |
| 02/21/2013 | DE102011081002A1 Mikromechanisches Bauteil, durch ein Herstellungsverfahren hergestelltes Zwischenprodukt und Herstellungsverfahren für ein mikromechanisches Bauteil Micromechanical component, produced by a production process and an intermediate production method for a micromechanical component |
| 02/21/2013 | DE102011080978A1 Verfahren zur Herstellung einer mikromechanischen Struktur und mikromechanische Struktur A process for producing a micromechanical structure and micromechanical structure |
| 02/20/2013 | EP2558407A2 Method for manufacturing a hermetically sealed structure |
| 02/20/2013 | EP2558406A2 Microelectronic component |
| 02/20/2013 | CN102937651A Giant magneto-impedance effect biosensor preparation method for serum tumor marker detection |
| 02/20/2013 | CN102935996A Preparation method of miniaturized magnetic fluxgate biosensor for serum tumor marker detection |
| 02/20/2013 | CN102935995A Post-CMOS integrated method for threshold presetting |
| 02/20/2013 | CN102935994A Novel CMOS-MEMS compatible uncooled infrared sensor pixel level packaging method |
| 02/20/2013 | CN102935993A Single-arm beam device made of two-dimensional electronic materials and production method thereof |
| 02/20/2013 | CN102279210B Double-sensitive-layer gas sensor based on nano fiber and particle adhesion layer and preparation method of double-sensitive-layer gas sensor |
| 02/19/2013 | CA2498669C Method for selectively covering a micro machined surface |
| 02/14/2013 | WO2013021425A1 Electronic device having variable capacitance element and method for manufacturing same |
| 02/14/2013 | WO2013020275A1 Manufacturing method of mems piezoresistive pressure chip and sensor |
| 02/14/2013 | DE102011110166A1 Verfahren zum Strukturieren eines aus glasartigem Material bestehenden Flächensubstrats sowie optisches Bauelement A method for patterning a substrate consisting of glassy material surface and optical component |
| 02/14/2013 | DE102011080898A1 Einglättende Schicht für metallische Werkstücke Einglättende layer for metal workpieces |
| 02/13/2013 | EP2556015A1 Free form printing of silicon micro- and nanostructures |
| 02/13/2013 | CN102933628A Self-assemblable polymer and method for use in lithography |
| 02/13/2013 | CN102928977A Manufacturing method for micro electro mechanical system (MEMS) micromirror bistable state structure and optical switch |
| 02/13/2013 | CN102928596A Giant magneto-impedance effect biosensor for detecting serum tumor markers |
| 02/13/2013 | CN102928460A Film heat flux sensor and preparation method thereof |
| 02/13/2013 | CN102928391A Silicon nanowire ordered array-based pH fluorescence sensor and manufacturing method and application thereof |
| 02/13/2013 | CN102928153A Three-dimensional vacuum sensor and preparation method of three-dimensional vacuum sensor |
| 02/13/2013 | CN102928089A Uncooled pyroelectric linear focal plane and manufacturing method thereof |
| 02/13/2013 | CN102923645A High-density nano electrode array and preparation method thereof |
| 02/13/2013 | CN102923644A Three-dimensional vacuum sensor and manufacturing method thereof |
| 02/13/2013 | CN102923643A Method for producing novel micro-fluidic chip based on industrial standard printed circuit board process |
| 02/13/2013 | CN102923642A Side wall flatting method of high aspect ratio silicon structure |
| 02/13/2013 | CN102923641A Method for preparing nano channel with unsymmetrical wettability on two sides |
| 02/13/2013 | CN102923640A Semiconductor device having Au-Cu electrodes and method of manufacturing semiconductor device |
| 02/13/2013 | CN102923639A Precise molding method of biomimetic micro-channel system based on plant veins |
| 02/13/2013 | CN102923636A 半导体结构及其制作方法 Semiconductor structure and fabrication method |
| 02/13/2013 | CN102923635A Nanofluid diode and manufacturing method thereof |
| 02/13/2013 | CN102476789B Metamaterial manufacturing method |
| 02/13/2013 | CN102252878B Off-Gel free flow electrophoresis coupling chip and making method thereof |
| 02/13/2013 | CN102169088B Monomolecular detection method |
| 02/13/2013 | CN101867080B Bulk silicon micro mechanic resonator and manufacturing method thereof |
| 02/13/2013 | CN101591015B Preparation method of banded carbon nano tube film |
| 02/13/2013 | CN101557875B Device for the intake or manipulation of a liquid |
| 02/13/2013 | CN101051114B Piano mems with hidden hinge |
| 02/12/2013 | US8372676 Integrated getter area for wafer level encapsulated microelectromechanical systems |
| 02/08/2013 | DE202012102039U1 Nanostruktur Nanostructure |
| 02/07/2013 | WO2013020039A2 Elimination of silicon residues from mems cavity floor |
| 02/07/2013 | WO2013019864A1 Method of manufacturing a switch system |
| 02/07/2013 | WO2013019510A1 Mems force sensors fabricated using paper substrates |
| 02/07/2013 | DE102011104843B4 Mikrospiegelbauteil mit linienförmiger Biegefeder sowie Verfahren zu dessen Herstellung Micro-mirror device having line-shaped bending spring and to processes for the preparation thereof |
| 02/07/2013 | DE102009016487B4 Mikrofonchip Microphone chip |
| 02/06/2013 | EP2554510A2 A method of making a microfluidic device |
| 02/06/2013 | CN102917793A Method for manufacturing a microfluidic chip, and related chip and plate |
| 02/06/2013 | CN102914582A Voltammetric sensor plated with conductive polymer nanometer film and preparation method thereof |
| 02/06/2013 | CN102914395A Nano stress sensor based on metal nano gap and preparation method thereof |
| 02/06/2013 | CN102910576A Method for producing high-sensitivity surface reinforcement Raman sensor chip |
| 02/06/2013 | CN102910575A Manufacture method of polymer nano channel |
| 02/06/2013 | CN102910574A Manufacturing method for non-silicon MEMS micro-channel group |
| 02/06/2013 | CN102910573A Preparation method of SERS (Surface Enhanced Raman Scattering) active substrate of multilevel metal micro-nano structure array with removable protection layer |
| 02/06/2013 | CN102910572A Etching method for releasing MEMS (Micro-electromechanical Systems) suspension bridge structure |
| 02/06/2013 | CN102909204A Method for cleaning wafer after deep silicon etching process |
| 02/06/2013 | CN102213784B Manufacturing method for dynamically-stamped reflective optical grating |
| 01/31/2013 | WO2013015671A1 A piezoresistive accelerometer |