| Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526) |
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| 04/03/2013 | CN103025648A Method for functionalising fluid lines contained in a micromechanical device, micromechanical device including functionalised lines, and method for manufacturing same |
| 04/03/2013 | CN103023371A Micro-nano integrated generator and manufacturing method thereof |
| 04/03/2013 | CN103019034A Positive-type photosensitive resin composition, cured film and manufacturing method thereof, pattern, mems structure manufacturing method, dry and wet etching method |
| 04/03/2013 | CN103018429A Structure used for biologic detection chip of silicon nanowire and manufacturing method of structure |
| 04/03/2013 | CN103018288A Controllable heating and defrosting capacitive type high-altitude humidity sensor and manufacturing method thereof |
| 04/03/2013 | CN103017946A Micro-electromechanical system (MEMS) piezoresistive multi-axis force sensor and production method thereof |
| 04/03/2013 | CN103011065A Mass production method of wafer level glass micro-cavities |
| 04/03/2013 | CN103011064A Method for preparing substructure less than 10 nanometers on nanometer material surface |
| 04/03/2013 | CN103011063A Capillary forming method for preparing super oleophobic surface |
| 04/03/2013 | CN103011062A Microfluid preparation method based on LED UV lamplight |
| 04/03/2013 | CN103011061A Novel tandem type coil electromagnetic energy collector |
| 04/03/2013 | CN103011060A Method for preparing hemispheric micro-nano lens array |
| 04/03/2013 | CN103011059A Method for regulating structure of nanosphere convex plane array type SERS (Surface Enhanced Raman Scattering) substrate |
| 04/03/2013 | CN103011058A Method for preparing three-dimensional hollow micro nanometer functional structure by utilizing laser direct writing |
| 04/03/2013 | CN103011057A Preparation method of capacitive barometric sensor of micro-electronic-mechanical system |
| 04/03/2013 | CN103011056A Method for enhancing bonding strength of SOG (silicon on glass) process microstructure |
| 04/03/2013 | CN103011055A Microparticle production device and production method |
| 04/03/2013 | CN103011054A Method of manufacturing an electromechanical transducer |
| 04/03/2013 | CN103011053A Face-down exposed packaging structure of sensor chip and packaging method |
| 04/03/2013 | CN103011052A Sacrificial layer of MEMS (Micro-Electro-Mechanical-System) device, MEMS device and manufacturing method thereof |
| 04/03/2013 | CN103011051A Electronic device, manufacturing method thereof, and electronic apparatus |
| 04/03/2013 | CN103011050A Semiconductor package and method of fabricating the same |
| 04/03/2013 | CN103011048A Isolation structure, semiconductor device having the same, and method for fabricating the isolation structure |
| 04/03/2013 | CN102621805B Method for preparing micro-nano-channels based on liquid-gas equilibrium polymer nano-channels self-building mechanism |
| 04/03/2013 | CN102331443B Acetone gas sensor and manufacturing method thereof |
| 04/03/2013 | CN102134053B Manufacturing method of biaxial MEMS (micro-electro-mechanical system) gyroscope |
| 04/03/2013 | CN102086021B Method for preparing micro-nano-scale-span integrated channel |
| 04/03/2013 | CN101619954B Completely-integrated impact piece ignitor and preparation method thereof |
| 03/28/2013 | WO2013040839A1 Metamaterial and preparation method therefor |
| 03/28/2013 | DE112011100505T5 Verfahren zur herstellung eines fotoaktiven substrats, das zur mikrofertigung geeignet ist Process for the preparation of a photoactive substrate, which is suitable for microfabrication |
| 03/28/2013 | DE112006001203B4 Verfahren zum Bilden eines hoch auflösenden Musters A method for forming a high-resolution pattern |
| 03/28/2013 | DE102011083644A1 Mikromechanische Sensorvorrichtung mit beweglichem Gate und entsprechendes Herstellungsverfahren Micromechanical sensor device with movable gate and method of manufacture |
| 03/28/2013 | DE102004036433B4 Mikromechanisches Bauteil und Verfahren zur Herstellung eines solchen Bauteils Micromechanical element and process for producing such a component |
| 03/27/2013 | CN103000362A Preparation method of flexible substrate-based folding spiral inductor provided with magnetic core |
| 03/27/2013 | CN102998479A Two-dimensional wind speed and wind direction sensor of aluminum nitride based integrated array structure and manufacture method of sensor |
| 03/27/2013 | CN102998037A Dielectric isolation piezoresistive pressure sensor and method for manufacturing same |
| 03/27/2013 | CN102992261A Glass micro-structure hydrogenation positive pressure thermal forming method |
| 03/27/2013 | CN102992260A Method and system of fabricating PZT nanoparticle ink based piezoelectric sensor |
| 03/27/2013 | CN102992259A Method for manufacturing nano-grade graph with dynamic-mode nanolithography technology under solution system |
| 03/27/2013 | CN102992258A Integrated circuit and manufacturing method thereof |
| 03/27/2013 | CN102426176B Gas sensor and manufacturing technique thereof |
| 03/27/2013 | CN102297689B Electrostatically driven piezoelectric detection closed loop controlled micro-solid modal gyro |
| 03/27/2013 | CN102261979B Low-range piezoresistive pressure sensor for vacuum measurement and manufacturing method thereof |
| 03/27/2013 | CN102180437B Graphene-based infrared smart transparent film device and preparation method thereof |
| 03/27/2013 | CN102176506B Transverse micro electro mechanical system (MEMS) microactuator adopting piezoelectric thick film actuating and manufacturing method thereof |
| 03/27/2013 | CN102046514B Device with miniature electromechanical system sensor and preparation method thereof |
| 03/27/2013 | CN101995295B Non-refrigerating infrared focal plane array as well as preparation method and application thereof |
| 03/27/2013 | CN101993032B Method for manufacturing microstructural film pattern and TFT-LCD array substrate |
| 03/26/2013 | US8405170 Packaging for micro electro-mechanical systems and methods of fabricating thereof |
| 03/26/2013 | US8405150 Contoured insulator layer of silicon-on-insulator wafers and process of manufacture |
| 03/21/2013 | WO2013037196A1 Method for manufacturing cavity of full silicon-based microfluidic device |
| 03/21/2013 | WO2013020039A3 Elimination of silicon residues from mems cavity floor |
| 03/21/2013 | WO2012177954A3 Bi-metallic actuators |
| 03/21/2013 | DE102012216695A1 Mikrolinsenarray und verfahren zum herstellen eines mikrolinsenarrays Microlens array and method of manufacturing a microlens array |
| 03/21/2013 | DE102012204178B3 Mikrostrukturbauteil und Verfahren zu dessen Herstellung Microstructured component and process for its preparation |
| 03/20/2013 | EP2571048A2 Method for producing a structure with a cavity sealed hermetically under a controlled atmosphere |
| 03/20/2013 | CN102982727A Microstructured device and method of fabrication |
| 03/20/2013 | CN102981360A Manufacturing method of micro-nano speckle |
| 03/20/2013 | CN102981271A Manufacturing method of electrostatic-driven micro-electro-mechanical system (MEMS) deformable mirror with large-stroke structure |
| 03/20/2013 | CN102980920A Silicon nanowire chip simultaneously detecting miRNAs and protein markers and detection method and application of silicon nanowire chip |
| 03/20/2013 | CN102980695A MEMS (Micro Electro Mechanical System) piezoresistive type absolute pressure sensor based on SOI (Silicon on Insulator) silicon chip |
| 03/20/2013 | CN102980694A MEMS piezoresistive pressure transducer without strain membrane structure and manufacture method thereof |
| 03/20/2013 | CN102980566A Conical ring fluctuation micromechanical gyroscope and preparation method thereof |
| 03/20/2013 | CN102980565A Circular ring fluctuation micromechanical gyroscope and preparation method thereof |
| 03/20/2013 | CN102978582A Production device of pure tungsten capillary tube |
| 03/20/2013 | CN102976265A Manufacturing method for size-controllable wafer level glass micro-cavity |
| 03/20/2013 | CN102976264A Method for preparing self-supporting multilayer micro nano structure |
| 03/20/2013 | CN102976263A Method for preparing micro-electromechanical system (MEMS) piezoresistive multi-axis sensor |
| 03/20/2013 | CN102253238B Static suspension six-axis micro accelerometer and manufacturing method thereof |
| 03/20/2013 | CN102023234B Micromachined accelerometer with monolithic electrodes and method of making the same |
| 03/20/2013 | CN101917784B Three-dimensional micro heater with groove-shaped heating film region and manufacturing method thereof |
| 03/19/2013 | US8399383 Used to assay simultaneously the presence, amount, and/or function of proteins present in a protein sample/chip, or to assay the presence, relative specificity, and binding affinity of each probe in a mixture of probes for each of the proteins |
| 03/14/2013 | WO2013036436A1 Mechanical layer for interferometric modulators and methods of making the same |
| 03/14/2013 | WO2013036394A2 High area stacked layered metallic structures and related methods |
| 03/14/2013 | WO2013036115A1 Process to coat an active agent to a surface |
| 03/14/2013 | WO2013034394A1 Component and method for producing a component |
| 03/14/2013 | DE102012216150A1 Mikroelektromechanisches System mit Biegeauslenkung der Rückplattenstruktur The micro-electro mechanical system with bending deflection of the backplate structure |
| 03/13/2013 | EP2567401A1 Process for minimizing chipping when separating mems dies on a wafer |
| 03/13/2013 | EP2566808A2 Counterbearing with aspherical membrane bed, pressure sensor comprising such a counterbearing and method for the production thereof |
| 03/13/2013 | EP2566807A1 Method for integrating mems microswitches on gan substrates comprising electronic power components |
| 03/13/2013 | CN102967556A Micro-flow control chip machining and detection experiment device based on digital micro-mirror device |
| 03/13/2013 | CN102967407A Absolute pressure transducer chip and production method thereof |
| 03/13/2013 | CN102967394A Symmetrical capacitor pressure sensor and manufacture method thereof |
| 03/13/2013 | CN102963864A Method for sealing wafer-level micro-cavity based on BCB (benzocyclobutene) glue |
| 03/13/2013 | CN102963863A Preparation method of flexible silicon-carbide thin film with tunable hydrophilicity and hydrophobility |
| 03/13/2013 | CN102963862A Manufacturing method of net-shaped mono-crystalline silicon nano-wire array structure |
| 03/13/2013 | CN102963861A Method for determining etching time of sacrificial layer in real time |
| 03/13/2013 | CN102963860A Manufacturing method of infrared detector with microbridge structure |
| 03/13/2013 | CN102963859A Testing structure for corrosion time of sacrificial layer and preparation method of MEMS (Micro-electromechanical System) device |
| 03/13/2013 | CN102963858A Micro-electromechanical device and manufacturing method thereof |
| 03/13/2013 | CN102963856A A micro-electro-mechanical system device and a manufacture method thereof |
| 03/13/2013 | CN102338681B Planar silicon pressure sensor and manufacturing method thereof |
| 03/13/2013 | CN101661012B Microfilm capacitive type surface stress sensor used for biochemical detection and manufacture method thereof |
| 03/13/2013 | CN101644725B Mems probe fabricating a probe card on a reusable substrate |
| 03/13/2013 | CN101631739B Method for manufacturing MEMS microphone |
| 03/07/2013 | WO2013033526A2 Mems device anchoring |
| 03/07/2013 | WO2013032821A1 Piezoelectric microphone fabricated on glass |
| 03/07/2013 | WO2013032820A1 Piezoelectric microphone fabricated on glass |
| 03/07/2013 | WO2013032725A2 Glass as a substrate material and a final package for mems and ic devices |
| 03/07/2013 | DE102012108305A1 Sensorbauelement und Verfahren Sensor device and method |