| Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526) |
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| 05/08/2013 | CN102190483B Three-dimensional micro-nano material composed of nano CoFe2O4 and preparation method thereof |
| 05/08/2013 | CN102126703B Two-dimensional multi-shell hollow sphere ordered structure array and preparation method thereof |
| 05/08/2013 | CN101830428B Method for manufacturing super hydrophobic surface by microneedle array |
| 05/02/2013 | WO2013061313A1 Method for manufacturing a protective layer against hf etching, semiconductor device provided with the protective layer and method for manufacturing the semiconductor device |
| 05/02/2013 | WO2013036394A3 High area stacked layered metallic structures and related methods |
| 05/02/2013 | DE112011102135T5 MEMS-Strukturen mit planarem Hohlraum und verwandte Strukturen, Herstellungsverfahren und Design-Strukturen MEMS structures with planar cavity and related structures, manufacturing processes and design structures |
| 05/02/2013 | DE102012209838A1 Halbleiterdrucksensor und Verfahren zum Herstellen eines Halbleiterdrucksensors A semiconductor pressure sensor and method for manufacturing a semiconductor pressure sensor |
| 05/02/2013 | DE102012203052A1 Transparent metallic oxide layer used for electrode for solar cell, touch screen and display apparatus, is obtained by depositing gallium-doped zinc oxide material on substrate, and coating element of specific group on layer |
| 05/02/2013 | DE102012200740A1 Mikromechanisches Bauelement und Verfahren zur Herstellung eines mikromechanischen Bauelements Micromechanical component and process for producing a micromechanical component |
| 05/02/2013 | DE102011085371A1 Lab-on-chip for e.g. analytic applications, has structure and film layers that are formed in bonding regions and below recess portions, and non-bonding areas that are provided under metallic portions provided in structured metal films |
| 05/01/2013 | EP2586742A1 Electronic component package and method of manufacturing the same |
| 05/01/2013 | EP2586741A2 Structure for airtight encapsulation of a device and an electronic component |
| 05/01/2013 | CN103080197A A polymeric substrate having a glass-like surface and a chip made of said polymeric substrate |
| 05/01/2013 | CN103076676A Manufacturing methods of micromechanical optical grating with adjustable blazing angle |
| 05/01/2013 | CN103075954A Micro-nano manufacturing method for curved surface structure electric field type time grating angular displacement sensor |
| 05/01/2013 | CN103075573A Micro-fluidic chip-based electric field response micro valve and preparation method thereof |
| 05/01/2013 | CN103075572A Micro-fluidic chip-based pH (Potential of Hydrogen) response micro valve and preparation method thereof |
| 05/01/2013 | CN103072943A Method for fixing etching sample |
| 05/01/2013 | CN103072942A Method for preparing NiO ordered nanowire array doped with Pt in situ |
| 05/01/2013 | CN103072941A Method for preparing self-packaging of MEMS (micro electro mechanical systems) device based on surface sacrificial layer technology |
| 05/01/2013 | CN103072940A Metal microstructure processing method based on blue laser direct writing |
| 05/01/2013 | CN103072939A Temperature-controlled deep silicon etching method |
| 05/01/2013 | CN103072938A Preparation method of planar carbon film electrode |
| 05/01/2013 | CN101949878B Polyimide film miniature quick-response humidity sensing element and manufacturing method thereof |
| 05/01/2013 | CN101808933B Multicomponent sacrificial structure |
| 05/01/2013 | CN101795961B Tool for making microstructured articles |
| 05/01/2013 | CN101033057B Microstructure, semiconductor device, and manufacturing method of the microstructure |
| 04/25/2013 | WO2013059715A2 Iron based alloys for bioabsorbable stent |
| 04/25/2013 | WO2013059345A1 Stacked vias for vertical integration |
| 04/25/2013 | WO2013032726A3 Glass as a substrate material and a final package for mems and ic devices |
| 04/25/2013 | WO2013032725A3 Glass as a substrate material and a final package for mems and ic devices |
| 04/25/2013 | WO2013025800A3 Ultra-light micro-lattices and a method for forming the same |
| 04/25/2013 | US20130102101 Wafer Level Packaging |
| 04/25/2013 | US20130098865 Angle control of multi-cavity molded components for mems and nems group assembly |
| 04/25/2013 | DE102011085084A1 Verfahren zum Herstellen einer elektrischen Durchkontaktierung in einem Substrat sowie Substrat mit einer elektrischen Durchkontaktierung A method of making an electrical plated-through hole in a substrate as well as substrate to an electrical through-contact |
| 04/25/2013 | DE102011054789A1 Nano-Formgebungsstruktur Nano-forming structure |
| 04/24/2013 | EP2583936A1 Optical air slit and method for manufacturing optical air slits |
| 04/24/2013 | CN103063352A Micro electro mechanical system pressure sensor and manufacture method thereof and micro electro mechanical system |
| 04/24/2013 | CN103063351A Micro electro mechanical system pressure sensor and manufacture method thereof and micro electro mechanical system |
| 04/24/2013 | CN103063350A Micro-electromechanical system (MEMS) pressure sensor array, manufacturing method of the same, and pressure measuring method |
| 04/24/2013 | CN103058130A Fixture and method for preventing corrosion of back face of wafer |
| 04/24/2013 | CN103058129A Method for preparing semiconductor sub-micron band on flexible substrate, and flexible optical waveguide |
| 04/24/2013 | CN103058128A Non-uniform hot pressing deformation method of preparing of super oleophobic surface |
| 04/24/2013 | CN103058127A Surface treatment method of micro-strip |
| 04/24/2013 | CN103058126A Processing method for surface electrodes of three-dimensional quartz micro-mechanical structure |
| 04/24/2013 | CN103058125A Method for producing electrical feedthrough in substrate, and substrate having electrical feedthrough |
| 04/24/2013 | CN103058124A Copper oxide grading array film and preparation method thereof |
| 04/24/2013 | CN102530849B Large-breadth microstructural processing system based on moving-iron electromechanical transducer and processing method thereof |
| 04/24/2013 | CN102359828B Micro-electronic temperature sensor and manufacturing process thereof |
| 04/24/2013 | CN102353811B Microelectronic acceleration sensor and manufacturing process thereof |
| 04/24/2013 | CN102175910B Micro-electro-mechanical system (MEMS) microwave power automatic detection system, detection method and preparation method thereof |
| 04/24/2013 | CN101351400B Method for manufacturing micromechanical components |
| 04/18/2013 | WO2013013831A8 A substrate surface structured with thermally stable metal alloy nanoparticles, a method for preparing the same and uses thereof, in particular as a catalyst |
| 04/18/2013 | DE102012207048A1 Method for manufacturing e.g. field faucet mirror of illumination optical device, involves arranging structural element with broken mirror element so that one of defective mirror elements is provided out of range of reflection surfaces |
| 04/18/2013 | DE102011084575A1 Method for forming e.g. isolating, semiconducting and high-conductive structured polymer layer on substrate, involves applying radiation energy into transfer mask so that polymer layer is released from light-absorbing areas |
| 04/17/2013 | EP2581339A2 Electronic device encapsulation structure and method for making such a structure |
| 04/17/2013 | EP2581338A1 Method for encapsulating microdevice by transferring cover and depositing getter through the cover |
| 04/17/2013 | EP2580155A1 Three-dimensional metal-coated nanostructures on substrate surfaces, method for producing same and use thereof |
| 04/17/2013 | CN202885979U Uncooled pyroelectric linear array focal plane |
| 04/17/2013 | CN103048784A Passively-driven MEMS (Micro Electro Mechanical Systems) optical switch and machining process |
| 04/17/2013 | CN103048487A Wind speed and wind direction sensor with high sensitivity |
| 04/17/2013 | CN103043602A Fabrication method of measuring mechanism for seebeck coefficient of nano-scale material |
| 04/17/2013 | CN103043601A High-adaptability uniform film formation method and device for nanomaterial on substrate |
| 04/17/2013 | CN103043600A Preparation method of three-dimensional self-supporting micro-nano functional structure based on thin film material |
| 04/17/2013 | CN103043599A Preparation method of flexible polymer substrate-based spiral inductor |
| 04/17/2013 | CN103043598A Method for compositely controlling micro-mechanical component by ultrasonic radiation force and moment |
| 04/17/2013 | CN103043597A Method for preparing metal micro-nano array electrode by using ZnO crystal as template |
| 04/17/2013 | CN103043596A Flexible material with micron and nano composite array structure and preparation method and application of flexible material |
| 04/17/2013 | CN103043595A Mildew proof antibacterial material with bionic micrometer structure surface and preparation method thereof |
| 04/17/2013 | CN102134052B Making method of MIS capacitor lower piezoresistance structure adopting substrate grid |
| 04/17/2013 | CN102092670B Carbon nano-tube composite structure and preparation method thereof |
| 04/17/2013 | CN102086019B Method for manufacturing monolithic polysilicon cantilever structure |
| 04/17/2013 | CN101795505B Low-power consumption micro-heater with mesh-structured heating film and fabrication method thereof |
| 04/11/2013 | WO2013051245A1 Method and apparatus for laser-beam processing and method for manufacturing ink jet head |
| 04/11/2013 | WO2013050338A1 Method to provide a patterned orientation template for a self-assemblable polymer |
| 04/11/2013 | US20130087866 Micro-electromechanical semiconductor component and method for the production thereof |
| 04/11/2013 | DE102009006064B4 Verfahren zur Herstellung eines mikrostrukturierten Films A process for producing a microstructured film |
| 04/11/2013 | DE102008013116B4 Verfahren zur Erzeugung einer mikromechanischen Struktur Method for producing a micromechanical structure |
| 04/10/2013 | EP2577395A1 Lithography method for doubled pitch |
| 04/10/2013 | EP2576429A2 Component with a via and method for producing it |
| 04/10/2013 | EP2576056A1 Method for manufacturing a microfluidic chip, and related chip and plate |
| 04/10/2013 | CN103039091A Backplate for microphone |
| 04/10/2013 | CN103038156A Component with a via and method for producing it |
| 04/10/2013 | CN103033927A Method for manufacturing optical deflector for forming dicing street with double etching |
| 04/10/2013 | CN103033770A Giant magneto-impedance effect two-dimensional magnetic field sensor |
| 04/10/2013 | CN103030100A Method for preparing sub-wavelength silicon nano-wire array with antireflection characteristic |
| 04/10/2013 | CN103030099A Gas-assisted forming method for producing ultra-oleophobic surface |
| 04/10/2013 | CN103030098A Method for manufacturing large-area nano gap electrode arrays in parallel |
| 04/10/2013 | CN103030097A Method for preparing wafer level low-dimensional nanostructures based on electrostatic field self-focusing |
| 04/10/2013 | CN103030096A Silicon material with nano-structure surface and manufacturing method thereof |
| 04/10/2013 | CN103030095A Silver nanoparticle-modified zinc oxide nanorod array and preparation method and application thereof |
| 04/10/2013 | CN103030094A Infrared emission and split integrated chip and preparation method thereof |
| 04/10/2013 | CN102426060B Terahertz or infrared micro-bolometer and manufacturing method thereof |
| 04/10/2013 | CN102020236B Micro-electromechanical system chip and package method thereof |
| 04/10/2013 | CN102015523B Micromechanical component and method for producing the same |
| 04/09/2013 | US8415754 Capped integrated device with protective cap, composite wafer incorporating integrated devices and process for bonding integrated devices with respective protective caps |
| 04/04/2013 | DE112011102136T5 Mikroelektromechanisches System Micro-Electro-Mechanical System |
| 04/04/2013 | DE112011102134T5 MEMS-Strukturen mit planarem Hohlraum und verwandte Strukturen, Herstellungsverfahren und Design-Strukturen MEMS structures with planar cavity and related structures, manufacturing processes and design structures |
| 04/04/2013 | DE102012217807A1 Thermoelektrische vorrichtung und verfahren zum herstellen derselben A thermoelectric device and method for manufacturing the same |
| 04/03/2013 | EP2574974A1 Method of manufacturing optical deflector by forming dicing street with double etching |