| Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526) |
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| 06/05/2013 | CN101765462B Methods of macromolecular analysis using nanochannel arrays |
| 06/05/2013 | CN101458260B Method of manufacturing a microfluid component comprising at least one microchannel filled with nanostructures |
| 06/04/2013 | USRE44255 Support for microelectronic, microoptoelectronic or micromechanical devices |
| 06/04/2013 | US8455258 Apparatus and methods for conducting assays and high throughput screening |
| 06/04/2013 | US8455174 Polymers, methods of use thereof, and methods of decomposition thereof |
| 06/04/2013 | US8454844 Microneedle structure and production method therefor |
| 05/30/2013 | WO2013078364A1 Articles, systems, and methods relating to thermal stability of nanostructured and/or microstructured materials |
| 05/30/2013 | WO2013077691A1 Superhydrophobic substrate and method for manufacturing same |
| 05/30/2013 | WO2013076845A1 Actuator manufacturing method and actuator |
| 05/30/2013 | WO2013075901A1 Process for manufacturing an encapsulating device |
| 05/30/2013 | US20130137207 Media-compatible electrically isolated pressure sensor for high temperature applications |
| 05/30/2013 | US20130135971 Method for manufacturing capacitive micromachined ultrasonic transducer and apparatus configured to obtain subject information using the capacitive micromachined ultrasonic transducer |
| 05/30/2013 | US20130134528 Etchant-free methods of producing a gap between two layers, and devices produced thereby |
| 05/29/2013 | EP2597067A1 Method for manufacturing an encapsulation device |
| 05/29/2013 | DE102012022829A1 Verfahren zum Herstellen von isolierten Halbleiterstrukturen A method for producing isolated semiconductor structures |
| 05/29/2013 | DE102011119610A1 Verfahren zur Herstellung strukturierter optischer Komponenten A process for the production of structured optical components |
| 05/29/2013 | DE102011119349A1 Method for manufacturing thin layer sense element i.e. strain gauge, in industry, involves producing sensor substrate by applying liquid polyimide phase to carrier, and carrying out poly-imidization by action of elevated temperature |
| 05/29/2013 | DE102004010907B4 Optische Vorrichtung mit Mikrolinsen-Anordnung, sowie Verfahren zu ihrer Herstellung An optical device with micro lens array, and to processes for their preparation |
| 05/29/2013 | CN202956137U Thin-film temperature ablation composite sensor |
| 05/29/2013 | CN103121660A Microfluid-system-oriented glass-based bionic microchannel processing device and method |
| 05/29/2013 | CN103121659A Method for processing microstructure on highly oriented pyrolytic graphite by using photolithography technique |
| 05/29/2013 | CN103121658A Silicon epitaxy manufacturing method of capacitive triaxial micro gyroscope |
| 05/29/2013 | CN103121657A Micro electrical mechanical system with bending deflection of backplate structure |
| 05/29/2013 | CN101982764B Composite membrane modified biosensor and preparation method and application thereof |
| 05/28/2013 | USRE44246 Method for containing a device and a corresponding device |
| 05/28/2013 | US8450816 Method for manufacturing a microelectromechanical component; and a microelectromechanical component |
| 05/23/2013 | WO2013073160A1 Method and device for detecting termination of etching |
| 05/23/2013 | WO2013072440A1 Medicament guiding assembly for a drug delivery device |
| 05/23/2013 | WO2012170499A3 Nanopore fabrication and applications thereof |
| 05/23/2013 | US20130126992 MEMS Chip Package and Method for Manufacturing an MEMS Chip Package |
| 05/23/2013 | US20130126466 Method for Producing a Dielectric Layer on a Component |
| 05/23/2013 | DE102011086856A1 Mikrofluidische Membranventilvorrichtung und entsprechendes Herstellungsverfahren Microfluidic diaphragm valve device and corresponding manufacturing method |
| 05/23/2013 | DE102011086765A1 Chip mit mikro-elektromechanischer Struktur und Verfahren zum Herstellen eines Chips mit mikro-elektromechanischer Struktur Chip with micro-electro-mechanical structure and method of manufacturing a chip with micro-electro-mechanical structure |
| 05/23/2013 | DE102011086722A1 Mikromechanische Funktionsvorrichtung, insbesondere Lautsprechervorrichtung, und entsprechendes Herstellungsverfahren Micromechanical device function, particularly the speaker apparatus, and corresponding method of production |
| 05/23/2013 | DE102011055562A1 Microsystem component e.g. pressure sensor component has electrical terminal surface that is arranged in specific region of indentation portion so as to electrically connect with functional element covered by covering portion |
| 05/22/2013 | EP2594313A2 Hollow microneedle having a variable appearance |
| 05/22/2013 | CN103119082A Sacrificial polymer compositions including polycarbonates having repeat units derived from stereospecific polycyclic 2,3-diol monomers |
| 05/22/2013 | CN103117199A Pine-shaped nanometer array field emitting negative pole manufacturing method |
| 05/22/2013 | CN103116242A Method for preparing heterostructure without aligning nano press printing |
| 05/22/2013 | CN103116037A Quartz vibration beam accelerometer and manufacture method thereof |
| 05/22/2013 | CN103115947A Preparation method and application of carbon-doped mesoporous metal oxide acetone sensor |
| 05/22/2013 | CN103115719A Resonance-type micro electromechanical system wing wind power sensor and manufacturing method thereof |
| 05/22/2013 | CN103115704A High-temperature pressure sensor and production method thereof |
| 05/22/2013 | CN103115703A Micro capacitance-type wall shear stress sensor and manufacturing method thereof based on through silicon via (TSV) technology |
| 05/22/2013 | CN103112818A Method of manufacturing metal electrodes on single micro-nano line by utilizing scanning electron microscope |
| 05/22/2013 | CN103112817A Tower-type pier of uncooled infrared detector and manufacture method thereof |
| 05/22/2013 | CN103112816A Method for preparing pyramid array on monocrystalline silicon substrate |
| 05/22/2013 | CN102180439B Carbon microstructure with graphene integrated on surface and preparation method thereof |
| 05/22/2013 | CN102139855B Manufacturing method of micro-nano cantilever beam structure for hypersensitive detection |
| 05/22/2013 | CN102095766B Miniature integrated temperature control type CO2 gas sensor and manufacturing method thereof |
| 05/22/2013 | CN102030303B Microstructure manufacturing method |
| 05/22/2013 | CN101935857B Preparation method of friction-reduction anti-adhesion nano organic film based on micro device |
| 05/22/2013 | CN101920928B Composite micromechanical part and method for manufacturing same |
| 05/21/2013 | US8445210 Microfabricated crossflow devices and methods |
| 05/16/2013 | WO2013071051A1 Method and apparatus for wafer-level solder hermetic seal encapsulation of mems devices |
| 05/16/2013 | WO2013070583A1 Patterning of antistiction films for electromechanical systems devices |
| 05/16/2013 | WO2013070013A1 Mems sensor packaging and method thereof |
| 05/16/2013 | WO2013068633A2 Methods and systems for cmos-based radio-frequency filters of mems having organized sets of elements |
| 05/16/2013 | WO2013068474A1 Improved process for producing a device comprising cavities formed between a suspended element resting on insulating pads semi-buried in a substrate and this substrate |
| 05/16/2013 | WO2013067977A1 A method for anchoring nanostructures and/or layer of gold onto surface of a base material, a substrate comprising base material with anchored nanostructures and/or layer of gold |
| 05/16/2013 | US20130119492 Miniaturized Electrical Component Comprising an MEMS and an ASIC and Production Method |
| 05/16/2013 | US20130119441 Microelectronic device and mems package structure and fabricating method thereof |
| 05/16/2013 | US20130119046 Misalignment correction for embedded microelectronic die applications |
| 05/16/2013 | DE102011118273A1 Herstellung einer Halbleitereinrichtung mit mindestens einem säulen- oder wandförmigen Halbleiter-Element Manufacturing a semiconductor device having at least one columnar or wall-like semiconductor element |
| 05/16/2013 | DE102008062499B4 MEMS-Bauelemente und Verfahren zur Herstellung derselben MEMS devices and methods for manufacturing the same |
| 05/15/2013 | EP2590892A1 Method for preparing microfluidic devices |
| 05/15/2013 | EP2590891A1 Method for producing an integrated microfluidic system and integrated microfluidic system |
| 05/15/2013 | EP2590889A1 Switchable surfaces based on freely floating colloidal particles |
| 05/15/2013 | CN103107737A Piezoelectric friction combined type micro-nano generator and prepared method thereof |
| 05/15/2013 | CN103107137A Manufacturing method of chip |
| 05/15/2013 | CN103101961A Preparation method of zinc oxide nanotube array |
| 05/15/2013 | CN103101878A Method for preparing silicon-based microelectrode |
| 05/15/2013 | CN103101877A Preparation method of gas sensitive element based on ordered nanowire arrays |
| 05/15/2013 | CN103101876A Method for preparing silicon cone structure on (111) type silicon wafer |
| 05/15/2013 | CN103101875A Semiconductor package and method of fabricating the same |
| 05/15/2013 | CN102120562B Auxiliary pressurizing device for chip bonding |
| 05/14/2013 | US8440546 Methods and devices for fabricating and assembling printable semiconductor elements |
| 05/14/2013 | US8440089 Three-dimensional structure and its manufacturing method |
| 05/10/2013 | WO2013067184A2 Method of making a nozzle |
| 05/10/2013 | WO2013066824A1 Encapsulation of ems devices on glass |
| 05/10/2013 | WO2013066773A1 Method of improving thin-film encapsulation for an electromechanical systems assembly |
| 05/09/2013 | US20130115730 Low-Temperature Wafer Level Processing for MEMS Devices |
| 05/09/2013 | US20130115433 Micromechanical system |
| 05/08/2013 | EP2588405A1 Method for functionalising fluid lines contained in a micromechanical device, micromechanical device including functionalised lines, and method for manufacturing same |
| 05/08/2013 | DE102011085723A1 Bauelement und Verfahren zur Herstellung eines Bauelements Device and method for manufacturing a device |
| 05/08/2013 | DE102010006132B4 Miniaturisiertes elektrisches Bauelement mit einem Stapel aus einem MEMS und einem ASIC Miniaturized electrical component comprising a stack of a MEMS and an ASIC |
| 05/08/2013 | CN103098180A Treatment liquid for inhibiting pattern collapse in microstructures and method for manufacturing microstructures by using said treatment liquid |
| 05/08/2013 | CN103098179A Processing liquid for suppressing pattern collapse of microstructure and method for producing microstructure using same |
| 05/08/2013 | CN103094698A Metamaterial microstructure and preparation method thereof |
| 05/08/2013 | CN103091982A Microtube fabrication process |
| 05/08/2013 | CN103091979A Nanoimprint template as well as preparation method and application thereof |
| 05/08/2013 | CN103091510A Micromechanical Component And Method For Manufacturing A Micromechanical Component |
| 05/08/2013 | CN103091368A CMOS Compatible Biofet |
| 05/08/2013 | CN103090779A Eddy current sensor chip based on resonant structure and manufacture method of eddy current sensor chip |
| 05/08/2013 | CN103086321A Method for manufacturing monocrystalline silicon nano-long needle point on (111) type silicon chip |
| 05/08/2013 | CN103086320A Novel manufacturing method of hot wire micro-sensor with flexible wall surface |
| 05/08/2013 | CN103086319A Induction preparation process for electric field with dry adhesion type two-level structure |
| 05/08/2013 | CN103086318A Micro-electromechanical system (MEMS) silicon wafer scribing and cutting and structure releasing method |
| 05/08/2013 | CN103086317A Fusing method of substrate layer, manufacturing method of microfluidic chip and fusing apparatus of substrate layer |
| 05/08/2013 | CN103086316A MEMS vertical comb micro-mirror surface driver manufacturing method |