| Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526) |
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| 07/03/2013 | CN102185097B Piezoelectric stacking type MEMS (Micro-electromechanical System) vibration energy collector and manufacturing method thereof |
| 07/03/2013 | CN102147414B Nano probe based method for detecting trace proteins by using microfluidic chip |
| 07/03/2013 | CN101585507B Method for producing through-hole structure in PDMS micro-fluidic chip |
| 07/03/2013 | CN101566506B Structure of film thermoelectric converter based on micro bridge resonator and fabricating method thereof |
| 07/02/2013 | US8476096 Packaging for micro electro-mechanical systems and methods of fabricating thereof |
| 06/27/2013 | WO2013095260A1 Insulation of micro structures |
| 06/27/2013 | WO2013095147A1 Method of bonding two substrates and device manufactured thereby |
| 06/27/2013 | DE102011089798A1 Massiv paralleler Test molekularer Wechselwirkungen basierend auf magnetischen Nano- und Mikropartikeln Massively parallel testing of molecular interactions based on magnetic nanoparticles and microparticles |
| 06/27/2013 | DE102011089752A1 Verfahren zur Herstellung von Silizium-Mikronadelarrays mit Löchern und Mikronadelarray Process for the preparation of silicon microneedle arrays with holes and microneedle array |
| 06/27/2013 | DE102011089569A1 Verfahren zum Verbinden zweier Siliziumsubstrate und entsprechende Anordnung zweier Siliziumsubstrate A method of joining two silicon substrates and corresponding arrangement of two silicon substrates |
| 06/26/2013 | EP2608255A1 Method of bonding two substrates and device manufactured thereby |
| 06/26/2013 | EP2607974A1 Method for manufacturing a resonator |
| 06/26/2013 | CN103180240A Wafer-scale package including power source |
| 06/26/2013 | CN103175552A Capacitive transducer, manufacturing method thereof, and multi-function device possessing the same |
| 06/26/2013 | CN103172044A Carbon nanotube paper preparation method |
| 06/26/2013 | CN103172017A Method for manufacturing super-hydrophobic silicon substrate |
| 06/26/2013 | CN103172016A Preparation method of zinc oxide nano-wire pattern |
| 06/26/2013 | CN103172015A Method for producing silicon microneedle arrays with holes and microneedle array |
| 06/26/2013 | CN102007066B Patch production |
| 06/20/2013 | WO2013090887A1 Motion sensor integrated nano-probe n/mems apparatus, method and applications |
| 06/20/2013 | WO2013089845A2 Method for etching material longitudinally spaced from etch mask |
| 06/20/2013 | WO2013089635A1 Thin film capping |
| 06/20/2013 | WO2013087888A1 3d microfluidic system having nested areas and a built-in reservoir, method for the preparing same, and uses thereof |
| 06/20/2013 | US20130152688 Micro-electro-mechanical sensing device and manufacturing method thereof |
| 06/20/2013 | DE102012223550A1 Mikromechanisches Halbleitererfassungsbauelement The micromechanical semiconductor detection device |
| 06/20/2013 | DE102012221818A1 Strukturen und entwurfsstrukturen mikroelektromechanischer systeme (mems) Structures and structures design of microelectromechanical systems (mems) |
| 06/20/2013 | DE102012221815A1 Kondensatoreinheiten mit mikroelektromechanischer struktur (mems), kondensatortrimmung dieser und design-strukturen Capacitor units with micro-electro-mechanical structure (mems), this kondensatortrimmung and design structures |
| 06/19/2013 | EP2604344A2 Methods of macromolecular analysis using nanochannel arrays |
| 06/19/2013 | EP2603449A1 Method for producing a mems apparatus with a high aspect ratio, and converter and capacitor |
| 06/19/2013 | CN203012350U Fine convex-concave pattern substrate, mould and wire grid polarizer |
| 06/19/2013 | CN103168000A Anti-stiction method in an inertial mems, corresponding computer program product, storage means and device |
| 06/19/2013 | CN103165362A Method for releasing vacuum paraffin filling structure of silicon microchannel plate |
| 06/19/2013 | CN103162727A Sensing device and fabricating method thereof |
| 06/19/2013 | CN103159501A Preparation method of core shell Si/Fe2O3 nanowire array |
| 06/19/2013 | CN103159167A Sensor encapsulation equipment |
| 06/19/2013 | CN103159166A Efficient micro-array processing device based on parasitic motion principle |
| 06/19/2013 | CN103159165A Method for preparing patterning silicon nanometer well array |
| 06/19/2013 | CN103159164A Electric-field-induced impressing method for high-depth-to-width-ratio microcolumn array |
| 06/19/2013 | CN103159163A Substrate etching method and substrate processing device |
| 06/19/2013 | CN103159162A Method of producing microporous diaphragm |
| 06/18/2013 | US8465698 Microfluidic apparatus with integrated porous-substrate/sensor for real-time (BIO) chemical molecule detection |
| 06/13/2013 | WO2013086083A1 Packaging compatible wafer level capping of mems devices |
| 06/13/2013 | WO2013085561A1 Net-shape structure with micro-truss core |
| 06/13/2013 | US20130147313 Method for producing a MEMS apparatus with a high aspect ratio, and converter and capacitor |
| 06/13/2013 | US20130146994 Method for manufacturing a hermetically sealed structure |
| 06/13/2013 | DE102011120498A1 Werkzeug zum Erzeugen einer Schicht mit mikrostruktuierter Außenfläche auf einer Substratoberfläche Tool for providing a layer having mikrostruktuierter outer surface on a substrate surface |
| 06/12/2013 | EP2602610A1 Microfluidic chip manufacturing method, microfluidic chip, and device for generating surface plasmon resonance light |
| 06/12/2013 | EP2601239A1 Polymer composition for microelectronic assembly |
| 06/12/2013 | EP2601238A1 Sacrificial polymer compositions including polycarbonates having repeat units derived from stereospecific polycyclic 2,3-diol monomers |
| 06/12/2013 | CN202994696U Thin-film heat flux sensor |
| 06/12/2013 | CN202988706U Micro-particle production device |
| 06/12/2013 | CN202988705U Micromachining control device based on diamond cutter |
| 06/12/2013 | CN103154081A Polymer composition for microelectronic assembly |
| 06/12/2013 | CN103153841A Method and device for restoring and maintaining superhydrophobicity under liquid |
| 06/12/2013 | CN103149606A Method for performing real-time monitoring and quality control on in-site formed optical microlens manufacturing |
| 06/12/2013 | CN103149424A Heat-shield type MEMS (Micro-Electromechanical System) microwave power sensor |
| 06/12/2013 | CN103149423A Low-temperature double-layer isolating micro-electromechanical system (MEMS) microwave power sensor |
| 06/12/2013 | CN103145095A Preparation method of panchromatic structural color or color variation pattern array |
| 06/12/2013 | CN103145094A Micro machining method for bulk silicon for forming cavity structure of MEMS (micro-electromechanical systems) thermopile detector |
| 06/12/2013 | CN103145093A Preparation method of comb tooth clearance silicon micro-inertial component with high depth-to-width ratio |
| 06/12/2013 | CN103145092A Nano etching seal and method for carrying out nano etching by utilizing nano etching seal |
| 06/12/2013 | CN103145091A Method for preparing electrostatic actuation structure with staggered teeth |
| 06/12/2013 | CN103145090A Method for producing a thin single crystal silicon having large surface area |
| 06/12/2013 | CN103145089A Reverse thermal bonding technology for making micro and nano fluid system with controllable size |
| 06/12/2013 | CN103145088A MEMS (micro-electromechanical system) chip and wafer level encapsulation cover plate grounding method of MEMS chip |
| 06/12/2013 | CN102384984B Capacitive single-mass block full comb electrode sensor for triaxial acceleration and manufacturing method thereof |
| 06/12/2013 | CN102305256B Metal micrometer/nanometer spring as well as preparation method and application thereof |
| 06/12/2013 | CN102297737B Pressure sensor cavity structure and manufacturing method thereof |
| 06/12/2013 | CN102134054B Method for fabricating MEMS device |
| 06/12/2013 | CN101644605B Thermopile sensor and method of manufacturing same |
| 06/12/2013 | CN101622542B Microchip manufacturing method |
| 06/12/2013 | CN101414701B Microelectron mechanical socle beam type microwave power coupler and preparation method thereof |
| 06/11/2013 | US8460962 Capacitive MEMS switch and method of fabricating the same |
| 06/06/2013 | WO2013082315A1 Thin back glass interconnect |
| 06/06/2013 | WO2013082027A1 Two state three electrode drive scheme |
| 06/06/2013 | WO2013033526A3 Mems device anchoring |
| 06/06/2013 | US20130143347 Methods and devices for fabricating tri-layer beams |
| 06/06/2013 | US20130140678 Insulator layer based mems devices |
| 06/06/2013 | US20130140656 MEMS Microphone And Method For Producing The MEMS Microphone |
| 06/06/2013 | US20130140181 Apparatus and Methods for Conducting Assays and High Throughput Screening |
| 06/06/2013 | US20130139592 Mems multi-axis gyroscope z-axis electrode structure |
| 06/06/2013 | DE102012100825A1 Vorrichtung zum Bearbeiten eines Substrats und Verfahren hierzu An apparatus for processing a substrate and method therefor |
| 06/06/2013 | DE102009018849B4 Masterstruktur zum Prägen und/oder Bedrucken eines Grundmaterials, Vorrichtung zum kontinuierlichen Prägen und/oder Bedrucken eines Grundmaterials und Verfahren zum Herstellen einer Masterstruktur zum Prägen und/oder Bedrucken eines Grundmaterials Master structure for embossing and / or printing a base material, apparatus for continuously embossing and / or printing a base material and method for producing a master structure for embossing and / or printing a base material |
| 06/06/2013 | DE102008037947B4 Verfahren zum Herstellen eines Element-Wafer und eines Elements A method of manufacturing a wafer-element and an element |
| 06/06/2013 | DE102007028288B4 Mit akustischen Wellen arbeitendes MEMS Bauelement und Verfahren zur Herstellung With acoustic waves working MEMS device and methods for preparing |
| 06/05/2013 | EP2599747A2 Method of manufacturing resonant transducer |
| 06/05/2013 | EP2599746A1 Process for forming a structure having at least a multi-thickness active part |
| 06/05/2013 | EP2599745A1 Fabrication of a MEMS device having moving parts of different thicknesses. |
| 06/05/2013 | EP2598560A2 A polymeric substrate having a glass-like surface and a chip made of said polymeric substrate |
| 06/05/2013 | EP2598433A2 Method and device for restoring and maintaining superhydrophobicity under liquid |
| 06/05/2013 | CN103137438A Method for forming functional part in minute space |
| 06/05/2013 | CN103130179A Method of manufacturing resonant transducer |
| 06/05/2013 | CN103130178A Method for manufacturing capacitive micromachined ultrasonic transducer and apparatus configured to obtain subject information |
| 06/05/2013 | CN103130177A Suspension structure micro-electro-mechanical-systems (MEMS) device and manufacturing method thereof |
| 06/05/2013 | CN103130176A Micromechanical functional apparatus, particularly a loudspeaker apparatus, and appropriate method of manufacture |
| 06/05/2013 | CN103130175A MEMS chip package and method for manufacturing an MEMS chip package |
| 06/05/2013 | CN103130174A MEMS devices and methods for forming the same |
| 06/05/2013 | CN102353324B Flexible semi-clarity strain sensor and preparation method thereof |
| 06/05/2013 | CN102107848B Method of manufacturing suspension radio frequency switch |
| 06/05/2013 | CN102033135B Integrated microfluidic chip interface mould |