| Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526) |
|---|
| 07/25/2013 | WO2013108994A1 Gradient index lens using effective refractive index of microstructure arranged in radial pattern, and method for manufacturing same |
| 07/25/2013 | WO2013108199A1 Reversible switching between super hydrophobic and super hydrophilic states |
| 07/25/2013 | US20130189492 Registered structure formation via the application of directed thermal energy to diblock copolymer films |
| 07/25/2013 | DE102013100673A1 Sensorbauelement und Verfahren Sensor device and method |
| 07/25/2013 | DE102012200929A1 Mikromechanische Struktur und Verfahren zur Herstellung einer mikromechanischen Struktur Micromechanical structure and method for making a micromechanical structure |
| 07/25/2013 | DE102012100476A1 Producing thin polymer films useful in laser particle accelerators, comprises e.g. applying a separating layer medium on deposition substrate, applying a polymer material on e.g. separating layer medium, and separating the polymer material |
| 07/24/2013 | EP2616822A1 Micromachined 3-axis accelerometer with a single proof-mass |
| 07/24/2013 | EP2616772A2 Micromachined monolithic 3-axis gyroscope with single drive |
| 07/24/2013 | EP2616771A2 Micromachined monolithic 6-axis inertial sensor |
| 07/24/2013 | EP2616389A2 Multi-die mems package |
| 07/24/2013 | EP2616388A2 Sealed packaging for microelectromechanical systems |
| 07/24/2013 | CN203079678U Tray used in MEMS (micro-electromechanical system) silicon wafer scribing, cutting and structure releasing method |
| 07/24/2013 | CN103221846A Microstructured articles comprising nanostructures and method |
| 07/24/2013 | CN103221795A Microelectromechanical pressure sensor including reference capacitor |
| 07/24/2013 | CN103221487A Controlling morphology of block copolymers |
| 07/24/2013 | CN103221458A Method for the manufacture of articles of thiol-ene polymers |
| 07/24/2013 | CN103221333A Multi-die MEMS package |
| 07/24/2013 | CN103221331A Sealed packaging for microelectromechanical systems |
| 07/24/2013 | CN103221330A Sensor comprising a preferably multilayered ceramic substrate and method for producing it |
| 07/24/2013 | CN103219587A Terahertz front-end integrated receiving device based on bulk silicon MEMS (micro-electromechanical system) technical antenna |
| 07/24/2013 | CN103213943A Method for processing and leveling micro-channel of polymer chip |
| 07/24/2013 | CN103213942A Preparation method of passive wireless capacitance type humidity sensor |
| 07/24/2013 | CN103213941A Pad lead structure based on trinocular optical stereoscopic microscope |
| 07/24/2013 | CN103213940A Micro nano scale based method for endowing material with two different wettability |
| 07/24/2013 | CN103213939A Processing method of four-mass-block silicon micro-electromechanical gyro structure mechanism |
| 07/24/2013 | CN103213938A Surface-enhanced Raman active substrate with gold nano cap array and preparation method thereof |
| 07/24/2013 | CN103213937A Semiconductor package and method and system for fabricating the same |
| 07/24/2013 | CN103213934A Micromechanical structure and method for manufacturing a micromechanical structure |
| 07/24/2013 | CN102502585B Method for directly growing carbon nano onion on iron-based amorphous powder |
| 07/24/2013 | CN102156203B MEMS (micro-electromechanical system) inertial sensor and forming method of MEMS inertial sensor |
| 07/24/2013 | CN102139854B MEMS (micro electro mechanical system) structure and manufacturing method thereof |
| 07/18/2013 | WO2013106783A1 Electrostatically transduced sensors composed of photochemically etched glass |
| 07/18/2013 | WO2013106285A2 Structures formed using monocrystalline silicon and/or other materials for optical and other applications |
| 07/18/2013 | WO2013104608A1 Improved patch area cell adhesion |
| 07/18/2013 | WO2013104499A1 Self-assemblable polymer and methods for use in lithography |
| 07/18/2013 | WO2013033032A3 Method and apparatus for release-assisted microcontact printing of mems |
| 07/18/2013 | US20130183833 Laser micro/nano processing system and method |
| 07/18/2013 | US20130181302 Method for making a suspended membrane structure with buried electrode |
| 07/18/2013 | DE102012200655A1 Method for manufacturing micromechanical arrangement, particularly micromechanical sensors, involves providing substrate with casualty layer above it, where micromechanical functional structure is formed on casualty layer |
| 07/17/2013 | EP2615632A1 Treatment liquid for inhibiting pattern collapse in microstructures, and microstructure manufacturing method using said treatment liquid |
| 07/17/2013 | EP2615631A1 Processing liquid for suppressing pattern collapse of microstructure, and method for producing microstructure using same |
| 07/17/2013 | CN103209922A Through silicon via with reduced shunt capacitance |
| 07/17/2013 | CN103207021A High-performance micro-electromechanical system (MEMS) thermopile infrared detector structure and manufacturing method thereof |
| 07/17/2013 | CN103204461A Semiconductor structure and forming method thereof |
| 07/17/2013 | CN103204460A Production method of metal micro-nano structure based on laser interference induced cross-linking reaction |
| 07/17/2013 | CN103204459A Forming method of flexible substrate film surface micro-structure |
| 07/17/2013 | CN103204458A Ultraviolet polymerization electret based self-assembly method |
| 07/17/2013 | CN103204457A Production method of aluminum alloy bionic superhydrophobic surface |
| 07/17/2013 | CN103204456A Support structure for TSV in MEMS structure |
| 07/17/2013 | CN103204455A Controllable graphene array preparation method |
| 07/17/2013 | CN102565460B Continuous direct-writing nano particle solution scanning probe and manufacturing method thereof |
| 07/17/2013 | CN102375332B Suspension photoresist planarization technology for MEMS structure |
| 07/11/2013 | WO2013102637A1 Method for etching a complex pattern |
| 07/11/2013 | WO2013045766A3 Touch sensitive film, touch sensing device, and electronic device |
| 07/11/2013 | US20130178008 Method of making semiconductor device |
| 07/11/2013 | US20130177738 Method of forming a micro-structure |
| 07/11/2013 | US20130175643 Method for production of a structure with a buried electrode by direct transfer and stucture obtained in this manner |
| 07/11/2013 | DE102012200273A1 Elektronisches Bauteil mit korrosionsgeschützter Bondverbindung und Verfahren zur Herstellung des Bauteils Electronic component with a corrosion-resistant bond, and methods of producing the component |
| 07/10/2013 | EP2611594A1 Process for producing a microfluidic apparatus and related laminating devices |
| 07/10/2013 | CN203054328U Automatic focusing lens based on micro-electro-mechanical system |
| 07/10/2013 | CN103197137A Low-temperature double-layer isolation compensating type micro-electromechanical system (MEMS) microwave power sensor |
| 07/10/2013 | CN103196613A High-temperature CMUT pressure sensor and preparation method thereof |
| 07/10/2013 | CN103193198A Method for reducing packaging stress of micro-electromechanical system (MEMS) chip through back graphics |
| 07/10/2013 | CN103193197A Preparation method of micro device movable structure based on silicon/glass anodic bonding |
| 07/10/2013 | CN103193196A Assembling method of three-dimensional micro-nano structure |
| 07/10/2013 | CN103193195A Redistribution method of heavy doping boron silicon slice |
| 07/10/2013 | CN103193194A Manufacturing method of ordered nanometer microstructure based on dielectrophoresis assembly of silver nanoparticles |
| 07/10/2013 | CN103193193A MEMS device and method of forming same |
| 07/10/2013 | CN103193192A Method for isolating functional structure Si and sacrificial layer Si in bulk silicon machining |
| 07/10/2013 | CN103193191A Cantilever beam structure with high response sensitivity and method for making same |
| 07/10/2013 | CN103193190A Infrared-terahertz dual-band array detector microbridge structure and production method thereof |
| 07/10/2013 | CN103193189A Multielectrode nanopore device for DNA detection and production method thereof |
| 07/10/2013 | CN102517558B Porous metal/dielectric micro tube, and preparation method and application thereof |
| 07/10/2013 | CN102360120B Digital micro-mirror device and forming method thereof |
| 07/10/2013 | CN102354052B Digital micro-mirror device and forming method thereof |
| 07/10/2013 | CN101831163B Sacrificial compositions, methods of use thereof, and methods of decomposition thereof |
| 07/09/2013 | CA2700356C Sol-gel phase-reversible hydrogel templates and uses thereof |
| 07/04/2013 | WO2013097135A1 A silicon based mems microphone, a system and a package with the same |
| 07/04/2013 | US20130171418 Method of forming a nano-structure |
| 07/04/2013 | US20130170669 Strain and pressure sensing device, microphone, method for manufacturing strain and pressure sensing device, and method for manufacturing microphone |
| 07/04/2013 | US20130168784 Semiconductor package and fabrication method thereof |
| 07/04/2013 | US20130168675 Detection and Mitigation of Particle Contaminants in MEMS Devices |
| 07/04/2013 | DE112011103053T5 Steuerung der Abmessungen in Nanopren- und Nanofluidischen Einheiten mit Rückkopplung Dimensional control in Nanopren- and nanofluidic devices with feedback |
| 07/04/2013 | DE102012223979A1 Schaltbare Filter und Entwurfsstrukturen Switchable filter and design structures |
| 07/04/2013 | DE102012223968A1 Strukturen mit mikroelektromechanischem System (MEMS) und Design-Strukturen Structures with micro-electro-mechanical system (MEMS) structures and design |
| 07/03/2013 | EP2610008A1 Methods of macromolecular analysis using nanochannel arrays |
| 07/03/2013 | CN103189305A Feedback control of dimensions in nanopore and nanofluidic devices |
| 07/03/2013 | CN103187947A Switchable filters and design structures |
| 07/03/2013 | CN103185918A Micro-electro-mechanical adjustable nitride resonant grating and preparation method thereof |
| 07/03/2013 | CN103185909A Micro-electro-mechanical adjustable nitride resonant grating and double-sided processing method thereof |
| 07/03/2013 | CN103184886A Measuring component of MEMS (Micro-electromechanical Systems) technology-based gas alarm and preparation method of measuring component |
| 07/03/2013 | CN103184862A Three-dimensional MEMS (Micro-electromechanical Systems) accelerometer measurement part for petroleum well logging and preparation method thereof |
| 07/03/2013 | CN103183309A Micro-electro-mechanical system (MEMS) structures and design structures |
| 07/03/2013 | CN103183308A Al-Ge bonding method |
| 07/03/2013 | CN103183307A Making method of tensile stress LPCVD SiO2 membrane |
| 07/03/2013 | CN103183306A Microelectromechanical system device with electrical interconnections and method for fabricating the same |
| 07/03/2013 | CN103183304A Micro-electro-mechanical sensing element and manufacturing method thereof |
| 07/03/2013 | CN102507530B Method using gamma radiation for preparing nano-silver surface-enhanced Raman spectrum substrate |
| 07/03/2013 | CN102502537B Method for preparing porous aluminum nitride or gallium nitride slice or thin strip by dealloying |
| 07/03/2013 | CN102374910B Carbon nanotube / polymer composite membrane array type flexible force sensor and manufacturing method thereof |