| Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526) |
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| 10/02/2013 | DE102012204853A1 Verfahren zum Herstellen einer Dünnschicht auf einem Substrat A method for forming a thin film on a substrate |
| 10/02/2013 | DE102012204835A1 Sensor, Verfahren zum Herstellen eines Sensors und Verfahren zum Montieren eines Sensors Sensor, method of manufacturing a sensor and method for mounting a sensor |
| 10/02/2013 | CN203222475U Miniature device and encapsulation mold for same |
| 10/02/2013 | CN103337985A Single-surface friction power generator based on transverse friction and preparation method of single-surface friction power generator |
| 10/02/2013 | CN103335753A An ultramicro pressure sensor chip with a silicon-glass base-beam film structure and a manufacturing method |
| 10/02/2013 | CN103335751A A double-harmonic-oscillator silicon micro pressure transducer and a manufacturing method thereof |
| 10/02/2013 | CN103332649A Preparation method of polyvinylidene fluoride with one-dimensional nanowire array structure |
| 10/02/2013 | CN103332648A Electromodulation MEMS infrared source and fabrication method thereof |
| 10/01/2013 | US8546265 Method, apparatus and program for manufacturing silicon structure |
| 09/26/2013 | WO2013106285A3 Structures formed using monocrystalline silicon and/or other materials for optical and other applications |
| 09/26/2013 | WO2013036480A3 Backplate with recess and electronic component |
| 09/26/2013 | DE102013102896A1 Device for forming microstructured coating on surface of substrate for e.g. bearing area of airplane, has secondary pressure exerting elements mounted in curing zone, and application strand provided in contact with inner side of tape |
| 09/26/2013 | DE102012005546A1 Mikrospiegelanordnung und Verfahren zur Herstellung einer Mikrospiegelanordnung Micro-mirror array and method of manufacturing a micro-mirror array |
| 09/25/2013 | CN103328688A Vapour etch of silicon dioxide with improved selectivity |
| 09/25/2013 | CN103326695A Reconfigurable matching network matcher with MEMS switch |
| 09/25/2013 | CN103326094A Waveguide filter, manufacturing method thereof and communication device |
| 09/25/2013 | CN103325674A Constraint etching processing method of complex three-dimensional multistage micro-nano structures |
| 09/25/2013 | CN103323042A Capacitance-type ultrasonic sensor of integrated full-vibration conductive film structure and manufacturing method thereof |
| 09/25/2013 | CN103322994A Double-wafer integrated silicon-based super-thin micro-hemispherical resonator gyroscope and preparation method thereof |
| 09/25/2013 | CN103319931A Thermal annealing process |
| 09/25/2013 | CN103318838A Vacuum packaging method for micro-electro-mechanical system devices |
| 09/25/2013 | CN103318837A Flexible noise reduction bionic mebrane with blocking property and preparation method thereof |
| 09/25/2013 | CN103318836A Optical readout full-hollow focal plane array provided with thermal sink structures and manufacturing method thereof |
| 09/25/2013 | CN103318835A Hermetic seals for micro-electromechanical system device |
| 09/25/2013 | CN102419283B Micro tensile measurement unit and production method thereof |
| 09/25/2013 | CN102411087B 90-degree angle four-input micro electromechanical microwave power sensor and preparation method thereof |
| 09/25/2013 | CN102126697B Encapsulating structure with micro electromechanical component and manufacturing method thereof |
| 09/25/2013 | CN101927976B Infrared detector with micro-bridge structure and manufacturing method thereof |
| 09/24/2013 | US8541313 Method for etching a sacrificial layer for a micro-machined structure |
| 09/19/2013 | WO2013137831A1 A novel method to fabricate polymeric microneedles |
| 09/19/2013 | WO2013136185A2 Method of manufacture for a miniaturized drug delivery device |
| 09/19/2013 | US20130244181 Polymers, methods of use thereof, and methods of decomposition thereof |
| 09/19/2013 | US20130243663 Direct sealing of glass microstructures |
| 09/19/2013 | US20130241012 Eutectic bonding of thin chips on a carrier substrate |
| 09/19/2013 | US20130240336 Hybrid mems rf switch and method of fabricating same |
| 09/19/2013 | DE102012103174B3 Verfahren zur Herstellung eines mikrostrukturierten Formkörpers A process for producing a microstructured molding |
| 09/19/2013 | DE102012005262A1 Sensoranordnung aus Trägersubstrat und ferroelektrischer Schicht sowie Verfahren zur Herstellung und Verwendung der Sensoranordnung Sensor arrangement consisting of the carrier substrate and the ferroelectric layer, and methods for making and using the sensor arrangement |
| 09/18/2013 | EP2637966A1 Method for the production of a substrate comprising embedded layers of getter material |
| 09/18/2013 | CN103313794A Direct sealing of glass microstructures |
| 09/18/2013 | CN103313172A Micromechanical Sound Transducer Arrangement and a Corresponding Production Method |
| 09/18/2013 | CN103311221A Semiconductor device integrated with passive component |
| 09/18/2013 | CN103303862A Production method of high-sensitivity biochemical sensor based on resonance type micro-cantilever structure |
| 09/18/2013 | CN103303861A Three-dimensional ordered precious metal nanotube array electrode and preparation method thereof |
| 09/18/2013 | CN103303860A Method for generating 0-50nm of random-height nano step on surface of Si |
| 09/18/2013 | CN103303859A Methods and structures of integrated MEMS-CMOS devices |
| 09/18/2013 | CN103303858A Wet releasing method for silicon-based MEMS device by using KOH solution |
| 09/18/2013 | CN102255128B Micro electro mechanical clamped beam type directional microwave power coupler and manufacturing method thereof |
| 09/12/2013 | WO2013134592A2 Atomic layer deposition strengthening members and method of manufacture |
| 09/12/2013 | WO2013133767A1 A mems iris diaphragm for an optical system and method for adjusting a size of an aperture thereof |
| 09/12/2013 | WO2013131973A1 Method for producing a pressure sensor and corresponding sensor |
| 09/12/2013 | WO2013131586A1 Three-dimensional nano-sculptured structures of high surface-atom mobility materials and method of making same |
| 09/12/2013 | US20130236697 Microstructured articles comprising nanostructures and method |
| 09/12/2013 | DE102012203792A1 Infrarotsensor, Wärmebildkamera und Verfahren zum Herstellen einer Mikrostruktur aus thermoelektrischen Sensorstäben Infrared sensor, thermal imager and method of manufacturing a microstructure of the thermoelectric sensor bars |
| 09/12/2013 | DE102005000891B4 Verfahren zur Herstellung eines strukturierten Wafers A process for preparing a patterned wafer |
| 09/11/2013 | CN103295854A Carbon nano tube micro-tip structure and manufacturing method thereof |
| 09/11/2013 | CN103293660A Miniature F-P (Fabry-Perot) cavity tunable filter and method for manufacturing same |
| 09/11/2013 | CN103293338A Sensing component of capacitive acceleration sensor and manufacturing methods and applications of sensing component and capacitive acceleration sensor |
| 09/11/2013 | CN103293309A Carbon nano-tube micro-cantilever biosensor for detecting tumor markers |
| 09/11/2013 | CN103293204A Preparation method of iridium oxide microelectrode controlling electrochemical property by using activated circulation |
| 09/11/2013 | CN103293142A Flexible surface enhanced Raman spectrum base and preparation method thereof |
| 09/11/2013 | CN103293104A Multi-slit optical waveguide epitaxial grating FP (Fabry-Perot) cavity optical biochemical sensor chip |
| 09/11/2013 | CN103288043A High aspect ratio MEMS device and method for forming the same |
| 09/11/2013 | CN103288042A Nano-scale metamaterial microstructure and preparation method thereof |
| 09/11/2013 | CN103288041A V-shaped-structure MEMS (micro-electromechanical system) actuator for detonating sequence |
| 09/11/2013 | CN103288037A Micromechanical sensor arrangement, corresponding manufacturing method and application |
| 09/11/2013 | CN103288036A Micromechanical sensor apparatus with a movable gate, and corresponding production process |
| 09/11/2013 | CN103288034A Off-plane electrostatic driver and production method thereof |
| 09/11/2013 | CN103288033A Micro-tip structure of carbon nano tube and preparation method of structure |
| 09/11/2013 | CN102346164B Method for constructing uric acid sensor on the basis of super-long zinc oxide nano-wire |
| 09/11/2013 | CN102289148B Embedded micro-pinpoint electrode and manufacturing method thereof |
| 09/11/2013 | CN102015524B Graphoepitaxial self-assembly of arrays of downward facing half-cylinders |
| 09/11/2013 | CN101437749B Superhydrophobic surfaces and fabrication process |
| 09/05/2013 | US20130230934 System and method for miniaturization of synthetic jets |
| 09/04/2013 | EP2632848A1 Wafer-scale package including power source |
| 09/04/2013 | CN203178030U Optical fiber harmonic oscillator vacuum sensor |
| 09/04/2013 | CN103282816A Linearly deployed actuators |
| 09/04/2013 | CN103280615A Reconfigurable microwave low-pass filter with MEMS switch |
| 09/04/2013 | CN103274354A Preparation method of gecko structure simulating adhesive |
| 09/04/2013 | CN103274353A Preparation method for large area surface-enhanced Raman active substrate by inclination growth |
| 09/04/2013 | CN103274351A Electrochemistry geophone electrode sensitive core based on MEMS and manufacturing method thereof |
| 09/04/2013 | CN103274350A Heat insulation structure based on Parylene filling and preparation method thereof |
| 09/04/2013 | CN103274349A Thermal stress insulating MEMS micro heater interconnected substrate and method for manufacturing thermal stress insulating MEMS micro heater interconnected substrate |
| 09/04/2013 | CN102707378B Method for manufacturing silicone micro-nano optical structure by using imprinting technology |
| 09/04/2013 | CN102249183B CuO/TiO2 nanotube array and preparation method and application method thereof |
| 09/04/2013 | CN102079505B Ordered structure array of two-dimensional hollow balls and preparing method thereof |
| 09/04/2013 | CN101431172B Reconfigurable microwave low-pass filter containing MEMS switch and its manufacturing method |
| 08/29/2013 | WO2013126373A1 Electromechanical systems device |
| 08/29/2013 | WO2013081842A3 Encapsulated arrays of electromechanical systems devices |
| 08/29/2013 | US20130221457 Assembly of a capacitive acoustic transducer of the microelectromechanical type and package thereof |
| 08/29/2013 | US20130221456 Capacitance Type Micro-Silicon Microphone and Method for Making the Same |
| 08/29/2013 | US20130221411 Micromechanical sensor apparatus with a movable gate, and corresponding production process |
| 08/29/2013 | US20130220016 Microelectromechanical sensor with out-of-plane sensing and process for manufacturing a microelectromechanical sensor |
| 08/29/2013 | DE19964638B3 Sensor comprises a micromechanical structure based on silicon integrated in the sensor chamber of a base wafer and a cover made of a transparent deposition layer and a sealing layer |
| 08/29/2013 | DE10240401B4 Verfahren zum Ausbilden von Strukturen auf einem Wafer A method for forming structures on a wafer |
| 08/29/2013 | DE102013202484A1 SOI-Wafer und Verfahren zu seiner Herstellung SOI wafer and process for its preparation |
| 08/29/2013 | DE102012203135A1 Micromechanical sensor arrangement for use in navigation component for navigation in mobile terminal, has functional microelectromechanical system-regions integrated on front side of silicon substrate and rear side of silicon substrate |
| 08/29/2013 | DE102012202783A1 Mikromechanische Sensorvorrichtung mit beweglichem Gate und entsprechendes Herstellungsverfahren Micromechanical sensor device with movable gate and method of manufacture |
| 08/29/2013 | DE102012101505A1 Verfahren zur Herstellung eines Sensors A method for producing a sensor |
| 08/28/2013 | EP2499085B1 Micromechanical method and corresponding assembly for bonding semiconductor substrates and correspondingly bonded semiconductor chip |
| 08/28/2013 | CN102275864B Directional arrangement method for nickel-supported multi-walled carbon nanotubes |