| Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526) |
|---|
| 10/30/2013 | EP2655246A1 Graphene windows, methods for making same, and devices containing same |
| 10/30/2013 | CN203259470U Monolithic integrated miniature infrared gas sensor |
| 10/30/2013 | CN103378061A Semiconductor device, method of manufacturing semiconductor device, and electronic apparatus |
| 10/30/2013 | CN103373701A Method for producing an optical window device for a mems device |
| 10/30/2013 | CN103373700A Methods for producing a cavity within a semiconductor substrate |
| 10/30/2013 | CN103373699A Guide rail and system for conveying lead frames with pre-plastic package bodies |
| 10/30/2013 | CN103373698A Method for manufacturing MEMS (Micro Electro Mechanical System) and MEMS inertial sensor |
| 10/30/2013 | CN103373697A Hybrid integrated component and method for the manufacture thereof |
| 10/30/2013 | CN103373695A MEMS device structure and methods of forming same |
| 10/30/2013 | CN102584331B Method for preparing double-component and double-layer nano lubrication thin film by taking nano-particle array as template |
| 10/30/2013 | CN102418082B Method and device for preparing film coating micronano texture |
| 10/30/2013 | CN102097458B Methods and devices for fabricating and assembling printable semiconductor elements |
| 10/30/2013 | CN101048338B Fluid container composed of two plates |
| 10/24/2013 | US20130280842 Microelectromechanical device including an encapsulation layer of which a portion is removed to expose a substantially planar surface having a portion that is disposed outside and above a chamber and including a field region on which integrated circuits are formed, and methods for fabricating same |
| 10/24/2013 | US20130278907 Optical mems scanning micro-mirror with anti-speckle cover |
| 10/24/2013 | US20130277774 Method for manufacturing a hybrid integrated component |
| 10/24/2013 | US20130277772 Microelectromechanical pressure sensor including reference capacitor |
| 10/24/2013 | DE19843984B4 Verfahren zur Herstellung von Strahlungssensoren A process for the production of radiation sensors |
| 10/24/2013 | DE102012206732A1 Verfahren zum Herstellen eines hybrid integrierten Bauteils A method for manufacturing a hybrid integrated component |
| 10/23/2013 | EP2653530A2 Sequencer |
| 10/23/2013 | EP2653186A2 Method for manufacturing microstructure body |
| 10/23/2013 | CN103370783A Void-free wafer bonding using channels |
| 10/23/2013 | CN103369441A MEMS device, MEMS structure and method of making MEMS device |
| 10/23/2013 | CN103367247A Method for carrying out selective area deposition of silver nano particles on surface of PDMS (Polydimethylsiloxane) elastic body |
| 10/23/2013 | CN103364636A Micro-machinery cantilever capacitance type power sensor-based phase detector and manufacturing method of phase detector |
| 10/23/2013 | CN103364584A Piezoresistance type acceleration sensor containing silicon through holes and method for manufacturing same |
| 10/23/2013 | CN103364120A Silver-tin eutectic vacuum bonding metal variant-type MEMS pressure transistor and manufacturing method thereof |
| 10/23/2013 | CN103359683A Method for preparing magnetic tunnel junction (MTJ) nano column array |
| 10/23/2013 | CN103359682A MEMS nanostructures and methods of forming the same |
| 10/23/2013 | CN103359681A Sensor, method for producing sensor and method for mounting sensor |
| 10/23/2013 | CN103359680A Vacuum-packaged ultrathin MEMS chip and processing method thereof |
| 10/23/2013 | CN103359679A Electronic device and manufacturing method thereof, electronic apparatus, and moving body |
| 10/23/2013 | CN103359678A Semiconductor device and method of manufacturing same |
| 10/23/2013 | CN103359677A Infrared detector packaging structure and manufacturing method thereof |
| 10/22/2013 | US8562844 Methods using block co-polymer self-assembly for sub-lithographic patterning |
| 10/17/2013 | WO2013153028A1 Method for producing trench-like depressions in the surface of a wafer |
| 10/17/2013 | WO2013152899A1 Membrane arrangement for a micro-electromechanical measuring transducer and method for producing a membrane arrangement |
| 10/17/2013 | US20130273330 Silicon hardmask layer for directed self-assembly |
| 10/17/2013 | US20130270658 Methods for producing a cavity within a semiconductor substrate |
| 10/17/2013 | US20130270657 Micromachined monolithic 6-axis inertial sensor |
| 10/17/2013 | DE112004000219B4 Fluidausstoßvorrichtung The fluid ejection device |
| 10/17/2013 | DE10230252B4 Verfahren zur Herstellung integrierter Mikrosysteme A method for manufacturing integrated microsystems |
| 10/17/2013 | DE102012206531A1 Verfahren zur Erzeugung einer Kavität innerhalb eines Halbleitersubstrats A method for generating a cavity within a semiconductor substrate |
| 10/17/2013 | DE102012206280A1 Mikromechanisches Bauteil und Herstellungsverfahren für ein mikromechanisches Bauteil Micromechanical element and manufacturing method for a micromechanical component |
| 10/17/2013 | DE102012206269A1 Mikromechanisches Bauteil und Herstellungsverfahren für ein mikromechanisches Bauteil Micromechanical element and manufacturing method for a micromechanical component |
| 10/17/2013 | DE102012205921A1 Membrananordnung für einen mikro-elektromechanischen Messumformer und Verfahren zum Herstellen einer Membrananordnung Membrane assembly for a micro-electro-mechanical transducer and method for producing a membrane assembly |
| 10/17/2013 | DE102012103256A1 Mikrostrukturapparat mit optischer Oberflächengüte sowie Verfahren zur Herstellung desselben The same microstructure apparatus with optical surface quality and methods of making |
| 10/16/2013 | EP2650907A2 Methods and devices for fabricating and assembling printable semiconductor elements |
| 10/16/2013 | EP2650906A2 Methods and devices for fabricating and assembling printable semiconductor elements |
| 10/16/2013 | EP2650905A2 Methods and devices for fabricating and assembling printable semiconductor elements |
| 10/16/2013 | EP2650256A2 Method for manufacturing a microstructured device |
| 10/16/2013 | EP2650255A1 Method for producing a micro-nozzle |
| 10/16/2013 | EP2650254A1 Method for manufacturing a micro-nozzle |
| 10/16/2013 | EP2649006A1 Circuit comprising a component covered with a lid, method for producing such a circuit, and device for implementing said method |
| 10/16/2013 | EP2649005A1 Process for manufacturing electro-mechanical systems |
| 10/16/2013 | CN103350983A Integrated wafer-level vacuum packaged MEMS device and manufacturing method thereof |
| 10/16/2013 | CN103350982A Manufacturing method of micro-channel mold |
| 10/16/2013 | CN102243268B Micro-electro-mechanical directional coupling microwave power sensor and preparation method thereof |
| 10/16/2013 | CN102198924B Electronic device |
| 10/16/2013 | CN102173376B Preparation method for small silicon-based nano hollow array with orderly heights |
| 10/10/2013 | WO2013149685A1 Integrated circuit provided with a device for detecting the spatial orientation thereof and/or a change in said orientation |
| 10/10/2013 | WO2013149547A1 Multi-silicon trench forming method and etching mask structure thereof for mems sealing cap silicon chip |
| 10/10/2013 | US20130267049 Method for producing a structure comprising at least one active part having zones of different thicknesses |
| 10/10/2013 | DE102013205527A1 Mems-bauelement und verfahren zur herstellung eines mems-bauelements MEMS device and method of manufacturing a MEMS device |
| 10/10/2013 | DE102012221835B3 Normal-closed non-return valve for micro-fluidic component e.g. micro-pump of polymeric layer system e.g. lab-on-chip system, has seal surface formed between intake and increased roughness surface of valve element to close main portion |
| 10/10/2013 | DE102010022675B4 Verfahren zur Herstellung einer Hydrogel-Mikrostruktur A process for the preparation of a hydrogel microstructure |
| 10/09/2013 | EP2646858A2 Microstructured articles comprising nanostructures and method |
| 10/09/2013 | CN103347808A A silicon based mems microphone, a system and a package with the same |
| 10/09/2013 | CN103346699A V+U type composite beam micro actuator based on electric heating driving and preparation method thereof |
| 10/09/2013 | CN103345057A Miniature bridge-type structure and preparation method thereof |
| 10/09/2013 | CN103344831A Phase detector based on micromechanical direct thermoelectric power sensors and preparation method thereof |
| 10/09/2013 | CN103344374A Hidden-type MEMS pressure sensor sensitive chip and manufacturing method thereof |
| 10/09/2013 | CN103344229A Miniature hemispherical resonant gyroscope based on SOI (Silicon on Insulator) silicon slice and manufacturing method of miniature hemispherical resonant gyroscope |
| 10/09/2013 | CN103342339A Method for forming micro-channels |
| 10/09/2013 | CN103342338A Wafer level packaging method and packaging structure of MEMS (Micro Electronic and Mechanical System) chip |
| 10/09/2013 | CN103342337A Method for preparing mesoporous silicon nanowire by metal nanoparticle auxiliary etching method |
| 10/09/2013 | CN103342336A Preparation method of three-dimensional ordered macropore microelectrode |
| 10/09/2013 | CN103342335A System and method for aerating and plugging alkali metal steam chamber of mini type CPT atomic clock |
| 10/09/2013 | CN103342334A Method of processing surfaces of polymeric materials by using electrochemical etching |
| 10/09/2013 | CN103342333A Infrared thermopile type sensor based on CMOS DPTM process and manufacturing method thereof |
| 10/09/2013 | CN103342332A Integrated thermopile infrared detection system based on CMOS process and manufacturing method thereof |
| 10/09/2013 | CN102249182B Method for preparing magnetic/polymer composite material three-dimensional micro/nano device capable of being remotely magnetically driven |
| 10/09/2013 | CN101386401B Monitoring structure of infrared detector pixel stress and monitoring method |
| 10/08/2013 | US8551599 Reconfigurable microactuator and method of configuring same |
| 10/08/2013 | US8551315 Method for electromechanical fabrication |
| 10/03/2013 | WO2013148294A1 Super-hydrophilic structures |
| 10/03/2013 | WO2013148266A1 Cavity package design |
| 10/03/2013 | WO2013145287A1 Mems device and process for producing same |
| 10/03/2013 | WO2013145260A1 Electronic device and method for manufacturing same |
| 10/03/2013 | WO2013092920A3 Method of producing a resonator |
| 10/03/2013 | WO2013089845A3 Method for etching material longitudinally spaced from etch mask |
| 10/03/2013 | US20130260504 Method for fabricating micro-electro-mechanical systems (mems) device |
| 10/03/2013 | US20130260503 Methods and Apparatuses for Integrated Packaging of Microelectromechanical Devices |
| 10/03/2013 | US20130256919 Multifunction sensor as pop microwave pcb |
| 10/03/2013 | US20130256815 Cavity package design |
| 10/03/2013 | US20130256361 Apparatus for cutting transmission electron microscope micro-grids |
| 10/03/2013 | US20130256359 Method for cutting transmission electron microscope micro-grids |
| 10/02/2013 | EP2643413A1 Controlling morphology of block copolymers |
| 10/02/2013 | EP2643261A1 Method for the wafer-level integration of shape memory alloy wires |
| 10/02/2013 | DE102013205249A1 Halbleitervorrichtung und Herstellungsverfahren hierfür A semiconductor device and manufacturing method thereof |