Patents
Sitemap › B81 - Micro-structural technology › B81C - Processes or apparatus specially adapted for the manufacture or treatment of micro-structural devices or systems › B81C 1 - Manufacture or treatment of devices or systems in or on a substrate
Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526)
12/2013
12/04/2013CN103420321A Hybrid integrated component and method for the manufacture thereof
12/04/2013CN102388165B Mems device with integrated via and spacer
12/02/2013DE202010018039U1 Masken und/oder Blenden für eine Laseranlage zur Erzeugung von Mikrostrukturen auf einer Festkörperoberfläche, Mikrostruktur und Vorrichtung zur Herstellung dieser Masken und/oder Blenden sowie dieser Mikrostruktur Masks and / or diaphragms for a laser system for producing microstructures on a solid body surface, microstructure and apparatus for producing these masks and / or diaphragms and this microstructure
11/2013
11/28/2013WO2013176964A1 Method of forming a micro device transfer head with silicon electrode
11/28/2013WO2013176963A1 Micro device transfer head with silicon electrode
11/28/2013WO2013175127A1 Surface preparation method
11/28/2013WO2013144738A3 A deformable apparatus and method
11/28/2013WO2013095147A9 Method of bonding two substrates and device manufactured thereby
11/28/2013DE10334243B4 Mikromechanisches Verfahren zum Herstellen eines flexiblen Schichtelements Micromechanical method for producing a flexible layer member
11/28/2013DE102013209479A1 Verfahren zur Verarbeitung eines Wafers an unmaskierten Bereichen und zuvor maskierten Bereichen zur Reduzierung einer Waferdicke A method of processing a wafer to previously masked regions and unmasked regions to reduce a thickness of wafer
11/28/2013DE102012208492A1 Dehnmessstreifenanordnung Dehnmessstreifenanordnung
11/28/2013DE102011050722B4 Verfahren zur Herstellung eines mehrschichtigen Aufbaus mit einer mikrostrukturierten Oberfläche A process for preparing a multilayer structure with a microstructured surface
11/27/2013EP2666745A1 Electronic component package and method of manufacturing the same, and electronic component device
11/27/2013CN203310916U Phase detector based on micromechanical cantilever capacitive power sensor
11/27/2013CN203310915U Phase detector based on micro mechanical direct thermoelectric power sensor
11/27/2013CN203310419U Two-chip integrated silicon-based ultrathin micro-hemispherical resonator gyroscope
11/27/2013CN103412008A Pd-doped SnO2 nanowire gas sensor for detecting H2 under low temperature, and preparation method thereof
11/27/2013CN103407959A Three-dimensional electrode pattern manufacturing method
11/27/2013CN103407958A Production method of cavity-SOI (Silicon On Insulator)
11/27/2013CN102879609B Capacitive acceleration transducer for H-shaped beam and manufacturing method thereof
11/27/2013CN102796998B Method for operating and controlling position of nano-grating deposition substrate in vacuum vessel and device therefor
11/27/2013CN102435634B OTFT (Organic Field-Effect Transistor) integrated sensor array and production method thereof
11/27/2013CN102167278B Zinc oxide micro/nano composite structure array film and preparation method thereof
11/27/2013CN102092675B Method for preparing self-masking uni-junction multiport three-dimensional nano structure
11/27/2013CN102009943B Microelectronic device and manufacturing method of micro-electromechanical resonator thereof
11/26/2013US8592926 Substrate bonding with metal germanium silicon material
11/26/2013US8592215 Microfabricated crossflow devices and methods
11/21/2013WO2013170959A1 Highly ordered arrays of micelles or nanoparticles on a substrate surface and methods for producing the same
11/21/2013WO2013170866A1 Highly ordered arrays of micelles or nanoparticles on a substrate surface and methods for producing the same
11/21/2013WO2013170624A1 Nano porous material capable of being directly lithographically patterned and preparation method thereof
11/21/2013WO2013136185A3 Method of manufacture for a miniaturized drug delivery device
11/21/2013US20130309797 Method for manufacturing mems device
11/21/2013US20130309445 Method of manufacturing base body having microscopic hole, and base body
11/21/2013US20130306590 Stable Cavity-Induced Two-Phase Heat Transfer in Silicon Microchannels
11/21/2013DE102012208220A1 Infrarot-Sensorvorrichtung und Verfahren zur Herstellung einer Infrarot-Sensorvorrichtung Infrared sensor apparatus and method for producing an infrared sensor device
11/21/2013DE102012208192A1 Infrarot-Sensorvorrichtung und Verfahren zur Herstellung einer Infrarot-Sensorvorrichtung Infrared sensor apparatus and method for producing an infrared sensor device
11/21/2013DE102012208117A1 Mikromechanisches Bauteil, Herstellungsverfahren für ein mikromechanisches Bauteil und Verfahren zum Betreiben eines mikromechanischen Bauteils Micromechanical element, manufacturing method for a micromechanical component and method for operating a micromechanical component
11/21/2013DE102010032799B4 Mikroventil mit elastisch verformbarer Ventillippe, Herstellungsverfahren und Mikropumpe Microvalve with elastically deformable valve lip, manufacturing processes and micropump
11/20/2013EP2663849A1 Micromechanical pressure sensor and method for producing same
11/20/2013EP2663521A1 A method of manufacturing a probe comprising a cantilever with a conduit
11/20/2013EP2663520A2 Method for mems device fabrication and device formed
11/20/2013CN103402908A Process for producing highly ordered nanopillar or nanohole structures on large areas
11/20/2013CN103400801A Vacuum encapsulation CMOS (complementary metal-oxide-semiconductor transistor) and MEMS (micro electronic mechanical system) chip and processing method of vacuum encapsulation CMOS and MEMS chip
11/20/2013CN103399368A Microlens, microlens array structure and manufacturing process thereof
11/20/2013CN103399047A Temperature compensation system and method of hydrogen sensor with palladium nano structure based on quantum transportation
11/20/2013CN103395740A Method for selectively preparing porous silicon based on silicon on insulator
11/20/2013CN103395739A Preparation method of micro-concave mirror
11/20/2013CN103395736A MEMS glass size bonding structure and manufacturing method thereof
11/20/2013CN102799063B Method for preparing photoresist template and patterned ZnO nanorod array
11/20/2013CN102175909B Micro-electro-mechanical system (MEMS) cantilever type microwave power automatic detection system and detection method and preparation method thereof
11/20/2013CN102026909B Method for producing chips
11/19/2013US8585910 Process of making a microtube and microfluidic devices formed therewith
11/14/2013WO2011001293A3 Method of forming an electromechanical transducer device
11/14/2013US20130302933 Method for fabricating mems device with protection rings
11/14/2013US20130299928 Hybridly integrated component and method for the production thereof
11/14/2013US20130299927 Hybrid intergrated component and method for the manufacture thereof
11/14/2013US20130299925 Micromechanical inertial sensor and method for manufacturing same
11/14/2013US20130299924 Hybrid integrated component and method for the manufacture thereof
11/14/2013US20130298671 Flexure bearing to reduce quadrature for resonating micromachined devices
11/14/2013DE19800574B4 Mikromechanisches Bauelement Micromechanical component
11/14/2013DE102012208053A1 Hybrid integriertes Bauteil und Verfahren zu dessen Herstellung Hybrid integrated component and method for its production
11/14/2013DE102012208033A1 Hybrid integriertes Bauteil und Verfahren zu dessen Herstellung Hybrid integrated component and method for its production
11/14/2013DE102012208031A1 +Hybrid integriertes Bauteil und Verfahren zu dessen Herstellung + Hybrid integrated component and method for its production
11/14/2013DE102012208030A1 Mikromechanischer Inertialsensor und Verfahren zu dessen Herstellung Micromechanical inertial sensor and method for its production
11/13/2013EP2661413A1 Method for encapsulating a micro-component
11/13/2013CN1974372B Monolithic integrated sensor chip for measing three parameters of pressure difference, absolute pressure and temperature and making process thereof
11/13/2013CN103387206A Manufacturing method of ultramicropore broadband flexible micro-perforated plate
11/13/2013CN102323314B Production and detection method of plated bismuth gold micro-array electrode for detecting heavy metals
11/13/2013CN102176637B Miniature electromagnetic type vibration energy collector and manufacturing method thereof
11/13/2013CN102117946B Radio frequency micro electro mechanical system switch with spring plate contact and manufacturing method thereof
11/13/2013CN102107845B Micron sensing element, and preparation method and application thereof
11/12/2013CA2714788C Merged-mask micro-machining process
11/07/2013DE102013104463A1 Chip-Einbettungsgehäuse und Verfahren zum Bilden eines Chip-Einbettungsgehäuses Chip embedding housing and method of forming a chip embedding housing
11/07/2013DE102005023699B4 Verfahren zur Herstellung eines mikromechanischen Bauelements mit einer Membran A process for producing a micromechanical component having a membrane
11/07/2013DE102004058879B4 MEMS-Mikrophon und Verfahren zur Herstellung MEMS microphone and methods for preparing
11/06/2013EP2659263A1 Light emission detection device and method of manufacturing the same
11/06/2013EP1433199B1 Method for forming a cavity structure in an soi substrate and cavity structure formed in an soi substrate
11/06/2013CN103382016A BioMEMS employing integrated package member and planar optical circuit
11/06/2013CN102311095B Method for preparing multistage metal micro-nanostructures inside micro fluidic chip
11/06/2013CN102275863B Wafer-level vacuum encapsulating method for micro-electromechanical device
10/2013
10/31/2013WO2013163125A1 Method for creating asperities in metal for metal-to-metal bonding
10/31/2013WO2013159584A1 Micro-mechanical magnetic field sensor and preparation method thereof
10/31/2013WO2013134592A3 Atomic layer deposition strengthening members and method of manufacture
10/31/2013US20130288429 Method of encapsulation of a microcomponent
10/31/2013US20130287999 Interfacial Convective Assembly for High Aspect Ratio Structures Without Surface Treatment
10/31/2013US20130285175 Micromechanical component and method for manufacturing a micromechanical component
10/31/2013US20130285171 Environment-resistant module, micropackage and methods of manufacturing same
10/31/2013US20130285169 Method for producing an optical window device for a mems device
10/31/2013US20130285168 Mems inertial sensor and method for manufacturing the same
10/31/2013US20130285166 Hybrid integrated component and method for the manufacture thereof
10/31/2013US20130285164 Mems device and method of manufacturing the same
10/31/2013US20130285162 Integrated getter area for wafer level encapsulated microelectromechanical systems
10/31/2013US20130285160 Microscale Metallic CNT Templated Devices and Related Methods
10/31/2013US20130284572 Through-silicon via resonators in chip packages and methods of assembling same
10/31/2013DE102013206755A1 Nanoprägelithographieverfahren Nanoimprint lithography process
10/31/2013DE102012207165A1 Micro-electromechanical device e.g. micro-electromechanical sensor such as inertial sensor, has electrically conductive metallization portion which is arranged on surface of substrate and is partially formed of chemically active getter
10/31/2013DE102012206869A1 Mikromechanisches Bauelement und Verfahren zur Herstellung eines mikromechanischen Bauelements Micromechanical component and process for producing a micromechanical component
10/31/2013DE102012206858A1 Verfahren zum Herstellen einer optischen Fenstervorrichtung für eine MEMS-Vorrichtung A method of manufacturing an optical window apparatus for a MEMS device
10/31/2013DE102012206854A1 Hybrid integriertes Bauteil und Verfahren zu dessen Herstellung Hybrid integrated component and method for its production
10/31/2013DE102012103720A1 Method for manufacturing micro-mold component, involves creating space with removal device comprising micro mold portion, by separating molding form support plate and sprue plate from micro molding insert
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