Patents
Sitemap › B81 - Micro-structural technology › B81C - Processes or apparatus specially adapted for the manufacture or treatment of micro-structural devices or systems › B81C 1 - Manufacture or treatment of devices or systems in or on a substrate
Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526)
02/2014
02/13/2014US20140042869 Out-of-plane travel restriction structures
02/13/2014US20140042596 Bonded wafer structures
02/13/2014US20140042563 Integrated circuit with mems element and manufacturing method thereof
02/13/2014US20140042498 Starting substrate for semiconductor engineering having substrate-through connections and a method for making same
02/13/2014US20140041727 High throughput screening of crystallization of materials
02/13/2014DE112012002109T5 Herstellungsverfahren für optisches Bauteil und optisches Bauteil Manufacturing processes for optical component and optical component
02/13/2014DE112012002104T5 Optisches Modul und Herstellungsverfahren für dasselbe Optical module and manufacturing method for the same
02/13/2014DE102013108353A1 Vorrichtung mit einer eingebetteten MEMS-Vorrichtung und Verfahrenzur Herstellung einer eingebetteten MEMS-Vorrichtung A device with an embedded MEMS device and Verfahrenzur manufacturing an embedded MEMS device
02/13/2014DE102011120498B4 Werkzeug zum Erzeugen einer Schicht mit mikrostrukturierter Außenfläche auf einer Substratoberfläche Tool for providing a layer having a microstructured outer surface on a substrate surface
02/13/2014DE102004043233B4 Verfahren zum Herstellen eines beweglichen Abschnitts einer Halbleitervorrichtung A method of manufacturing a movable portion of a semiconductor device
02/12/2014EP2695849A1 Micropump
02/12/2014EP2695848A1 Integrated circuit with MEMS element designed to avoid sticking and manufacturing method thereof
02/12/2014CN203432973U Carbon nano-tube micro-cantilever biosensor for detecting tumor markers
02/12/2014CN203432736U Force sensing resonant element
02/12/2014CN103582830A Production method for optical component and optical component
02/12/2014CN103576242A Manufacturing method for light-blocking type micro-electro-mechanical variable light attenuator
02/12/2014CN103575797A Method for the production of a flame ionization detector and corresponding flame ionization detector
02/12/2014CN103575403A Terahertz focal plane array based on MEMS technology
02/12/2014CN103575260A Micro gyroscope and processing manufacturing method thereof
02/12/2014CN103571253A High temperature thermal annealing process
02/12/2014CN103571252A Thermal annealing process
02/12/2014CN103569955A Method for preparing colloidal microsphere column array
02/12/2014CN103569954A Method for preparing micron submicron reaction vessel array
02/12/2014CN103569953A Method for preparing polymer fiber bundle with cross-shaped section
02/12/2014CN103569952A Method for preparing one-dimensional polymer periodical microstructure
02/12/2014CN103569951A Method for preparing amorphous silicon micro-electromechanical systems (MEMS) suspended film structure
02/12/2014CN103569950A Preparation method of super-lyophobic surface
02/12/2014CN103569949A Method for encapsulating at least a microelectronic device
02/12/2014CN103569948A Bonding method using porous surface for making stacked structure
02/12/2014CN103569947A Systematic packaging method
02/12/2014CN103569946A Manufacturing method for non-refrigeration optical readout infrared imaging focal plane array detector
02/12/2014CN103569945A Molecule detection nanopore device with anti-blocking function and manufacturing method thereof
02/12/2014CN103569944A Stress adjusting technology for SiO2/Al double-material composite beam
02/12/2014CN103569943A Friction-resistant Pt (platinum)/graphene composite structure and preparation method thereof
02/12/2014CN103569941A Apparatus comprising MEMS and method for manufacturing embedded MEMS device
02/12/2014CN103569940A MEMS device, electronic apparatus, and manufacturing method of MEMS device
02/12/2014CN103569939A Micro-machine structure and corresponding making method
02/12/2014CN103569937A MEMS device and method for forming the same
02/12/2014CN102509718B Wafer-level chip size encapsulation technology for GaAs (gallium arsenide) CCD (Charge Coupled Device) image sensor
02/12/2014CN102445477B Ex-vivo nerve information dual-mode detection microelectrode array chip and preparation method thereof
02/12/2014CN102290968B Miniature generator and preparation method thereof
02/12/2014CN102259830B Isolation cavity manufacturing method compatible with semiconductor process and isolation cavity
02/12/2014CN102203001B Transducer with decoupled sensing in mutually orthogonal directions
02/12/2014CN102031525B Method for etching deep through silicon via (TSV)
02/06/2014WO2014021868A1 Device including interposer between semiconductor and substrate
02/06/2014WO2014020389A1 Methods of forming semiconductor structures including a conductive interconnection, and related structures
02/06/2014WO2014020388A1 Methods of forming semiconductor structures including mems devices and integrated circuits on common sides of substrates, and related structures and devices
02/06/2014WO2014020387A1 Methods of forming semiconductor structures including mems devices and integrated circuits on opposing sides of substrates, and related structures and devices
02/06/2014WO2013186408A8 Cell culture device and method associated with said
02/06/2014US20140038364 Method of encapsulating a microelectronic device
02/06/2014US20140038335 Integrated acoustic transducer in mems technology, and manufacturing process thereof
02/06/2014US20140036342 Electrical Routing
02/06/2014US20140035433 Mems device, electronic apparatus, and manufacturing method of mems device
02/06/2014US20140034132 Microfluidic Devices for the Generation of Nano-Vapor Bubbles and Their Methods of Manufacture and Use
02/06/2014US20140033848 Complex micromechanical part
02/06/2014DE102012213548A1 Bondpad zum Thermokompressionsbonden, Verfahren zum Herstellen eines Bondpads und Bauelement Bonding pad for thermo-compression bonding, bonding pads and a method for producing component
02/05/2014EP2692689A2 Method for encapsulating a microelectronic device
02/05/2014CN103558368A Nano electrode array structure for measuring characteristics of biological cells and manufacturing method thereof
02/05/2014CN103552981A Preparation method of bionic gecko composite microarray
02/05/2014CN103552980A Wafer level packaging method for micro electromechanical system (MEMS) chip and single-chip micro-miniature type MEMS chip
02/05/2014CN103552977A Wafer level package structure for micro electromechanical system and package method
02/05/2014CN103552976A Intelligent device applied to magnetic field regulation and control of micro-electro mechanical system and production method thereof
02/05/2014CN103551213A Preparation method of micro-flow pipeline
02/05/2014CN102249177B Micro-electromechanical sensor and forming method thereof
02/04/2014CA2490975C A device having a light-absorbing mask and a method for fabricating same
01/2014
01/30/2014WO2014018558A1 Methods, systems, and devices relating to open microfluidic channels
01/30/2014WO2014016309A1 Method for producing microcarriers and for performing biological assays
01/30/2014WO2014016263A1 Method for producing structured microcarriers
01/30/2014WO2014016262A1 Method for producing microcarriers
01/30/2014DE102013200531A1 Micro mirror for projection exposure system such as extreme UV (EUV) projection exposure system, has mirror element which is tiltable formed around axis, and coil spring is provided to bias mirror element in basic position
01/30/2014DE102012213313A1 Micromechanical structure, particularly acceleration sensor, comprises micromechanical functional structure formed on surface of substrate, and strip conductor arrangement with two insulating layers and intermediate strip conductor layer
01/30/2014DE102012213305A1 Method for manufacturing microelectromechanical system element of component, involves spanning rear connection opening in substrate under membrane structure, producing cavity in substrate and opening cavity by backside thinning of substrate
01/29/2014EP2690059A1 Method for producing microcarriers
01/29/2014EP2690058A1 Method for producing microcarriers and for performing biological assays
01/29/2014EP2690057A1 Method for producing structured microcarriers
01/29/2014CN103547957A MEMS anchor and spacer structure
01/29/2014CN103547529A Treatment of a self-assembled monolayer on a dielectric layer for improved epoxy adhesion
01/29/2014CN103547528A Optical module and production method for same
01/29/2014CN103545589A Positive and negative photoresist technology combined microstrip line manufacturing method
01/29/2014CN103543604A Nano-imprinting method
01/29/2014CN103542926A Optical-fiber micro-electro-mechanical hydrophone and production method thereof
01/29/2014CN103539064A Wet etching method of sacrificial layer of MEMS (Micro-electromechanical Systems) structure and MEMS structure
01/29/2014CN103539063A Environment micro electrical mechanical system (MEMS) sensor base plate packaging structure and manufacturing method
01/29/2014CN103539062A MEMS devices, packaged MEMS devices, and methods of manufacture thereof
01/29/2014CN102520012B MEMS (Micro Electro Mechanical System) technology-based thermal diffusivity sensor chip and manufacturing method thereof
01/29/2014CN102275866B Manufacturing process of microfluid channel with heating function
01/28/2014US8637137 Microstructures and methods of fabrication thereof
01/28/2014US8636911 Process for MEMS scanning mirror with mass remove from mirror backside
01/23/2014WO2014013193A1 Method for manufacturing a thin film of ordered silicon nanopatterns
01/23/2014WO2014012381A1 Copper-connection microcolumn mechanical property in-situ compression sample and preparation method thereof
01/23/2014US20140024162 Anchor design and method for mems transducer apparatuses
01/23/2014US20140024161 Method of fabricating an inertial sensor
01/23/2014US20140024160 Triple-Axis MEMS Accelerometer
01/23/2014US20140024149 Low-Profile MEMS Thermal Printhead Die Having Backside Electrical Connections
01/23/2014US20140021561 Microfabrication of High Quality Three Dimensional Structures Using Wafer-Level Glassblowing of Fused Quartz and Ultra Low Expansion Glasses
01/23/2014US20140021443 Nano resonator and manufacturing method thereof
01/23/2014DE10350036B4 Verfahren zum Vereinzeln von Halbleiterchips und entsprechende Halbleiterchipanordnung A method for separating semiconductor chips and semiconductor chip assembly corresponding
01/23/2014DE102013213445A1 Verfahren zur Herstellung einer Membran aus Halbleitermaterial A method for producing a membrane of semiconductor material
01/23/2014DE102012212650A1 Mikrofluidische Lagerungsvorrichtung zum Vorlagern eines Fluids, Verfahren zu dessen Herstellung und eine Verwendung derselben Microfluidic device for storage Vorlagern a fluid, method for its production and a use thereof
01/22/2014EP2688091A1 Method for producing a cavity by anisotropically removing material from a substrate
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