Patents
Sitemap › B81 - Micro-structural technology › B81C - Processes or apparatus specially adapted for the manufacture or treatment of micro-structural devices or systems › B81C 1 - Manufacture or treatment of devices or systems in or on a substrate
Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526)
03/2014
03/19/2014CN103648967A Out-of-plane spacer defined electrode
03/19/2014CN103646848A Methods and devices for fabricating and assembling printable semiconductor elements
03/19/2014CN103644999A Low-range and high-sensitivity micro-electromechanical system (MEMS) pressure sensor and manufacture method thereof
03/19/2014CN103641063A Method for preparing graphical porous silicon structure
03/19/2014CN103641062A Method for preparing micro-nano structure
03/19/2014CN103641061A Micro-nano gas sensor with gas-sensitive reconstruction effect and preparation method of micro-nano gas sensor
03/19/2014CN103641060A Semiconductor integrated device assembly and related manufacturing process
03/19/2014CN103641059A Silicon-pillared metal film nano-structure array and preparation method thereof
03/19/2014CN102768230B Vertical flat plate capacitive gas sensor and preparation method thereof
03/19/2014CN102580794B Micro-fluidic chip capable of positioning cells and organisms and application thereof
03/19/2014CN102543591B MEMS (micro-electro-mechanical systems) switch and manufacturing method thereof
03/19/2014CN102508409B Ultraviolet-light-assisted thermocuring nanoimprint lithography technology and material
03/19/2014CN101870449B Multilayer line manufacturing process of wafer-level micro electromechanical system chip encapsulation technology
03/19/2014CN101870448B Preparation process of chip through silicon via (TSV) packaging technology of micro electro mechanical system (MEMS)
03/18/2014US8673645 Apparatus and methods for conducting assays and high throughput screening
03/13/2014WO2013136003A3 Surface treatment of microfluidic devices
03/13/2014US20140070336 Semiconductor device and method for manufacturing the same
03/13/2014DE102013014881A1 Verbesserte Silizium-Durchkontaktierung mit einer Füllung aus mehreren-Materialien Improved Through-silicon via with a filling of several materials
03/12/2014EP2704990A1 Hierarchical carbon nano and micro structures
03/12/2014CN103633099A Methods and devices for fabricating and assembling printable semiconductor elements
03/12/2014CN103630582A Micro-electromechanical system (MEMS) humidity sensor and preparation method thereof
03/12/2014CN103630571A Micro-nano array sensor and preparation method thereof
03/12/2014CN103628075A Plasma etching method
03/12/2014CN103626120A Preparation method of non-sensitive area protection film for sensor
03/12/2014CN103626119A Preparation method for nano metal ball bowl array structure
03/12/2014CN103626118A Laser machining method for simultaneously restoring and realizing N doping of graphene oxide microstructure
03/12/2014CN103626117A Method for preparing tungsten oxide nanowire/porous silicon composite structure material at low temperature
03/12/2014CN103626116A Methods for fabricating mems structures by etching sacrificial features embedded in glass
03/12/2014CN103626115A Ultrathin nitride micro-nano static actuator and manufacturing method thereof
03/12/2014CN102778586B Differential capacitive micro-acceleration transducer and manufacturing method thereof
03/12/2014CN102620878B Capacitive micromachining ultrasonic sensor and preparation and application methods thereof
03/12/2014CN102528379B Method for disassembling micro-electro-mechanical devices under assistance of laser impact
03/12/2014CN102507531B Raman scattering enhanced substrate of oxidation zinc base semiconductor and preparation method and application thereof
03/12/2014CN102437017B Method for preparing nano structure on surface of (111) silicon wafer
03/12/2014CN102344114B Preparation method for deep trench isolation channel
03/12/2014CN102344113B Method for etching device deep slot with metal sensitive interlayer
03/12/2014CN102167280B Super-hydrophobic silicon micron-nano composite structure and preparation method thereof
03/06/2014WO2014033056A1 Sensor part
03/06/2014US20140065751 Method For Manufacturing Three-Dimensionally Shaped Comb-Tooth Electret Electrode
03/06/2014US20140061892 Packaged device exposed to environmental air and liquids and manufacturing method thereof
03/06/2014US20140061826 Ultrasonic transducer and method of manufacturing the same
03/06/2014US20140061825 Micro electro mechanical system(mems) acoustic sensor and fabrication method thereof
03/06/2014US20140061824 Mems packaging scheme using dielectric fence
03/05/2014CN103619750A Wafer with spacer including horizontal member
03/05/2014CN103616123A Pressure sensor and manufacturing method thereof
03/05/2014CN101870447B Manufacturing process of chip through silicon via (TSV) packaging technology of micro electro mechanical system (MEMS)
03/04/2014US8664699 Methods and devices for fabricating and assembling printable semiconductor elements
02/2014
02/27/2014WO2014031592A1 Mems pressure sensor with multiple membrane electrodes
02/27/2014WO2014031200A1 Method of stress relief in anti-reflective coated cap wafers for wafer level packaged infrared focal plane arrays
02/27/2014WO2014031172A1 Fabrication of nanowire arrays
02/27/2014WO2014029190A1 High performance mems thermopile infrared detector based on black silicon and method of manufacturing same
02/27/2014WO2014029189A1 High performance mems thermopile infrared detector structure and method of manufacturing same
02/27/2014US20140057444 Method for manufacturing mems device, method for manufacturing thermal detector, thermal detector, thermal detection device, and electronic instrument
02/27/2014US20140057382 Methods for fabricating mems structures by etching sacrificial features embedded in glass
02/27/2014US20140057104 Process for Fabricating High-Precision Objects by High-Resolution Lithography and Dry Deposition and Objects thus Obtained
02/27/2014US20140054732 Method and apparatus for release-assisted microcontact printing of mems
02/27/2014US20140054731 Mems pressure sensor with multiple membrane electrodes
02/27/2014US20140054730 System and method for forming a buried lower electrode in conjunction with an encapsulated mems device
02/27/2014US20140054729 Mems device, electronic apparatus, and manufacturing method of mems device
02/27/2014US20140054265 Method of forming fine pattern, and developer
02/27/2014US20140054261 Micro-device on glass
02/27/2014DE102013202645A1 Optical system for microlithographic projection exposure system, has polarizers that are interacted to enable rotation of linearly polarized light in polarization direction around angular pitch whose sum corresponds with total angle
02/27/2014DE102012023379A1 Verfahren zur Herstellung eines Wandlermoduls und entsprechendes Wandlermodul A process for the preparation of a converter module and corresponding converter module
02/27/2014DE102008028528B4 Vorrichtung mit Photoresistmaterialstruktur und Verfahren zum Herstellen derselben Device with photoresist material structure and method of manufacturing the same
02/26/2014EP2700614A2 Methods for fabricating mems structures by etching sacrificial features embedded in glass
02/26/2014CN103608726A Photoresists containing polymer-tethered nanoparticles
02/26/2014CN103608283A Anodic bonding for a MEMS device
02/26/2014CN103604538A MEMS pressure sensor chip based on SOI technology and manufacturing method thereof
02/26/2014CN103601147A Preparation method of contact type four-electrode salinity sensor based on micro electro mechanical systems (MEMS) technology
02/26/2014CN102234098B Manufacturing method of micro electromechanical structure
02/26/2014CN101398617B Replication and transfer of microstructures and nanostructures
02/25/2014US8658368 Microfabricated crossflow devices and methods
02/25/2014US8658367 Microfabricated crossflow devices and methods
02/25/2014US8656958 Microfabricated elastomeric valve and pump systems
02/20/2014WO2014028536A2 Implantable mems device and method
02/20/2014DE102012107457A1 MEMS-Bauelement und Verfahren zur Herstellung MEMS device and methods for preparing
02/20/2014DE102012015204A1 Verfahren zur Herstellung eines Flammenionisationsdetektors und entsprechender Flammenionisationsdetektor A process for producing a flame and corresponding flame ionization
02/20/2014DE102010036217B4 Verfahren zur hermetischen Verkapselung eines Mikrosystems Process for hermetic encapsulation of a microsystem
02/20/2014DE102009042319B4 Verfahren zur Herstellung eines Sensorknoten-Moduls A method for producing a sensor node module
02/20/2014DE102004020173B4 Mikrostrukturiertes Bauelement und ein Verfahren zum Herstellen eines mikrostrukturierten Bauelements Microstructured component and a method for producing a microstructured component
02/19/2014EP2697160A2 A method for microfabrication of a capacitive micromachined ultrasonic transducer comprising a diamond membrane and a transducer thereof
02/19/2014EP2697159A1 Out-of-plane spacer defined electrode
02/19/2014EP2697158A1 Wafer with recessed plug
02/19/2014EP2697157A1 Wafer with spacer including horizontal member
02/19/2014EP2697156A1 Method of forming non-planar membranes using cmp
02/19/2014EP2697154A1 Method of forming membranes with modified stress characteristics
02/19/2014CN103596876A Method of forming non-planar membranes using CMP
02/19/2014CN103596875A Wafer with recessed plug
02/19/2014CN103596874A Out-of-plane travel restriction structures
02/19/2014CN103588165A Three dimensional trans-scale charcoal electrode array structure and manufacture method
02/19/2014CN103588164A Copper-silver micro-nano multi-stage structure super-hydrophobic surface and production method thereof
02/19/2014CN102798474B High-performance MEMS (Micro Electro Mechanical System) thermopile infrared detector structure and preparation method thereof
02/19/2014CN102303845B Preparation method of drug-delivery type three-dimensional carbon microelectrode with microfluid channel
02/19/2014CN102275868B Pre-buried mask wet etching process for silicon micro mechanical structure
02/19/2014CN102145874B Micro-electro-mechanical device and manufacturing method thereof
02/19/2014CN101931379B Resonator and a method of manufacturing the same, and oscillator and electronic apparatus including the same
02/18/2014US8652343 Method for selectively removing material from the surface of a substrate, masking material for a wafer, and wafer with masking material
02/13/2014US20140045290 Method for manufacturing semiconductor device and method for manufacturing microphone
02/13/2014US20140044933 Nano pattern formation
02/13/2014US20140044866 Method for the Automated Production Consisting of a Molecular Layer of Amphiphilic Molecules and a Device for Producing Said Molecular Layer
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