Patents
Sitemap › B81 - Micro-structural technology › B81C - Processes or apparatus specially adapted for the manufacture or treatment of micro-structural devices or systems › B81C 1 - Manufacture or treatment of devices or systems in or on a substrate
Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526)
04/2014
04/09/2014EP2714582A1 Method for producing an mos transistor
04/09/2014CN103715070A Method for adhesive magnetron sputtering thick film
04/09/2014CN103712721A SOI pressure strain gauge and manufacturing method thereof
04/09/2014CN103712720A Capacitive pressure sensor and inertial sensor integrated device and forming method thereof
04/09/2014CN103712601A Liquid multilayer-capacitanc inclination microensor
04/09/2014CN103708413A Method for preparing one-dimensional silicon nanostructure array on surface of optical fiber
04/09/2014CN103708412A Micro electro mechanical system packaging method
04/09/2014CN103708411A Nanowire arranging and positioning method based on ridge electrode structure
04/09/2014CN103708410A Novel micro heater and production method thereof
04/09/2014CN103708409A Pressure sensor and inertia sensor assembly and production method thereof
04/09/2014CN103708407A Wafer-level packaging structure and method of integrated MEMS sensor
04/09/2014CN103708406A Resonant type infrared detector structure capable of isolating packaging stress and manufacturing method thereof
04/09/2014CN103708405A On-chip large-dig-angle silicon oxide micro-disc resonant cavity and manufacturing method for same
04/09/2014CN103708404A Thin film with improved temperature range
04/09/2014CN102768290B MEMS (micro-electrochemical systems) accelerometer and production method thereof
04/09/2014CN102602881B Method for forming multiple silicon trenches on MEMS (Micro Electro Mechanical Systems) sealing-cap silicon chip and etching mask structure thereof
04/09/2014CN102408094B Preparation method for highly repetitive surface enhanced Raman spectrum (SERS) active substrate
04/09/2014CN102363520B Wafer level three-dimensional encapsulation method for micro-electro-mechanical system (MEMS) device
04/09/2014CN101993031B Protection structure and semiconductor structure of contact pad
04/08/2014US8693083 Micromirror unit and method of making the same
04/03/2014WO2014050229A1 Device member comprising cavity and production method for device member comprising cavity
04/03/2014WO2014050035A1 Mirror device manufacturing method
04/03/2014WO2014049141A1 Method for producing a cover for optical mems packaging
04/03/2014WO2014048815A1 Method for producing a nanoporous part, and corresponding nanoporous part
04/03/2014WO2014048213A1 Method for preparing silicon film
04/03/2014US20140091408 Sensor module and semiconductor chip
04/03/2014DE102012217881A1 Sensoranordnung und Herstellungsverfahren Sensor assembly and manufacturing processes
04/03/2014DE102012217793A1 Herstellungsverfahren Manufacturing process
04/02/2014EP2712428A1 Mems anchor and spacer structure
04/02/2014CN203513268U Substrate structure for low-stress MEMS sensor chip packaging
04/02/2014CN103703528A Electronic device having variable capacitance element and method for manufacturing same
04/02/2014CN103702928A Method for processing super-hydrophobic surface, and evaporator having super-hydrophobic surface
04/02/2014CN103702927A Controlled fabrication of nanopores in nanometric solid state materials
04/02/2014CN103693614A Manufacturing method of anti-overload micro-pressure sensor with arc stress-homogenizing structure
04/02/2014CN103693613A Surface wettability regulation and control device based on film transformation and regulation and control method
04/02/2014CN103693612A Silicon film preparation method
04/02/2014CN103693611A PVDF (Polyvinylidene Fluoride)/CNTs (Carbon Nano Tubes) conical micro-column array and preparation method thereof
04/02/2014CN102292472B Mold and manufacturing method therefor
04/01/2014US8685778 Planar cavity MEMS and related structures, methods of manufacture and design structures
04/01/2014US8685777 Method for fabricating a fixed structure defining a volume receiving a movable element in particular of a MEMS
03/2014
03/27/2014WO2014046981A1 Micro device stabilization post
03/27/2014WO2014044463A1 Device having at least two wafers for detecting electromagnetic radiation and method for producing said device
03/27/2014WO2014044122A1 Silicon etching method
03/27/2014WO2014044120A1 Polymer material and bonding method
03/27/2014US20140087509 Mems-based cantilever energy harvester
03/27/2014US20140084397 Wafer-level packaging of a mems integrated device and related manufacturing process
03/27/2014US20140084396 Mems device and process
03/27/2014US20140084395 Mems microphone
03/27/2014US20140084394 Micro electro mechanical system (mems) microphone and fabrication method thereof
03/27/2014US20140083859 Biofunctional nanofibers for analyte separation in microchannels
03/27/2014DE102012217228A1 Herstellungsverfahren für ein Nanoporen-aufweisendes Teil und entsprechendes Nanoporen-aufweisendes Teil Manufacturing method for a nanopore exhibiting part and corresponding nanopore part exhibiting
03/27/2014DE102012217133A1 Mikroelektronisches Bauelement und entsprechendes Herstellungsverfahren Microelectronic component and corresponding production method
03/27/2014DE102012216997A1 Electrical switching element i.e. reed contact, for e.g. contactless switch used in pacemaker, has contact pad contacted by deflection region of extension during deflecting deflection region in direction by external magnetic field
03/27/2014DE102012216996A1 Micro-electromechanical systems (MEMS) sound transducer of MEMS sound transducer arrangement, has diaphragm whose projection is arranged above projection of substrate, and whose recess is extended themselves into recess of substrate
03/27/2014DE102012216978A1 Producing detection element for detecting substances by spectroscopy, preferably Raman spectroscopy, comprises detecting microstructures on a substrate; and partially providing substrate with its microstructures with a metal coating
03/27/2014DE102012215262A1 Micromechanical structure has shallow trench isolation (STI) trench that is lower in upper side of substrate in which piezo-resistive stips are introduced
03/26/2014CN103681648A Electrical circuit and method for producing electrical circuit
03/26/2014CN103676473A Method for preparing metal pattern on curved surface by combining nano-imprinting with wet etching
03/26/2014CN103675365A Test probe card for micro-mechanical chip and manufacture method of test probe card
03/26/2014CN103675347A Accelerometer and manufacturing process thereof
03/26/2014CN103675346A Accelerometer and manufacturing process thereof
03/26/2014CN103675345A Accelerometer and manufacturing process thereof
03/26/2014CN103675344A Accelerometer and manufacturing process thereof
03/26/2014CN103675048A Metal-oxide gas sensor based on MEMS (Micro-Electro-Mechanic System) and preparation technology thereof
03/26/2014CN103675024A Direct sensing BioFET and methods of manufacture
03/26/2014CN103674397A High-overload back pressure type absolute-pressure sensor module and manufacturing technology thereof
03/26/2014CN103674355A Suspended force-sensitive sensor chip capable of eliminating encapsulation stress and manufacture method thereof
03/26/2014CN103674112A Method for preparing integrated silicon piezoresistive type sensor chip preparing and sensor chip
03/26/2014CN103663361A Flexible mechanical photoetching stripping process method of silicon substrate or ceramic substrate
03/26/2014CN103663360A Terahertz device and preparation method thereof
03/26/2014CN103663359A Microelectronic component and corresponding production process
03/26/2014CN103663358A Method for preparing super-hydrophobic surface on silicon wafer based on laser interference nanometer lithography
03/26/2014CN103663357A Silicon etching method
03/26/2014CN103663356A Method and structure for encapsulating transparent substrate detector chip
03/26/2014CN103663355A Preparation method of cone micro-nano structure of photoluminescent device
03/26/2014CN103663354A Micro/nano array and application thereof in micro/nano material standard bending strain loading
03/26/2014CN103663353A Air sound particle vibration velocity sensor and manufacturing method of air sound particle vibration velocity sensor
03/26/2014CN103663351A Wafer-level packaging of a mems integrated device and related manufacturing process
03/26/2014CN103663350A Micromechanical sensor device with movable gate and corresponding production method
03/26/2014CN103663346A Packaged device designed to be exposed to environmental air and liquids and manufacturing method thereof
03/26/2014CN103663345A Microelectromechanical system (MEMS) device and fabrication method thereof
03/26/2014CN103663344A Improved through silicon via including multi-material fill
03/26/2014CN103663343A Electronic device, method of manufacturing the same, and oscillator
03/26/2014CN103663342A Common wiring microelectrode array chip and manufacturing method thereof
03/26/2014CN102530834B Manufacturing method of impedance type microfluidic chip
03/26/2014CN102417155B Production method of tri-axial accelerometer
03/26/2014CN102320558B Manufacturing method for cavity of full silica-based microfluidic device
03/26/2014CN102320556B Method for constructing netty nano ZnO material strain transducer
03/26/2014CN102295269B Cavity-body sealing process
03/26/2014CN102285633B Composite integrated sensor structure and manufacturing method thereof
03/26/2014CN102285629B Preparation method for surface-enhanced Raman spectrum active substrate
03/25/2014US8679887 Method for manufacturing a micro-electro-mechanical device, in particular an optical microswitch, and micro-electro-mechanical device thus obtained
03/20/2014WO2014042868A1 Imod pixel architecture for improved fill factor, frame rate and stiction performance
03/20/2014US20140080242 Method for manufacturing package structure with micro-electromechanical element
03/20/2014US20140079936 Controlled Fabrication of Nanopores in Nanometric Solid State Materials
03/20/2014US20140077316 Wafer bonding and related methods and apparatus
03/20/2014US20140077272 Micromechanical sensor device with movable gate and corresponding production method
03/20/2014DE102012216618A1 Anordnung von mindestens zwei Wafern zum Detektieren von elektromagnetischer Strahlung und Verfahren zum Herstellen der Anordnung Arrangement of at least two wafers for detecting electromagnetic radiation and methods of making the arrangement
03/20/2014DE102012216497A1 Elektronische Sensorvorrichtung zum Detektieren von chemischen oder biologischen Spezies, mikrofluidische Vorrichtung mit einer derartigen Sensorvorrichtung sowie Verfahren zum Herstellen der Sensorvorrichtung und Verfahren zum Herstellen der mikrofluidischen Vorrichtung Electronic sensor device for detecting chemical or biological species, microfluidic device having such a sensor apparatus and method of manufacturing the sensor device and method of manufacturing the microfluidic device
03/20/2014DE102012216493A1 Mikromechanische Sensorvorrichtung mit beweglichem Gate und entsprechendes Herstellungsverfahren Micromechanical sensor device with movable gate and method of manufacture
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