Patents
Sitemap › B81 - Micro-structural technology › B81C - Processes or apparatus specially adapted for the manufacture or treatment of micro-structural devices or systems › B81C 1 - Manufacture or treatment of devices or systems in or on a substrate
Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526)
05/2014
05/07/2014CN103777066A 一种微电子机械双通道微波功率检测系统及其制备方法 A microelectronic mechanical dual-channel microwave power detection system and its preparation method
05/07/2014CN103776812A 表面增强拉曼基底的制备方法 Surface-enhanced Raman substrate preparation
05/07/2014CN103776580A 半导体传感器器件的封装及其方法 Package and method of the semiconductor sensor device
05/07/2014CN103771336A 一种基于压电聚合物微结构阵列的俘能器制造方法 A method of producing energy harvester based on piezoelectric polymer microstructure array
05/07/2014CN103771335A 一种仿壁虎脚微纳分级结构及其制造工艺 One kind of gecko feet micro-nano hierarchical structure and its manufacturing process
05/07/2014CN103771332A 电子装置及其制造方法 Electronic device and method of manufacturing
05/07/2014CN102667432B 具有柔性衬底的热传感器及其使用 A thermal sensor having a flexible substrate, and their use
05/07/2014CN102565148B 微型差分电容葡萄糖连续监测阻尼传感器及制作方法 Miniature damping differential capacitance sensor for continuous monitoring of glucose and production methods
05/06/2014US8715514 Micro-electromechanical systems (MEMS) microphone and method of manufacturing the same
05/01/2014WO2014064606A1 Production of micro-mechanical devices
05/01/2014WO2014063410A1 Capacitive accelerometer of bent flexible beam and manufacturing method
05/01/2014WO2014063409A1 Capacitive accelerometer of h-shaped beam and manufacturing method
05/01/2014US20140120646 Electromechanical transducer and method of manufacturing the same
05/01/2014US20140120271 Method for forming microelectrode-pair arrays on silicon substrate surface with hydrophobic silicon pillars
05/01/2014US20140117474 Pressure sensing device and manufacturing method of the same
05/01/2014US20140117472 Micromechanical component
05/01/2014US20140117471 Micromechanical component having a bond joint
04/2014
04/30/2014EP2724864A2 Method and device for creating and transferring diffractive microstructures on a printable material
04/30/2014DE102013018203A1 Verfahren zur Modifikation der Oberflächen von metallischen Werkstoffen A process for the modification of the surfaces of metallic materials
04/30/2014DE102012219769A1 Verfahren zum Herstellen einer elektrischen Durchkontaktierung in einem Substrat sowie Substrat mit einer elektrischen Durchkontaktierung A method of making an electrical plated-through hole in a substrate as well as substrate to an electrical through-contact
04/30/2014DE102012219660A1 Mechanisches Bauteil und Herstellungsverfahren für ein mechanisches Bauteil Mechanical component and manufacturing method for a mechanical component
04/30/2014DE102012219616A1 Mikromechanisches Bauelement mit Bondverbindung Micromechanical component with bond
04/30/2014DE102012219605A1 Mikromechanisches Bauelement Micromechanical component
04/30/2014DE102012219591A1 Micromechanical component for use in e.g. sensor device for detecting mass of adjustable part, has actuator variable in shape such that restoring force is exerted on spring and/or adjustable part, and part is displaceable into movement
04/30/2014DE102012219582A1 Method for forming contact of electrode stack for micro-electromechanical component used in e.g. mobile telephone, involves etching functional layers at exposed portion of interfaces for exposing the surface portions of the electrodes
04/30/2014DE102012218906A1 Beschleunigungssensor und Verfahren zum Herstellen eines Beschleunigungssensors Acceleration sensor and method for producing an acceleration sensor
04/30/2014DE102012201713B4 Verfahren für die positionierung von mikrostrukturelementen A method for the positioning of microstructure elements
04/30/2014DE102012021413A1 Sensor mit Maskierung Sensor with masking
04/30/2014DE102012021222A1 Verfahren zur Herstellung einer nanoporösen Schicht auf einem Substrat A process for producing a nano-porous layer on a substrate
04/30/2014CN103765579A Method of making system-in-package device, and system-in-package device
04/30/2014CN103759838A Infrared detector of microbridge structure and method for manufacturing same
04/30/2014CN103754819A Preparation method of flexible anti-drag skin of micro-electromechanical system (MEMS)
04/30/2014CN103754818A Micro-electro-mechanical system dew-point sensor provided with vacuum chamber and manufacturing method of dew-point sensor
04/30/2014CN103754817A Three-dimensional vertical-interconnection silicon-based light and electricity simultaneous transmission device and manufacturing method thereof
04/30/2014CN102358616B Airtight sintering device of glass tube and MEMS chip
04/30/2014CN102311090B Two-dimensional comb actuator and manufacturing method thereof
04/29/2014US8709849 Wafer level packaging
04/29/2014US8709152 Microfluidic free interface diffusion techniques
04/29/2014US8708966 Microneedle devices and methods of manufacture and use thereof
04/29/2014CA2490393C Microelectromechanical device with integrated conductive shield
04/24/2014WO2014062305A1 Packaged microphone system with integrated passive device die
04/24/2014WO2014062273A2 Substrate with multiple encapsulated devices
04/24/2014US20140113449 Nanoelectromechanical Logic Devices
04/24/2014US20140113396 Esd protection for mems resonator devices
04/24/2014US20140111842 Display device provided with mems light valve and forming method thereof
04/24/2014US20140110800 Method for manufacturing a cap for a mems component, and hybrid integrated component having such a cap
04/24/2014US20140110799 Electronic device and its manufacturing method
04/24/2014US20140109680 Micro-electro-mechanical device and method for making the same
04/24/2014DE102012219465A1 Verfahren zum Herstellen einer Kappe für ein MEMS-Bauelement und hybrid integriertes Bauteil mit einer solchen Kappe A method of manufacturing a cap for a MEMS device and hybrid integrated component with such a cap
04/24/2014DE102012219328A1 Plastic component for use as e.g. distribution ring of stator of e.g. motor for use in motor car, comprises insulating plastic material and is injection-molded, and whose surface is super-hydrophobic
04/23/2014CN103747870A Substrate surface structured with thermally stable metal alloy nanoparticles, method for preparing the same and uses thereof, in particular as catalyst
04/23/2014CN103746602A Screw-type piezoelectric type energy collector and preparation method thereof
04/23/2014CN103738914A Manufacturing method of micro-electromechanical system (MEMS) apparatus
04/23/2014CN103738913A Method for manufacturing quasi-three-dimensional micron-nanometer column array
04/23/2014CN103738912A Monocrystalline silicon non-destructive surface nanometer machining method based on tribo-chemistry induction etching
04/23/2014CN103738911A Gallium arsenide surface micro/nano machining method based on friction-induced selectivity etching
04/23/2014CN103115947B Preparation method and application of carbon-doped mesoporous metal oxide acetone sensor
04/23/2014CN102520147B Capacitive micromachined ultrasonic transducer (CMUT) for detecting trace biochemical substances and preparation method for CMUT
04/23/2014CN102501444B Titanium dioxide nanotube array-carbon nanotube-hydroxyapatite biological composite coating and preparation thereof
04/23/2014CN102398890B Supersonic wave processing method of glass base microfluidic chip
04/23/2014CN102328903B Large-area nano-seam electrode parallel manufacturing method
04/23/2014CN102295267B Manufacturing method of flexible MEMS (micro electro-mechanical system) anti-drag skin
04/23/2014CN101997187B Micro electro mechanical system plug and socket connectors, manufacturing method thereof and connector assembly
04/17/2014WO2013014321A8 Magnetometer mems cmos device including a multiwire compass
04/17/2014US20140106454 Method for producing three-dimensional monolithic microfluidic devices
04/17/2014US20140103779 Microelectromechanical component and method for producing a microelectromechanical component
04/17/2014US20140103497 Production process for a micromechanical component and micromechanical component
04/17/2014DE102013220411A1 Die-Bond-Design für einen für mittleren Druck ausgelegten Sensor für Fahrzeuganwendungen The design for a bond which is designed for medium-sized pressure sensor for automotive applications
04/17/2014DE102013111163A1 MEMS-Bauelement und Verfahren zum Fertigen eines MEMS-Bauelements MEMS device and method of fabricating a MEMS device
04/17/2014DE102012218845A1 Herstellungsverfahren für ein mikromechanisches Bauteil und mikromechanisches Bauteil Manufacturing method for a micromechanical component and micromechanical component
04/17/2014DE102012218725A1 Mikroelektromechanisches Bauelement und Verfahren zur Herstellung eines mikroelektromechanischen Bauelementes The micro-electro-mechanical device and method for manufacturing a micro-electro-mechanical component
04/17/2014DE102012217105A1 Elektrische Schaltung und Verfahren zum Herstellen einer elektrischen Schaltung Electrical circuit and method for establishing an electrical circuit
04/16/2014EP2718766A1 Photoresists containing polymer-tethered nanoparticles
04/16/2014EP2718226A1 Anodic bonding for a mems device
04/16/2014CN103732528A Elimination of silicon residues from MEMS cavity floor
04/16/2014CN103730411A Through-silicon-via (TSV) etching method
04/16/2014CN103723676A Manufacturing method of micro-fluid channel
04/16/2014CN103723675A Production process for a micromechanical component and micromechanical component
04/16/2014CN103723674A MEMS transistors and method of fabricating MEMS transistors
04/16/2014CN102829880B High-performance MEMS (Micro Electro Mechanical System) thermopile infrared detector based on black silicon and preparation method thereof
04/16/2014CN102721829B Capacitive micro acceleration sensor and uni-wafer manufacturing method thereof
04/16/2014CN102686508B A tri wavelength diffraction modulator and a method for modulation
04/16/2014CN102589760B Minitype capacitance-type mechanical sensor and preparation method thereof
04/16/2014CN102565142B Low-temperature drift piezoresistive humidity sensor and manufacturing method thereof
04/16/2014CN102543239B Three-dimensional heterojunction isotope battery based on carbon nanotube film and preparation method of three-dimensional heterojunction isotope battery
04/16/2014CN102401842B Non-equal height comb teeth capacitive triaxial acceleration transducer and method for manufacturing same
04/16/2014CN102358615B Preparation method of multifunctional integrated nano-wire array
04/16/2014CN102354789B MEMS (micro-electromechanical system)-based microwave power coupler with reconfigurable coupling degrees and preparation method thereof
04/16/2014CN102336388B Preparation method of pressure-sensitive transducer
04/16/2014CN102275857B Micro-electro-mechanical device and manufacturing method thereof
04/16/2014CN102176535B Micro electro mechanical microwave antenna and manufacturing method thereof
04/16/2014CN101870450B Manufacturing process of chip through silicon via (TSV) packaging technology of micro electro mechanical system (MEMS)
04/15/2014US8695640 Microfabricated elastomeric valve and pump systems
04/10/2014WO2014055506A1 Capacitive pressure sensor and method
04/10/2014DE102013111008A1 Silizium-auf-Nichts-Einheiten und Verfahren für ihre Herstellung Silicon-on-nothing units and methods for their preparation
04/10/2014DE102012218369A1 Method for connecting sheet-like metal structures on polymer, involves removing recess portion by introducing electromagnetic radiation, so that metal structures are melted, such that merger region is formed in contact region
04/09/2014EP2717296A1 Etching of block-copolymers
04/09/2014EP2717097A1 Photosensitive resin composition for forming biochip, and biochip
04/09/2014EP2715782A1 Method for making patterns on the surface of a substrate using block copolymers
04/09/2014EP2715450A1 Method for producing three-dimensional monolithic microfluidic devices
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