Patents
Sitemap › B81 - Micro-structural technology › B81C - Processes or apparatus specially adapted for the manufacture or treatment of micro-structural devices or systems › B81C 1 - Manufacture or treatment of devices or systems in or on a substrate
Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526)
07/2014
07/23/2014CN102025337B 谐振器 Resonator
07/22/2014US8786933 Fabrication of a floating rocker MEMS device for light modulation
07/17/2014WO2014109984A1 Electromechanical systems having sidewall beams
07/17/2014US20140199811 Stackable microelectronic package structures
07/17/2014US20140199799 Method and structure for adding mass with stress isolation to mems structures
07/17/2014US20140199713 Apparatus and methods for conducting assays and high throughput screening
07/17/2014US20140197502 Comb MEMS Device and Method of Making a Comb MEMS Device
07/17/2014US20140197501 MEMS Device with Polymer Layer, System of a MEMS Device with a Polymer Layer, Method of Making a MEMS Device with a Polymer Layer
07/17/2014DE102014100470A1 Kamm-MEMS-Vorrichtung und Verfahren zur Herstellung einer Kamm-MEMS-Vorrichtung Comb-MEMS device and method of manufacturing a comb-MEMS device
07/17/2014DE102014100238A1 MEMS-Vorrichtung mit Polymerschicht, System einer MEMS-Vorrichtung mit einer Polymerschicht, Verfahren zum Herstellen einer MEMS-Vorrichtung mit einer Polymerschicht MEMS device with polymer layer system of a MEMS device with a polymer layer, A method of manufacturing a MEMS device with a polymer layer
07/16/2014EP2753961A2 High aspect ratio structure and method for manufacturing the same
07/16/2014EP2753573A2 High area stacked layered metallic structures and related methods
07/16/2014CN203720145U 电化学微流芯片 Electrochemical microfluidic chips
07/16/2014CN203719812U 气压与加速度传感器相集成的mems芯片 Pressure and acceleration sensor chip with integrated mems
07/16/2014CN103928359A 一种垂直碳纳米管阵列与金属基底键合的方法 A method of vertical carbon nanotube array is bonded to the metal substrate
07/16/2014CN103928358A 一种垂直碳纳米管阵列向金属衬底转移的方法 A method of vertical carbon nanotube arrays transferred to the metal substrate
07/16/2014CN103926234A 一种单层纳米金表面增强拉曼活性基底及其制备方法 A single-layered nano-gold surface-enhanced Raman active substrate and its preparation method
07/16/2014CN103926034A 硅压力芯片结构设计及工艺 Silicon chip design and process pressure
07/16/2014CN103926028A 一种应变片的结构设计及制作工艺 Structural design and fabrication process of a strain gauge
07/16/2014CN103924241A 一种大规模制备低表面应力的表面具备微纳结构的钨的方法 Surface preparation method for large scale low surface stress with tungsten micro and nano structures
07/16/2014CN103922275A 晶片级自形成纳米通道及其制造方法 Nanochannel and method of manufacturing a wafer-level self-forming
07/16/2014CN103922274A 一种三维红外光源及其制作方法 A three-dimensional infrared light source and its production method
07/16/2014CN103922273A 叠层组合式mems芯片的制造方法及其叠层组合式mems芯片 The method of manufacturing a laminated composite mems chip and chip stacked modular mems
07/16/2014CN103922272A 纯二氧化硅侧壁的腔体结构、复合腔体及其形成方法 Pure silica cavity structure sidewall, and method of forming the composite cavity
07/16/2014CN103922271A 梳状mems器件和制作梳状mems器件的方法 Comb comb mems mems devices and device production method
07/16/2014CN103922270A 非制冷光读出红外焦平面阵列结构和制作方法 Optical readout uncooled infrared focal plane array structure and production methods
07/16/2014CN103922268A 阶梯梁式高q值抗过载mems悬浮电感 Ladder beam high q value of anti-overload mems suspended inductors
07/16/2014CN103922267A 一种基于mems的惯性传感器生产及晶圆级封装工艺 A mems inertial sensor production and wafer-level packaging technology based
07/16/2014CN102978582B 一种纯钨毛细管的生产装置 A pure tungsten capillary production unit
07/16/2014CN102854741B 用于非平整衬底晶圆级纳米压印的复合软模具及制造方法 Composite soft mold and manufacturing methods for non-flat substrate wafer level nanoimprint
07/16/2014CN102303843B 纳米流体通道及其制作方法 Nanofluidic channel and its production methods
07/15/2014US8780434 MEMS device with sloped support
07/15/2014US8779583 Semiconductor device and manufacturing method
07/15/2014US8778208 Method and article
07/15/2014US8778200 Method for manufacturing liquid discharge head
07/15/2014US8778197 Graphene windows, methods for making same, and devices containing same
07/15/2014CA2408291C High density protein arrays for screening of protein activity
07/10/2014US20140193949 Socket type mems bonding
07/10/2014US20140193948 Integrated bondline spacers for wafer level packaged circuit devices
07/10/2014US20140192397 Mems device with sloped support
07/10/2014US20140191341 Method and Apparatus for a Semiconductor Structure
07/10/2014US20140191236 Methods and Devices for Fabricating and Assembling Printable Semiconductor Elements
07/10/2014US20140191185 Apparatus and method for fabricating nano resonator using laser interference lithography
07/10/2014US20140190259 Mems tunneling micro seismic sensor
07/10/2014DE102013100075A1 Mikrofluidikvorrichtung und Verfahren zur Herstellung einer Mikrofluidikvorrichtung A microfluidic device and method for producing a microfluidic
07/10/2014DE102009056052B4 Anordnung mit einem Träger und einer Schicht Arrangement comprising a support and a layer
07/09/2014EP2752030A1 Piezoelectric microphone fabricated on glass
07/09/2014EP2752029A1 Piezoelectric microphone fabricated on glass
07/09/2014EP2751022A2 Mems device anchoring
07/09/2014CN1914115B 微机电设备以及制造微机电设备的方法 MEMS device and method of manufacturing MEMS devices
07/09/2014CN103917484A 用于蚀刻与蚀刻掩模纵向间隔开的材料的方法 The method of etching with an etching mask material longitudinally spaced apart for
07/09/2014CN103915308A 一种双射频脉冲等离子体的刻蚀方法及其刻蚀装置 A dual RF pulse plasma etching method and an etching apparatus
07/09/2014CN103913596A 硅微谐振式加速度计的制备方法 Preparation of silicon micro-resonant accelerometer
07/09/2014CN103913244A 透明衬底探测器及其制造方法 A transparent substrate and a manufacturing method Detector
07/09/2014CN103910325A 一种可实现键合间隙精确可控的高可靠性的mems封装结构及封装方法 A bonding gap precisely controllable high reliability mems packaging structure and packaging method can be realized
07/09/2014CN103910324A 金属玻璃微流体通道及其制备方法 Metallic glass microfluidic channel and its preparation method
07/09/2014CN102782488B 具有驱动电极阵列的微流体沟道器件 An array of drive electrodes having a microfluidic channel device
07/09/2014CN102568976B 一种二级反射器的制作方法 One kind of manufacturing method of two reflectors
07/09/2014CN102381677B 复合晶片半导体元件及其形成方法 Compound semiconductor device and method of forming a wafer
07/09/2014CN102303844B Mems器件及其形成方法 Mems device and method for forming
07/09/2014CN102234096B 半导体结构体及半导体结构体的制造方法 The method of manufacturing a semiconductor structure and semiconductor structure
07/08/2014USRE44995 Method for producing a semiconductor component and a semiconductor component produced according to the method
07/08/2014US8771525 Rotary nanotube bearing structure and methods for manufacturing and using the same
07/08/2014DE202008018474U1 Schicht mit hierarchischer mikro- und nanostrukturierter Oberfläche sowie Zusammensetzung zu ihrer Herstellung Layer with hierarchical micro- and nano-structured surface and composition for the preparation thereof
07/03/2014WO2014105637A1 Re-inking roller for microcontact printing in a roll-to-roll process
07/03/2014WO2014105471A1 Preventing glass particle injection during the oil fill process
07/03/2014WO2014105458A1 Article with hollow microneedles and method of making
07/03/2014WO2014103842A1 Method for producing microchannel and microchannel
07/03/2014WO2014102121A1 Component comprising component element and a support
07/03/2014US20140186987 Manufacturing methods for micro-electromechanical system device having electrical insulating structure
07/03/2014US20140186986 Hybrid mems bump design to prevent in-process and in-use stiction
07/03/2014US20140183670 Capacitive Intravascular Pressure-Sensing Devices and Associated Systems and Methods
07/03/2014US20140183669 Resonant sensor with asymmetric gapped cantilevers
07/03/2014US20140182377 Method, apparatus and system for providing metering of acceleration
07/03/2014DE112012004340T5 Integrierte Halbleitereinheiten mit Träger aus amorphem Silicium, Verfahren zur Herstellung und Entwurfsstruktur A semiconductor integrated units with carrier of amorphous silicon, processes for preparing and design structure
07/03/2014DE102012224537A1 Lithographieverfahren und Lithographievorrichtung für Bauteile und Schaltungen mit Strukturabmessungen im Mikro- und Nanobereich Lithography process and lithography apparatus for components and circuits with feature sizes in the micro- and nanoscale
07/02/2014EP2748653A1 Method for producing periodic crystalline silicon nanostructures
07/02/2014CN203683082U 具有孔的半导体装置 The semiconductor device having a bore
07/02/2014CN103904074A 电路和用于制造电路的方法 Circuit and a method for manufacturing the circuit
07/02/2014CN103901093A 制备亲疏水相间的微阵列芯片及其用于质谱成像定量分析的方法 Preparation of hydrophilic and hydrophobic phases microarray and mass spectrometry imaging method for quantitative analysis of
07/02/2014CN103900740A 压力传感器及其制造方法 Pressure sensor and its manufacturing method
07/02/2014CN103900544A 一种基于热膨胀流的mems三轴陀螺及其加工方法 A three-axis thermal expansion of the flow of mems gyro and processing method based on
07/02/2014CN103896207A 一种基于力电热耦合的碳纳米管阵列键合方法 Based electric power coupled carbon nanotube array bonding method
07/02/2014CN103896206A 基于硅片刻穿的体硅加工工艺 Silicon-based bulk silicon moment wear process
07/02/2014CN103896205A Mems牺牲层刻蚀方法 Mems sacrificial layer etching method
07/02/2014CN103896204A 沟槽中的成膜工艺方法 The film formation process for the trench
07/02/2014CN103896203A 一种mems红外光源及其制备方法 Mems one kind of infrared light source and its preparation method
07/02/2014CN102789884B 一种石英材料内部的螺线管微电感的制备方法 A silica material inside the solenoid microinductance preparation
07/02/2014CN102566395B 不具有塑性域的部件的组装方法 Domain does not have a method of assembling plastic parts
07/02/2014CN102540456B 一种自倾斜微机电系统微镜 A self-tilt MEMS micromirror
07/02/2014CN102430512B Mems玻璃球面超声换能器片上集成系统及其制备方法 Mems glass sphere transducer ultrasound transducer on-chip system and its preparation method
07/02/2014CN102390802B 一种电毛细力驱动填充与反电场辅助脱模的压印成形方法 An electrically driven filled capillary forces and anti-field-assisted molding method releasing imprint
07/02/2014CN102381681B 一种微机械结构与集成电路单片集成的加工方法 A micro mechanical structure monolithically integrated with the integrated circuit processing methods
07/02/2014CN102358611B 一种制造抛物凹面微透镜阵列的介电泳力压印成形方法 India beat dielectrophoresis method of molding a parabolic concave microlens array fabricated
07/02/2014CN101886962B 电子压力传感装置 Electronic pressure sensing device
07/01/2014US8767983 Module including a micro-electro-mechanical microphone
07/01/2014US8765512 Packaging compatible wafer level capping of MEMS devices
07/01/2014US8763641 Microfluidic pump and valve structures and fabrication methods
07/01/2014US8763220 Method of manufacturing a MEMS device
06/2014
06/26/2014WO2014100497A1 Cmos integrated moving-gate transducer with silicon as a functional layer
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