Patents
Sitemap › B81 - Micro-structural technology › B81C - Processes or apparatus specially adapted for the manufacture or treatment of micro-structural devices or systems › B81C 1 - Manufacture or treatment of devices or systems in or on a substrate
Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526)
08/2014
08/13/2014EP2764357A1 Method for making a silicon separation microcolumn for chromatography or gas chromatography
08/13/2014CN103985649A 晶圆级封装方法及晶圆 Wafer and wafer-level packaging method
08/13/2014CN103984204A 一种润滑薄膜的制备方法 Method for preparing a lubricating film
08/13/2014CN103983395A 一种微压力传感器及其制备与检测方法 A micro pressure sensor and its preparation and detection methods
08/13/2014CN103979485A 一种微纳多孔硅材料的制备方法 A method for preparing porous silicon micro-nano materials
08/13/2014CN103979484A 微应力诱导反应方法及使用其的指针核-壳微颗粒的制备方法 Stress-induced micro-reaction process and the use thereof pointer core - shell microparticles prepared
08/13/2014CN103979483A 制造包括至少两个不同的功能性高度的一体式微机械构件的方法 Manufacture comprising at least two different functions of the height of the micro mechanical components of one method of
08/13/2014CN102998479B 氮化铝基集成阵列结构的二维风速风向传感器及其制造方法 Dimensional wind speed and direction sensor and method for manufacturing aluminum nitride integrated array structure
08/13/2014CN102928089B 一种非制冷热释电线列焦平面及其制造方法 An uncooled focal plane and its manufacturing method pyroelectric wire column
08/13/2014CN102645565B 一种微机械磁场传感器及其制备方法 A micro mechanical magnetic field sensor and its preparation method
08/13/2014CN102530843B 一种疏松化聚酰亚胺红外吸收薄膜的制备方法 A loose Preparation infrared absorption method polyimide film
08/13/2014CN102431964B 可控生成量子点或量子线的方法 The method of generating controllable quantum dots or quantum wires
08/13/2014CN102285631B 一种在石墨或石墨烯表面加工纳米尺度图形的方法 A graphite or graphene nano-scale graphics processing method
08/13/2014CN102099282B 晶圆级封装半导体的方法 Wafer-level packaging method of a semiconductor
08/13/2014CN102079502B 一种mems器件及其圆片级真空封装方法 One kind of mems devices and wafer level vacuum packaging method
08/13/2014CN101778712B 制备在聚合物表面上的微流体系统的方法 The method for preparing the surface of the polymer micro-fluidic system
08/12/2014US8803296 Coatings for relatively movable surfaces
08/07/2014US20140220723 Methods and Structures for Using Diamond in the Production of MEMS
08/07/2014US20140217521 MEMS Device With Stress Relief Structures
08/07/2014US20140217478 Cmos ultrasonic transducers and related apparatus and methods
08/07/2014DE102014209905A1 Lithographisches Verfahren zur Herstellung eines optischen Bauteils sowie entsprechend hergestelltes optisches Bauteil für eine Projektionsbelichtungsanlage A lithographic process for producing an optical component, as well as correspondingly produced optical member for a projection exposure apparatus
08/07/2014DE102012015204B4 Verfahren zur Herstellung eines Flammenionisationsdetektors A process for producing a flame ionization detector
08/06/2014EP2762864A1 Membrane-based sensor device and method for manufacturing the same
08/06/2014EP2761413A2 Touch sensitive film, touch sensing device, and electronic device
08/06/2014CN203754412U 一种mems红外光源 One kind of infrared light mems
08/06/2014CN103974896A 用于垂直集成的堆叠式通孔 For vertically integrated stacked vias
08/06/2014CN103968997A 一种soi微型皮拉尼计及其制作方法 One kind of miniature soi Pirani gauge its production methods
08/06/2014CN103964374A 一种去除mems传感器之再沉积聚合物的方法 A method of removing redeposited method of polymer mems sensor
08/06/2014CN103964373A 具有抗裂膜结构的微机电系统器件及其制造方法 Having a MEMS device and method of manufacturing the film structure of Cracking
08/06/2014CN103964372A 一种整合式微机电元件及其制造方法 An integrated micro-electromechanical device and manufacturing method
08/06/2014CN103964371A 硅晶片的钝化层的腐蚀方法 The method of etching a silicon wafer passivation layer
08/06/2014CN103964370A 一种电容式压力传感器的制备方法 Preparation of a capacitive pressure sensor
08/06/2014CN103964368A Mems器件和制造mems器件的方法 Mems device and method of manufacturing the mems device
08/06/2014CN103964366A 封闭的mems器件的内部电接触 Internal electrical contacts closed mems device
08/06/2014CN103964365A 用于密封环结构的方法和装置 Method and apparatus for the sealing ring structure
08/06/2014CN103964364A 微纳尺度静电力开关及其制造方法 Micro- and nanoscale electrostatic switch and its manufacturing method
08/06/2014CN102723839B 柔性基底电磁式能量采集器及其制备方法 Flexible substrates electromagnetic energy harvester and its preparation method
08/06/2014CN102375090B 微机械悬臂梁开关在线式微波功率检测器及制备方法 Micromechanical cantilever switch line microwave power detector and preparation methods
08/06/2014CN102275867B 带有部分密封壳体的半导体器件及其制造方法 Semiconductor device and manufacturing method with a portion of the seal housing
08/06/2014CN101776501B 一种mems压力敏感芯片及其制作方法 Mems one kind of pressure-sensitive chip and production methods
08/06/2014CN101742389B 集成电路结构 Integrated circuit structure
08/06/2014CN101301992B 微机械装置及在其上调节确定温度或确定温度过程的方法 Micromechanical device and a method to determine the temperature or determine the temperature adjustment process thereon
08/05/2014US8796792 Micro-electro-mechanical system having movable element integrated into leadframe-based package
08/05/2014US8794498 Electronic component device and method for producing the same
07/2014
07/31/2014WO2014056715A3 Differential pressure sensor and method for the production thereof
07/31/2014US20140213008 Capacitive Sensors and Methods for Forming the Same
07/31/2014US20140213007 Internal electrical contact for enclosed mems devices
07/31/2014US20140212641 Process for producing 3-dimensional structure assembled from nanoparticles
07/31/2014US20140210020 MEMS Device and Method of Manufacturing a MEMS Device
07/31/2014US20140210019 Low-cost package for integrated mems sensors
07/31/2014US20140210018 Microelectromechanical system devices having crack resistant membrane structures and methods for the fabrication thereof
07/31/2014US20140209470 Electrochemically Fabricated Structures Having Dielectric or Active Bases and Methods of and Apparatus for Producing Such Structures
07/31/2014US20140208857 Mems resonator pressure sensor
07/31/2014DE102014100722A1 MEMS-Vorrichtung und Verfahren zur Herstellung einer MEMS-Vorrichtung The MEMS device and method of manufacturing a MEMS device
07/31/2014DE102013201342A1 Verfahren zum Herstellen eines normal-geschlossenen Rückschlagventils für mikrofluidische Bauteile aus einem polymeren Schichtsystem und Rückschlagventil A process for producing a normally-closed check valve for microfluidic components of a polymeric coating system and check valve
07/31/2014DE102013201297A1 Einheit zum Bevorraten eines Fluids und Verfahren zur Herstellung einer Einheit zum Bevorraten eines Fluids Unit for storing a fluid and method of manufacturing a unit for storing a fluid
07/30/2014CN103958396A 经囊封机电系统装置阵列 Electromechanical systems by encapsulating device array
07/30/2014CN103958395A 薄背面玻璃互连件 Thin back glass interconnects
07/30/2014CN103958394A 制造封装装置的方法 The method of producing the packaging unit
07/30/2014CN103958393A Mems传感器封装及其方法 Mems sensor package and method
07/30/2014CN103958392A 超轻微格构及其形成方法 Ultra-light trellis and method of forming
07/30/2014CN103956483A 钴酸锌/氧化镍核壳纳米线阵列的制备方法和应用 Cobalt, zinc / nickel oxide preparation and application of core-shell nanowire arrays
07/30/2014CN103956336A 用于制造可转移半导体结构、器件和器件构件的松脱策略 For the manufacture of semiconductor structures can be transferred, devices and device components loose strategy
07/30/2014CN103956321A 单晶硅蚀刻方法及所获得的半导体结构 Monocrystalline silicon etching method and a semiconductor structure obtained
07/30/2014CN103955129A 具有双反射镜的微型原子气体腔器件及其制造方法 Miniature atomic gas chamber device and a manufacturing method having a double mirror
07/30/2014CN103954383A 一种可用于高温环境下壁面剪应力测量的底层隔板微传感器及其制造方法 An underlying partitions can be used for micro-sensor and method for manufacturing high-temperature environments wall shear stress measurements
07/30/2014CN103950887A 一种深硅刻蚀方法 A dark silicon etching method
07/30/2014CN103950886A 一种mems传感器封装结构及其封装方法 One kind mems sensor package structure and packaging method
07/30/2014CN102728405B 功能导向的多金属氧酸盐一维纳米阵列及制备方法 Function-oriented POMs one-dimensional arrays and preparation methods
07/30/2014CN102583229B 面向微结构制造具有力反馈控制的微探针刻划加工方法 Manufacturing a force for microstructure characterization microprobe processing method of feedback control
07/30/2014CN102491254B 一种聚二甲基硅氧烷弹性体选区皱纹化的方法 One poly dimethyl siloxane elastomer of the selection method of wrinkles
07/30/2014CN102362346B 通孔结构及其方法 The through-hole structure and a method
07/29/2014US8792179 Laminated micromirror package
07/29/2014US8791540 Thin semiconductor device having embedded die support and methods of making the same
07/29/2014US8791539 Thin semiconductor device having embedded die support and methods of making the same
07/24/2014WO2014113508A2 Methods of forming parts using laser machining
07/24/2014WO2014028536A3 Implantable mems device and method
07/24/2014WO2014019676A3 Ring laser gyroscope
07/24/2014US20140207014 Micromachined fluid flow regulating device
07/24/2014US20140206123 Dual Layer Microelectromechanical Systems Device and Method of Manufacturing Same
07/24/2014US20140203883 Resonator, oscillator, and method for fabricating oscillator
07/24/2014US20140203421 Micro-electro mechanical system (mems) structures and methods of forming the same
07/24/2014US20140203380 Chip package comprising a microphone structure and a method of manufacturing the same
07/24/2014US20140203379 Integration of laminate mems in bbul coreless package
07/24/2014US20140202837 Low-cost process-independent rf mems switch
07/24/2014DE102014100755A1 Chipanordnung und verfahren zu ihrer herstellung Chip system and process for their production
07/24/2014DE102014100743A1 Chipgehäuse und Verfahren zu seiner Herstellung Chip package and process for its preparation
07/24/2014DE102013100563A1 Aufnahmeeinrichtung zur Handhabung strukturierter Substrate Receiving means for handling structured substrates
07/23/2014EP2755909A2 Method for etching material longitudinally spaced from etch mask
07/23/2014CN103945882A 用于药物递送装置的药剂导向组件 A guide assembly for pharmaceutical drug delivery device
07/23/2014CN103941577A 具有双反射镜和凹槽形结构的原子气体腔器件及其制造方法 Atomic gases having a chamber device and a method of manufacturing a mirror and a double groove-shaped structure
07/23/2014CN103941576A 基于mems技术的原子气体腔器件及其制造方法 Based on device and method for manufacturing atomic gas chamber mems technology
07/23/2014CN103940535A 压力传感器的制造方法 The method of manufacturing the pressure sensor
07/23/2014CN103935954A 利用自组装单分子膜对贵金属进行正性和负性刻蚀的方法 The use of self-assembled monolayers were positive for precious metals and negative etching method
07/23/2014CN103935953A 复合腔体及其形成方法 And method of forming the composite cavity
07/23/2014CN103935952A 芯片封装体及其制造方法 Chip package and method of manufacturing
07/23/2014CN102583227B 一种ZnO三维同质pn结纳米阵列及其制备方法 A three-dimensional homogeneous pn junction ZnO nano-arrays and its preparation method
07/23/2014CN102495234B 一种双面对称弹性梁结构电容式微加速度传感器及方法 A double-sided symmetrical elastic beam structure and method for capacitive micromachined accelerometer
07/23/2014CN102398886B 具微机电元件的封装结构及其制法 Jiqizhifa package structure with micro-electromechanical components
07/23/2014CN102285635B 一种利用激光制作金属微纳结构的系统与方法 A system and method utilizing a laser produced metal micro and nano structures
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