Patents
Sitemap › B81 - Micro-structural technology › B81C - Processes or apparatus specially adapted for the manufacture or treatment of micro-structural devices or systems › B81C 1 - Manufacture or treatment of devices or systems in or on a substrate
Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526)
10/2014
10/21/2014US8865297 Heterogeneous surfaces
10/21/2014US8865090 Micro fluid system support and manufacturing method thereof
10/21/2014US8865007 Method for making three-dimensional nano-structure array
10/16/2014US20140308822 Deposition technique for depositing a coating on a device
10/16/2014US20140308771 Micro-electro-mechanical system (mems) structures and design structures
10/16/2014US20140308757 Mems device and a method of making the same
10/16/2014US20140306312 MEMS Sensor Packaging and Method Thereof
10/16/2014US20140306300 Component and Method for Producing a Component
10/14/2014US8861184 Method for fabricating a multi-layer capacitor and a multi-layer capacitor
10/14/2014US8860154 CMOS compatible silicon differential condenser microphone and method for manufacturing the same
10/14/2014US8859318 Method for integrating MEMS microswitches on GaN substrates comprising electronic power components
10/14/2014US8859317 Gas sensor and manufacturing method thereof
10/14/2014US8857234 Continuous microscale forming of metal-based microchannels and other microchannel devices
10/09/2014WO2014163729A2 Acoustic bandgap structures for integration of mems resonators
10/09/2014WO2014161462A1 Method for reinforcing micro-electro-mechanical systems device in manufacturing process
10/09/2014US20140302312 System and method for formation of thin films with self-assembled monolayers embedded on their surfaces
10/09/2014US20140299967 Electronic device structure and method of making electronic devices and integrated circuits using grayscale technology and multilayer thin-film composites
10/09/2014US20140299574 Methods for fabricating micro-devices
10/09/2014US20140299572 Compliant micro device transfer head with integrated electrode leads
10/09/2014US20140299472 Systems and Methods for an Integrated Bio-Entity Manipulation and Processing Semiconductor Device
10/09/2014US20140299271 Tunable Polish Rates By Varying Dissolved Oxygen Content
10/09/2014DE102013213071B3 Herstellungsverfahren für ein mikromechanisches Bauteil Manufacturing method for a micromechanical component
10/09/2014DE102013108280B3 Verfahren zum Herstellen eines Mikrosystems mit Pixel A method of manufacturing a microsystem with pixel
10/09/2014DE102013005633A1 Produktion von Mikrostrukturen in Mikrosystemen Production of microstructures in microsystems
10/08/2014EP2785663A2 Method to align covers on structured layers and resulting devices
10/08/2014EP2785634A1 Thin back glass interconnect
10/07/2014US8855337 Microphone and accelerometer
10/07/2014US8853850 MEMS packaging scheme using dielectric fence
10/07/2014US8853802 Method of forming a die having an IC region adjacent a MEMS region
10/07/2014US8853800 Integrated device of the type comprising at least a microfluidic system and further circuitry and corresponding integration process
10/07/2014US8852979 Micro-pattern forming method, and micro-channel transistor and micro-channel light-emitting transistor forming method using same
10/07/2014US8851442 Aerogel-bases mold for MEMS fabrication and formation thereof
10/02/2014WO2014159957A1 Methods of forming buried microelectricomechanical structures coupled with device substrates and structures formed thereby
10/02/2014WO2014156782A1 Method for manufacturing hollow structure
10/02/2014US20140295606 Method for producing a device comprising cavities formed between a suspended element resting on insulating pads semi-buried in a substrate and this substrate
10/02/2014US20140295122 Method for wafer-level manufacturing of objects and corresponding semi-finished products
10/02/2014US20140292429 Multigate resonant channel transistor
10/02/2014US20140291782 Methods and devices for packaging integrated circuits
10/02/2014US20140291781 Method of packaging a mems transducer device and packaged mems transducer device
10/02/2014US20140291780 Mems device and method of manufacturing the same
10/02/2014US20140291779 Semiconductor Devices and Methods for Manufacturing Semiconductor Devices
10/02/2014DE102014104171A1 Halbleiterbauelemente und Verfahren zum Herstellen von Halbleiterbauelementen Semiconductor devices and methods of manufacturing of semiconductor devices
10/01/2014EP2782868A1 Process for manufacturing an encapsulating device
09/2014
09/30/2014US8847375 Microelectromechanical systems embedded in a substrate
09/30/2014US8847336 Micromechanical component having an inclined structure and corresponding manufacturing method
09/30/2014US8847289 CMOS compatible MEMS microphone and method for manufacturing the same
09/30/2014US8847079 Method for producing an integrated device
09/30/2014US8846183 Microfabricated elastomeric valve and pump systems
09/30/2014US8846149 Delamination resistant semiconductor film and method for forming the same
09/30/2014CA2688799C In-line holographic mask for micromachining
09/25/2014WO2014150798A1 Interface for microfluidic chip
09/25/2014US20140287548 MEMS Device with Release Aperture
09/25/2014US20140287547 Inhibiting propagation of surface cracks in a mems device
09/25/2014US20140285060 Electrical component and method of manufacturing the same
09/25/2014US20140284730 Mems device and method of manufacturing the same
09/25/2014US20140284729 Electrical component and method of manufacturing the same
09/25/2014US20140284603 Composite micro-electro-mechanical-system apparatus and manufacturing method thereof
09/25/2014US20140284188 Mems device and method of manufacturing the same
09/25/2014DE102013204811A1 Sensorvorrichtung zum Sensieren eines Gases, Verfahren zum Betreiben einer Sensorvorrichtung zum Sensieren eines Gases und Herstellungsverfahren für eine Sensorvorrichtung zum Sensieren eines Gases Sensor device for sensing a gas, A method of operating a sensor device for sensing a gas and manufacturing method for a sensor device for sensing a gas
09/25/2014DE102013204763A1 Mikromechanische Sensorvorrichtung und entsprechendes Herstellungsverfahren Micromechanical sensor device and corresponding manufacturing method
09/25/2014DE102013005165A1 Verfahren und Einrichtung zur Herstellung mikrostrukturierter Gitterplatten mit hohem Aspektverhältnis Method and apparatus for the production of microstructured grid plates with high aspect ratio
09/24/2014EP2780278A1 Method and apparatus for wafer-level solder hermetic seal encapsulation of mems devices
09/24/2014EP2780062A1 Medicament guiding assembly for a drug delivery device
09/23/2014US8842859 Packaged microphone with reduced parasitics
09/23/2014US8841736 Integrated circuit with MEMS element and manufacturing method thereof
09/23/2014US8841156 Method for the production of micro-electromechanical semiconductor component
09/23/2014US8841155 Method for manufacturing MEMS device
09/23/2014US8841002 Method of room temperature covalent bonding
09/23/2014US8840985 Composition for forming inorganic pattern and method for forming inorganic pattern using the same
09/23/2014US8840850 Flow channel structure and method of manufacturing same
09/23/2014US8839512 Oblique parts or surfaces
09/23/2014CA2584145C Piano mems with hidden hinge
09/18/2014WO2014140120A1 Method for producing a micromechanical component, and corresponding micromechanical component
09/18/2014WO2014139795A1 Methods for providing spaced lithography features on a substrate by self-assembly of block copolymers
09/18/2014WO2014139793A1 Methods for providing lithography features on a substrate by self-assembly of block copolymers
09/18/2014US20140283230 Microprobe and microprobe manufacturing method
09/18/2014US20140273351 Method of encapsulating a micro-device by anodic bonding
09/18/2014US20140270271 MEMS Acoustic Transducer, MEMS Microphone, MEMS Microspeaker, Array of Speakers and Method for Manufacturing an Acoustic Transducer
09/18/2014US20140268295 Hermetically sealed mems device and its fabrication
09/18/2014US20140266484 Microelectromechanical resonators
09/18/2014US20140264909 Microelectromechanical system devices having through substrate vias and methods for the fabrication thereof
09/18/2014US20140264900 Anisotropic conductor and method of fabrication thereof
09/18/2014US20140264662 MEMS Integrated Pressure Sensor and Microphone Devices and Methods of Forming Same
09/18/2014US20140264655 Surface roughening to reduce adhesion in an integrated mems device
09/18/2014US20140264654 Microphone package with integrated substrate
09/18/2014US20140264653 MEMS Pressure Sensor and Microphone Devices Having Through-Vias and Methods of Forming Same
09/18/2014US20140264651 Semiconductor Devices and Methods of Forming Thereof
09/18/2014US20140264650 Low Frequency Response Microphone Diaphragm Structures And Methods For Producing The Same
09/18/2014US20140264649 Micromechanical structure and corresponding production process
09/18/2014US20140264648 MEMS Integrated Pressure Sensor Devices and Methods of Forming Same
09/18/2014US20140264647 Method of forming monolithic cmos-mems hybrid integrated, packaged structures
09/18/2014US20140264646 Microelectromechanical system and method
09/18/2014US20140264644 MEMS Method and Structure
09/18/2014US20140264643 Methods of forming buried electromechanical structures coupled with device substrates and structures formed thereby
09/18/2014US20140264475 Mems device structure with a capping structure
09/18/2014US20140260710 Ultrasound liquid dispersion humidifier
09/18/2014DE102014204712A1 MEMS-Akustikwandler, MEMS-Mikrofon, MEMS-Mikrolautsprecher, Lautsprecher-Array und Verfahren zur Herstellung eines Akustikwandlers MEMS-acoustic transducer, the MEMS microphone, MEMS micro-speaker, the speaker array and methods for producing an acoustic transducer
09/18/2014DE102014103389A1 Mikroelektromechanische Resonatoren Microelectromechanical resonators
09/18/2014DE102014103341A1 Halbleiterbauelemente und Verfahren zu ihrer Bildung Semiconductor devices and methods for their formation
09/18/2014DE102013204606A1 Wellenleiter-Resonator-Bauelement und Verfahren zu seiner Herstellung Waveguide resonator device and process for its preparation
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