Patents
Sitemap › B81 - Micro-structural technology › B81C - Processes or apparatus specially adapted for the manufacture or treatment of micro-structural devices or systems › B81C 1 - Manufacture or treatment of devices or systems in or on a substrate
Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526)
09/2014
09/18/2014DE102013204475A1 Herstellungsverfahren für ein mikromechanisches Bauelement und entsprechendes mikromechanisches Bauelement Manufacturing method for a micromechanical component and corresponding micromechanical component
09/18/2014DE102013106596A1 Verfahren für die Ausbildung von Biochips sowie Biochips mit nicht-organischen Kontaktauflagen für einen verbesserten Wärmehaushalt Method for the formation of biochips and biochips with non-organic contact pads for improved heat management
09/18/2014DE102006028783B4 Poröser Siliziumkörper mit schichtartigem Aufbau, Verfahren zu dessen Herstellung sowie Verwendung desselben Of the same porous silicon body with a layer-structure, processes for its preparation and use
09/17/2014EP2778121A1 Method for encapsulating microdevice by anodic bonding
09/17/2014EP2778120A1 Mems sensor packaging and method thereof
09/17/2014EP2776364A1 Improved process for producing a device comprising cavities formed between a suspended element resting on insulating pads semi-buried in a substrate and this substrate
09/16/2014US8837754 Microelectromechanical transducer and corresponding assembly process
09/16/2014US8836116 Wafer level packaging of micro-electro-mechanical systems (MEMS) and complementary metal-oxide-semiconductor (CMOS) substrates
09/16/2014US8836111 Semiconductor integrated device assembly and related manufacturing process
09/16/2014US8836053 Hybrid integrated component and method for the manufacture thereof
09/16/2014US8835222 Method for producing a two-chip assembly and corresponding two-chip assembly
09/16/2014US8835207 Method of manufacturing a semiconductor integrated circuit device having a MEMS element
09/16/2014US8835091 Method for manufacturing micro-structure and optically patternable sacrificial film-forming composition
09/16/2014US8834966 Coated microfluidic devices and methods of making
09/16/2014US8834956 Methods of utilizing block copolymer to form patterns
09/14/2014CA2844780A1 Fully differential capacitive architecture for mems accelerometer
09/12/2014WO2014136023A1 Micro/nano structures of colloidal nanoparticles attached to an electret substrate and method for producing such micro/nano structures
09/12/2014WO2014135329A1 Miniaturized component and method for the production thereof
09/11/2014US20140252512 Methods And Apparatus For MEMS Structure Release
09/11/2014US20140252510 Signal boosting apparatus and method of boosting signals
09/11/2014US20140252508 MEMS Device with a Capping Substrate
09/11/2014US20140252507 Self-sealing membrane for mems devices
09/11/2014US20140252422 Cavity structures for mems devices
09/11/2014US20140252358 Methods and Apparatus for MEMS Devices with Increased Sensitivity
09/11/2014DE102013203829A1 Verfahren und Vorrichtung zur Herstellung beidseitig mikrostrukturierter Verbundfolien Method and apparatus for producing composite films both sides of microstructured
09/11/2014DE102013102213A1 Miniaturisiertes Bauelement und Verfahren zur Herstellung Miniaturized device and method for producing
09/11/2014DE102013101752A1 Nicht-planarer Formkörper, Verfahren zu seiner Herstellung, seine Verwendung, Verfahren zur Herstellung eines Mikrogerüsts und dessen Verwendung Non-planar molded body, method for its preparation, its use, method of manufacturing a micro skeleton, and its use
09/11/2014DE102009056712B4 Verfahren zur Herstellung elektrischer Anschlusselemente auf Nanosäulen A process for producing electrical connection elements on nanopillars
09/10/2014EP2774891A1 Semiconductor device with capacitive sensor and integrated circuit
09/10/2014EP2773586A2 Micromechanical element, component having a micromechanical element, and method for producing a component
09/09/2014US8829630 Pressure sensor and method for manufacturing pressure sensor
09/09/2014US8829629 Capacitance type sensor
09/09/2014US8829628 MEMS package structure
09/09/2014US8828771 Sensor manufacturing method
09/09/2014US8828520 Micro-posts having improved uniformity and a method of manufacture thereof
09/09/2014US8828333 Method for the production of a microfluidic system on a polymer surface
09/09/2014US8828253 Lithography using self-assembled polymers
09/09/2014US8826734 Inertial force sensor
09/04/2014WO2014133192A1 Fluidic device and fabrication method thereof, and thermal transfer medium for fluidic device fabrication
09/04/2014WO2014131490A1 Microfluidic device and method
09/04/2014US20140248781 Semi-aqueous polymer removal compositions with enhanced compatibility to copper, tungsten, and porous low-k dielectrics
09/04/2014US20140248731 Apparatus integrating microelectromechanical system device with circuit chip and methods for fabricating the same
09/04/2014US20140248730 MEMS Device and Method of Formation Thereof
09/04/2014US20140246948 Transducer, and manufacturing method of the transducer
09/04/2014US20140246740 Implantation of gaseous chemicals into cavities formed in intermediate dielectrics layers for subsequent thermal diffusion release
09/04/2014US20140246739 Top Port MEMS Cavity Package and Method of Manufacture Thereof
09/04/2014US20140246738 Top Port MEMS Cavity Package and Method of Manufacture Thereof
09/04/2014US20140246737 Mems vibrator, method of manufacturing mems vibrator, electronic device, and moving object
09/04/2014US20140246708 MEMS Structures and Methods of Forming the Same
09/04/2014DE102010061340B4 Mehrkomponentenspritzgusssystem und Verfahren zu dessen Herstellung Multi-component injection molding system and process for its preparation
09/04/2014DE10196506B3 Herstellungsverfahren für einen Dünnfilmstrukturkörper Manufacturing method of a thin-film structure body
09/03/2014EP2772306A1 Method for manufacturing microfluidic chips, device for functionalizing microfluidic chips, microfluidic chip and device for holding a microfluidic chip
09/02/2014US8823114 Sensor device having electrode draw-out portions through side of substrate
09/02/2014US8821739 High temperature thermal annealing process
09/02/2014US8821738 Thermal annealing process
09/02/2014CA2658122C Nanonozzle device arrays: their preparation and use for macromolecular analysis
08/2014
08/28/2014WO2014130047A1 Component assembly using a temporary attach material
08/28/2014US20140242739 Systems and methods for a pressure sensor having a two layer die structure
08/28/2014US20140242407 In-situ Compressed Specimen for Evaluating Mechanical Property of Copper Interconnection Micro Column and Preparation Method thereof
08/28/2014US20140239423 Microelectromechanical system devices having through substrate vias and methods for the fabrication thereof
08/28/2014US20140239421 Surface charge mitigation layer for mems sensors
08/28/2014US20140239353 Method for mems structure with dual-level structural layer and acoustic port
08/28/2014US20140239352 Cmos compatible silicon differential condenser microphone and method for manufacturing the same
08/28/2014US20140238955 Plasma processing with preionized and predissociated tuning gases and associated systems and methods
08/28/2014US20140238952 Method for manufacturing thin substrate
08/28/2014US20140238865 Methods of Forming Three-Dimensional Structures Having Reduced Stress and/or Curvature
08/27/2014EP2768767A1 Stacked vias for vertical integration
08/26/2014US8816492 Method and apparatus for isolating MEMS devices from external stimuli
08/26/2014US8816453 MEMS component and a semiconductor component in a common housing having at least one access opening
08/26/2014US8815644 Wafer processing method
08/26/2014US8815626 Low-profile MEMS thermal printhead die having backside electrical connections
08/26/2014US8815624 Method of etching and singulating a cap wafer
08/26/2014US8815623 Method for manufacturing an intergrated pressure sensor
08/26/2014US8815105 Method using block copolymers for making a master mold for nanoimprinting patterned magnetic recording disks with chevron servo patterns
08/26/2014US8813564 MEMS multi-axis gyroscope with central suspension and gimbal structure
08/21/2014US20140235507 Protein Chips for High Throughput Screening of Protein Activity
08/21/2014US20140231979 Stacked assembly of a mems integrated device having a reduced thickness
08/21/2014US20140231939 Capacitive pressure sensor and method
08/21/2014US20140231938 Micro-electro-mechanical device with buried conductive regions, and manufacturing process thereof
08/21/2014US20140231937 Method for manufacturing a protective layer against hf etching, semiconductor device provided with the protective layer and method for manufacturing the semiconductor device
08/21/2014US20140231934 Electrical component and method of manufacturing the same
08/21/2014US20140231254 Method of Fabricating a Nanochannel System for DNA Sequencing and Nanoparticle Characterization
08/21/2014DE112013000325T5 Architektur und Herstellung von induktiven Inertialsensoren in Verpackungsaufbauschichten Architecture and manufacture of inductive inertial sensors in packaging structure layers
08/21/2014DE102013002667A1 Mikrofluidiksystem mit nach außen verschlossenen Kavitäten Microfluidic system with closed to the outside wells
08/20/2014EP2767870A2 Method for manufacturing a one-piece micromechanical part comprising at least two separate functional levels
08/20/2014EP2767869A1 Method for manufacturing a one-piece micromechanical part comprising at least two separate levels
08/20/2014EP2767504A1 Process for manufacturing a micro- on nano-mecahnical structure comprising a porous surface
08/19/2014US8809982 Robust high aspect ratio semiconductor device
08/19/2014US8809200 Method of manufacturing a structure based on anisotropic etching, and silicon substrate with etching mask
08/19/2014US8808560 Method for producing single-crystal diamond movable structure
08/14/2014WO2014124044A1 Self-similar and fractal design for stretchable electronics
08/14/2014US20140227818 Semiconductor structure with lamella defined by singulation trench
08/14/2014US20140227817 Manufacturing process of mems device
08/14/2014US20140227816 Method to package multiple mems sensors and actuators at different gases and cavity pressures
08/14/2014US20140227150 Microfluidic device and method for producing a microfluidic device
08/14/2014US20140225204 Acoustic sensor and method for manufacturing same
08/14/2014US20140225167 Vertical electromechanical switch device and method for manufacturing the same
08/14/2014US20140224776 Laser-induced gas plasma machining
08/14/2014DE112012004523T5 Verfahren zur Herstellung einer Schutzschicht gegen HF-Ätzen, mit der Schutzschicht ausgestattete Halbleitervorrichtung, und Verfahren zur Herstellung der Halbleitervorrichtung A process for preparing a protective layer against HF etching, with the protective layer-equipped semiconductor device and method of manufacturing the semiconductor device
08/14/2014DE102014100083A1 Verbundwafer und ein Verfahren zur Herstellung davon Bonded wafer and a method for preparation thereof
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