| Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526) |
|---|
| 12/10/2014 | CN102616734B 双掩膜soi mems加工方法 Double mask processing methods soi mems |
| 12/10/2014 | CN102285636B 一种多边形截面硅梁的湿法腐蚀制备工艺 Polygonal cross-section of the wet etching of silicon beams Preparation |
| 12/10/2014 | CN102161469B 在单晶基板上形成悬浮物件的方法 The method of forming a suspended article on a single crystal substrate |
| 12/09/2014 | US8907465 Methods and devices for packaging integrated circuits |
| 12/09/2014 | US8907434 MEMS inertial sensor and method for manufacturing the same |
| 12/09/2014 | US8906750 Method of encapsulation of a microcomponent |
| 12/09/2014 | US8906730 Method of forming membranes with modified stress characteristics |
| 12/09/2014 | US8906729 Method of manufacturing a device with a cavity |
| 12/09/2014 | US8906627 Apparatuses and methods for manipulating droplets |
| 12/09/2014 | US8905808 Devices including, methods using, and compositions of reflowable getters |
| 12/09/2014 | US8905293 Self-removal anti-stiction coating for bonding process |
| 12/04/2014 | US20140357007 Method of forming a bond ring for a first and second substrate |
| 12/04/2014 | US20140357006 Method for making a suspended part of a microelectronic and/or nanoelectronic structure in a monolithic part of a substrate |
| 12/04/2014 | US20140356989 Method of manufacturing mems devices with reliable hermetic seal |
| 12/04/2014 | US20140353780 Detection structure for a mems acoustic transducer with improved robustness to deformation |
| 12/04/2014 | US20140353775 Wafer-level packaging of integrated devices, and manufacturing method thereof |
| 12/04/2014 | US20140353773 Method for forming a suspended membrane |
| 12/04/2014 | US20140353772 Microelectronic packages including patterned die attach material and methods for the fabrication thereof |
| 12/02/2014 | US8901683 Micro electro mechanical system (MEMS) microphone and fabrication method thereof |
| 12/02/2014 | US8901681 Method and apparatus for attachment of MEMS devices |
| 12/02/2014 | US8901679 Micromechanical structure, in particular sensor arrangement, and corresponding operating method |
| 12/02/2014 | US8901538 Nano resonator and manufacturing method thereof |
| 12/02/2014 | US8900924 Chip package and method for forming the same |
| 12/02/2014 | US8900464 Method of making a microelectronic interconnect element with decreased conductor spacing |
| 11/27/2014 | US20140349434 Internal electrical contact for enclosed mems devices |
| 11/27/2014 | US20140347953 Microfluidic free interface diffusion techniques |
| 11/27/2014 | US20140346658 Fabricating a microelectronics lid using sol-gel processing |
| 11/27/2014 | US20140346657 Thin film capping |
| 11/27/2014 | US20140346622 Forming Semiconductor Structure with Device Layers and TRL |
| 11/27/2014 | US20140346621 Mems backplate, mems microphone comprising a mems backplate and method for manufacturing a mems microphone |
| 11/27/2014 | US20140346620 Mems microphone with reduced parasitic capacitance |
| 11/25/2014 | US8897470 Method of fabricating integrated semiconductor device with MOS, NPN BJT, LDMOS, pre-amplifier and MEMS unit |
| 11/25/2014 | US8896132 Electronic device and fabrication method thereof |
| 11/25/2014 | US8895934 Microstructure manufacturing method |
| 11/25/2014 | US8895448 Single crystal silicon membrane with a suspension layer, method for fabricating the same, and a micro-heater |
| 11/25/2014 | US8895406 Release strategies for making transferable semiconductor structures, devices and device components |
| 11/25/2014 | US8895339 Reducing MEMS stiction by introduction of a carbon barrier |
| 11/20/2014 | US20140342557 Method for etching a complex pattern |
| 11/20/2014 | US20140342487 Process for encapsulating a microelectronic device comprising injection of noble gas through a material permeable to this noble gas |
| 11/20/2014 | US20140340814 Mems variable capacitor with enhanced rf performance |
| 11/20/2014 | US20140339658 Device comprising a spring and an element suspended thereon, and method for manufacturing same |
| 11/20/2014 | US20140339657 Piezoelectric mems microphone |
| 11/20/2014 | US20140339607 Fabricating polysilicon mos devices and passive esd devices |
| 11/20/2014 | US20140338460 Micromechanical component, manufacturing method for a micromechanical component and method for mounting a micromechanical component |
| 11/20/2014 | US20140338452 Tri-axial mems accelerometer |
| 11/18/2014 | US8890631 MEMS oscillator and manufacturing method thereof |
| 11/18/2014 | US8890283 Wafer with recessed plug |
| 11/18/2014 | US8890075 Measuring cell for the infrared analysis of fluids, measuring system having such a measuring cell, and method for producing such a measuring cell |
| 11/18/2014 | US8889563 Method and apparatus for etching the silicon oxide layer of a semiconductor substrate |
| 11/18/2014 | US8889245 Three-dimensional nanostructures and method for fabricating the same |
| 11/18/2014 | US8889084 Micro fluid system support and manufacturing method thereof |
| 11/18/2014 | US8887382 Method for manufacturing a pendulous accelerometer |
| 11/13/2014 | US20140335301 Method of Bonding Two Substrates and Device Manufactured Thereby |
| 11/13/2014 | US20140335269 Nanoscale array structures suitable for surface enhanced raman scattering and methods related thereto |
| 11/13/2014 | US20140332945 Method of Etching a Wafer |
| 11/13/2014 | US20140332913 Micro-electro-mechanical system (mems) structures and design structures |
| 11/13/2014 | US20140332912 Chip package and a method of manufacturing the same |
| 11/13/2014 | US20140332911 Capacitive micro-machined transducer and method of manufacturing the same |
| 11/13/2014 | US20140332910 Microelectromechanical device and a method of manufacturing |
| 11/11/2014 | US8884384 Micromachine and method for manufacturing the same |
| 11/11/2014 | US8884331 Structure for hermetic encapsulation of a device and an electronic component |
| 11/11/2014 | US8883652 Silicon etching liquid and etching method |
| 11/11/2014 | US8883536 Systems and methods for a pressure sensor having a two layer die structure |
| 11/11/2014 | US8883535 Microelectromechanical system devices having through substrate vias and methods for the fabrication thereof |
| 11/11/2014 | US8883015 Patch production |
| 11/11/2014 | US8883014 Monolithically formed EWOD device and method of making the same |
| 11/11/2014 | US8881370 Method of fabricating an inertial sensor |
| 11/06/2014 | US20140329392 Coatings for relatively movable surfaces |
| 11/06/2014 | US20140329389 Bulk nano-ribbon and/or nano-porous structures for thermoelectric devices and methods for making the same |
| 11/06/2014 | US20140327946 Mems scanning micromirror |
| 11/06/2014 | US20140326702 Method of manufacturing base body having microscopic hole, and base body |
| 11/04/2014 | US8878315 Horizontal coplanar switches and methods of manufacture |
| 11/04/2014 | US8878312 Electrical bypass structure for MEMS device |
| 11/04/2014 | US8877537 Method for manufacturing MEMS device |
| 11/04/2014 | US8877074 Methods of manufacturing microdevices in laminates, lead frames, packages, and printed circuit boards |
| 11/04/2014 | US8877071 Angle control of multi-cavity molded components for MEMS and NEMS group assembly |
| 10/30/2014 | US20140322918 Micro-posts having improved uniformity and a method of manufacture thereof |
| 10/30/2014 | US20140322894 Method for Handling a Thin Substrate and for Substrate Capping |
| 10/30/2014 | US20140322854 Method for manufacturing a mems sensor |
| 10/30/2014 | US20140322489 Microfabricated elastomeric valve and pump systems |
| 10/30/2014 | US20140319631 MEMS Integrated Pressure Sensor Devices having Isotropic Cavities and Methods of Forming Same |
| 10/28/2014 | US8873341 CMUT cell formed from a membrane of nanotubes or nanowires or nanorods and device for ultra high frequency acoustic imaging including multiple cells of this kind |
| 10/28/2014 | US8872359 MEMS devices |
| 10/28/2014 | US8872289 Micro-electro-mechanical system (MEMS) structures and design structures |
| 10/28/2014 | US8872287 Integrated structure for MEMS device and semiconductor device and method of fabricating the same |
| 10/28/2014 | US8871641 Low resistance through-wafer via |
| 10/28/2014 | US8871606 Microelectromechanical device packaging with an anchored cap and its manufacture |
| 10/28/2014 | US8871433 Method for producing microstructure |
| 10/23/2014 | US20140312439 Microphone Module and Method of Manufacturing Thereof |
| 10/23/2014 | US20140312436 Method of fabricating mems device having release etch stop layer |
| 10/23/2014 | US20140312435 Mems device with stress isolation and method of fabrication |
| 10/23/2014 | US20140310914 Mems hinges with enhanced rotatability |
| 10/21/2014 | US8866289 Bonding process and bonded structures |
| 10/21/2014 | US8866241 Pressure sensing device having contacts opposite a membrane |
| 10/21/2014 | US8866240 System and methods for preparing freestanding films using laser-assisted chemical etch, and freestanding films formed using same |
| 10/21/2014 | US8866238 Hybrid integrated component and method for the manufacture thereof |
| 10/21/2014 | US8865599 Self-leveling planarization materials for microelectronic topography |
| 10/21/2014 | US8865564 Process for producing vertical interconnections through structured layers |
| 10/21/2014 | US8865498 Method for manufacturing three-dimensionally shaped comb-tooth electret electrode |
| 10/21/2014 | US8865497 Planar cavity MEMS and related structures, methods of manufacture and design structures |