| Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526) |
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| 07/18/2001 | EP1116165A2 Method for producing metallic microstructures and use of this method in the production of sensor devices for detecting fingerprints |
| 07/18/2001 | EP1116038A1 Formation of a bridge in a micro-device |
| 07/18/2001 | EP1115649A1 Micromechanical component with sealed membrane openings |
| 07/18/2001 | EP1115648A1 Method for producing nanometer structures on semiconductor surfaces |
| 07/17/2001 | US6262962 Method of and apparatus for recording/reproducing information signal, recording/reproducing head device, memory medium, and head element and manufacture thereof |
| 07/17/2001 | US6262464 Encapsulated MEMS brand-pass filter for integrated circuits |
| 07/17/2001 | US6261964 Material removal method for forming a structure |
| 07/12/2001 | WO2001050137A2 Micromechanical structure, in particular for an acceleration sensor or yaw rate sensor and a corresponding method for producing the same |
| 07/12/2001 | WO2001049362A1 Method of forming vertical, hollow needles within a semiconductor substrate |
| 07/12/2001 | WO2000075068A3 Method and apparatus for stress pulsed release and actuation of micromechanical structures |
| 07/12/2001 | DE19962231A1 Verfahren zur Herstellung mikromechanischer Strukturen A process for producing micromechanical structures |
| 07/12/2001 | DE10000368A1 Mikromechanische Struktur, insbesondere für einen Beschleunigungssensor oder Drehratensensor, und entsprechendes Herstellungsverfahren Micromechanical structure, in particular for an acceleration sensor or yaw rate sensor, and manufacturing method thereof |
| 07/11/2001 | EP1114791A2 Method of forming structure having surface roughness due to nano-sized surface features |
| 07/11/2001 | EP1113981A1 Micromechanical component and its production method |
| 07/11/2001 | EP1113832A1 Surface micromachined microneedles |
| 07/05/2001 | WO2000074763A3 Devices and methods for enhanced microneedle penetration of biological barriers |
| 07/05/2001 | WO2000054312A8 Ic-compatible parylene mems technology and its application in integrated sensors |
| 07/05/2001 | US20010006851 Method of forming micro structure having surface roughness due to nano-sized surface features |
| 07/05/2001 | US20010006248 Micromachined device having electrically isolated components and a method for making the same |
| 07/05/2001 | DE19960094A1 Verfahren zur mikromechanischen Herstellung eines Halbleiterelements, insbesondere Beschleunigungssensors Process for the micromechanical fabrication of a semiconductor element, in particular acceleration sensor |
| 07/05/2001 | DE19958907A1 Production of electrodes used in production of stacked capacitor in DRAMs comprises forming a molded support structure in or on substrate, enlarging surface of structure; and forming electrodes using support structure |
| 07/03/2001 | US6256134 Microelectromechanical devices including rotating plates and related methods |
| 07/03/2001 | US6255757 Microactuators including a metal layer on distal portions of an arched beam |
| 07/03/2001 | US6255741 Semiconductor device with a protective sheet to affix a semiconductor chip |
| 06/28/2001 | WO2001046708A1 Sensor device and method of manufacture thereof |
| 06/28/2001 | WO2001046664A2 Method for producing micromechanical structures |
| 06/28/2001 | WO2001046489A1 Ion beam modification of residual stress gradients in thin film polycrystalline silicon membranes |
| 06/28/2001 | WO2001046458A1 Deposited thin films and their use in detection, attachment, and bio-medical applications |
| 06/28/2001 | WO2001046066A2 Sensor with at least one micromechanical structure and method for the production thereof |
| 06/28/2001 | DE19961578A1 Sensor comprises a micromechanical structure based on silicon integrated in the sensor chamber of a base wafer and a cover made of a transparent deposition layer and a sealing layer |
| 06/28/2001 | CA2394942A1 Deposited thin films and their use in detection, attachment, and bio-medical applications |
| 06/27/2001 | EP1111671A2 Process for fabricating a semiconductor device |
| 06/27/2001 | CN1067771C Array of thin film actuated mirrors having an improved optical efficiency and method for the manufacture thereof |
| 06/26/2001 | US6252725 Semiconductor micro epi-optical components |
| 06/26/2001 | US6251699 Method for fabricating micromechanical components |
| 06/26/2001 | US6251698 Method for making a machined silicon micro-sensor |
| 06/26/2001 | US6250984 Article comprising enhanced nanotube emitter structure and process for fabricating article |
| 06/21/2001 | WO2001044822A1 Different sacrificial layer thickness under fixed and movable electrodes (capacitive acceleration sensor) |
| 06/21/2001 | WO2001011411B1 Microelectromechanical optical switch and method of manufacture thereof |
| 06/21/2001 | US20010004548 Electronic devices including micromechanical switches |
| 06/20/2001 | EP1108203A2 Micromechanical component protected against environmental influences |
| 06/19/2001 | US6249503 Method of and apparatus for recording/reproducing an information signal, recording/reproducing head device, memory medium, and head element |
| 06/19/2001 | US6248378 Expelling liquid; forming liquid-gas interface; fineness, uniform particle sizes |
| 06/19/2001 | US6247485 Miniature valve for filling the reservoir of an apparatus for the transdermal administration of medicine |
| 06/14/2001 | WO2001043153A1 Electronic devices including micromechanical switches |
| 06/14/2001 | WO2001042131A1 Gear and method of making the same |
| 06/14/2001 | WO2001011672A8 Method of etching a layer using sacrificial elements |
| 06/13/2001 | EP1107294A2 Method for making diaphragm-based sensors and apparatus constructed therewith |
| 06/13/2001 | EP1105344A1 Micromechanical sensor and corresponding production method |
| 06/12/2001 | US6245593 Semiconductor device with flat protective adhesive sheet and method of manufacturing the same |
| 06/12/2001 | US6245249 Micro-structure and manufacturing method and apparatus |
| 06/12/2001 | US6245161 Economical silicon-on-silicon hybrid wafer assembly |
| 06/07/2001 | WO2001039986A1 Thermal transfer of microstructured layers |
| 06/07/2001 | US20010002663 Treating sample by contacting sample with a gas phase bromine trifluoride containing etchant to produce a desired etch depth in sample |
| 06/07/2001 | DE10021489A1 Micro-production process comprises forming electrolyte solution, treating polymer substrate, micro-processing, and contacting with plate cathode |
| 06/05/2001 | US6242363 Method of etching a wafer layer using a sacrificial wall to form vertical sidewall |
| 06/05/2001 | US6242276 Method for fabricating micro inertia sensor |
| 06/05/2001 | US6242163 Shape deposition manufacturing of microscopic ceramic and metallic parts using silicon molds |
| 06/05/2001 | US6240962 Parylene micro check valve and fabrication method thereof |
| 06/03/2001 | CA2310700A1 Microchip for capillary gel electrophoresis and the method for fabricating the same |
| 05/31/2001 | DE19955969A1 Verwendung von Polyimid für Haftschichten und lithographisches Verfahren zur Herstellung von Mikrobauteilen The use of polyimide for subbing layers, and lithographic process for manufacturing micro-components |
| 05/30/2001 | EP1103829A1 Polarizer |
| 05/30/2001 | CN1297530A Method of producing detector belonging to gas sensor, and detector produced in accordance with method |
| 05/29/2001 | US6239473 Trench isolation for micromechanical devices |
| 05/29/2001 | US6238580 Method of HF vapor release of microstructures |
| 05/25/2001 | WO2001037050A1 Use of polyimide for adhesive layers, lithographic method for producing microcomponents and method for producing composite material |
| 05/25/2001 | WO2001037045A1 Flat coil and lithographic method for producing microcomponents |
| 05/25/2001 | WO2001036319A1 Method for reducing variations in arrays of micro-machined cantilever structures using ion implantation |
| 05/25/2001 | WO2001007159A3 Integration of biochemical protocols in a continuous flow microfluidic device |
| 05/25/2001 | WO2001006543A3 Microelectromechanical device with moving element |
| 05/23/2001 | DE19955975A1 Lithographisches Verfahren zur Herstellung von Mikrobauteilen Lithographic method for producing microcomponents |
| 05/22/2001 | US6236491 Micromachined electrostatic actuator with air gap |
| 05/22/2001 | US6236096 Structure of a three-electrode capacitive pressure sensor |
| 05/22/2001 | US6235611 Method for making silicon-on-sapphire transducers |
| 05/22/2001 | US6234402 Stabilized capillary microjet and devices and methods for producing same |
| 05/17/2001 | WO2001035433A2 Cmos-compatible mem switches and method of making |
| 05/16/2001 | EP1099244A2 Method and apparatus for anisotropic etching |
| 05/16/2001 | EP1098837A1 Silicon micro-machined projection with duct |
| 05/16/2001 | CN1295352A Film-type device and its manufacture |
| 05/16/2001 | CN1065967C Method for forming array of thin film actuated mirrors |
| 05/15/2001 | US6232150 Process for making microstructures and microstructures made thereby |
| 05/15/2001 | US6232140 Semiconductor integrated capacitive acceleration sensor and relative fabrication method |
| 05/10/2001 | WO2001033621A2 Methods for forming openings in a substrate and methods for creating assemblies |
| 05/10/2001 | WO2001033614A1 Method for fabricating arrays of micro-needles |
| 05/10/2001 | WO2001033558A1 Magnetic pole fabrication process and device |
| 05/10/2001 | WO2001032930A1 Methods and apparatuses for analyzing polynucleotide sequences |
| 05/10/2001 | WO2001032554A2 Microscopic scale forming method by selective etching of a doped substrate |
| 05/10/2001 | CA2388528A1 Methods and apparatus for analyzing polynucleotide sequences |
| 05/09/2001 | EP1098181A2 Method for making diaphragm-based sensors and apparatus constructed therewith |
| 05/09/2001 | CN1294540A Method for machining work by laser beam |
| 05/08/2001 | US6229640 Microelectromechanical optical switch and method of manufacture thereof |
| 05/02/2001 | EP1096547A2 Method and apparatus for plasma etching |
| 05/02/2001 | EP1095401A1 Method for anisotropic plasma etching of semiconductors |
| 05/01/2001 | US6225140 CMOS compatable surface machined pressure sensor and method of fabricating the same |
| 04/26/2001 | WO2001028915A1 Gas sensor and fabrication method thereof |
| 04/12/2001 | WO2001025504A1 Micro three-dimensional structure, production method therefor and production device therefor |
| 04/11/2001 | EP1089937A1 Gas generation system |
| 04/11/2001 | EP0950190B1 Method for the production of a micromechanical semiconductor array |
| 04/10/2001 | US6214738 Aluminum workpiece treated with focused radiation beams and treatment with anodic oxidation |
| 04/05/2001 | WO2001024307A1 Small-sized phase shifter and method of manufacture thereof |