| Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526) |
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| 07/09/1997 | EP0783107A1 Manufacturing process for a micromechanical element with movable structure |
| 07/08/1997 | US5646768 Support posts for micro-mechanical devices |
| 07/08/1997 | US5646347 Suspension for micromechanical structure and micromechanical acceleration sensor |
| 07/08/1997 | US5645684 Microelectromechanical systems, electronic circuits and mechanical devices integrated on the same chip |
| 06/24/1997 | US5641400 Use of temperature control devices in miniaturized planar column devices and miniaturized total analysis systems |
| 06/10/1997 | US5637189 Dry etch process control using electrically biased stop junctions |
| 06/04/1997 | EP0776476A1 Gravity-compensating accelerometer and method for making same |
| 06/03/1997 | US5636070 Thin film actuated mirror array |
| 05/20/1997 | US5631782 Support post architecture for micromechanical devices |
| 05/15/1997 | WO1997017302A1 Field-assisted sealing |
| 05/15/1997 | CA2236788A1 Field-assisted sealing |
| 05/13/1997 | US5629243 Preloaded linear beam vibration sensor and its manufacturing method |
| 05/13/1997 | US5628917 Single lithography step and repeated sequence of thermal oxidation and reactive ion etching |
| 05/07/1997 | CN1149190A Method of unsticking components of micro-mechanical devices |
| 05/02/1997 | EP0770871A2 Use of temperature control devices in miniaturized planar column devices and miniaturized total analysis systems |
| 04/17/1997 | DE19639717A1 Ink=jet print head with piezo-electric actuator |
| 04/17/1997 | DE19537814A1 Sensor, esp. acceleration sensor |
| 04/15/1997 | US5620929 Method of manufacturing a gas flow type sensor |
| 04/08/1997 | US5618345 Method of producing self-supporting thin film of silicon single crystal |
| 04/02/1997 | EP0766060A1 Micromechanical part having at least one tip consisting of diamond, and manufacturing method for such parts. |
| 03/26/1997 | EP0764346A1 High vertical aspect ratio thin film structures |
| 03/19/1997 | EP0763881A2 Magnetic micro-mover |
| 03/19/1997 | EP0763844A1 Method of manufacturing micro-tip and female mold substrate therefor, and method of manufacturing probe with micro-tip |
| 03/18/1997 | US5611940 Microsystem with integrated circuit and micromechanical component, and production process |
| 03/11/1997 | US5610335 Microelectromechanical lateral accelerometer |
| 03/06/1997 | WO1997008727A1 Planarizing process for field emitter displays and other electron source applications |
| 02/27/1997 | WO1997007517A2 Electrostatically operated, micromechanical capacitor |
| 02/27/1997 | CA2219945A1 Electrostatically operated, micromechanical capacitor |
| 02/25/1997 | US5605489 Method of protecting micromechanical devices during wafer separation |
| 02/18/1997 | US5604623 Array of thin film actuated mirrors having an improved optical efficiency and method for the manufacture thereof |
| 02/18/1997 | US5604081 Method for producing a surface structure with reliefs |
| 02/12/1997 | EP0758088A2 Micromechanical switch |
| 02/11/1997 | US5602411 Micromechanical component with a dielectric movable structure, and microsystem |
| 02/05/1997 | EP0757431A2 Machine structures fabricated of multiple microstructure layers |
| 01/29/1997 | EP0756164A2 Method for making diaphragm-based sensors and apparatus constructed therewith |
| 01/28/1997 | US5597767 Separation of wafer into die with wafer-level processing |
| 01/22/1997 | EP0702796A4 Microelectromechanical lateral accelerometer |
| 01/21/1997 | US5596219 Thermal sensor/actuator in semiconductor material |
| 01/15/1997 | EP0652819B1 Process for manufacturing micro-structured bodies made of plastics |
| 01/09/1997 | WO1997001055A1 Method for the manufacture of a membrane-containing microstructure |
| 01/07/1997 | US5591679 Sealed cavity arrangement method |
| 01/03/1997 | WO1997000451A1 Gravity-compensating accelerometer and method for making same |
| 01/02/1997 | DE19625605A1 Semiconductor sensor for physical parameter |
| 01/02/1997 | DE19522004A1 Method for producing partly movable micro structure(s) |
| 12/31/1996 | US5589083 Method of manufacturing microstructure by the anisotropic etching and bonding of substrates |
| 12/27/1996 | EP0749474A1 Microfabricated capsules for isolation of cell transplants |
| 12/19/1996 | WO1996041368A1 Multilayer high vertical aspect ratio thin film structures |
| 12/19/1996 | WO1996040420A1 Micromachined porous membranes with bulksupport |
| 12/19/1996 | CA2570713A1 Removal of material by polarized radiation and back side application of radiation |
| 12/18/1996 | EP0637403A4 Micromachining process for making perfect exterior corner in an etchable substrate. |
| 12/12/1996 | WO1996039260A1 Method of producing micro-electrical conduits |
| 12/12/1996 | WO1996039252A1 Electrokinetic pumping |
| 12/12/1996 | DE19623072A1 Semiconductive sensor mfg. method |
| 12/12/1996 | CA2223166A1 Method of producing micro-electrical conduits |
| 12/12/1996 | CA2223099A1 Electrokinetic pumping |
| 12/05/1996 | DE19619921A1 Mfg. semiconductor device having capped element |
| 12/04/1996 | EP0746013A2 Method of cleaning and treating a micromechanical device |
| 11/27/1996 | EP0500620B1 Process for the production of metal microstructure bodies |
| 11/26/1996 | US5578843 Semiconductor sensor with a fusion bonded flexible structure |
| 11/20/1996 | EP0734282A4 Miniaturized planar columns for use in a liquid phase separation apparatus |
| 11/20/1996 | EP0734281A4 Miniaturized planar columns in novel support media for liquid phase analysis |
| 11/19/1996 | US5576251 Process for making a semiconductor sensor with a fusion bonded flexible structure |
| 11/19/1996 | US5576147 Formation of microstructures using a preformed photoresist sheet |
| 11/13/1996 | EP0742581A2 Sealed cavity arrangement |
| 11/13/1996 | EP0741910A1 Cavity-containing structure and method for making same |
| 11/12/1996 | US5573679 Fabrication of a surface micromachined capacitive microphone using a dry-etch process |
| 11/06/1996 | CN1135276A Array of thin film actuated mirrors for use in an optics projection system and method for mfg. same |
| 11/05/1996 | US5571410 Fully integrated miniaturized planar liquid sample handling and analysis device |
| 10/30/1996 | CN1134772A Thin film actuated mirror array for use in an optical projection system and method for the manufacture thereof |
| 10/23/1996 | CN1134208A Thin film actuated mirror array and method for its manufacture |
| 10/17/1996 | WO1996032650A1 Methods for planarization and encapsulation of micromechanical devices in semiconductor processes |
| 10/08/1996 | US5563343 Microelectromechanical lateral accelerometer |
| 10/02/1996 | EP0734282A1 Miniaturized planar columns for use in a liquid phase separation apparatus |
| 10/02/1996 | EP0734281A1 Miniaturized planar columns in novel support media for liquid phase analysis |
| 09/26/1996 | WO1996022460A3 Electroformed multilayer spray director and a process for the preparation thereof |
| 09/19/1996 | WO1996028841A1 A method for the manufacturing of micromachined structures and a micromachined structure manufactured using such method |
| 09/17/1996 | US5557132 Semiconductor relay unit |
| 09/10/1996 | US5554434 Micro light valve and method for manufacturing the same |
| 08/08/1996 | WO1996023667A1 Masking process for fabricating ultra-high aspect ratio, wafer-free micro-opto-electromechanical structures |
| 08/06/1996 | US5543108 Method of making microstructured bodies of plastic material |
| 07/25/1996 | WO1996022460A2 Electroformed multilayer spray director and a process for the preparation thereof |
| 07/25/1996 | CA2205801A1 Electroformed multilayer spray director and a process for the preparation thereof |
| 07/17/1996 | EP0721587A1 Micromechanical device and process for producing the same |
| 07/10/1996 | EP0720748A1 Integrated micromechanical sensor device and process for producing it |
| 07/09/1996 | US5534111 Partially thinning layer of silicon nitride on tabs which support bridged detector prior to anisotropically etching to form pit beneath detector, then plasma dry etching to remove exposed silicon nitride |
| 06/27/1996 | DE19547642A1 Multi-axis acceleration sensor for motor vehicle system |
| 06/18/1996 | US5527744 Wafer method for breaking a semiconductor |
| 06/05/1996 | CN1123917A Method for forming an array of thin film actuated mirrors |
| 06/05/1996 | CN1123916A Thin film actuated mirror array |
| 06/04/1996 | US5523878 Dipping in precursor solution |
| 05/30/1996 | WO1996016203A1 Process for preparing micromechanical components having free-standing microstructures or membranes |
| 05/29/1996 | EP0714121A2 Corrosion protection for micromechanical metallic layers |
| 05/23/1996 | WO1996015550A1 Silicon-germanium-carbon compositions and processes thereof |
| 05/23/1996 | DE4445177A1 Verfahren zur Herstellung polykristalliner Siliziumschichten mit einstellbaren Schichtspannungen A process for producing polycrystalline silicon layers with adjustable layer stresses |
| 05/17/1996 | WO1996014660A1 Method for fabricating a self-limiting silicon based interconnect for testing bare semiconductor dice |
| 05/08/1996 | EP0711029A2 Microstructure and method of forming the same |
| 05/07/1996 | US5514235 Method of making bonded wafers |
| 05/02/1996 | WO1996012546A1 Miniaturized planar columns for use in a liquid phase separation apparatus |
| 05/02/1996 | WO1996012545A1 Miniaturized planar columns in novel support media for liquid phase analysis |
| 04/30/1996 | US5512374 PFPE coatings for micro-mechanical devices |