Patents
Sitemap › B81 - Micro-structural technology › B81C - Processes or apparatus specially adapted for the manufacture or treatment of micro-structural devices or systems › B81C 1 - Manufacture or treatment of devices or systems in or on a substrate
Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526)
02/2000
02/29/2000US6030083 Array of thin film actuated mirrors for use in an optical projection system and method for the manufacture thereof
02/24/2000WO2000009440A1 Micromechanical sensor and corresponding production method
02/23/2000EP0981168A2 Semiconductor micro-optical components and method for producing them
02/23/2000EP0980446A1 Silicon etching process for making microchannel plates
02/23/2000CN1245559A Method for making micro-mechanic sensor
02/23/2000CN1245547A Micropump with built-in intermediate part
02/22/2000US6028331 Integrated semiconductor devices comprising a chemoresistive gas microsensor
02/22/2000US6027632 Portions of the excess emitter material overlying the dielectric layer in the spaces between the control electrodes are initially removed, the portion of excess emitter covering the control electrode are removed for exposure
02/22/2000US6027630 Method for electrochemical fabrication
02/17/2000WO2000008496A1 Polarizer
02/16/2000EP0979992A1 Micromechanical sensor
02/15/2000US6025767 Encapsulated micro-relay modules and methods of fabricating same
02/15/2000US6024801 Exposing device surface in an enclosure to supercritical fluid cleaning medium, purging of libeated substances, depositing lubrication passivant, removing device
02/10/2000WO1999036941A3 Trench isolation for micromechanical devices
02/08/2000US6023121 Thermal arched beam microelectromechanical structure
02/03/2000WO2000005749A2 Method and apparatus for anisotropic etching
02/03/2000WO2000005166A1 Silicon micro-machined projection with duct
02/02/2000EP0912223A4 Microfabricated filter and shell constructed with a permeable membrane
02/02/2000CN1243576A Micromechanical semiconductor device and method for production thereof
02/01/2000US6020272 Method for forming suspended micromechanical structures
02/01/2000US6020215 Process for manufacturing microstructure
01/2000
01/18/2000USRE36517 Thin film magnet, cylindrical ferromagnetic thin film and production method thereof
01/18/2000US6015599 High vertical aspect ratio thin film structures
01/11/2000US6013933 Semiconductor structure having a monocrystalline member overlying a cavity in a semiconductor substrate and process therefor
01/11/2000US6013573 Method of manufacturing an air bridge type structure for supporting a micro-structure
01/11/2000US6013567 Controlled cleavage process using pressurized fluid
01/11/2000US6013563 Controlled cleaning process
01/05/2000EP0968526A2 Method of forming etched structures comprising implantation steps
01/04/2000US6010919 Method for manufacturing semiconductor devices by use of dry etching
01/04/2000US6010579 Reusable substrate for thin film separation
12/1999
12/30/1999DE19820758C1 Herstellverfahren für mikromechanische Bauelemente Production process for micromechanical devices
12/29/1999CN1047904C Array of thin film actuated mirrors for use in an optics projection system and method for mfg. same
12/29/1999CN1047903C Thin film actuated mirror array for use in an optical projection system and method for manufacture thereof
12/22/1999EP0964941A1 Method for producing and magazining at least one metallic micro-component
12/22/1999CN1047669C Method of mfg. microelectronic mechinery device
12/21/1999US6003374 Acceleration sensor and a method for its manufacture
12/16/1999WO1999064580A1 Microneedle devices and methods of manufacture and use thereof
12/09/1999WO1999063559A1 Micro-mechanical elements
12/09/1999WO1999062684A1 Method for molding high precision components
12/07/1999US5998816 Sensor element with removal resistance region
12/07/1999US5998066 Gray scale mask and depth pattern transfer technique using inorganic chalcogenide glass
12/07/1999US5997713 Silicon etching process for making microchannel plates
12/02/1999DE19913612C1 Producing adjustment structures in semiconducting substrates
12/01/1999CN1047056C Thin film actuated mirror array and method for its manufacture
11/1999
11/30/1999US5994816 Thermal arched beam microelectromechanical devices and associated fabrication methods
11/30/1999US5994750 Microstructure and method of forming the same
11/30/1999US5994207 Controlled cleavage process using pressurized fluid
11/30/1999US5994160 Forming oxide film on walls of mold; vapor deposition of diamond particles; removal substrate
11/30/1999US5992225 Cantilever probe and scanning type probe microscope utilizing the cantilever probe
11/25/1999WO1999059810A2 Microstructured films
11/24/1999CN1236483A Multiple local oxidation for surface micro machining
11/24/1999CN1236219A Method of forming groove in surface of mother substrate
11/23/1999US5989974 Method of manufacturing a semiconductor device
11/23/1999US5987989 Semiconductor physical quantity sensor
11/23/1999US5987921 Method for making a semiconductor acceleration sensor
11/18/1999WO1999058985A1 Method for producing micromechanical components
11/18/1999DE19821627A1 Module with microchannel system useful in miniaturized processing or analysis systems e.g. PCR or immunoassays
11/17/1999EP0957509A2 Process for the fabrication of a device containing a microstructured layer
11/16/1999US5985742 Controlled cleavage process and device for patterned films
11/16/1999US5985412 Method of manufacturing microstructures and also microstructure
11/16/1999US5985328 Micromachined porous membranes with bulk support
11/16/1999US5985164 Method for forming a filter
11/16/1999US5984481 Array of thin film actuated mirrors for use in an optical projection system and method for the manufacture thereof
11/16/1999US5983721 Micromechanical component having closely spaced apart anchoring areas for a surface structure disposed thereon
11/11/1999DE19921241A1 Semiconductor sensor for a dynamic parameter, e.g. an accelerometer manufacture method
11/11/1999DE19820816A1 Bond pad structure used for micromechanical sensors
11/10/1999EP0955668A2 Process for manufacture of micro electromechanical devices having high electrical isolation
11/09/1999US5980762 Method of micromachining a semiconductor
11/09/1999US5980119 Single-crystal component to be applied to optical module and its fabrication method
11/04/1999WO1999041772A3 A method of component manufacture
11/04/1999DE19819458A1 Micromechanical component manufacturing method for e.g. capacitive acceleration sensor
11/04/1999DE19819456A1 Micromechanical component manufacturing method, e.g. for micromechanical acceleration sensor manufacture
11/03/1999EP0799495A4 Silicon-germanium-carbon compositions and processes thereof
11/02/1999US5976994 Method and system for locally annealing a microstructure formed on a substrate and device formed thereby
11/02/1999US5976983 Method of cleaning semiconductor wafers after lapping
11/02/1999US5976826 Plate with surface pattern of cytophilic zones formed of self-assembled monolayer, and cytophobic zones wide enough to only allow contact by cellular bridges above and free of contact with cytophobic zones; for cytometry, cultures
11/02/1999US5976390 Micromachining method and micromachined structure
10/1999
10/27/1999EP0951617A1 Micropump with a built-in intermediate part
10/27/1999EP0883442A4 Electrokinetic pumping
10/26/1999USRE36350 Fully integrated miniaturized planar liquid sample handling and analysis device
10/26/1999US5972154 Methods of dicing flat workpieces
10/21/1999DE19817311A1 Manufacture of micromechanical component, such as rotation rate sensor
10/20/1999EP0951068A1 Method of fabrication of a microstructure having an inside cavity
10/20/1999EP0951047A2 Nanostructure, electron emitting device, carbon nanotube device, and method of producing the same
10/20/1999EP0950258A1 Method and device for treating a semiconductor surface
10/20/1999EP0950190A1 Micromechanical semiconductor array and method for the production thereof
10/20/1999EP0950172A1 Method for producing a suspended element in a micro-machined structure
10/13/1999EP0814911A4 Electroformed multilayer spray director and a process for the preparation thereof
10/12/1999US5966617 Multiple local oxidation for surface micromachining
10/06/1999EP0947835A2 Micromechanical component having a moving dielectric element and a method of manufacture
10/06/1999EP0946977A1 Multiple local oxidation for surface micromachining
10/05/1999US5962081 A microstructure comprising an elastic membrane. a method which simplifies the fabrication of and permits further miniaturization of microfluidic structures as well as other structures comprising a flexible polymer membrane.
10/05/1999US5961877 3.5-15.8 mole percent of hf; 0.2-9.7 mole percent of hno3; 34.8-82.6 mole percent of acetic acid; 12.3-46.5 mole percent of h2o; and wherein the molecular ratio of hno.sub.3 to hf is less than about 0.78.
09/1999
09/30/1999WO1999049506A1 Method and apparatus for manufacturing a micromechanical device
09/23/1999DE19911916A1 Semiconductor component e.g. an acceleration or pressure sensor chip
09/23/1999DE19811965A1 Three-dimensional crystalline silicon structures are produced e.g. for micromechanical sensors, actuators and light guide components
09/22/1999EP0943155A1 Method for anisotropic etching of silicon
09/22/1999EP0793736B1 Process for preparing micromechanical components having free-standing microstructures or membranes
09/21/1999US5955818 Machine structures fabricated of multiple microstructure layers
09/21/1999US5955817 Thermal arched beam microelectromechanical switching array
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