Patents
Sitemap › B81 - Micro-structural technology › B81C - Processes or apparatus specially adapted for the manufacture or treatment of micro-structural devices or systems › B81C 1 - Manufacture or treatment of devices or systems in or on a substrate
Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526)
01/1999
01/14/1999WO1999001688A1 Thermal microvalves
01/12/1999US5858256 Depositing a metal layer on the tip but not the sides of a column extending from a substrate, etching the substrate to remove metal from tip to form a pit, etching from the back to form an aperture; reproducable; field scanning microscopes
01/12/1999US5858193 Electrokinetic pumping
12/1998
12/30/1998CN1203148A Micro structure and its manufacture method
12/29/1998US5853446 Method for forming glass rib structures
12/23/1998EP0886181A2 Micro structure and its manufacture method
12/23/1998EP0885452A1 Electrochemical removal of material, particularly excess emitter material in electron-emitting device
12/23/1998EP0869850A4 Method of producing micro-electrical conduits
12/17/1998WO1998057423A1 Method and system for locally annealing a microstructure formed on a substrate and device formed thereby
12/17/1998DE19826317A1 Method of manufacturing a semiconducting substrate for a semiconducting pressure sensor
12/16/1998EP0883442A1 Electrokinetic pumping
12/10/1998WO1998056036A1 Semiconductor device and method of anodization for the semiconductor device
12/10/1998WO1998056035A1 Method of anodizing silicon substrate and method of producing acceleration sensor of surface type
12/10/1998WO1998055876A1 Nonstick layer for a micromechanical component
12/10/1998DE19817310A1 Micro-mechanical component
12/08/1998US5846676 Mask structure and exposure method and apparatus using the same
12/02/1998EP0881651A1 Threshold microswitch and a manufacturing method thereof
12/01/1998US5844286 Semiconductor acceleration sensor
11/1998
11/26/1998WO1998053483A1 Method for making a machined silicon micro-sensor
11/26/1998WO1998053236A1 Low-power thermopneumatic microvalve
11/26/1998DE19736674C1 Micromechanical electrostatic relay
11/24/1998US5842106 Method of producing micro-electrical conduits
11/19/1998WO1998052101A1 Gray scale mask and depth pattern transfer technique using inorganic chalcogenide glass
11/18/1998EP0878835A1 Etching method for silicon substrate
11/18/1998EP0720748B1 Integrated micromechanical sensor device and process for producing it
11/12/1998WO1998050604A1 Silicon etching process for making microchannel plates
11/11/1998EP0877256A1 Method of manufacturing sensor
11/10/1998US5835293 Array of thin film actuated mirrors for use in an optical projection system and method for the manufacture thereof
11/10/1998US5834864 Magnetic micro-mover
11/10/1998US5832585 Method of separating micro-devices formed on a substrate
11/05/1998WO1998049376A1 Field emitter fabrication using open circuit electrochemical lift off
11/05/1998WO1998049018A1 Method and apparatus for a substrate having an irregular shape
11/03/1998US5830372 Thermal sensor/actuator in semiconductor material
10/1998
10/27/1998US5827756 Method of manufacturing semiconductor device
10/22/1998WO1998047198A2 A preferential crystal etching technique for the fabrication of millimeter and submillimeter wavelength horn antennas
10/20/1998US5824608 Semiconductor physical-quantity sensor and method for manufacturing same
10/20/1998US5824233 Micromechanical component with a dielectric movable structure, microsystem, and production process
10/20/1998US5824204 Micromachined capillary electrophoresis device
10/20/1998US5824177 Method for manufacturing a semiconductor device
10/20/1998US5822839 Method for making a micromotor in a ceramic substrate
10/15/1998WO1998045504A1 Article, method, and apparatus for electrochemical fabrication
10/15/1998DE19816224A1 Microfluid channel element
10/15/1998CA2572786A1 Method for electrochemical fabrication including etching to remove flash
10/15/1998CA2572503A1 Method for electrochemical fabrication including enhanced data manipulation
10/15/1998CA2572499A1 Method for electrochemical fabrication including use of multiple structural and/or sacrificial materials
10/14/1998EP0870319A1 A method for the manufacturing of micromachined structures and a micromachined structure manufactured using such method
10/14/1998EP0869921A1 Field-assisted sealing
10/14/1998EP0869850A1 Method of producing micro-electrical conduits
10/06/1998US5817539 Production method for a micromechanical component with a movable structure
10/01/1998DE19813669A1 Bonded wafer especially silicon wafer
09/1998
09/30/1998EP0867702A2 Method of fabrication of an infrared radiation detector and more particularly an infrared sensitive bolometer
09/30/1998EP0867701A1 Method of fabrication of an infrared radiation detector and more particularly an infrared sensitive bolometer
09/23/1998EP0866487A1 Method of making electronic and glass structures on glass substrates
09/23/1998EP0865664A1 Process for anisotropic plasma etching of different substrates
09/23/1998CN1193927A Electrokinetic pumping
09/17/1998WO1998040909A2 Method of forming etched structures comprising implantation steps
09/17/1998DE19710324A1 Semiconductor devices with micro-mechanical structures
09/16/1998EP0865075A2 Process for the fabrication of spatially structured devices
09/16/1998EP0864094A1 Structure comprising an insulated part in a solid substrate and method for producing same
09/15/1998US5808331 Monolithic semiconductor device having a microstructure and a transistor
09/11/1998WO1998039501A1 Method for producing and magazining at least one metallic micro-component
09/10/1998DE19709137A1 Verfahren zur Herstellung und Magazinierung mindestens eines metallischen Mikrobauteils A process for producing and magazining at least one metallic microcomponent
09/08/1998US5805971 Method of producing three-dimensional forms
09/08/1998US5804086 Structure having cavities and process for producing such a structure
09/08/1998US5804083 Method of forming a microstructure
09/08/1998US5804022 Method for making miniaturized planar columns in novel support media for liquid phase analysis
09/01/1998US5801070 High sensitivity, silicon-based, Microcalorimetric gas sensor and fabrication method
08/1998
08/26/1998EP0860864A2 Method of cleaning semiconductor wafers after lapping
08/25/1998US5798042 Microfabricated filter with specially constructed channel walls, and containment well and capsule constructed with such filters
08/20/1998DE19755397A1 Silicon micro-machine
08/20/1998DE19704454A1 Surface micro-mechanical structure production
08/19/1998CN1190788A Method of fabricating integrated microstructures of semiconductor material
08/18/1998US5795815 Integrated circuit scribe line structures and methods for making same
08/05/1998EP0856825A1 Process for manufacturing integrated semiconductor devices comprising a chemoresistive gas microsensor
08/04/1998US5789045 Microtubes devices based on surface tension and wettability
07/1998
07/30/1998WO1998032595A1 Flexible skin incorporating mems technology
07/23/1998WO1998032163A1 Gas phase silicon etching with bromine trifluoride
07/22/1998EP0854358A1 High sensitivity miniature pressure transducer
07/16/1998DE19700290A1 Mikromechanische Halbleiteranordnung und Verfahren zur Herstellung einer mikromechanischen Halbleiteranordnung A micromechanical semiconductor arrangement and method of manufacturing a micromechanical semiconductor arrangement
07/09/1998WO1998029901A1 Method and device for treating a semiconductor surface
07/09/1998WO1998029748A1 Micromechanical semiconductor array and method for the production thereof
07/09/1998WO1998029720A1 Method for producing a suspended element in a micro-machined structure
07/09/1998WO1998029661A1 Micropump with a built-in intermediate part
07/09/1998CA2276401A1 Micropump with a built-in intermediate part
07/07/1998US5776748 Method of formation of microstamped patterns on plates for adhesion of cells and other biological materials, devices and uses therefor
07/02/1998DE19752218A1 Non-adherent semiconductor surface production
06/1998
06/30/1998US5772902 Method to prevent adhesion of micromechanical structures
06/23/1998US5770465 Trench-filling etch-masking microfabrication technique
06/23/1998US5770076 Micromachined capsules having porous membranes and bulk supports
06/17/1998EP0848248A1 Cantilever and method of manufacturing the same
06/16/1998US5766446 Electrochemical removal of material, particularly excess emitter material in electron-emitting device
06/10/1998EP0846328A2 Electrostatically operated, micromechanical capacitor
06/09/1998US5763318 Method of making a machine structures fabricated of mutiple microstructure layers
06/09/1998US5761957 Semiconductor pressure sensor that suppresses non-linear temperature characteristics
06/04/1998WO1998024119A1 Process for manufacturing micromechanical functional elements
06/04/1998WO1998023935A1 Process for producing micromechanical sensors
06/02/1998US5760947 Thin film actuated mirror array for use in an optical projection system and method for the manufacture thereof
06/02/1998US5760290 Semiconductor acceleration sensor and testing method thereof
05/1998
05/28/1998WO1998022719A1 Miniature valve for filling the reservoir of an apparatus for the transdermal administration of medicine
05/28/1998DE19751708A1 Mechanical component with functional coating
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