| Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526) |
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| 01/05/1995 | WO1995000258A1 Method of applying a monolayer lubricant to micromachines |
| 01/03/1995 | US5378583 Exposure and development with thinning of sheets to form patterns |
| 01/03/1995 | US5377544 Rotational vibration gyroscope |
| 12/28/1994 | EP0631122A1 High sensitivity miniature pressure transducer |
| 12/27/1994 | US5376252 Microfluidic structure and process for its manufacture |
| 12/25/1994 | CA2126111A1 Wafer-like processing after sawing dmds |
| 12/21/1994 | EP0630058A2 Process for forming an arrangement of pyrodetectors by electrochemically etching a silicon substrate |
| 12/20/1994 | US5375033 Multi-dimensional precision micro-actuator |
| 12/08/1994 | WO1994028427A1 Microelectromechanical lateral accelerometer |
| 11/23/1994 | EP0625285A1 Method for anisotropically etching silicon |
| 11/09/1994 | EP0623807A1 Microstructure for vibratory gyroscope |
| 11/08/1994 | US5362681 Method for separating circuit dies from a wafer |
| 11/02/1994 | EP0622608A1 Scanning apparatus for investigating surface structures with a resolution of microns and method of its manufacture |
| 10/19/1994 | EP0620415A1 Angular velocity sensor |
| 10/11/1994 | US5354985 Near field scanning optical and force microscope including cantilever and optical waveguide |
| 10/05/1994 | EP0618502A1 Process for making stepped moulds, stepped moulds and high precision stepped microstructure bodies moulded therewith |
| 10/05/1994 | EP0618425A1 Sensor head and method for its manufacture |
| 10/04/1994 | US5351412 Micro positioning device |
| 09/01/1994 | WO1994019824A1 Micromachining process for making perfect exterior corner in an etchable substrate |
| 09/01/1994 | CA2133656A1 Micromachining process for making perfect exterior corner in an etchable substrate |
| 08/31/1994 | EP0613009A2 System for detecting and measuring acceleration |
| 08/17/1994 | EP0610657A2 Integrated partial sawing process |
| 08/16/1994 | US5338400 Micromachining process for making perfect exterior corner in an etchable substrate |
| 08/11/1994 | DE4402085A1 Kapazitiver, an seiner Oberfläche mikrobearbeiteter Differenzdrucksensor und Verfahren zu dessen Herstellung Capacitive, micro-machined on its surface differential pressure sensor and method for its production |
| 08/02/1994 | US5334835 Probe drive mechanism and electronic device which uses the same |
| 07/27/1994 | EP0607680A2 Formation of microstructures using a preformed photoresist sheet |
| 07/26/1994 | US5332469 Capacitive surface micromachined differential pressure sensor |
| 07/05/1994 | US5327033 Micromechanical magnetic devices |
| 06/23/1994 | WO1994014187A1 Method for anisotropically etching silicon |
| 06/09/1994 | DE4338433A1 Piezo-operating element for scanning tunnelling microscope - has piezoelectric material applied to surface of surface adjacent control electrode. |
| 06/07/1994 | US5318652 Wafer bonding enhancement technique |
| 05/31/1994 | US5316979 RIE process for fabricating submicron, silicon electromechanical structures |
| 05/26/1994 | DE4241045C1 Verfahren zum anisotropen Ätzen von Silicium A method for anisotropic etching of silicon |
| 05/25/1994 | EP0598477A1 Semiconductor device and method of manufacturing the same |
| 05/18/1994 | EP0597302A2 Etching method for silicon substrate |
| 05/18/1994 | CA2103174A1 Semiconductor device and method of manufacturing the same |
| 05/05/1994 | DE4314301C1 Surface scanning sensor - has a sensor point of a photo-structurable glass |
| 04/26/1994 | US5305640 Digital flexure beam accelerometer |
| 04/12/1994 | US5302239 In situ plasma dry etching process |
| 03/22/1994 | US5295395 Diaphragm-based-sensors |
| 03/09/1994 | EP0585836A2 Process for making microstructures |
| 02/23/1994 | EP0583678A2 Process to create surface pattern and applications thereof |
| 02/03/1994 | WO1994002299A1 Method and apparatus for separating circuit dies from a wafer |
| 02/01/1994 | US5282924 Containing cantilever beam |
| 01/20/1994 | WO1994001262A1 Process for manufacturing micro-structured bodies made of plastics |
| 12/28/1993 | US5272913 Cantilever for a scanning probe microscope and a method of manufacturing the same |
| 11/23/1993 | US5264696 Cantilever chip for scanning probe microscope having first and second probes formed with different aspect ratios |
| 11/02/1993 | US5258097 Dry-release method for sacrificial layer microstructure fabrication |
| 10/28/1993 | WO1993021657A1 Multi-dimensional precision micro-actuator |
| 10/19/1993 | US5254209 Method of making micromechanical components |
| 09/14/1993 | US5245193 Micromechanics forming method and micromechanics |
| 08/18/1993 | EP0556009A2 Method of producing a buried boss diaphragm structure in silicon and product made thereby |
| 07/20/1993 | CA1320358C Silicon-based sensors and method of making same |
| 06/22/1993 | US5221415 Method of forming microfabricated cantilever stylus with integrated pyramidal tip |
| 05/11/1993 | US5209818 Manufacture of a micromechanical element with two degrees of freedom |
| 05/04/1993 | US5206983 Method of manufacturing micromechanical devices |
| 04/13/1993 | US5201992 Exposing tapered silicon protuberance to dry oxidizing environment at relatively low temperature |
| 04/07/1993 | EP0535934A1 Method of manufacturing cantilever drive mechanism, method of manufacturing probe drive mechanism, cantilever drive mechanism, probe drive mechanism and electronic device which uses the same |
| 03/31/1993 | EP0394305B1 Device for measuring acceleration |
| 03/30/1993 | US5198390 RIE process for fabricating submicron, silicon electromechanical structures |
| 03/17/1993 | EP0532229A1 Method of polishing silicon-based optical waveguides |
| 03/09/1993 | US5192395 Method of making a digital flexure beam accelerometer |
| 02/24/1993 | EP0527905A1 Microfluidic structure and process for its manufacture. |
| 02/23/1993 | US5188706 Method of manufacturing an x-ray exposure mask and device for controlling the internal stress of thin films |
| 02/16/1993 | US5186789 Method of making a cantilever stylus for use in an atomic force microscope |
| 01/12/1993 | US5179499 Multi-dimensional precision micro-actuator |
| 01/07/1993 | EP0521713A1 Manufacture of a micromechanical element with two degrees of freedom |
| 12/30/1992 | EP0520631A2 Micromechanical magnetic devices and method of producing the same |
| 11/10/1992 | US5162078 Method of producing microstructered metallic bodies |
| 09/29/1992 | US5151153 Multilayer element with patterns on a conveyor and etching |
| 09/02/1992 | EP0500620A1 Process for the production of metal microstructure bodies. |
| 08/26/1992 | EP0500234A2 Method for making diaphragm-based sensors and apparatus constructed therewith |
| 07/21/1992 | US5131978 Semiconductors, channel plates for ink jet printers |
| 07/01/1992 | EP0491973A1 Integrated pneumatically and electrostatically controlled scanning tunneling microscope and method of making the same |
| 06/09/1992 | US5121089 Micro-machined switch and method of fabrication |
| 06/03/1992 | EP0488133A1 Method of making a cantilever stylus for use in an atomic force microscope |
| 05/26/1992 | US5116462 Cantilever beam; coating, masking, etching |
| 05/06/1992 | EP0484142A2 Micro-machined switch and method of fabrication |
| 04/15/1992 | EP0480274A1 Acceleration sensing and measurement |
| 03/11/1992 | EP0411088A4 Formation of microstructures with removal of liquid by freezing and sublimation |
| 01/29/1992 | EP0468071A1 Method of producing micromechanical sensors for the AFM/STM/MFM profilometry and micromechanical AFM/STM/MFM sensor head |
| 12/10/1991 | US5072288 Microdynamic release structure |
| 12/03/1991 | CA1292722C Method for producing a plurality of plate shaped microstructured metal bodies |
| 11/19/1991 | US5065628 Instrument for measuring accelerations and process of making the same |
| 11/14/1991 | WO1991016966A1 Microfluidic structure and process for its manufacture |
| 09/24/1991 | US5051379 Coating an inorganic material on a wafer, masking for a beam pattern photoresists |
| 09/03/1991 | US5045439 Process for the lithographic manufacture of electroformable microstructures having a triangular or trapezoidal cross-section |
| 07/25/1991 | DE4001399C1 Metallic microstructures - formed on substrates, by putting poly:methyl methacrylate] between moulding tool and silicon substrate |
| 05/30/1991 | WO1991007700A1 Process for the production of metal microstructure bodies |
| 05/07/1991 | US5013693 Semiconductors |
| 04/09/1991 | CA1282867C Thin film orthogonal microsensor for air flow and method |
| 02/26/1991 | US4996627 High sensitivity miniature pressure transducer |
| 02/20/1991 | EP0413042A1 Method of producing micromechanical sensors for the AFM/STM profilometry and micromechanical AFM/STM sensor head |
| 02/20/1991 | EP0413041A1 Method of producing micromechanical sensors for the AFM/STM profilometry and micromechanical AFM/STM sensor head |
| 02/06/1991 | EP0411088A1 Formation of microstructures with removal of liquid by freezing and sublimation. |
| 09/26/1990 | EP0389198A2 Method of manufacturing an X-ray exposure mask and device for controlling the internal stress of thin films |
| 09/26/1990 | EP0389071A2 Method for fabricating semiconductor diaphragms |
| 08/23/1990 | WO1990009677A1 Formation of microstructures with removal of liquid by freezing and sublimation |
| 06/20/1990 | EP0373329A2 Process for the lithographic production of galvanically shaped microstructures having a triangular or trapezoidal cross-section |
| 04/10/1990 | US4916002 Forming aperture in dielectric on silicon substrate; anisotropic etching |