| Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526) |
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| 10/17/2002 | WO2002082537A1 High frequency integrated circuit (hfic) microsystems assembly and method for fabricating the same |
| 10/17/2002 | WO2002082100A1 Method for manufacturing a silicon sensor and a silicon sensor |
| 10/17/2002 | WO2002082047A2 High throughput screening of crystallization of materials |
| 10/17/2002 | WO2002081363A2 Method for producing a semiconductor component and a semiconductor component produced according to this method |
| 10/17/2002 | US20020150840 Stamper-forming electrode material, stamper-forming thin film, and method of manufacturing optical disk |
| 10/17/2002 | US20020149294 Actuator |
| 10/17/2002 | US20020149292 Miniature device with increased insulative spacing and method for making same |
| 10/17/2002 | US20020148807 Method of etching a deep trench in a substrate and method of fabricating on-chip devices and micro-machined structures using the same |
| 10/17/2002 | DE10118568A1 Production of optically transparent regions in a silicon substrate used for optical investigations of small amounts of liquid in medicine and analysis comprises etching and oxidizing the defined transparent regions in the substrate |
| 10/17/2002 | DE10117486A1 Verfahren zur Herstelung eines Halbleiterbauelements sowie ein nach dem Verfahren hergestelltes Halbleiterbauelement A process for Herstelung a semiconductor device as well as a product produced by the process semiconductor device |
| 10/17/2002 | CA2442914A1 High throughput screening of crystallization of materials |
| 10/16/2002 | EP1248952A2 Micromechanical structure, in particular for an acceleration sensor or yaw rate sensor and a corresponding method for producing the same |
| 10/15/2002 | US6465854 Micromechanical component |
| 10/15/2002 | US6465357 Fabricating structures using chemo-mechanical polishing and chemically-selective endpoint detection |
| 10/15/2002 | US6465355 Method of fabricating suspended microstructures |
| 10/15/2002 | US6465280 In-situ cap and method of fabricating same for an integrated circuit device |
| 10/15/2002 | US6464892 Methods of fabricating microelectromechanical and microfluidic devices |
| 10/15/2002 | US6464886 Device and method for creating spherical particles of uniform size |
| 10/15/2002 | US6464853 Method of producing structure having narrow pores by anodizing |
| 10/15/2002 | US6464842 Mechanical or electromechanical systems, real time feedback control operating on a time scale commensurate with the formation of nanoscale solid state features. |
| 10/10/2002 | WO2002080262A1 Lateral nanostructures by vertical processing |
| 10/10/2002 | WO2002079814A2 Method for fabricating a through-wafer optical mems device having an anti-reflective coating |
| 10/10/2002 | WO2002079080A1 Production device and production method for silicon-based structure |
| 10/10/2002 | WO2002062202A3 Microprotrusion array and methods of making a microprotrusion |
| 10/10/2002 | US20020145231 High throughput screening of crystallization of materials |
| 10/10/2002 | US20020144738 Microfabricated elastomeric valve and pump systems |
| 10/09/2002 | EP1247293A1 Methods for producing packaged integrated circuit devices & packaged integrated circuit devices produced thereby |
| 10/09/2002 | EP1246773A2 Fabrication of metallic microstructures via exposure of photosensitive composition |
| 10/09/2002 | EP1246730A1 Thermal transfer of microstructured layers |
| 10/08/2002 | US6462392 Micromechanical cap structure and the respective manufacturing method |
| 10/08/2002 | US6462391 Suspended moving channels and channel actuators for microfluidic applications and method for making |
| 10/08/2002 | US6461967 Material removal method for forming a structure |
| 10/08/2002 | US6461888 Lateral polysilicon beam process |
| 10/03/2002 | WO2002076881A1 Method for making a structure with micromachined membrane |
| 10/03/2002 | WO2002076880A2 Method for producing micromechanic sensors and sensors produced by said method |
| 10/03/2002 | WO2002052644A9 Thermally enhanced microcircuit package and method of forming same |
| 10/03/2002 | WO2002043937A3 Method of making a product with a micro or nano sized structure and product |
| 10/03/2002 | US20020142587 Method for selective deposition of materials in micromachined molds |
| 10/03/2002 | US20020142508 Metal film protection of the surface of a structure formed on a semiconductor substrate during etching of the substrate by a KOH etchant |
| 10/03/2002 | US20020141038 Microminiature movable device |
| 10/03/2002 | US20020139769 Ultraviolet method of embedding structures in photocerams |
| 10/03/2002 | US20020139171 Micromechanical component and manufacturing method |
| 10/02/2002 | EP1245529A2 Microminiature movable device |
| 10/02/2002 | EP1244495A1 Method of forming vertical, hollow needles within a semiconductor substrate |
| 10/02/2002 | DE10114036A1 Verfahren zur Herstellung von mikromechanischen Sensoren und damit hergestellte Sensoren A process for producing micromechanical sensors and sensors produced thereby |
| 10/01/2002 | US6458698 Controlled-stress stable metallization for electronic and electromechanical devices |
| 10/01/2002 | US6458672 Controlled cleavage process and resulting device using beta annealing |
| 10/01/2002 | US6458513 Forming cavities, masking and etching silicon substrate to form three dimensional structure |
| 10/01/2002 | US6458263 Cantilevered multilevel LIGA devices and methods |
| 09/26/2002 | WO2002075794A2 A method for making a micromechanical device by using a sacrificial substrate |
| 09/26/2002 | WO2002074686A2 A method and device for protecting micro electromechanical systems structures during dicing of a wafer |
| 09/26/2002 | WO2002057824A3 Across-wafer optical mems device and protective lid having across-wafer light-transmissive portions |
| 09/26/2002 | WO2002056061A3 Optical mems device and package having a light-transmissive opening or window |
| 09/26/2002 | WO2002024604B1 Fabrication of ceramic microstructures |
| 09/26/2002 | WO2001011411A9 Microelectromechanical optical switch and method of manufacture thereof |
| 09/26/2002 | US20020138049 Microneedle devices and methods of manufacture and use thereof |
| 09/26/2002 | US20020135266 Method for topographical patterning of a device |
| 09/26/2002 | US20020135062 Process of manufacturing a composite structure for electrically connecting a first body of semiconductor material overlaid by a second body of semiconductor material |
| 09/26/2002 | US20020135033 Micro-mirror and a method for fabricating the same |
| 09/25/2002 | EP0869850B1 Forming electrical conduits through holes |
| 09/24/2002 | US6455227 Structure comprising at least three resist layers laid one upon another, with absorption layer capable of absorbing beams for exposure sandwiched between each two resist layers, and at least one absorption layer is comprised of amorphous carbon |
| 09/24/2002 | US6454987 Micro structure and its manufacture method |
| 09/19/2002 | WO2002073691A1 In-situ cap and method of fabricating same for an integrated circuit device |
| 09/19/2002 | WO2002073314A1 Method of fabricating nanometer-scale flowchannels and trenches with self-aligned electrodes and structures formed by the same |
| 09/19/2002 | WO2002072189A2 Method of manufacturing microneedle structures using soft lithography and photolithography |
| 09/19/2002 | US20020133129 Method of manufacturing microneedle structures using soft lithography and photolithography |
| 09/19/2002 | US20020132490 Microstructure having a membrane and a wedge beneath and methods for manufacture of same |
| 09/19/2002 | US20020132389 Method for making a micromechanical device by using a sacrificial substrate |
| 09/19/2002 | US20020132387 Electronic microcomponent of the variable capacitor or microswitch type, and process for fabricating such a component |
| 09/19/2002 | US20020132113 Method and system for making a micromachine device with a gas permeable enclosure |
| 09/19/2002 | US20020132101 Deposited thin film void-column network materials |
| 09/19/2002 | US20020132062 Micromechanical device recoat methods |
| 09/18/2002 | EP1240529A2 Method for producing micromechanical structures |
| 09/18/2002 | CN1370284A Microelectromechanical optical switch and method of manufacture thereof |
| 09/17/2002 | US6451668 Method of producing calibration structures in semiconductor substrates |
| 09/17/2002 | US6451375 Process for depositing a film on a nanometer structure |
| 09/17/2002 | US6451240 Method of manufacturing an intracutaneous microneedle array |
| 09/17/2002 | US6450189 Method and device for production of components for microfabrication |
| 09/12/2002 | WO2002070233A1 Process of stripe coating to produce microstructured composite articles |
| 09/12/2002 | US20020128593 Valve integrally associated with microfluidic liquid transport assembly |
| 09/12/2002 | US20020127822 Semiconductor device and method of manufacturing the same |
| 09/12/2002 | US20020127812 Probe pin for testing electrical characteristics of apparatus, probe card using probe pins |
| 09/12/2002 | US20020127495 Method of fabricating nanometer-scale flowchannels and trenches with self-aligned electrodes and the structures formed by the same |
| 09/12/2002 | US20020127352 Irradiating focused ion beam and depositing a film on a narrowly limited strip shape region from ends of sample; sequentially shifting irradiation region in a tip end direction to cause a thin deposition layer to extend |
| 09/12/2002 | US20020126455 Tiled microelectromechanical device modules and fabrication methods |
| 09/12/2002 | US20020126368 Post metal etch clean process using soft mask |
| 09/12/2002 | US20020125582 Process for manufacturing integrated devices having connections on a separate wafer, and integrated device thus obtained |
| 09/12/2002 | US20020125228 Energy-efficient method and system for processing target material using an amplified, wavelength-shifted pulse train |
| 09/12/2002 | US20020125208 MEMS sensor structure and microfabrication process therefor |
| 09/12/2002 | DE10207667A1 Verfahren zur Herstellung eines Wafers mit hoher Dichte A process for producing a wafer with high density |
| 09/11/2002 | EP1238312A1 Use of polyimide for adhesive layers, lithographic method for producing microcomponents and method for producing composite material |
| 09/11/2002 | EP1238311A1 Flat coil and lithographic method for producing microcomponents |
| 09/11/2002 | CN1369039A Microfabricated elastomeric valve and pump systems |
| 09/10/2002 | US6448691 Piezoelectric/electrostrictive device and method of manufacturing same |
| 09/10/2002 | US6448622 Germanium silicides and transistor layers |
| 09/10/2002 | US6448109 Wafer level method of capping multiple MEMS elements |
| 09/06/2002 | WO2002068319A2 Bi-stable micro-actuator and optical switch |
| 09/06/2002 | WO2002043118A3 Wafer-level transfer of membranes in semiconductor processing |
| 09/06/2002 | WO2002012925A3 Micromirror elements, package for the micromirror elements, and protection system therefor |
| 09/06/2002 | CA2438727A1 Bi-stable micro-actuator and optical switch |