| Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526) |
|---|
| 04/30/2002 | US6379988 Pre-release plastic packaging of MEMS and IMEMS devices |
| 04/30/2002 | US6379773 Multilayer; plastic layer and patterned polytetrafluoroethylene |
| 04/30/2002 | US6379573 Self-limiting isotropic wet etching process |
| 04/30/2002 | US6378365 Micromachined thermal flowmeter having heating element disposed in a silicon island |
| 04/25/2002 | WO2002033410A2 Microvolume immunoabsorbant assays with amplified electrochemical detection |
| 04/25/2002 | WO2002032806A1 Thermoelastic actuator design |
| 04/25/2002 | WO2002010684A3 Three-axes sensor and a method of making same |
| 04/25/2002 | WO2002010064A3 A MEM gyroscope and a method of making same |
| 04/25/2002 | WO2001099169A3 Etch stop layer system for sige devices |
| 04/25/2002 | US20020048838 Acceleration sensor and method of manufacturing the same |
| 04/25/2002 | US20020048833 Manufacturing method and manufacturing device of microstructure |
| 04/25/2002 | US20020048531 Deposited thin films and their use in detection, attachment, and bio-medical applications |
| 04/25/2002 | US20020047541 Plasma processsing method and apparatus thereof |
| 04/25/2002 | US20020047493 Single stage microactuator for multidimensional actuation with multi-folded spring |
| 04/25/2002 | US20020046995 Method for forming microchannels by scanning a laser |
| 04/24/2002 | EP1198695A1 Method for producing a torsion spring |
| 04/24/2002 | EP1198344A1 Method for producing microcomponents |
| 04/24/2002 | CN1346503A Electronic devices including micromechanical switches |
| 04/23/2002 | US6376291 Process for manufacturing buried channels and cavities in semiconductor material wafers |
| 04/18/2002 | WO2002030809A2 Micromachined component and method of manufacture |
| 04/18/2002 | WO2002030486A2 Microfluidic device based sample injection system for analytical devices |
| 04/18/2002 | WO2000074932A9 Deposited thin film void-column network materials |
| 04/18/2002 | US20020045287 Production of diaphragms |
| 04/18/2002 | US20020043801 Pipe joint, its manufacturing method, and fluid device using the same |
| 04/18/2002 | US20020042985 Thermal bend actuator |
| 04/18/2002 | DE10146574A1 Herstellungsverfahren eines Mikromaterialstücks Process for manufacturing a micro-patch |
| 04/18/2002 | DE10051315A1 Micromechanical component used as an acceleration or rotation sensor in vehicles has functional components hanging above a substrate in a functional layer |
| 04/18/2002 | DE10046510A1 Sensorbauteil mit einem in einem Kanal isoliert, umströmbar gelagerten, elektrisch leitenden, länglichen Element und Herstellverfahren hierfür Sensor component having a isolated in a channel flow around mounted, electrically conductive, elongated element and manufacturing method thereof |
| 04/17/2002 | EP1196788A1 Merged-mask micro-machining process |
| 04/16/2002 | US6372655 Etches a layer in a structure with a first etchant etch until a layer in a fastest etching region is etched; layer is then etched with a second etchant until a layer in a region with a slowest etch rate is etched. |
| 04/16/2002 | US6372542 Method of component manufacture |
| 04/11/2002 | WO2002028766A2 Method of trimming micro-machined electromechanical sensors (mems) devices |
| 04/10/2002 | EP1195352A1 A method for producing micromachined devices and devices obtained thereof |
| 04/10/2002 | EP1194693A2 Microfabricated elastomeric valve and pump systems |
| 04/09/2002 | US6368885 Method for manufacturing a micromechanical component |
| 04/09/2002 | US6368838 Producing patterned surfaces for plating cells or proteins in specific patterns by providing plates with patterned regions of materials that bind cells, or proteins interspersed with regions incapable of binding to samples |
| 04/04/2002 | WO2002012116A3 Bonded wafer optical mems process |
| 04/04/2002 | WO2001046066A3 Sensor with at least one micromechanical structure and method for the production thereof |
| 04/04/2002 | US20020038508 Method of producing self-supporting microstructures, thin flat parts or membranes, and utilization of microstructures produced by the method as resistance grids in a device for measuring weak gas flows |
| 04/04/2002 | DE10143968A1 A method of producing a vacuum container with an internal vacuum cavity |
| 04/04/2002 | DE10053865C1 Process for anodically bonding materials with glass components used in microsystems for joining glass with silicon comprises using niobium or tantalum phosphate glass having a specified alkali ion conductivity |
| 04/04/2002 | DE10046509A1 Sensorbauteil und Verfahren zu seiner Herstellung Sensor component and method for its preparation |
| 04/03/2002 | EP1193527A2 Method of manufacturing a mirror structure |
| 04/03/2002 | CN1343370A Method for producing microelectronic structure |
| 04/03/2002 | CN1343369A IC-compatible parylene MEMS Technology and its application of integrated sensors |
| 04/02/2002 | US6365056 Method for producing a suspended element in a micro-machined structure |
| 04/02/2002 | US6363606 Process for forming integrated structures using three dimensional printing techniques |
| 03/29/2002 | CA2355450A1 Hybrid attach mirrors for a mems optical switch |
| 03/28/2002 | WO2002025697A2 Apparatus for etching semiconductor samples and a source for providing a gas by sublimation thereto |
| 03/28/2002 | WO2002024604A1 Fabrication of ceramic microstructures |
| 03/28/2002 | WO2002024570A1 Micro electro-mechanical systems |
| 03/28/2002 | WO2002024466A1 Freestanding polymer mems structures with anti stiction |
| 03/28/2002 | WO2001091846A3 Microneedle apparatus used for marking skin and for dispensing semi-permanent subcutaneous makeup |
| 03/28/2002 | US20020037601 Production method of a micromachine |
| 03/28/2002 | DE10039645A1 Mask for ion beams used during structuring substrates consists of a silicon wafer with a perforated pattern and a metal coating on the side facing the ion beams for stopping ion beams and deflecting heat |
| 03/27/2002 | CN1341546A Graphic-arts technique method of metal layer on wafer with thick layer structure |
| 03/26/2002 | US6363183 Reconfigurable and scalable intergrated optic waveguide add/drop multiplexing element using micro-opto-electro-mechanical systems and methods of fabricating thereof |
| 03/26/2002 | US6362083 Method for fabricating locally reinforced metallic microfeature |
| 03/26/2002 | US6362079 Semiconductor device and method of anodization for the semiconductor device |
| 03/21/2002 | WO2002023163A1 Microfabricated crossflow devices and methods |
| 03/21/2002 | WO2002023115A2 Enhanced surface structures for passive immersion cooling of integrated circuits |
| 03/21/2002 | WO2002022496A1 Sensor component comprising an electrically conductive longish element, which is held inside a channel while insulated and in a manner that permits electricity to flow therearound, and a production method therefor |
| 03/21/2002 | WO2002022495A1 Sensor component and method for the production thereof |
| 03/21/2002 | WO2002022492A2 Microelectromechanical flexible membrane electrostatic valve device and related fabrication methods |
| 03/21/2002 | WO2001074708A3 Method for depositing polycrystalline sige suitable for micromachining and devices obtained thereof |
| 03/21/2002 | US20020034879 Method for nanomachining high aspect ratio structures |
| 03/21/2002 | US20020033422 Fuel injection nozzle and method of use |
| 03/21/2002 | US20020033229 Apparatus for etching semiconductor samples and a source for providing a gas by sublimination thereto |
| 03/20/2002 | EP1187789A1 Precisely defined microelectromechanical structures and associated fabrication methods |
| 03/20/2002 | EP1187653A2 Devices and methods for enhanced microneedle penetration of biological barriers |
| 03/20/2002 | CN1341274A Methods utilizing scanning probe microscope tips and products therefor or produced method thereby |
| 03/19/2002 | US6360036 MEMS optical switch and method of manufacture |
| 03/19/2002 | US6358769 Process for manufacturing mechanical, electromechanical and opto-electromechanical microstructures having suspended regions subject to mechanical stresses during assembly |
| 03/19/2002 | US6357670 Stabilized capillary microjet and devices and methods for producing same |
| 03/19/2002 | US6357299 Micromechanical sensor and method for producing the same |
| 03/14/2002 | WO2001058803A3 Method for producing a micromechanical component, and a component produced according to said method |
| 03/14/2002 | WO2001024228A3 Temporary bridge for micro machined structures |
| 03/14/2002 | US20020029814 Microfabricated elastomeric valve and pump systems |
| 03/13/2002 | EP1187234A2 Piezoelectric/electrostrictive element |
| 03/13/2002 | EP1186214A2 Conservatively printed displays and methods relating to same |
| 03/13/2002 | EP1186011A1 Controlled-stress stable metallization for electronic and electromechanical devices |
| 03/13/2002 | EP1186002A1 Ic-compatible parylene mems technology and its application in integrated sensors |
| 03/13/2002 | EP1185481A1 Improved methods of fabricating microelectromechanical and microfluidic devices |
| 03/12/2002 | US6356524 Method of recording/reproducing an information signal |
| 03/12/2002 | US6355574 Method and device for treating a semiconductor surface |
| 03/12/2002 | US6355198 Method of forming articles including waveguides via capillary micromolding and microtransfer molding |
| 03/12/2002 | US6355181 Method and apparatus for manufacturing a micromechanical device |
| 03/12/2002 | US6354697 Electrostatic typeinkjet head having a vent passage and a manufacturing method thereof |
| 03/07/2002 | WO2002017985A2 Microneedle structure and production method therefor |
| 03/07/2002 | US20020028529 Method for manufacturing semiconductor pressure sensor having reference pressure chamber |
| 03/07/2002 | US20020027487 Microswitch and method of fabricating the microswitch |
| 03/07/2002 | US20020026724 Method of aligning micro structures using guides |
| 03/06/2002 | EP1183642A1 Integrated circuit device which is secured against attacks resulting from controlled destruction of an additional layer |
| 03/06/2002 | EP1183566A1 Micromachined electrostatic actuator with air gap |
| 03/06/2002 | EP1183064A1 Method of manufacturing an intracutaneous microneedle array |
| 02/28/2002 | WO2002015960A2 Microneedle array module and method of fabricating the same |
| 02/28/2002 | US20020025529 Monitoring target nucleotide sequences; provide joined primed target nucleotide sequences, incubate with sample, detect signal, removing or reducing signal, repeat process |
| 02/28/2002 | US20020025019 Exposure method |
| 02/28/2002 | US20020024004 Probe with hollow waveguide and method for producing the same |
| 02/27/2002 | EP1181239A1 Method for producing self-supporting micro-structures, consisting of thin, flat sections or membranes, and use of micro-structures produced by said method as a resistance grid in a device for measuring weak gas flows |