| Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526) |
|---|
| 04/30/1996 | US5511419 Rotational vibration gyroscope |
| 04/25/1996 | DE19539178A1 Halbleiterbeschleunigungssensor und Prüfverfahren für diesen Semiconductor acceleration sensor and test methods for these |
| 04/24/1996 | EP0708331A1 Fully integrated miniaturized planar liquid sample handling and analysis device |
| 04/24/1996 | EP0708330A1 Low voltage miniaturized column analytical apparatus and method |
| 04/24/1996 | CN1120990A Monolayer coating using molecular recognition for micromechanical devices |
| 04/23/1996 | US5509974 Etch control seal for dissolved wafer process |
| 04/17/1996 | CN1120733A The use of a saw frame with tape as a substrate carrier for wafer level backend processing |
| 04/11/1996 | DE19530944A1 Formation of micro-mechanical structures in silicon for e.g. ink jet print head |
| 04/02/1996 | US5504026 Methods for planarization and encapsulation of micromechanical devices in semiconductor processes |
| 03/27/1996 | EP0702796A1 Microelectromechanical lateral accelerometer |
| 03/26/1996 | US5501893 Plasma polymerizing temporary etch stop |
| 03/19/1996 | US5500549 Semiconductor yaw rate sensor |
| 03/19/1996 | US5500071 Miniaturized planar columns in novel support media for liquid phase analysis |
| 03/14/1996 | WO1996008036A1 Process for producing micromechanical structures by means of reactive ion etching |
| 03/14/1996 | WO1996007954A1 Microstructures and methods for manufacturing microstructures |
| 03/13/1996 | EP0700580A1 Method for fabricating suspension members for micromachined sensors |
| 03/07/1996 | DE4431478A1 Micromechanical suspension device for acceleration sensor |
| 03/05/1996 | US5497262 Support posts for micro-mechanical devices |
| 03/05/1996 | US5496668 Formation of microstructures using a preformed photoresist sheet |
| 02/21/1996 | CN1117148A Method of providing sacrificial spacer for micro-mechanical devices |
| 02/20/1996 | US5493173 Field emission cold cathode and method for manufacturing the same |
| 02/20/1996 | US5493156 Equipment using a micro-actuator |
| 02/14/1996 | CN1116716A Array of thin film actuated mirrors having an improved optical efficiency and method for the manufacture thereof |
| 02/06/1996 | US5489812 Micro actuator |
| 02/06/1996 | US5488863 Angular velocity sensor making use of tuning fork vibration |
| 01/31/1996 | EP0694801A2 Improvements in and relating to micro-mechanical devices |
| 01/16/1996 | US5485304 Support posts for micro-mechanical devices |
| 01/16/1996 | US5484073 Method for fabricating suspension members for micromachined sensors |
| 01/16/1996 | US5483741 Method for fabricating a self limiting silicon based interconnect for testing bare semiconductor dice |
| 01/09/1996 | US5482564 Low surface tension liquid and immersion |
| 01/04/1996 | DE4422913A1 Prodn. of microstructures used in the construction of microsystems |
| 01/03/1996 | EP0690330A1 improvements in or relating to micro-mechanical devices |
| 12/31/1995 | CA2149952A1 Monolayer coating using molecular recognition for micro-mechanical devices |
| 12/27/1995 | EP0689077A2 Improvements in and relating to micro-mechanical devices |
| 12/27/1995 | EP0689076A1 Improvements in or relating to micro-mechanical devices |
| 12/27/1995 | EP0411088B1 Formation of microstructures with removal of liquid by freezing and sublimation |
| 12/22/1995 | CA2149934A1 Method of unsticking components of micro-mechanical devices |
| 12/22/1995 | CA2149932A1 Method of providing sacrificial spacer for micro-mechanical devices |
| 12/06/1995 | EP0685864A1 Planar solenoid relay and production method thereof |
| 11/29/1995 | EP0684462A2 Thermal sensor/actuator realised in semiconductor material |
| 11/22/1995 | EP0527905B1 Microfluidic structure and process for its manufacture |
| 11/14/1995 | US5465611 Sensor head for use in atomic force microscopy and method for its production |
| 11/02/1995 | EP0679897A1 Micromechanical component having a moving dielectric element |
| 11/02/1995 | EP0679878A2 Microsystem with integrated circuit and micromechanical component and fabrication procedure |
| 10/25/1995 | EP0678905A2 Etch control seal for dissolved wafer micromachining process |
| 10/03/1995 | US5455419 Micromechanical sensor and sensor fabrication process |
| 10/03/1995 | US5454906 Method of providing sacrificial spacer for micro-mechanical devices |
| 10/03/1995 | US5454146 Method of manufacturing a microactuator |
| 09/29/1995 | WO1995026567A1 Method for fabricating suspension members for micromachined sensors |
| 09/27/1995 | EP0674181A2 Micro mechanical component and production process thereof |
| 09/25/1995 | CA2145331A1 Micro mechanical component and production process thereof |
| 09/19/1995 | US5451371 High-sensitivity, silicon-based, microcalorimetric gas sensor |
| 09/19/1995 | US5450751 Microstructure for vibratory gyroscope |
| 09/14/1995 | WO1995024736A1 High vertical aspect ratio thin film structures |
| 09/14/1995 | WO1995024472A1 Microfabricated capsules for isolation of cell transplants |
| 08/30/1995 | EP0669521A2 Method of manufacturing a gas flow type sensor |
| 08/29/1995 | US5445559 Wafer-like processing after sawing DMDs |
| 08/03/1995 | WO1995020824A1 Cavity-containing structure and method for making same |
| 08/02/1995 | EP0665590A2 Microstructure, process for manufacturing thereof and devices incorporating the same |
| 08/01/1995 | US5437739 Forming raised ring around structure which has greater resistance to selective etch than substrate |
| 07/19/1995 | EP0663692A2 Process for fabricating a layer having reduced strain |
| 06/29/1995 | WO1995017760A1 Planar solenoid relay and production method thereof |
| 06/28/1995 | CN1104341A Wafer-like processing after sawing dmds |
| 06/27/1995 | CA1336057C Formation of microstructures with removal of liquid by freezing and sublimation |
| 06/22/1995 | DE4418207C1 Thermal sensor or actuator in semiconductor material |
| 06/14/1995 | EP0657759A2 Wafer-like processing after sawing DMDS |
| 06/14/1995 | DE4444149A1 Semiconductor sensor for measurement of yaw |
| 06/08/1995 | DE4414969C1 Micromechanical component for acceleration or inclination sensor |
| 05/31/1995 | EP0655781A2 Integrated circuit processing |
| 05/26/1995 | WO1995014351A1 Array of thin film actuated mirrors for use in an optical projection system and method for the manufacture thereof |
| 05/26/1995 | CA2176347A1 Array of thin film actuated mirrors for use in an optical projection system and method for the manufacture thereof |
| 05/23/1995 | US5417801 Forming sacrificial layers |
| 05/18/1995 | WO1995013683A1 Thin film actuated mirror array for use in an optical projection system and method for the manufacture thereof |
| 05/18/1995 | CA2176111A1 Thin film actuated mirror array for use in an optical projection system and method for the manufacture thereof |
| 05/17/1995 | EP0653657A1 Array of thin film actuated mirrors for use in an optical projection system and method for the manufacture thereof |
| 05/17/1995 | EP0652819A1 Process for manufacturing micro-structured bodies made of plastics. |
| 05/10/1995 | EP0652455A1 Thin film actuated mirror array for use in an optical projection system and method for the manufacture thereof |
| 05/10/1995 | EP0651693A1 Method and apparatus for separating circuit dies from a wafer |
| 05/04/1995 | WO1995012287A1 Thin film actuated mirror array and methods for its manufacture |
| 05/04/1995 | CA2175198A1 Thin film actuated mirror array and methods for its manufacture |
| 05/03/1995 | EP0651274A1 Thin film actuated mirror array and method for the manufacture thereof |
| 05/02/1995 | US5411919 Semiconductor device and method of manufacturing the same |
| 04/11/1995 | US5406108 Interconnection construction of semiconductor device |
| 04/06/1995 | WO1995009366A1 Micromechanical device and process for producing the same |
| 04/04/1995 | US5403752 Forming holes in substrate of n-doped singl crystal silicon by electrochemical etching to produce structured region for pyrometer |
| 04/04/1995 | US5403665 Method of applying a monolayer lubricant to micromachines |
| 03/30/1995 | WO1995008775A1 Integrated micromechanical sensor device and process for producing it |
| 03/22/1995 | EP0394336B1 Method of making silicon-based sensors. |
| 03/21/1995 | US5399232 Microfabricated cantilever stylus with integrated pyramidal tip |
| 03/14/1995 | US5398229 Method of manufacturing cantilever drive mechanism, method of manufacturing probe drive mechanism, cantilever drive mechanism, probe drive mechanism and electronic device which uses the same |
| 02/28/1995 | US5393710 Each of the pixels for display can be controlled by use of electrostatic force to pass or shut a light beam, thereby displaying stationary or moving images |
| 02/28/1995 | US5393706 Integrated partial sawing process |
| 02/28/1995 | US5393647 Etching, carbiding or nitriding with organic or ammonia vapor |
| 02/28/1995 | US5393375 Process for fabricating submicron single crystal electromechanical structures |
| 02/14/1995 | US5389182 Use of a saw frame with tape as a substrate carrier for wafer level backend processing |
| 02/08/1995 | EP0637403A1 Micromachining process for making perfect exterior corner in an etchable substrate |
| 02/03/1995 | CA2129212A1 Use of a saw frame with tape as a substrate carrier for wafer level backend processing |
| 01/31/1995 | US5386110 Method of making cantilever chip for scanning probe microscope |
| 01/26/1995 | WO1995002894A1 Superhard tips for micro-probe microscopy and field emission |
| 01/25/1995 | EP0635760A1 Process for making microstructures |