B81C 1 - Manufacture or treatment of devices or systems in or on a substrate

Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526)
12/2001
12/13/2001	WO2001033621A3 Methods for forming openings in a substrate and methods for creating assemblies
12/13/2001	US20010050266 Single mask technique for making positive and negative micromachined features on a substrate
12/13/2001	DE10023872C1 Production of microstructures layers comprises applying a layer on a sacrificial layer, depositing crystals, producing perforations and removing the sacrificial layer
12/12/2001	EP0776476B1 Gravity-compensated accelerometer and method for making same
12/11/2001	US6328794 Method of controlling stress in a film
12/06/2001	WO2001092939A1 Staggered torsional electrostatic combdrive and method of forming same
12/06/2001	WO2001092896A1 Acceleration switch
12/06/2001	WO2001091846A2 Microneedle apparatus used for marking skin and for dispensing semi-permanent subcutaneous makeup
12/06/2001	US20010049200 Process for forming a buried cavity in a semiconductor material wafer and a buried cavity
12/06/2001	US20010049193 Forming an electroconductive metallization thin film in the movable part and a connecting support; the layer is of an inert metal having a Young's modulus at room temperature which is greater than that of gold; stress relieving
12/06/2001	DE10126621A1 Semiconductor pressure sensor with a rounded corner part of a membrane for picking up pressure has a recess on a semiconductor substrate with a sidewall, a bottom wall acting as a membrane and a corner part with a bending radius
12/04/2001	US6327332 Exposure method
12/04/2001	US6326229 Process for manufacturing integrated semiconductor devices comprising a chemoresistive gas microsensor
12/04/2001	US6324748 Method of fabricating a microelectro mechanical structure having an arched beam
11/2001
11/29/2001	WO2001090761A2 Methods of sampling specimens for microanalysis
11/29/2001	WO2001090577A1 Micromachined fluidic device and method for making same
11/29/2001	WO2001089987A1 Method of fabricating devices incorporating microelectromechanical systems using at least one uv curable tape
11/29/2001	WO2001089788A2 Patterning of surfaces utilizing microfluidic stamps including three-dimensionally arrayed channel networks
11/29/2001	WO2001089787A2 Microfluidic systems including three-dimensionally arrayed channel networks
11/29/2001	US20010046346 Micromachined structure for opto-mechanical micro-switch
11/29/2001	US20010045610 Micro-machined surface structure
11/29/2001	US20010045362 Fabrication of metallic microstructures via exposure of photosensitive composition
11/29/2001	DE10022266A1 Verfahren zum Herstellen und Verschließen eines Hohlraums für Mikrobauelemente oder Mikrosysteme A method of manufacturing and closing a cavity for microdevices or microsystems
11/29/2001	CA2410062A1 Microfluidic systems including three-dimensionally arrayed channel networks
11/28/2001	EP1157407A1 Methods utilizing scanning probe microscope tips and products therefor or produced thereby
11/27/2001	US6324250 Exposure method
11/22/2001	WO2001088586A2 Optical backplane interface using mems
11/22/2001	WO2001088525A1 Structurally programmable microfluidic systems
11/22/2001	WO2001088371A2 Micro pump
11/22/2001	WO2001087765A2 Micromechanical component and method for producing the same
11/22/2001	WO2001087458A1 Magnetic bead-based arrays
11/22/2001	US20010044225 Method for forming microelectronic spring structures on a substrate
11/22/2001	US20010044194 Bonded substrate structures and method for fabricating bonded substrate structures
11/22/2001	US20010044156 Forming specimen from semiconductor wafer, analyzing raised regions via atom probe
11/22/2001	US20010043545 Method of recording/reproducing an information signal
11/22/2001	US20010042793 Stabilized capillary microjet and devices and methods for producing same
11/22/2001	US20010042598 Apparatus for manufacturing micro-structure
11/22/2001	DE10024697A1 Manufacturing micromechanical component, involves providing sensor structure with trenches of width not greater than determined maximum width closable by closure layer bulges
11/22/2001	DE10024266A1 Micromechanical component used as a pressure sensor comprises a semiconductor functional layer on a substrate, a hollow chamber arranged between the substrate and the functional layer, and distance spacers arranged on the substrate
11/22/2001	CA2409081A1 Mems optical backplane interface
11/21/2001	EP1156499A1 Microelectronic part of the type of a variable capacitor or a microswitch
11/21/2001	EP1155442A1 Multilayer structure with controlled internal stresses and method for making same
11/20/2001	US6321134 Clustertool system software using plasma immersion ion implantation
11/20/2001	US6319729 Method for manufacturing an angular rate sensor
11/20/2001	US6318177 Micromechanical component and method for producing the micromechanical component
11/15/2001	WO2001086361A2 Method and system for self-replicating manufacturing stations
11/15/2001	WO2001085601A1 Method for the production and sealing of a cavity for microcomponents or microsystems
11/15/2001	WO2001085600A1 Method of fabricating devices incorporating microelectromechanical systems using uv curable tapes
11/15/2001	US20010041406 Method of producing electrodes of a micromechanical or microelectronic device
11/15/2001	US20010041357 Polymerase chain reaction
11/15/2001	US20010041307 Embossing
11/15/2001	US20010040250 Electronic microcomponent of the variable capacitor or microswitch type, and process for fabricating such a component
11/15/2001	US20010040145 Step and flash imprint lithography
11/15/2001	DE10021490A1 Micro fabrication of geometric three-dimensional micro structures forms a laminate of a hydrophilic polymer and a hydrophobic resin with structured recesses for electroplating and final separation
11/15/2001	CA2348107A1 Variable capacity electronic microcomponent or microswitch or process for fabricating such a component
11/14/2001	EP1153405A1 Electronic devices including micromechanical switches
11/14/2001	EP1152977A1 Method for producing three-dimensional structures by means of an etching process
11/13/2001	US6316840 Semiconductor device
11/08/2001	WO2001084242A1 Multi depth substrate fabrication processes
11/08/2001	WO2001083827A1 High density protein arrays for screening of protein activity
11/08/2001	WO2001083674A1 Biological identification system with integrated sensor chip
11/08/2001	WO2001083363A1 Improved thermal bend actuator
11/08/2001	US20010038148 Structure for electrically connecting a first body of semiconductor material overlaid by a second body of semiconductor material, composite structure using the electric connection structure, and manufacturing process thereof
11/08/2001	CA2408291A1 High density protein arrays for screening of protein activity
11/08/2001	CA2406063A1 Multi depth substrate fabrication processes
11/07/2001	EP1151962A1 Structure for electrically connecting a first body of semiconductor material overlaid by a second body of semiconductor material, composite structure using the electric connection structure, and manufacturing process thereof
11/06/2001	US6312612 Apparatus and method for manufacturing an intracutaneous microneedle array
11/01/2001	WO2001032554A3 Microscopic scale forming method by selective etching of a doped substrate
11/01/2001	US20010036495 Enhanced food products
10/2001
10/31/2001	EP1150318A1 Micromachine switch and its production method
10/31/2001	EP0894043B1 Method of forming articles and patterning surfaces via capillary micromolding
10/30/2001	US6310018 Anhydrous cleaning composition comprising 88 weight percent fluorinated solvent, 0.005 to 2 weight percent hydrogen fluoride or complex thereof, 0.01 to 5 weight percent of co-solvent; for semiconductor substrates
10/30/2001	US6309975 Methods of making implanted structures
10/30/2001	US6309189 Micropump with a built-in intermediate part
10/25/2001	WO2001080286A2 Deposited thin films and their use in separation and sarcrificial layer applications
10/25/2001	WO2001079903A1 Optical switch with mobile components and method for making same
10/25/2001	WO2001078893A2 Fluidic impedances in microfluidic system
10/25/2001	WO2000042231A9 Polycrystalline silicon germanium films for forming micro-electromechanical systems
10/25/2001	US20010034076 Process for wafer level treatment to reduce stiction and passivate micromachined surfaces and compounds used therefor
10/25/2001	US20010033796 Microfabricated elastomeric valve and pump sysems
10/25/2001	CA2406214A1 Deposited thin films and their use in separation and sarcrificial layer applications
10/23/2001	US6306348 Self-addressable, self-assembling microelectronic system for biological reactions e.g. nucleic acid hybridizations, antibody/antigen reactions clinical diagnostics, and biopolymer synthesis
10/18/2001	WO2001077009A1 Micromechanical component and method for producing the same
10/18/2001	WO2001077008A1 Micromechanical component and corresponding production method
10/18/2001	US20010029983 Microfabricated elastomeric valve and pump systems
10/18/2001	DE10017976A1 Mikromechanisches Bauelement und entsprechendes Herstellungsverfahren Micro-mechanical device and manufacturing method thereof
10/17/2001	EP1146533A1 Micromachine switch and its production method
10/17/2001	EP1144973A1 Method of producing calibration structures in semiconductor substrates
10/17/2001	EP1144890A2 Parylene micro check valve and fabrication method thereof
10/16/2001	US6303277 Pattern forming method and method of manufacturing device having fine pattern
10/11/2001	WO2001075955A1 Fluorinated solvent compositions containing hydrogen fluoride
10/11/2001	WO2001074708A2 Method for depositing polycrystalline sige suitable for micromachining and devices obtained thereof
10/11/2001	WO2001014248A3 Assembly process for delicate silicon structures
10/11/2001	US20010029087 Method for making silicon-on-sapphire transducers
10/11/2001	US20010029060 Method for manufacturing semiconductor dynamic quantity sensor
10/11/2001	US20010029058 Method for producing optically planar surfaces for micro-electromechanical system devices
10/11/2001	US20010028872 Multilayer
10/11/2001	US20010028378 Monolithic nozzle assembly formed with mono-crystalline silicon wafer and method for manufacturing the same
10/11/2001	US20010028253 Sensor array for a capacitance measuring fingerprint sensor, and method for producing such a sensor array
10/11/2001	DE10017422A1 Mikromechanisches Bauelement und entsprechendes Herstellungverfahren Micro-mechanical device and manufacturing method thereof

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