| Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526) |
|---|
| 02/27/2002 | CN1338116A Micro-relay |
| 02/26/2002 | US6351057 Microactuator and method for fabricating the same |
| 02/21/2002 | US20020022124 Designer particles of micron and submicron dimension |
| 02/21/2002 | US20020021055 Micro-actuator and manufacturing method thereof |
| 02/21/2002 | US20020020688 Apparatus and method for manufacturing an intracutaneous microneedle array |
| 02/21/2002 | US20020020053 Deposited thin films and their use in separation and sacrificial layer applications |
| 02/20/2002 | EP1180693A1 Sensor device and method of manufacture thereof |
| 02/20/2002 | EP1180493A2 Micro-actuator and manufacturing method thereof |
| 02/20/2002 | CN1079311C Micromechanical device having contacting elements and method for preventing said elements being adhering |
| 02/19/2002 | US6348295 Methods for manufacturing electronic and electromechanical elements and devices by thin-film deposition and imaging |
| 02/14/2002 | WO2002012925A2 Micromirror elements, package for the micromirror elements, and protection system therefor |
| 02/14/2002 | WO2002012116A2 Bonded wafer optical mems process |
| 02/14/2002 | WO2002012115A2 Methods for reducing the curvature in boron-doped silicon micromachined structures |
| 02/14/2002 | US20020019064 By patterning a thick functional material film in high aspect ratio with a simple and practical manufacturing method using a silicon layer for a mask pattern; for Micro Electro Mechanic Systems (MEMS) |
| 02/14/2002 | US20020018964 Method of fabricating a suspended micro-structure with a sloped support and a suspended microstructure fabricated by the method |
| 02/14/2002 | US20020017134 Inertia sensor and method of fabricating the same |
| 02/13/2002 | EP1179139A1 Micromechanic pump |
| 02/13/2002 | EP0939862B1 Miniature valve for filling the reservoir of an apparatus for the transdermal administration of medicine |
| 02/07/2002 | WO2002011191A2 Near critical and supercritical ozone substrate treatment and apparatus for same |
| 02/07/2002 | WO2002011189A2 A tunneling sensor or switch and a method of making same |
| 02/07/2002 | WO2002011188A2 A mem sensor and a method of making same |
| 02/07/2002 | WO2002010702A2 Micro-machined absolute pressure sensor |
| 02/07/2002 | WO2002010684A2 Three-axes sensor and a method of making same |
| 02/07/2002 | WO2002010064A2 A mem gyroscope and a method of making same |
| 02/07/2002 | WO2002010063A2 A tunneling sensor or switch and a method of making same |
| 02/07/2002 | WO2001080286A3 Deposited thin films and their use in separation and sarcrificial layer applications |
| 02/07/2002 | US20020016080 Two etchant etch method |
| 02/07/2002 | US20020014306 Contacting first and second bonding surface, wherein a first reactant for chemical bonding reaction is present on first bonding surface, a second reactant for chemical bonding reaction is present on second surface for bonding |
| 02/07/2002 | CA2410707A1 Micro-machined absolute pressure sensor |
| 02/06/2002 | EP1177333A1 Method of producing a filter |
| 02/05/2002 | US6344417 Method for micro-mechanical structures |
| 01/31/2002 | WO2001066065A3 Systems and methods for fluid transport through dermal barriers |
| 01/31/2002 | US20020012744 Re-coating MEMS devices using dissolved resins |
| 01/30/2002 | EP1176029A2 Ink jet recording element and printing method |
| 01/30/2002 | EP1175600A1 Integrated optoelectronic thin-film sensor and method of producing same |
| 01/29/2002 | US6342430 Trench isolation for micromechanical devices |
| 01/29/2002 | US6342427 Method for forming micro cavity |
| 01/24/2002 | WO2002006061A1 Method for topographical patterning of a device |
| 01/24/2002 | WO2001056771A3 Method for fabricating micro-structures with various surface properties in multilayer body by plasma etching |
| 01/24/2002 | US20020008922 Actuator and micromirror for fast beam steering and method of fabricating the same |
| 01/24/2002 | DE10032579A1 Verfahren zur Herstellung eines Halbleiterbauelements sowie ein nach dem Verfahren hergestelltes Halbleiterbauelement A process for producing a semiconductor device as well as a product produced by the process semiconductor device |
| 01/23/2002 | EP1174995A2 Single stage microactuator for multidimensional actuation with multi-folded spring |
| 01/23/2002 | EP1173893A2 Polycrystalline silicon germanium films for forming micro-electromechanical systems |
| 01/23/2002 | EP1021815B1 Micromechanical electrostatic relay and method for the production thereof |
| 01/22/2002 | US6340806 Energy-efficient method and system for processing target material using an amplified, wavelength-shifted pulse train |
| 01/17/2002 | WO2002005344A1 Method for cutting a block of material and for forming a thin film |
| 01/17/2002 | US20020006682 Micromechanical component and appropriate manufacturing method |
| 01/17/2002 | US20020006626 Process for preparing monolayers and microarrays of biomolecules by using dendrimers |
| 01/17/2002 | US20020005772 Electromagnetic actuator, optical scanner and method of preparing electromagnetic actuator |
| 01/17/2002 | DE10029012A1 Mikrostruktur und Verfahren zu deren Herstellung Microstructure and methods for their preparation |
| 01/16/2002 | EP1172680A2 Method for coating micro-electromechanical systems (MEMS) |
| 01/16/2002 | EP1171378A1 A method of manufacturing a thermal bend actuator |
| 01/16/2002 | EP0946977B1 Multiple local oxidation for surface micromachining |
| 01/10/2002 | WO2002002458A1 Method for production of a semiconductor component and a semiconductor component produced by said method |
| 01/10/2002 | US20020004182 Multi depth substrate fabrication processes |
| 01/10/2002 | US20020003312 Device and method for fluid aeration via gas forced through a liquid within an orifice of a pressure chamber |
| 01/10/2002 | DE10130713A1 Semiconductor acceleration sensor chip comprises peripheral grooves formed on substrate surface |
| 01/10/2002 | DE10030084A1 Multichamber covered container to accept, store, deliver and dispose of smallest quantities of e.g. blood, is made of flexible plastic elastomer in LIGA process |
| 01/09/2002 | EP1169650A1 Different sacrificial layer thickness under fixed and movable electrodes (capacitive acceleration sensor) |
| 01/09/2002 | CN1330034A Manufacture of membrane |
| 01/03/2002 | WO2001051276A3 Fabrication of metallic microstructures via exposure of photosensitive composition |
| 01/03/2002 | US20020001960 Material removal method for forming a structure |
| 01/03/2002 | US20020001871 Triple layer isolation for silicon microstructure and structures formed using the same |
| 01/03/2002 | US20020001695 Micro-passage element used for fluid analysis |
| 01/03/2002 | US20020000649 Method of fabrication of a microstructure having an internal cavity |
| 01/02/2002 | EP1168609A2 Encapsulated mems band-pass filter for integrated circuits and method of fabrication thereof |
| 01/02/2002 | EP1167280A2 Production of diaphragms |
| 01/02/2002 | EP1166352A1 Micro-relay |
| 01/02/2002 | EP1166345A1 Method for producing a microelectronic structure |
| 01/02/2002 | EP0983609B1 Method for making a machined silicon micro-sensor |
| 01/02/2002 | CN1328955A Bandpass filter of packaged microelectronic machinery system with integrated circuit and its manufacturing method |
| 01/02/2002 | CN1077283C Thermal type flow sensor for very fine working and manufacturing method thereof |
| 01/01/2002 | US6335264 Controlled cleavage thin film separation process using a reusable substrate |
| 01/01/2002 | US6335224 Protection of microelectronic devices during packaging |
| 01/01/2002 | US6334960 Polymerization and solidification of fluid on transfer layer |
| 01/01/2002 | US6334856 Microneedle devices and methods of manufacture and use thereof |
| 12/27/2001 | WO2001099169A2 Etch stop layer system for sige devices |
| 12/27/2001 | WO2001099149A2 Method for forming barrier structures on a substrate and the resulting article |
| 12/27/2001 | WO2001098786A1 Accelerometer with folded beams |
| 12/27/2001 | WO2001098016A2 Laser system for processing target material |
| 12/27/2001 | WO2001050137A3 Micromechanical structure, in particular for an acceleration sensor or yaw rate sensor and a corresponding method for producing the same |
| 12/27/2001 | WO2001046664A3 Method for producing micromechanical structures |
| 12/27/2001 | WO2001035433A3 Cmos-compatible mem switches and method of making |
| 12/27/2001 | US20010055876 Semiconductor sensor device and method of manufacturing the same |
| 12/27/2001 | US20010055864 Encapsulated MEMS band-pass filter for integrated circuits and method of fabrication thereof |
| 12/27/2001 | US20010055833 Method of fabrication of an infrared radiation detector and infrared detector device |
| 12/27/2001 | US20010055242 Continuous laminar fluid mixing in micro-electromechanical systems |
| 12/27/2001 | US20010054778 Microfabricated elastomeric valve and pump systems |
| 12/27/2001 | US20010054316 Method of manufacturing inertial force sensor |
| 12/27/2001 | US20010054315 Micromechanical component protected from environmental influences |
| 12/23/2001 | CA2351285A1 Production of diaphragms |
| 12/20/2001 | WO2001096958A2 Process for producing microfluidic articles |
| 12/20/2001 | WO2001096232A1 Microstructure and method for the production thereof |
| 12/20/2001 | WO2001096058A1 Method and apparatus for making a minute product using uv laser beam |
| 12/20/2001 | US20010052628 Semiconductor pressure sensor having strain gauge and circuit portion on semiconductor substrate |
| 12/20/2001 | US20010052266 Semiconductor pressure sensor having rounded corner portion of diaphragm |
| 12/20/2001 | DE10128577A1 Semiconductor pressure sensor for e.g., as intake pressure sensor in vehicle engine intake, has semiconductor substrate, diaphragm portion, strain gauge, circuit portion, and local oxidation of silicon film |
| 12/19/2001 | EP1164601A2 Electromagnetic actuator, its manufacturing method, and optical scanner using the same actuator |
| 12/18/2001 | US6331383 Exposure of photosensitive material having photoacid generator and ph indicator to ultraviolet radiation; colorimetric analysis; masking, development |
| 12/13/2001 | WO2001093997A1 Continuous laminar fluid mixing in micro-electromechanical systems |