| Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526) |
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| 04/05/2001 | WO2001024228A2 Temporary bridge for micro machined structures |
| 04/05/2001 | WO2001023300A1 Dissolved wafer fabrication process and associated microelectromechanical device having a support substrate with spacing mesas |
| 04/04/2001 | EP1089356A2 Piezoelectric/electrostrictive device and method of manufacturing same |
| 04/04/2001 | EP1089261A1 A method of producing suspended elements for electrical connection between two portions of a micro-mechanism which can move relative to one another |
| 04/04/2001 | EP1088785A1 Fabrication process for a three- dimensional suspended microstructure, an integrated microstructure obtained by this process and an adjustable integrated micro-optical element |
| 04/04/2001 | EP1088329A1 Method and apparatus for stabilising a plasma |
| 04/04/2001 | CN1064135C Thin film actuated mirror array |
| 04/03/2001 | US6211598 In-plane MEMS thermal actuator and associated fabrication methods |
| 04/03/2001 | US6210988 Polycrystalline silicon germanium films for forming micro-electromechanical systems |
| 04/03/2001 | US6210986 Microfluidic channel fabrication method |
| 03/28/2001 | EP1087445A1 Inertia force sensor and method for producing inertia force sensor |
| 03/28/2001 | EP1086214A1 Microneedle devices and methods of manufacture and use thereof |
| 03/27/2001 | US6207005 Cluster tool apparatus using plasma immersion ion implantation |
| 03/22/2001 | WO2001019723A1 Three-dimensional suspended integrated microstructure and method for making same |
| 03/22/2001 | DE19941701A1 Manufacturing method for cantilevered structure used for sensor application involves plasma etching of substrate in window region over portion of substrate thickness in front of support or functional layer |
| 03/21/2001 | EP1085219A2 In-plane MEMS thermal actuator and associated fabrication methods |
| 03/21/2001 | EP1084076A1 Chlorotrifluorine gas generator system |
| 03/20/2001 | US6204086 Method for manufacturing semiconductor components having micromechanical structures |
| 03/20/2001 | US6204085 Reduced deformation of micromechanical devices through thermal stabilization |
| 03/15/2001 | WO2001018857A1 Process for fabrication of 3-dimensional micromechanisms |
| 03/15/2001 | DE19941042A1 Verfahren zur Herstellung oberflächenmikromechanischer Strukturen durch Ätzung mit einem dampfförmigen, flußsäurehaltigen Ätzmedium A process for producing surface micromechanical structures by etching with a vapor, hydrofluoric acid etching medium |
| 03/14/2001 | EP1082754A1 Gas delivery system |
| 03/14/2001 | EP1082740A1 Micro-mechanical elements |
| 03/13/2001 | US6199874 Microelectromechanical accelerometer for automotive applications |
| 03/13/2001 | CA2317246A1 In-plane mems thermal actuator and associated fabrication methods |
| 03/08/2001 | DE19935819A1 Relais und Verfahren zu dessen Herstellung Relay and process for its preparation |
| 03/07/2001 | EP1081722A2 Electromagnetic actuator, its manufacturing method, and optical scanner using the same electromagnetic actuator |
| 03/07/2001 | EP1081391A2 Microelectromechanical valve having single crystalline components and associated fabrication method |
| 03/07/2001 | EP1081093A2 Process for the fabricaiton of micromechanical shallow structures by etching with a vapour phase medium containing hydrofluoric acid |
| 03/07/2001 | EP1079928A2 Microstructured films |
| 03/06/2001 | US6198159 Bonded wafer, process for producing same and substrate |
| 03/06/2001 | US6197835 Device and method for creating spherical particles of uniform size |
| 03/06/2001 | US6197655 Method for manufacturing integrated structures including removing a sacrificial region |
| 03/06/2001 | US6197610 Method of making small gaps for small electrical/mechanical devices |
| 03/06/2001 | US6197180 Heat-shrinking non-conductive polymer sheet containing holes onto metal surface; electroplating metal onto metal surface with holes of non-conductive sheet to produce metal microstructures on metal surface |
| 03/06/2001 | US6196525 Device and method for fluid aeration via gas forced through a liquid within an orifice of a pressure chamber |
| 03/01/2001 | WO2001014248A2 Assembly process for delicate silicon structures |
| 03/01/2001 | DE19934174C1 Verfahren zur Herstellung einer Torsionsfeder A process for producing a torsion spring |
| 03/01/2001 | CA2317069A1 Microelectromechanical valve having single crystalline components and associated fabrication method |
| 02/28/2001 | EP1079220A1 Micromechanical sensor and method for hermetic sealing |
| 02/27/2001 | US6194722 Method of fabrication of an infrared radiation detector and infrared detector device |
| 02/27/2001 | US6194066 Microscopic tube devices and method of manufacture |
| 02/22/2001 | DE19939318A1 Procedure for production of micro-mechanical structures such as rotation sensors has extra protective layer deposition and etching steps to protect the structure during processing of the reverse side of the substrate |
| 02/21/2001 | EP1077475A2 Method of micromachining a multi-part cavity |
| 02/21/2001 | EP1076826A1 Method for producing micromechanical components |
| 02/20/2001 | US6191671 Apparatus and method for a micromechanical electrostatic relay |
| 02/15/2001 | WO2001011672A1 Method of etching a layer using sacrificial elements |
| 02/15/2001 | WO2001011411A1 Microelectromechanical optical switch and method of manufacture thereof |
| 02/15/2001 | WO2000067537A3 Conservatively printed displays and methods relating to same |
| 02/15/2001 | DE19938207A1 Sensor, insbesondere mikromechanischer Sensor, und Verfahren zu dessen Herstellung Sensor, in particular a micromechanical sensor, and process for its preparation |
| 02/14/2001 | EP0685864B1 Planar solenoid relay and production method thereof |
| 02/13/2001 | US6188301 Switching structure and method of fabrication |
| 02/13/2001 | US6187607 Manufacturing method for micromechanical component |
| 02/13/2001 | US6187214 Method and device for production of components for microfabrication |
| 02/13/2001 | US6187110 Prepared by introducing energetic particles in a selected manner through a surface of a donor substrate to a selected depth underneath the surface, where the particles have a relatively high concentration to define a donor substrate |
| 02/08/2001 | WO2001009911A1 Microelectromechanic relay and method for the production thereof |
| 02/08/2001 | CA2387251A1 Microelectromechanic relay and method for the production thereof |
| 02/06/2001 | US6183267 Ultra-miniature electrical contacts and method of manufacture |
| 02/01/2001 | WO2001007869A1 Method for producing a torsion spring |
| 02/01/2001 | WO2001007506A2 Microfabricated devices and method of manufacturing the same |
| 02/01/2001 | WO2001007159A2 Integration of biochemical protocols in a continuous flow microfluidic device |
| 02/01/2001 | DE19933418A1 Micromechanical components fabrication method, involves forming structuring layer on substrate and subsequent etching of sacrificial layer |
| 02/01/2001 | CA2379927A1 Integration of biochemical protocols in a continuous flow microfluidic device |
| 01/30/2001 | US6180536 Suspended moving channels and channel actuators for microfluidic applications and method for making |
| 01/25/2001 | WO2001006543A2 Microelectromechanical device with moving element |
| 01/25/2001 | WO2001006496A1 Inorganic permeation layer for micro-electric device |
| 01/25/2001 | CA2379762A1 Inorganic permeation layer for micro-electric device |
| 01/25/2001 | CA2379537A1 Microelectromechanical device with moving element |
| 01/18/2001 | WO2001004938A1 Mechanical patterning of a device layer |
| 01/18/2001 | WO2001004638A1 Merged-mask micro-machining process |
| 01/18/2001 | CA2714788A1 Merged-mask micro-machining process |
| 01/18/2001 | CA2343227A1 Mechanical patterning of a device layer |
| 01/17/2001 | EP1069552A1 Process for assembling a microactuator and a transducer in a hard disk R/W unit |
| 01/11/2001 | DE10020713A1 Contact structure for probe card, has contactor formed on dielectric substrate by minute machining operation such that contact section of contactor is perpendicularly formed on one end of horizontal section |
| 01/09/2001 | US6171972 Fracture-resistant micromachined devices |
| 01/09/2001 | US6170332 Micromechanical accelerometer for automotive applications |
| 01/04/2001 | WO2001001025A2 Microfabricated elastomeric valve and pump systems |
| 01/03/2001 | EP1065378A2 Microfabricated elastomeric valve and pump systems |
| 01/02/2001 | US6169321 Method and system for locally annealing a microstructure formed on a substrate and device formed thereby |
| 01/02/2001 | US6168395 Bistable microactuator with coupled membranes |
| 12/28/2000 | WO2000078667A1 Precisely defined microelectromechanical structures and associated fabrication methods |
| 12/28/2000 | DE19928658A1 Forming submicron channels on surfaces with potential future applications in nanoelectronics, chemical analysis and micro-engineering, employs oscillatory Langmuir-Blodgett wetting technique |
| 12/28/2000 | DE19928297A1 Production of a sensor with a membrane comprises depositing a silicon nitride layer by a LPCVD or PECVD process on a surface of a silicon substrate, and etching a recess from the underside of the substrate |
| 12/27/2000 | EP1062685A1 Integrated large area microstructures and micromechanical devices |
| 12/27/2000 | EP1062684A2 Trench isolation for micromechanical devices |
| 12/27/2000 | EP1062180A1 Method for processing silicon using etching processes |
| 12/26/2000 | US6166386 Micro-processing method using a probe |
| 12/21/2000 | WO2000077839A1 Controlled-stress stable metallization for electronic and electromechanical devices |
| 12/21/2000 | WO2000076911A1 Improved methods of fabricating microelectromechanical and microfluidic devices |
| 12/21/2000 | CA2374666A1 Improved methods of fabricating microelectromechanical and microfluidic devices |
| 12/20/2000 | CN1277731A Thermal arched beam microelectromechanical devices and associated fabrication method |
| 12/20/2000 | CN1277142A Manufacture of integrated minuature movable silicon mechanical-structure on glass substrate |
| 12/19/2000 | US6162705 Controlled cleavage process and resulting device using beta annealing |
| 12/19/2000 | US6162657 Method for manufacturing a micromechanical relay |
| 12/19/2000 | US6162367 Treating sample by contacting sample with a gas-phase bromine trifluoride containing etchant to produce a controlled etch depth in said sample; micromachining |
| 12/14/2000 | WO2000075068A2 Method and apparatus for stress pulsed release and actuation of micromechanical structures |
| 12/14/2000 | WO2000074932A1 Deposited thin film void-column network materials |
| 12/14/2000 | WO2000074764A1 Method of manufacturing an intracutaneous microneedle array |
| 12/14/2000 | WO2000074763A2 Devices and methods for enhanced microneedle penetration of biological barriers |
| 12/14/2000 | CA2375138A1 Deposited thin film void-column network materials |