| Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526) |
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| 09/15/1999 | EP0941460A1 Process for producing micromechanical sensors |
| 09/10/1999 | WO1999045583A1 Method for electrochemically etching a p-type semiconducting material, and a substrate of at least partly porous semiconducting material |
| 09/08/1999 | EP0939973A1 Process for manufacturing micromechanical functional elements |
| 09/08/1999 | EP0939862A1 Miniature valve for filling the reservoir of an apparatus for the transdermal administration of medicine |
| 09/07/1999 | US5948470 A selected block copolymer is coated onto the selected substrate and a component of the block copolymer is modified with ozone and physically removed so that the dense periodic pattern of the block copolymer can be transferred onto the |
| 09/02/1999 | WO1999043479A1 Microcutter and method for producing microreliefs in a structure |
| 09/01/1999 | EP0938738A1 Method for manufacturing a micromechanical relay |
| 08/25/1999 | EP0937280A1 Multifunctional microstructures and preparation thereof |
| 08/24/1999 | US5943591 Integrated circuit scribe line structures and methods for making same |
| 08/24/1999 | US5943555 Micro mechanical component and production process thereof |
| 08/19/1999 | WO1999041772A2 A method of component manufacture |
| 08/19/1999 | WO1999041592A1 A method of producing a detector belonging to a gas sensor, and a detector produced in accordance with the method |
| 08/19/1999 | CA2320920A1 A method of component manufacture |
| 08/19/1999 | CA2320919A1 A method of producing a detector belonging to a gas sensor, and a detector produced in accordance with the method |
| 08/17/1999 | CA2159642C Method for fabricating suspension members for micromachined sensors |
| 08/10/1999 | US5936758 Method of passivating a micromechanical device within a hermetic package |
| 08/05/1999 | WO1998047198A9 A preferential crystal etching technique for the fabrication of millimeter and submillimeter wavelength horn antennas |
| 07/28/1999 | EP0932171A2 Micromechanical capacitor |
| 07/27/1999 | US5930595 Isolation process for surface micromachined sensors and actuators |
| 07/27/1999 | US5929498 Semiconductor device |
| 07/27/1999 | US5928526 Method for manufacturing a substrate having an irregular shape |
| 07/22/1999 | WO1999036948A1 Integrated large area microstructures and micromechanical devices |
| 07/22/1999 | WO1999036941A2 Trench isolation for micromechanical devices |
| 07/15/1999 | WO1999035477A1 Micromechanical component |
| 07/15/1999 | WO1999035347A1 Microdevices based on surface tension and wettability that function as sensors, actuators, and other devices |
| 07/15/1999 | WO1999035305A1 Method for designing and producing a micromechanical device |
| 07/15/1999 | DE19800745A1 Design- und Herstellungsverfahren für eine mikromechanische Vorrichtung Design and manufacturing method for a micromechanical device |
| 07/15/1999 | DE19800574A1 Mikromechanisches Bauelement Micromechanical component |
| 07/14/1999 | EP0838084A4 Multilayer high vertical aspect ratio thin film structures |
| 07/13/1999 | US5923995 Methods and apparatuses for singulation of microelectromechanical systems |
| 07/13/1999 | US5923952 Method of making a semiconductor device |
| 07/13/1999 | US5922955 Gravity-compensation type accelerometer and process for producing such an accelerometer |
| 07/13/1999 | US5922212 Semiconductor sensor having suspended thin-film structure and method for fabricating thin-film structure body |
| 07/13/1999 | CA2063508C Manufacture of a micromechanical element with two degrees of freedom |
| 07/06/1999 | US5920013 Silicon micromachine with sacrificial pedestal |
| 07/06/1999 | US5919364 Microfabricated filter and shell constructed with a permeable membrane |
| 07/01/1999 | WO1999032890A1 Micromechanical device and corresponding production method |
| 06/24/1999 | WO1999031019A1 Device and method for creating spherical particles of uniform size |
| 06/24/1999 | WO1999030835A1 Method and device for production of components for microfabrication |
| 06/24/1999 | WO1999030834A1 Device and method for creating aerosols for drug delivery |
| 06/24/1999 | WO1999030833A1 Device and method for creating dry particles |
| 06/24/1999 | WO1999030832A1 Stabilized capillary microjet and devices and methods for producing same |
| 06/24/1999 | WO1998047198A3 A preferential crystal etching technique for the fabrication of millimeter and submillimeter wavelength horn antennas |
| 06/24/1999 | DE19859627A1 Semiconducting device, especially sensor forming part of integrated circuit |
| 06/24/1999 | DE19821841C1 Micro-device manufacture involving transfer of micro-structured layer from production substrate to another substrate |
| 06/24/1999 | CA2315108A1 Method and device for production of components for microfabrication |
| 06/24/1999 | CA2315048A1 Device and method for creating spherical particles of uniform size |
| 06/24/1999 | CA2314979A1 Stabilized capillary microjet and devices and methods for producing same |
| 06/24/1999 | CA2314918A1 Device and method for creating dry particles |
| 06/22/1999 | US5914801 Microelectromechanical devices including rotating plates and related methods |
| 06/22/1999 | US5914520 Micromechanical sensor device |
| 06/17/1999 | WO1999029498A1 Designer particles of micron and submicron dimension |
| 06/17/1999 | WO1999003684A8 The production of microstructures for use in assays |
| 06/17/1999 | WO1998040909A3 Method of forming etched structures comprising implantation steps |
| 06/17/1999 | DE19803186C1 Structured wafer production used in micro-mechanical sensor structure manufacture, without need for wafer edge lacquering or doping |
| 06/17/1999 | DE19753948A1 Microstructured metallic body produced by direct electroforming using a precision metallic negative body |
| 06/16/1999 | EP0922944A2 Method for manufacturing integrated structures including removing a sacrificial region |
| 06/15/1999 | US5913125 Method of controlling stress in a film |
| 06/02/1999 | EP0919015A1 Process and device for applying a photoresist lacquer on uneven base body surfaces |
| 06/01/1999 | US5909048 Micro-machining minute hollow using native oxide membrane |
| 05/25/1999 | US5906708 Vapor depositing an etching-stop dielectric layer |
| 05/19/1999 | EP0916145A1 Encapsulated micro-relay modules and methods of fabricating same |
| 05/18/1999 | US5905241 Threshold microswitch and a manufacturing method thereof |
| 05/14/1999 | WO1999003684A3 The production of microstructures for use in assays |
| 05/12/1999 | EP0914629A1 Gray scale mask and depth pattern transfer technique using inorganic chalcogenide glass |
| 05/11/1999 | US5902120 Process for producing spatially patterned components |
| 05/06/1999 | WO1998014787A8 Structure comprising an insulated part in a solid substrate and method for producing same |
| 05/06/1999 | EP0912223A1 Microfabricated filter and shell constructed with a permeable membrane |
| 05/04/1999 | US5900998 Thin film actuated mirror array and method for the manufacture thereof |
| 04/15/1999 | DE19752202C1 Micromechanical device production involving ion deposition on substrate region |
| 04/13/1999 | US5894091 Composite sensor |
| 04/13/1999 | US5893974 Inorganic porous shell provoding a selective molecular barrier between interior and exterior |
| 04/13/1999 | US5893967 Suitable for products such as cathode-ray tube displays of the flat-panel type |
| 04/06/1999 | US5891595 Method of fabricating composite piezo-electric members and a mask used for the fabrication of the same |
| 04/01/1999 | WO1999016096A1 Thermal arched beam microelectromechanical devices and associated fabrication methods |
| 03/31/1999 | EP0869921A4 Field-assisted sealing |
| 03/30/1999 | US5888846 Method for microfabricating diamond |
| 03/30/1999 | US5888761 Etching method for forming air bridge pattern on silicon substrate |
| 03/16/1999 | US5883705 Atomic force microscope for high speed imaging including integral actuator and sensor |
| 03/16/1999 | US5883009 Method of fabricating integrated semiconductor devices comprising a chemoresistive gas microsensor |
| 03/16/1999 | US5882571 Method for making miniaturized planar columns in novel support media for liquid phase analysis |
| 03/16/1999 | US5882532 Fabrication of single-crystal silicon structures using sacrificial-layer wafer bonding |
| 03/04/1999 | WO1999010922A1 Method for anisotropic etching of silicon |
| 03/04/1999 | WO1999010907A1 Micromechanical electrostatic relay and method for the production thereof |
| 03/04/1999 | DE19736370A1 Verfahren zum anisotropen Ätzen von Silizium A method for anisotropic etching of silicon |
| 03/04/1999 | CA2300956A1 Micromechanical electrostatic relay, and a method for its production |
| 02/16/1999 | US5872496 Planar type electromagnetic relay and method of manufacturing thereof |
| 02/16/1999 | US5872046 With a solution including diluted hydrofluoric acid and an alkyl glycol |
| 02/11/1999 | WO1999006110A1 Cluster tool method and apparatus using plasma immersion ion implantation |
| 02/11/1999 | DE19734113A1 Micro-mechanical component production process |
| 02/03/1999 | EP0895276A1 Process for manufacturing integrated microstructures of single-crystal semiconductor material |
| 02/03/1999 | EP0894043A1 Method of forming articles and patterning surfaces via capillary micromolding |
| 02/02/1999 | US5866469 Method of anodic wafer bonding |
| 02/02/1999 | US5866021 Method of manufacturing micro-tip and female mold substrate therefor, and method of manufacturing probe with micro-tip and the probe |
| 02/02/1999 | US5865938 Wafer chuck for inducing an electrical bias across wafer heterojunctions |
| 01/28/1999 | WO1999004422A1 Fusion-bond electrical feed-through |
| 01/28/1999 | WO1999003684A2 The production of microstructures for use in assays |
| 01/28/1999 | CA2293597A1 The production of microstructures for use in assays |
| 01/26/1999 | US5864062 Semiconductor acceleration sensor |
| 01/26/1999 | US5863233 Field emitter fabrication using open circuit electrochemical lift off |