| Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526) |
|---|
| 05/28/1998 | DE19648866A1 Method of manufacturing micromechnical components and assemblies |
| 05/28/1998 | DE19648759A1 Method of manufacturing microstructures |
| 05/27/1998 | EP0844469A1 Coated high-performance structural elements or components, method of manufacturing such elements or components and device for carrying out this method |
| 05/26/1998 | US5756901 Sensor and method for manufacturing a sensor |
| 05/22/1998 | WO1998021734A1 Method for manufacturing a micromechanical relay |
| 05/22/1998 | WO1998021626A1 Multifunctional microstructures and preparation thereof |
| 05/22/1998 | CA2761346A1 In-line holographic mask for micromachining |
| 05/22/1998 | CA2688799A1 In-line holographic mask for micromachining |
| 05/20/1998 | DE19727214A1 Semiconductor acceleration sensor esp for installing in airbag of motor vehicle |
| 05/19/1998 | US5753134 Method for producing a layer with reduced mechanical stresses |
| 05/14/1998 | DE19646667A1 Micromechanical electrostatic relay production |
| 05/12/1998 | US5751487 Multilayered filter films and method for making the same |
| 05/06/1998 | CN1180934A Semiconductor integrated capacitive acceleration sensor and relative fabrication method |
| 05/05/1998 | US5747169 Field-assisted sealing |
| 04/29/1998 | EP0838084A1 Multilayer high vertical aspect ratio thin film structures |
| 04/29/1998 | EP0838005A1 Method for the manufacture of a membrane-containing microstructure |
| 04/28/1998 | US5744719 Integrated micromechanical sensor device |
| 04/21/1998 | US5742377 Cantilever for scanning probe microscope including piezoelectric element and method of using the same |
| 04/16/1998 | WO1998015972A1 Process for anisotropic plasma etching of different substrates |
| 04/09/1998 | WO1998014787A1 Structure comprising an insulated part in a solid substrate and method for producing same |
| 04/09/1998 | DE19641288A1 Verfahren zum anisotropen Plasmaätzen verschiedener Substrate A method for anisotropic plasma etching of different substrates |
| 04/08/1998 | EP0834759A2 Microelectromechanical devices including rotating plates and related methods |
| 04/02/1998 | DE19639946A1 Micromechanical component with single-piece surface structure for acceleration sensor |
| 04/01/1998 | EP0831963A1 Micromachined porous membranes with bulksupport |
| 03/31/1998 | US5734105 Dynamic quantity sensor |
| 03/26/1998 | WO1998012740A1 Multiple local oxidation for surface micromachining |
| 03/24/1998 | US5731587 Hot stage for scanning probe microscope |
| 03/17/1998 | US5729074 Micro mechanical component and production process thereof |
| 03/12/1998 | DE19636914A1 Void-free trench filling process |
| 03/11/1998 | EP0828160A1 Acceleration sensor and a method for its manufacture |
| 03/10/1998 | US5725729 Semiconductors |
| 03/04/1998 | EP0826886A1 Single crystal optical module |
| 03/04/1998 | CN1175096A Method for fabricating composite piezo-electric members and mask used for fabrication of the same |
| 03/04/1998 | CN1174984A Thermal type flow sensor for very fine working |
| 02/26/1998 | WO1998008144A1 Process and device for applying a photoresist lacquer on uneven base body surfaces |
| 02/26/1998 | DE19633407A1 Vorrichtung und Verfahren zum Auftragen von Fotoresist auf nicht ebene Grundkörperflächen für fotolithografische Verfahren Apparatus and method for applying photoresist on non-planar body surfaces for photolithographic method |
| 02/19/1998 | DE19735041A1 Integrated circuit microcomponents separating method, e.g. for microphone, pressure sensor transducer |
| 02/12/1998 | WO1998006118A1 Encapsulated micro-relay modules and methods of fabricating same |
| 02/12/1998 | WO1998005935A1 Method for packaging microsensors |
| 02/12/1998 | CA2261683A1 Encapsulated micro-relay modules and methods of fabricating same |
| 02/11/1998 | EP0700580A4 Method for fabricating suspension members for micromachined sensors |
| 02/04/1998 | EP0822579A1 Method of fabricating integrated microstructures of semiconductor material |
| 02/04/1998 | EP0822578A1 Method of fabricating integrated semiconductor devices comprising a chemoresistive gas microsensor |
| 02/04/1998 | EP0822415A1 Semiconductor integrated capacitive acceleration sensor and relative fabrication method |
| 02/04/1998 | EP0822398A1 Integrated piezoresistive pressure sensor and relative fabrication method |
| 01/28/1998 | EP0820599A1 Methods for planarization and encapsulation of micromechanical devices in semiconductor processes |
| 01/20/1998 | US5709802 Method of making a micro-actuator device |
| 01/14/1998 | EP0818808A2 Improvements in or relating to semiconductor devices |
| 01/14/1998 | EP0783727A4 Microstructures and methods for manufacturing microstructures |
| 01/07/1998 | EP0817256A1 A wafer chuck for inducing an electrical bias across wafer heterojunctions |
| 01/07/1998 | EP0817250A1 Dry etch process control using electrically biased stop junctions |
| 01/07/1998 | EP0816856A1 Electrosatatic capacitive sensor and method for manufacturing the same |
| 01/07/1998 | EP0814911A2 Electroformed multilayer spray director and a process for the preparation thereof |
| 01/02/1998 | DE19624593A1 Optical micro-lens manufacturing method |
| 12/31/1997 | WO1997049475A1 Microfabricated filter and shell constructed with a permeable membrane |
| 12/30/1997 | US5703728 Support post architecture for micromechanical devices |
| 12/18/1997 | WO1997047370A1 Microfabricated filter and method of making same |
| 12/18/1997 | DE19651269A1 Single piece semiconductor acceleration sensor for motor vehicle |
| 12/17/1997 | EP0813255A1 Method of fabricating composite piezo-electric members and a mask used for the fabrication of the same |
| 12/16/1997 | US5698112 Surrounding the aluminum or alloy layer with protective titanium nitride layers, resistance to chemical substances used for etching sacrificial layer |
| 12/10/1997 | CN1167520A Electroformed multilayer spray director and a process for the preparation thereof |
| 12/09/1997 | US5696662 Electrostatically operated micromechanical capacitor |
| 12/04/1997 | DE19621349A1 Three=dimensionally structuring single crystal substrate |
| 12/03/1997 | EP0810441A2 Composite sensor |
| 11/25/1997 | US5690839 Method for forming an array of thin film actuated mirrors |
| 11/18/1997 | US5688158 Planarizing process for field emitter displays and other electron source applications |
| 11/11/1997 | US5686171 Integrated circuit scribe line structures and methods for making same |
| 11/11/1997 | US5685491 Fluid dispersant unit |
| 11/04/1997 | US5683594 Method for making diaphragm-based sensors and apparatus constructed therewith |
| 11/04/1997 | US5683546 Masking layers of air bridge patterns, generating isotropic defects in silicon substrates, ions and anisotropic etching |
| 10/30/1997 | DE19715194A1 Semiconductor device production for producing angular velocity sensors |
| 10/28/1997 | US5682053 Silicon wafer having substrate and monocrystalline silicon layer separated by buried silicon dioxide layer |
| 10/28/1997 | US5681661 High aspect ratio, microstructure-covered, macroscopic surfaces |
| 10/22/1997 | EP0802416A2 Manufacturing method of semiconductor acceleration sensor |
| 10/14/1997 | US5677090 Method of making X-ray mask having reduced stress |
| 10/14/1997 | US5676998 Thin film magnet, cylindrical ferromagnetic thin film and production method thereof |
| 10/08/1997 | EP0799495A1 Silicon-germanium-carbon compositions and processes thereof |
| 09/18/1997 | WO1997033737A1 Method of forming articles and patterning surfaces via capillary micromolding |
| 09/16/1997 | US5668062 Method for processing semiconductor wafer with reduced particle contamination during saw |
| 09/16/1997 | US5668061 Method of back cutting silicon wafers during a dicing procedure |
| 09/16/1997 | US5668033 Method for manufacturing a semiconductor acceleration sensor device |
| 09/12/1997 | WO1997033297A1 Electrochemical removal of material, particularly excess emitter material in electron-emitting device |
| 09/10/1997 | EP0794562A2 Micromachining method and micromachined structure |
| 09/10/1997 | EP0793736A1 Process for preparing micromechanical components having free-standing microstructures or membranes |
| 09/09/1997 | US5666190 Method of performing lithography using cantilever array |
| 09/03/1997 | EP0792518A1 Method for fabricating a self-limiting silicon based interconnect for testing bare semiconductor dice |
| 09/02/1997 | US5662814 Micro-machining minute hollow using native oxide membrane |
| 08/26/1997 | US5661611 Thin film actuated mirror array and method for the manufacture thereof |
| 08/26/1997 | US5660680 Method for fabrication of high vertical aspect ratio thin film structures |
| 08/19/1997 | US5658710 Surface treatment by diffusing a gas to nitrogenation and carbonization with silicon substrate |
| 08/19/1997 | US5658698 Microstructure, process for manufacturing thereof and devices incorporating the same |
| 08/19/1997 | US5658636 Method to prevent adhesion of micromechanical structures |
| 08/19/1997 | US5658413 Miniaturized planar columns in novel support media for liquid phase analysis |
| 08/14/1997 | WO1997029538A1 Bistable microactuator with coupled membranes |
| 08/14/1997 | WO1997029223A1 High aspect ratio, microstructure-covered, macroscopic surfaces |
| 07/31/1997 | WO1997007517A3 Electrostatically operated, micromechanical capacitor |
| 07/29/1997 | US5651898 Field emission cold cathode and method for manufacturing the same |
| 07/16/1997 | EP0783727A1 Microstructures and methods for manufacturing microstructures |
| 07/15/1997 | US5648300 Method of manufacturing cantilever drive mechanism and probe drive mechanism |
| 07/09/1997 | EP0783108A1 Micromechanical element with planarized cover over a cavity and method of fabrication |