| Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526) |
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| 06/18/2002 | US6405936 Stabilized capillary microjet and devices and methods for producing same |
| 06/18/2002 | US6405594 Silicon base plate with low parasitic electrical interference for sensors |
| 06/13/2002 | WO2002047172A1 A high frequency interconnect system using micromachined plugs and sockets |
| 06/13/2002 | WO2002046091A2 Method for producing a fluid component, fluid component and an analysis device |
| 06/13/2002 | US20020072203 Thin film-structure and a method for producing the same |
| 06/13/2002 | US20020072143 Method of producing vacuum container |
| 06/13/2002 | US20020071166 Magnetically packaged optical MEMs device and method for making the same |
| 06/13/2002 | US20020070639 Piezoelectric/electrostrictive element |
| 06/13/2002 | US20020070634 Freestanding polymer MEMS structures with anti stiction |
| 06/13/2002 | DE10060433A1 Verfahren zur Herstellung eines Fluidbauelements, Fluidbauelement und Analysevorrichtung A method for producing a fluid device, the fluid device and analysis device |
| 06/13/2002 | DE10055872A1 Porous structure production used for sieve or filter comprise anodizing silicon substrate to form porous silicon layer |
| 06/12/2002 | EP1213260A2 Process for manufacturing micromechanical and microoptomechanical structures with pre-applied patterning |
| 06/12/2002 | EP1213259A2 Process for manufacturing micromechanical and microoptomechanical structures with single crystal silicon exposure step |
| 06/11/2002 | US6404402 Preferential crystal etching technique for the fabrication of millimeter and submillimeter wavelength horn antennas |
| 06/11/2002 | US6401544 Micromechanical component protected from environmental influences |
| 06/06/2002 | WO2002044078A1 Method of manufacturing ultra-precise, self-assembled micro systems |
| 06/06/2002 | WO2002044033A2 Mems device with integral packaging |
| 06/06/2002 | WO2002043937A2 Method of making a product with a micro or nano sized structure and product |
| 06/06/2002 | WO2002043615A2 Microfabricated elastomeric valve and pump systems |
| 06/06/2002 | WO2001089788A3 Patterning of surfaces utilizing microfluidic stamps including three-dimensionally arrayed channel networks |
| 06/06/2002 | US20020068462 Forming a carbon layer on at least a part of the material layer to prevent the part of the material layer from being etched; and wet-etching the material layer using an alkali solution. |
| 06/06/2002 | US20020068370 Method of trimming micro-machined electromechanical sensors (MEMS) devices |
| 06/06/2002 | US20020068021 Transparent on both sides, which can easily be used for transmitted-light analysis; not necessary to adjust the active height of the fluid structure by very precisely controlled etching parameters |
| 06/06/2002 | US20020066978 Method of forming articles including waveguides via capillary micromolding and microtransfer molding |
| 06/06/2002 | US20020066870 Mask for electron beam projection lithography and method of fabricating the same |
| 06/06/2002 | DE10058864A1 Production of a micromechanical structure used for integrated sensor arrays comprises applying an auxiliary layer and a membrane to a substrate to cover contact surfaces |
| 06/05/2002 | EP1211219A2 Process for manufacturing micromechanical and microoptomechanical structures with backside metalization |
| 06/05/2002 | EP1116166B1 Sensor field for capacitive measuring fingerprint sensor and method for the production of said sensor field |
| 06/04/2002 | US6399900 Contact structure formed over a groove |
| 06/04/2002 | US6399516 Plasma etch techniques for fabricating silicon structures from a substrate |
| 06/04/2002 | US6399406 Encapsulated MEMS band-pass filter for integrated circuits and method of fabrication thereof |
| 06/04/2002 | US6399177 Deposited thin film void-column network materials |
| 05/30/2002 | WO2002043118A2 Wafer-level transfer of membranes in semiconductor processing |
| 05/30/2002 | WO2002042716A2 Wafer eutectic bonding of mems gyros |
| 05/30/2002 | WO2002023115A3 Enhanced surface structures for passive immersion cooling of integrated circuits |
| 05/30/2002 | WO2001090761A3 Methods of sampling specimens for microanalysis |
| 05/30/2002 | WO2001089787A3 Microfluidic systems including three-dimensionally arrayed channel networks |
| 05/30/2002 | WO2001078893A3 Fluidic impedances in microfluidic system |
| 05/30/2002 | WO2001046489A9 Ion beam modification of residual stress gradients in thin film polycrystalline silicon membranes |
| 05/30/2002 | US20020064957 Method of manufacturing a microstructure |
| 05/30/2002 | US20020063107 Methods of fabricating microelectromechanical and microfluidic devices |
| 05/29/2002 | EP1208403A1 Microelectromechanical optical switch and method of manufacture thereof |
| 05/29/2002 | EP1208002A1 Deposited thin film void-column network materials |
| 05/29/2002 | DE10055421A1 Verfahren zur Erzeugung einer mikromechanischen Struktur und mikromechanische Struktur Method for producing a micromechanical structure and micromechanical structure |
| 05/28/2002 | US6396368 CMOS-compatible MEM switches and method of making |
| 05/28/2002 | US6396174 Method for manufacturing a microintegrated structure with buried connections, in particular an integrated microactuator for a hard-disk drive unit |
| 05/28/2002 | US6395574 Micromechanical component and appropriate manufacturing method |
| 05/28/2002 | US6394429 Device and method for fluid aeration via gas forced through a liquid within an orifice of a pressure chamber |
| 05/28/2002 | US6393685 Microjoinery methods and devices |
| 05/23/2002 | WO2002040874A1 Apparatus and methods for conducting assays and high throughput screening |
| 05/23/2002 | DE10054247A1 Betätigungselement und Verfahren zu seiner Herstellung Actuating element and process for its preparation |
| 05/22/2002 | EP1055015B1 Method for producing a micromechanical device |
| 05/22/2002 | EP0838005B1 Method for the manufacture of a membrane-containing microstructure |
| 05/21/2002 | US6391788 Two etchant etch method |
| 05/21/2002 | US6391741 Fabrication process for microstructure protection systems related to hard disk reading unit |
| 05/21/2002 | US6391740 Generic layer transfer methodology by controlled cleavage process |
| 05/21/2002 | US6389902 Micromechanical sensor and method for its production |
| 05/16/2002 | WO2002038491A1 Surface-micromachined absolute pressure sensor and a method for manufacturing thereof |
| 05/16/2002 | WO2002038490A2 Method for producing glass-silicon-glass sandwich structures |
| 05/16/2002 | US20020058422 Stiction-free microstructure releasing method for fabricating MEMS device |
| 05/16/2002 | US20020058332 Microfabricated crossflow devices and methods |
| 05/16/2002 | US20020058279 Microarray for use in the accurate detection of preferential particles in sample |
| 05/16/2002 | US20020056519 Controlled cleavage using patterning |
| 05/16/2002 | DE10053307A1 Capsule used for microsensors comprises capsule elements connected together to form inner chamber, and metallizations as bond connections to join both capsule elements |
| 05/16/2002 | DE10053111A1 Production of field effect structure used in electronic devices comprises preparing substrate with gate region arranged between drain and source, and producing a germanium sacrificial layer |
| 05/16/2002 | DE10052419A1 Production of micromechanical component comprises applying auxiliary layer and membrane layer on substrate, applying spacer layer, back-etching spacer layer, etching auxiliary layer and applying sealing layer |
| 05/15/2002 | EP1204853A1 Inorganic permeation layer for micro-electric device |
| 05/14/2002 | US6388279 Semiconductor substrate manufacturing method, semiconductor pressure sensor and manufacturing method thereof |
| 05/14/2002 | US6387778 Breakable tethers for microelectromechanical system devices utilizing reactive ion etching lag |
| 05/14/2002 | US6387713 Method for manufacturing microfabrication apparatus |
| 05/14/2002 | US6386507 Microelectromechanical valves including single crystalline material components |
| 05/14/2002 | US6386463 Fuel injection nozzle and method of use |
| 05/10/2002 | WO2002037911A1 Method and arrangement relating to providing a substrate with cavities |
| 05/10/2002 | WO2002037660A1 Actuating member and method for producing the same |
| 05/10/2002 | WO2002036485A1 Valve integrally associated with microfluidic liquid transport assembly |
| 05/10/2002 | WO2002036484A1 Micromechanical component and corresponding production method |
| 05/10/2002 | WO2001032930A9 Methods and apparatuses for analyzing polynucleotide sequences |
| 05/09/2002 | US20020055266 Controlled cleavage process using pressurized fluid |
| 05/09/2002 | US20020055260 CMOS-compatible MEM switches and method of making |
| 05/09/2002 | US20020055253 Method for producing a micromechanical structure and a micromechanical structure |
| 05/08/2002 | EP1203748A1 Microdevice and its production method |
| 05/08/2002 | EP1203391A1 Microelectromechanic relay and method for the production thereof |
| 05/08/2002 | EP1203096A2 Integration of biochemical protocols in a continuous flow microfluidic device |
| 05/08/2002 | DE10054484A1 Mikromechanisches Bauelement und entsprechendes Herstellungsverfahren Micro-mechanical device and manufacturing method thereof |
| 05/08/2002 | DE10053326A1 Micro-mechanical component for sensing dew point contains membrane and porous material thermal insulating zone membrane support |
| 05/07/2002 | US6383833 Method of fabricating devices incorporating microelectromechanical systems using at least one UV curable tape |
| 05/02/2002 | WO2002034684A1 Method for anodic bonding at low temperatures |
| 05/02/2002 | WO2002034667A1 Method for microstructures fabrication |
| 05/02/2002 | WO2002011188A3 A mem sensor and a method of making same |
| 05/02/2002 | WO2002010063A3 A tunneling sensor or switch and a method of making same |
| 05/02/2002 | WO2001099149A3 Method for forming barrier structures on a substrate and the resulting article |
| 05/02/2002 | WO2001096958A3 Process for producing microfluidic articles |
| 05/02/2002 | WO2000054107A9 Step and flash imprint lithography |
| 05/02/2002 | US20020052113 First etchant is used to etch through the layer in the fastest etching region, and then a second etchant is used to complete etching through the layer in the slowest etching region; microelectrical mechanical system (MEMS) applications |
| 05/02/2002 | US20020051864 Laminated substrate including electroconductive film layer and layer of polytetrafluorethylene etched with synchrotron radiation light for use in plastic machinery |
| 05/02/2002 | EP1201604A2 A method for producing micromachined devices and devices obtained thereof |
| 05/02/2002 | EP1201603A2 Method to remove metal and silicon oxide during gas-phase sacrificial oxide etch |
| 05/02/2002 | EP1171378A4 A method of manufacturing a thermal bend actuator |
| 05/01/2002 | CN1347535A Integrated circuit device which is secured against attacks resulting from controlled destruction of additional layer |
| 05/01/2002 | CA2359506A1 Polysilicon microelectronic reflectors and beams and methods of fabricating same |