| Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526) |
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| 08/01/2002 | DE10104323A1 Verfahren zum Herstellen einer Rille mit einer Engstelle in der Oberfläche eines Bauteils und Bauteil A method of producing a groove having a constriction in the surface of a component and component |
| 07/31/2002 | EP1227534A1 Small-sized phase shifter and method of manufacture thereof |
| 07/31/2002 | EP1227345A2 Diffractive optical element |
| 07/31/2002 | EP1227061A2 Process for the manufacture of a micromechanical device |
| 07/31/2002 | EP1226944A1 Fabrication method |
| 07/31/2002 | EP1226090A1 Gas sensor and fabrication method thereof |
| 07/30/2002 | US6426237 Method for producing optically planar surfaces for micro-electromechanical system devices |
| 07/30/2002 | US6426014 Method of manufacturing a thermal bend actuator |
| 07/30/2002 | US6425971 Method of fabricating devices incorporating microelectromechanical systems using UV curable tapes |
| 07/25/2002 | WO2002057824A2 Across-wafer optical mems device and protective lid having across-wafer light-transmissive portions |
| 07/25/2002 | WO2002057180A2 Soi/glass process for forming thin silicon micromachined structures |
| 07/25/2002 | WO2002057179A2 Fabrication of silicon micro mechanical structures |
| 07/25/2002 | WO2001001025A9 Microfabricated elastomeric valve and pump systems |
| 07/25/2002 | US20020098713 Clustertool system software using plasma immersion ion implantation |
| 07/25/2002 | US20020098611 Micro-electromechanical process for fabrication of integrated multi-frequency communication passive components |
| 07/25/2002 | US20020096972 Piezoelectric/electrostrictive device and method of manufacturing same |
| 07/25/2002 | US20020096743 Method and device for protecting micro electromechanical systems structures during dicing of a wafer |
| 07/25/2002 | US20020096727 Micromechanical component and method of manufacturing a micromechanical component |
| 07/25/2002 | US20020096488 Method for fabricating a micro-electro-mechanical fluid ejector |
| 07/25/2002 | US20020096421 MEMS device with integral packaging |
| 07/25/2002 | DE10102993A1 Production of a micromechanical component comprises preparing a substrate, structuring the front side and partially covering the structured front side with a protective layer |
| 07/23/2002 | US6424017 Silicon-on-sapphire transducer |
| 07/23/2002 | US6423563 Method for manufacturing semiconductor dynamic quantity sensor |
| 07/18/2002 | WO2002056375A1 Molding of protective caps |
| 07/18/2002 | WO2002056366A1 Use of protective caps as masks at a wafer scale |
| 07/18/2002 | WO2002056061A2 Optical mems device and package having a light-transmissive opening or window |
| 07/18/2002 | WO2002056031A1 Accelerometer protected by caps applied at the wafer scale |
| 07/18/2002 | US20020094662 Method and device for protecting micro electromechanical systems structures during dicing of a wafer |
| 07/18/2002 | US20020094572 Apparatus for adhering prferential cells to surface in a determined pattern |
| 07/18/2002 | US20020093119 Silicon micro-mold and method for fabrication |
| 07/18/2002 | US20020093076 Semiconductor device and method for producing the same by dicing |
| 07/18/2002 | US20020092822 Methods of fabricating microelectromechanical and microfluidic devices |
| 07/18/2002 | US20020092776 Part fabricating method |
| 07/17/2002 | EP1222143A1 Method for production of a semiconductor component and a semiconductor component produced by said method |
| 07/16/2002 | US6420206 Optical membrane singulation process utilizing backside and frontside protective coating during die saw |
| 07/16/2002 | US6419752 Structuring device for processing a substrate |
| 07/11/2002 | WO2002054475A1 Method for microfabricating structures using silicon-on-insulator material |
| 07/11/2002 | US20020090565 Methods and apparatus for manufacturing electronic and electromechanical elements and devices by thin-film deposition and imaging |
| 07/11/2002 | US20020090458 Process for depositing a film on a nanometer structure |
| 07/11/2002 | US20020089097 Molding of protective caps |
| 07/10/2002 | EP1221176A2 Method of etching a layer using sacrificial elements |
| 07/10/2002 | EP1037713B1 Method of producing hollow droplets |
| 07/10/2002 | EP1008161B1 Thermal arched beam microelectromechanical devices and associated fabrication methods |
| 07/09/2002 | US6417021 Method of fabricating a piezoresistive pressure sensor |
| 07/09/2002 | US6415653 Cantilever for use in a scanning probe microscope |
| 07/04/2002 | WO2002052644A2 Thermally enhanced microcircuit package and method of forming same |
| 07/04/2002 | WO2002051743A2 Thin silicon micromachined structures |
| 07/04/2002 | WO2002051742A2 Micromechanical component and corresponding production method |
| 07/04/2002 | WO2002051741A2 Method for producing a semiconductor component having a movable mass in particular, and semiconductor component produced according to this method |
| 07/04/2002 | WO2002033410A3 Microvolume immunoabsorbant assays with amplified electrochemical detection |
| 07/04/2002 | WO2002030486A3 Microfluidic device based sample injection system for analytical devices |
| 07/04/2002 | WO2002015960A3 Microneedle array module and method of fabricating the same |
| 07/04/2002 | WO2001088586A3 Optical backplane interface using mems |
| 07/04/2002 | WO2001078893A9 Fluidic impedances in microfluidic system |
| 07/04/2002 | US20020086456 Bulk micromachining process for fabricating an optical MEMS device with integrated optical aperture |
| 07/04/2002 | US20020086101 Diluent assisted lubrication of micromechanical devices |
| 07/04/2002 | US20020085954 Depositing an inorganic sol-gel permeation layer on a micro-electronic device for molecular biological reactions; can be created with pre-defined porosity, pore size distribution, pore morphology, and surface area. |
| 07/04/2002 | US20020084251 Method of making a 3-D structure using an erodable mask formed from a film having a composition that varies in its direction of thickness |
| 07/04/2002 | US20020084249 Methods of fabricating microelectromechanical and microfluidic devices |
| 07/04/2002 | US20020084242 Methods of fabricating microelectromechanical and microfluidic devices |
| 07/04/2002 | DE10065026A1 Mikromechanisches Bauelement und entsprechendes Herstellungsverfahren Micro-mechanical device and manufacturing method thereof |
| 07/04/2002 | DE10065013A1 Micromechanical component used as an acceleration sensor or rotary sensor comprises a substrate, insulating layers, a micromechanical functional layer with conducting pathways, and a micromechanical functional layer with a trench |
| 07/04/2002 | DE10064494A1 Verfahren zur Herstellung eines Halbleiterbauelements sowie ein nach dem Verfahren hergestelltes Halbleiterbauelement, wobei das Halbleiterbauelement insbesondere eine bewegliche Masse aufweist A process for producing a semiconductor device as well as a product produced by the process semiconductor device, wherein the semiconductor component comprises in particular a movable mass |
| 07/04/2002 | DE10064456A1 Maskless process for forming metallic nanostructure in thin dielectric layers uses ultrashort wavelength laser pulses |
| 07/03/2002 | EP1220010A2 Micromechanical device recoat methods |
| 07/03/2002 | EP1219565A1 Process for manufacturing integrated devices having connections on separate wafers and stacking the same |
| 07/03/2002 | EP1218790A2 Microelectromechanical device with moving element |
| 07/03/2002 | EP1218289A1 Dissolved wafer fabrication process and associated microelectromechanical device having a support substrate with spacing mesas |
| 06/27/2002 | WO2002050874A2 Mems device having an actuator with curved electrodes |
| 06/27/2002 | WO2002050527A1 Method for producing thin film sensors, especially hot film anemometers and humidity sensors |
| 06/27/2002 | WO2001098016A3 Laser system for processing target material |
| 06/27/2002 | US20020082543 Microneedle devices and production thereof |
| 06/27/2002 | US20020081866 Thermally driven micro-pump buried in a silicon substrate and method for fabricating the same |
| 06/27/2002 | US20020081861 Silicon-germanium-carbon compositions and processes thereof |
| 06/27/2002 | US20020081823 Generic layer transfer methodology by controlled cleavage process |
| 06/27/2002 | US20020081821 SOI/glass process for forming thin silicon micromachined structures |
| 06/27/2002 | US20020081816 Method and device for protecting micro electromechanical systems structures during dicing of a wafer |
| 06/27/2002 | US20020081765 Thin Micromachined Structures |
| 06/27/2002 | US20020080212 A process of manufacturing fluid jetting apparatuses |
| 06/27/2002 | US20020079490 Structure, method of manufacturing the structure, and DNA separation device using the structure |
| 06/27/2002 | US20020079287 Methods of fabricating microelectromechanical and microfluidic devices |
| 06/27/2002 | DE10063794A1 Verfahren zur Herstellung von Dünnschichtsensoren, insbesondere Heissfilmanemometern A process for the manufacture of thin film sensors, in particular Heissfilmanemometern |
| 06/26/2002 | EP1217366A2 Structure, method of manufacturing the same and DNA separation device using the same |
| 06/25/2002 | US6410912 Method for reducing variations in arrays of micro-machined cantilever structures using ion implantation |
| 06/25/2002 | US6410361 Methods of fabricating in-plane MEMS thermal actuators |
| 06/25/2002 | US6408878 Microfabricated elastomeric valve and pump systems |
| 06/20/2002 | WO2002048023A2 Method for improving the polysilicon structures of a mems device by masking to inhibit anodic etching of the mems polysilicon structures |
| 06/20/2002 | WO2002047913A1 Microscale nozzle and method for manufacturing the same |
| 06/20/2002 | WO2002011191A3 Near critical and supercritical ozone substrate treatment and apparatus for same |
| 06/20/2002 | WO2001086361A3 Method and system for self-replicating manufacturing stations |
| 06/20/2002 | US20020076873 Method and device for protecting micro electromechanical systems structures during dicing of a wafer |
| 06/20/2002 | US20020076848 Method and device for protecting micro electromechanical systems structures during dicing of a wafer |
| 06/20/2002 | US20020076575 Fabrication of ceramic microstructures |
| 06/20/2002 | US20020075554 MEMS mirror and method of fabrication |
| 06/19/2002 | EP1215168A1 Magnetically packaged optical mems device and method for making the same |
| 06/19/2002 | EP1214630A2 Microfabricated devices and method of manufacturing the same |
| 06/19/2002 | CN1354049A Preparation method of C60 unimolecular layer membrane |
| 06/18/2002 | US6406933 Production method for micromechanical components |
| 06/18/2002 | US6406638 Method of forming vertical, hollow needles within a semiconductor substrate, and needles formed thereby |
| 06/18/2002 | US6406637 Thin film-planar structure and method for producing the same |